CN200975902Y - Gaseous mass flowmeter - Google Patents

Gaseous mass flowmeter Download PDF

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Publication number
CN200975902Y
CN200975902Y CN 200620034748 CN200620034748U CN200975902Y CN 200975902 Y CN200975902 Y CN 200975902Y CN 200620034748 CN200620034748 CN 200620034748 CN 200620034748 U CN200620034748 U CN 200620034748U CN 200975902 Y CN200975902 Y CN 200975902Y
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CN
China
Prior art keywords
sensor
module
mass
instrument
flow gas
Prior art date
Application number
CN 200620034748
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Chinese (zh)
Inventor
黄立基
江苏刚
王高峰
邓文红
杨祥友
王俭
阮继亮
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四川矽亚科技有限公司
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Priority to CN 200620034748 priority Critical patent/CN200975902Y/en
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Publication of CN200975902Y publication Critical patent/CN200975902Y/en

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Abstract

The utility model relates to a gas-quality flowmeter, which comprises a detecting mouth, a primary instrument formed a MEMS sensor measuring module, and a secondary instrument formed by the micro processor. The utility model is characterized in that: the secondary instrument comprises a micro monitoring module, an output module, a power module, a storage module, a signal processing module and a time module; the secondary instrument and the detecting mouth are arranged outside the pipe; the MEMS sensor measuring module is arranged in the pipe and connected with the detecting mouth. The flowmeter belongs to the total electronic micro-consumption design, and is fitted with the unique rectifier. The utility model can be powered by the battery and used to measure the wide dynamic range. The technology of the secondary instrument is highly reliable and favorable to large scale production.

Description

A kind of mass-flow gas meter

Technical field

The utility model relates to the flow instrument class, is specifically related to a kind of little power consumption mass-flow gas meter.

Background technology

Mass-flow gas meter is a kind of instrument that is used for the measurement gas quality, the tradition thermal mass flow meter has shown its superiority in the gas dosing field, its principle is that resistive platinum wire is wound on the ceramics pole, set up the temperature field by the electric current heating, cross the influence that the temperature field is produced when gas stream, show as the variation of flow.But higher power consumption is greatly limited its range of application, particularly in the environment for use that lacks condition of power supply, almost can't keep the work (more than 2 days) of instrument long period with battery, also because the restriction of manufacture craft, make its measures range degree be difficult to promote, existing mass-flow gas meter to the metering out of true of low discharge, can not realize the control mode, with high costs of simple two-wire system.

The utility model content

The technical problems to be solved in the utility model is how a kind of mass-flow gas meter is provided, and this flowmeter belongs to little power consumption design, is not fixed against the mechanical technique design merely; but and powered battery; detect wide dynamic range, secondary instrument engineering reliability height is convenient to large-scale production.

Above-mentioned technical matters of the present utility model is to solve like this: a kind of mass-flow gas meter is provided, mainly constitute by table body, detection mouth and sensor, this flowmeter comprise detect controller, by the primary instrument of MEMS sensor module and the secondary instrument that constitutes by microprocessor, it is characterized in that secondary instrument mainly is made of micro controller module, output module, power module, memory module, signal processing module and clock module.Show body and detect controller to be arranged on the pipeline outside, described MEMS sensor module is arranged in the duct chamber and with the detection controller and is connected with the table body.

According to mass-flow gas meter provided by the utility model, it is characterized in that, described MEMS sensor module mainly is made of ceramic substrate, sensing chip and radome fairing, described sensing chip is arranged on the lower end of ceramic substrate, and radome fairing is arranged on the top layer of MEMS sensor module (sensor); Described sensing chip body is a silicon substrate, the supporting surface of silicon substrate is provided with little power consumption mass flow sensor, described mass flow sensor occurs with the form of sensor array, and each sensor is made up of low-grade fever source, temperature sensor and reference temperature sensor in the sensor array, and the resistance of reference sensor is more than three times of resistance in low-grade fever source.

According to mass-flow gas meter provided by the utility model, it is characterized in that, in each sensor, a small resistor temperature sensor that is under the same terms with environment temperature is on the same bridge circuit with the temperature sensor that is positioned at downstream, low-grade fever source in the described sensor array.

According to mass-flow gas meter provided by the utility model, it is characterized in that be equipped with protective seam between described low-grade fever source, temperature sensor and the reference temperature sensor, this protective seam can be adiabatic hollowed membrane.

According to mass-flow gas meter provided by the utility model, it is characterized in that sensor can be arranged with single-row or multiple row in the described sensor array.

According to mass-flow gas meter provided by the utility model, it is characterized in that described primary instrument and secondary instrument can use the lithium battery power supply of 3.6V.

According to mass-flow gas meter provided by the utility model, it is characterized in that described signal processing module is provided with A/D converter, described output module is provided with the D/A transducer.

According to mass-flow gas meter provided by the utility model, it is characterized in that described sensor is connected with the table body.

Mass-flow gas meter provided by the utility model, its technology focuses on little power consumption sensing chip, it is a kind of MEMS mass flow sensor, and this sensor can be with the form appearance of sensor array, and sensor has the characteristics of low-power consumption and super large range.Each sensor is made up of low-grade fever source, temperature sensor and reference temperature sensor in the sensor array.Wherein, the resistance of reference sensor should be at least more than three times of resistance in low-grade fever source, and the resistance of reference sensor is big more, and the power that back-end circuit consumed is more little.Each sensor and not requiring in the sensor array around the strict symmetry of the temperature sensor of the upstream and downstream in low-grade fever source.The temperature sensor of upstream and downstream is a design parameter with respect to the position in low-grade fever source.

In the sensor array in the sensing chip in each sensor, a small resistor temperature sensor that is under the same terms with environment temperature is on the same bridge circuit with the temperature sensor that is positioned at downstream, low-grade fever source, this structure will reduce the bridge circuit imbalance of bringing owing to the difference in the manufacture process, and this sensor energy measurement flows to minimum fluid thus.Sensor can be arranged with single-row or multiple row in the sensor array in addition, specific flow range of each sensor measurement, thus this sensor array can provide the flow measurement of super large range.

Under optimized conditions, the sensor of this quality flowmeter is adopted as the technology of machining or MEMS device making technics with N or P-type<100〉monocrystalline silicon on the direction is to make on the body.Sensor is made up of low-grade fever source, temperature sensor and reference temperature sensor.Separate by the hollowed membrane of thermal insulation between each sensor.Sensor can be arranged to enlarge measurement range with single-row or multiple row.Adiabatic hollowed membrane.Hollowed membrane adopts the method for TMAH or KOH or plasma etching to make on silicon substrate.

In a word, utilize MEMS (micro electro mechanical system) (Micro Electro Mechanical Systems in recent years, MEMS) chip combines the flow sensor made from the large scale integrated circuit technology suitable change on manufacturing cost, make to depend on the gas flow of mechanical technique for a long time in respect of brand-new development opportunity.Owing to adopt the micro electronmechanical mass-flow gas meter of this sensor production all to show significant advantage than traditional flowmeter, make its application all obtain bigger development in all trades and professions at aspects such as calibration, use, maintenance, consistance, ranges.The gordian technique of the micro electronmechanical mass-flow gas meter of little power consumption is little power consumption flow sensing chip, it is to adopt CMOSMEMS technology and new material generation technique with the large scale integrated circuit compatibility to be made, integrated a plurality of flow sensors and temperature sensor, and adopted the control mode of little power consumption, in conjunction with the single-chip microcomputer software and hardware technology, finally developed provided by the utility model battery-powered, can little power consumption mass-flow gas meter long-term online use, the super large range.

Description of drawings

Fig. 1 is the logic diagram of mass-flow gas meter provided by the utility model.

Fig. 2 is the structural representation of mass-flow gas meter provided by the utility model.

Fig. 3 is the diagrammatic cross-section of mass-flow gas meter provided by the utility model.

Fig. 4 is the structural representation of the sensing chip of mass-flow gas meter provided by the utility model.

Fig. 5 is the sensor body structural representation of mass-flow gas meter provided by the utility model.

Fig. 6 is the electrical schematic diagram of mass-flow gas meter provided by the utility model.

Embodiment

Below in conjunction with accompanying drawing the utility model is elaborated.

Fig. 1 is the logic diagram of mass-flow gas meter provided by the utility model (once reaching secondary instrument), mainly comprise micro controller module, output module, memory module, clock module, power module, MEMS detection module and signal processing module, micro controller module mainly contains the CPU single-chip microcomputer and constitutes; Clock module is made of accurate RTC clock, and as DS3231, it is low-cost, high precision I 2C real-time clock (RTC), have integrated temperature compensating crystal oscillator (TCXO) and crystal, this device comprises cell input terminal, still can keep accurate timing when disconnecting primary power, integrated crystal oscillator has improved the long-term degree of accuracy of device, and reduced the number of elements of production line, RTC preserves second, divide, the time, week, date, Month And Year information, be less than 31 days month, to adjust the date at the end of month automatically, comprise the correction in leap year, the work form of clock can be 24 hours or be with 12 hours forms of AM/PM indication, two calendar alarm clocks that can be provided with and the square wave output that can be provided with are provided, and address and data are passed through I 2The serial transmission of C bidirectional bus; Output module mainly contains the liquid crystal display driver module and subscriber equipment constitutes, and subscriber equipment is connected with ability CPU single-chip microcomputer by RS485 communication interface, D/A transducer and pulse output driver; Power module mainly adopts powered battery; Memory module adopts eeprom memory; The MEMS detection module is connected with microcontroller with A/D converter by signal processing module, the MWMS detection module mainly comprises sensor, this sensor is mainly by ceramic substrate, sensing chip and protective cover constitute, sensing chip is arranged on the lower end of ceramic substrate, protective cover is arranged on the top layer of sensor, this sensing chip body is a silicon substrate, the supporting surface of silicon substrate is provided with little power consumption mass flow sensor, should occur with form of sensor array, and in the sensor array each sensor by the low-grade fever source, temperature sensor and reference temperature sensor are formed.

Fig. 2 is the structural representation of mass-flow gas meter provided by the utility model, Fig. 3 is the diagrammatic cross-section of mass-flow gas meter, Fig. 4 is the structural representation of the sensing chip of mass-flow gas meter, Fig. 5 is the sensor body structural representation of mass-flow gas meter, and Fig. 6 is the electrical schematic diagram of mass-flow gas meter provided by the utility model.Wherein: 1, ring flange, 2, rectifier, 3, pipeline, 4, detect mouth; 5, ground wire mouth, 6 table bodies, 7, sensor; 8, controller assemblies, 9, anti-riot battery module, 10, ceramic substrate; 11, sensing chip, 12, radome fairing, 13, carrying plane; 14, silicon substrate, 15, temperature sensor, 16, the low-grade fever source; 17, protective seam, 18, line, 19, cavity.Table body 6 joint detection mouths 4 are arranged on the outside in pipe 3 roads, and sensor body 7 is arranged on the inside of pipeline 3 and is connected with detection mouth 4 with table body 6; In the place ahead of pipeline 3 inner sensors 7 (gas stream Inbound), be provided with rectifier 2, this rectifier 2 can make gas steadily evenly by sensor, the measuring accuracy of augmented flow meter; Table body 6 is provided with the name plate set, makes things convenient for producer's label to use; Sensor 7 mainly is made of ceramic substrate 10, sensing chip 11 and radome fairing 12, wherein sensing chip 11 is arranged on the lower end of ceramic substrate 10, radome fairing 12 is arranged on the top layer of sensor 7, is used for to the gas rectification of flowing through sensor surface and the purpose that plays the protection sensor; The body of sensing chip 11 is a silicon substrate 14, the supporting surface 13 of silicon substrate 14 is provided with little power consumption mass flow sensor, mass flow sensor occurs with the form of sensor array, and each sensor is made up of low-grade fever source 16, temperature sensor 15 and reference temperature sensor in the sensor array; Be equipped with protective seam 17 between low-grade fever source 16, temperature sensor 15 and the reference temperature sensor, this protective seam can be adiabatic hollowed membrane; Below be several optimization embodiments of sensing chip: on silicon substrate, make each ingredient of temperature sensor, and adopt micro-machined body lithographic technique to make heat insulation hollowed membrane.Micro-machined body lithographic technique silicon substrate<carry out the array temperature sensors on the adiabatic hollowed membrane on 100〉crystal face, hollowed membrane adopts the method for TMAH or KOH or plasma etching to make on silicon substrate, hollowed membrane adopts the method for TMAH or KOH or plasma etching to make on silicon substrate, openwork part passes through silicon substrate<100〉crystal face, the material of temperature sensor can adopt Pt/Cr, and the low-grade fever source also is positioned on the hollowed membrane.Low-grade fever source and temperature sensor are all topped passivating material has covered between the low-grade fever source of passivating material and temperature sensor and has all adopted hollowed membrane heat insulation.The upper and lower side in low-grade fever source is provided with the temperature sensor of symmetry, and sensor places on the heat insulation hollowed membrane, and the upper and lower side in low-grade fever source also can be provided with asymmetric temperature sensor in addition, and sensor places on the heat insulation hollowed membrane.Reference temperature sensor places on the matrix of silicon, its resistance value is 3 to 25 times of other sensors, zero mark resistance places on the bridge circuit identical with the temperature sensor in downstream, the resistance value of the temperature sensor of upstream and downstream can be inequality, and relative position can be inequality in the low-grade fever source for the temperature sensor of upstream and downstream.Sensor array comprises plural flow sensor at least, and two sensors can be positioned on the identical or different heat insulation hollowed membrane.

To sum up state, the invention of the micro electronmechanical mass-flow gas meter of this little power consumption, pushed traditional thermal type gas quality flow meter to a brand-new boundary, because the structure of sensing chip narrows down to the scope of micron, the variation of matter has also taken place in its electromechanical properties thereupon, and one of notable attribute is exactly low-power consumption (average power consumption is less than 20mW); Micro electronmechanical integrated technology has also been finished the segment applications of multisensor on the single-chip simultaneously, has greatly promoted the range (100 to 1000 times) of flowmeter.

Claims (7)

1, a kind of mass-flow gas meter, comprise primary instrument that detects mouth, constitutes by MEMS sensor module and the secondary instrument that constitutes by microprocessor, it is characterized in that described secondary instrument mainly is made of micro controller module, output module, power module, memory module, signal processing module and clock module; Described secondary instrument and detection mouth are arranged on the pipeline outside, and described MEMS sensor module is arranged in the duct chamber and with the detection mouth and is connected.
2, mass-flow gas meter according to claim 1, it is characterized in that, described MEMS sensor module mainly is made of ceramic substrate, sensing chip and radome fairing, and described sensing chip is arranged on the lower end of ceramic substrate, and radome fairing is arranged on the top layer of MEMS sensor module; Described sensing chip body is a silicon substrate, the supporting surface of silicon substrate is provided with little power consumption mass flow sensor, described mass flow sensor occurs with the form of sensor array, and each sensor is made up of low-grade fever source, temperature sensor and reference temperature sensor in the sensor array, and the resistance of reference sensor is more than three times of resistance in low-grade fever source.
3, mass-flow gas meter according to claim 2, it is characterized in that, in each sensor, a small resistor temperature sensor that is under the same terms with environment temperature is on the same bridge circuit with the temperature sensor that is positioned at downstream, low-grade fever source in the described sensor array.
4, according to claim 2 or 3 described mass-flow gas meters, it is characterized in that, be equipped with protective seam between described low-grade fever source, temperature sensor and the reference temperature sensor, this protective seam can be adiabatic hollowed membrane.
According to claim 2 or 3 described mass-flow gas meters, it is characterized in that 5, sensor can be arranged with single-row or multiple row in the described sensor array.
6, mass-flow gas meter according to claim 1 is characterized in that, described primary instrument and secondary instrument can use the lithium battery power supply of 3.6V.
7, mass-flow gas meter according to claim 1 is characterized in that, described signal processing module is provided with A/D converter, and described output module is provided with the D/A transducer.
CN 200620034748 2006-06-27 2006-06-27 Gaseous mass flowmeter CN200975902Y (en)

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Application Number Priority Date Filing Date Title
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Publication Number Publication Date
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102735300A (en) * 2012-05-31 2012-10-17 卓度仪表(控股)有限公司 Gas flowmeter and gas flow rate measuring method
CN103207626A (en) * 2012-01-16 2013-07-17 中国科学院空间科学与应用研究中心 Gas flow control system and gas flow control method for space microgravity combustion experiment
CN103644948A (en) * 2013-11-16 2014-03-19 中山欧麦克仪器设备有限公司 Air mass flow meter
CN103674120A (en) * 2012-09-20 2014-03-26 廊坊新衡科技有限公司 Composite gas flow measuring device based on MEMS (micro-electromechanical system) sensitive elements and measuring method thereof
CN103900527A (en) * 2012-12-26 2014-07-02 贵州风雷航空军械有限责任公司 Air pressure altitude detection apparatus
CN104697622A (en) * 2013-12-06 2015-06-10 中国飞机强度研究所 Method for testing aircraft noise loads
CN105203167A (en) * 2015-10-22 2015-12-30 山东贝特智联表计股份有限公司 Thermal gas mass flow meter
CN105371909A (en) * 2015-11-05 2016-03-02 苏州美达瑞电子有限公司 Novel micro-flow heat-distributed mass flow meter based on stabilized power source
CN106768088A (en) * 2016-11-17 2017-05-31 江苏智石科技有限公司 A kind of household gas intelligent mobile monitoring system
CN107990945A (en) * 2017-10-20 2018-05-04 南京博沃科技发展有限公司 A kind of hot type porous plate gas flowmeter applied to uneven flow field

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103207626B (en) * 2012-01-16 2015-10-07 中国科学院空间科学与应用研究中心 A kind of gas Flowrate Control System for space microgravity combustion experiment and method
CN103207626A (en) * 2012-01-16 2013-07-17 中国科学院空间科学与应用研究中心 Gas flow control system and gas flow control method for space microgravity combustion experiment
CN102735300A (en) * 2012-05-31 2012-10-17 卓度仪表(控股)有限公司 Gas flowmeter and gas flow rate measuring method
CN103674120A (en) * 2012-09-20 2014-03-26 廊坊新衡科技有限公司 Composite gas flow measuring device based on MEMS (micro-electromechanical system) sensitive elements and measuring method thereof
CN103674120B (en) * 2012-09-20 2018-07-06 新奥科技发展有限公司 A kind of compound gas flow metering device and its measuring method based on MEMS sensing elements
CN103900527A (en) * 2012-12-26 2014-07-02 贵州风雷航空军械有限责任公司 Air pressure altitude detection apparatus
CN103644948A (en) * 2013-11-16 2014-03-19 中山欧麦克仪器设备有限公司 Air mass flow meter
CN104697622A (en) * 2013-12-06 2015-06-10 中国飞机强度研究所 Method for testing aircraft noise loads
CN105203167A (en) * 2015-10-22 2015-12-30 山东贝特智联表计股份有限公司 Thermal gas mass flow meter
CN105203167B (en) * 2015-10-22 2018-10-12 山东贝特智联表计股份有限公司 Thermal type gas quality flow meter
CN105371909A (en) * 2015-11-05 2016-03-02 苏州美达瑞电子有限公司 Novel micro-flow heat-distributed mass flow meter based on stabilized power source
CN106768088A (en) * 2016-11-17 2017-05-31 江苏智石科技有限公司 A kind of household gas intelligent mobile monitoring system
CN107990945A (en) * 2017-10-20 2018-05-04 南京博沃科技发展有限公司 A kind of hot type porous plate gas flowmeter applied to uneven flow field

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20071114

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