CN101403402A - Hydraulic system power measurement apparatus based on MEMS plug-in type flow transducer - Google Patents
Hydraulic system power measurement apparatus based on MEMS plug-in type flow transducer Download PDFInfo
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- CN101403402A CN101403402A CNA2008100128245A CN200810012824A CN101403402A CN 101403402 A CN101403402 A CN 101403402A CN A2008100128245 A CNA2008100128245 A CN A2008100128245A CN 200810012824 A CN200810012824 A CN 200810012824A CN 101403402 A CN101403402 A CN 101403402A
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Abstract
The invention relates to a power measurement device of a hydraulic system, in particular to a power measurement device of a hydraulic system based on an MEMS insertion-typed flow sensor. The device is mainly composed of a measuring tube, a probe, a fixing device, a secondary instrument of a flowmeter, a packaging structure, an MEMS sensitive core body, a signal line, a high-pressure pressure tapping, a low-pressure pressure tapping, a pressure sensor and signal acquisition and processing equipment. A flow measurement device places the MEMS sensitive core body in the probe of an insertion-typed flowmeter, and cancels a structure that traditional insertion-typed flowmeter needs to draw the pressure out of the tube. The pressure sensor measures the pressure signal of a pipeline at which the pressure sensor is positioned. According to a flow-pressure-power mathematical relation model, the measurement to the power of the hydraulic system is realized. The invention achieves the online measurement of the flow, the pressure, and the power of the hydraulic system, and provides a suitable solution for the state monitoring and fault diagnosis of the hydraulic system.
Description
Technical field
The present invention relates to a kind of hydraulic system power measurement apparatus, relate in particular to hydraulic system power measurement apparatus based on the MEMS plug-in type flow transducer.
Background technique
In the method that convection cell is measured in pipeline at present, can only carry out pressure measurement, thermometry and flow measurement, the measuring device of positive displacement, orifice-plate type, electromagnetic type, turbo type and ultrasonic type principle is also just used in flow measurement.Existing various surveying instrument can't be applied to power measurement by direct-on-line, and online power measurement exists the technical difficulty that can't overcome.At the existing in prior technology problem, develop the device of the online power measurement of a kind of hydraulic system, be very necessary to overcome existing problem.
Summary of the invention
The object of the present invention is to provide a kind of hydraulic system power measurement apparatus, promptly by the flow measurement of working medium in the hydraulic system pipeline, the measuring device that hydraulic power in the hydraulic system pipeline was measured and then realized to pressure field based on the MEMS plug-in type flow transducer.
Technological scheme of the present invention is: by sounding pipe 1, probe 2, fixing device 3, high pressure pressure tappings 8, low pressure pressure tappings 9, the package structure 5 of pressure transducer 10, signal acquisition process equipment 11 and flow transducer part, MEMS sensitive core body 6, signaling line 7, flowmeter secondary meter 4 constitute based on this device of hydraulic system power measurement apparatus of MEMS plug-in type flow transducer; Probe 2 is fixed on sounding pipe 1 inside by fixing device 3; MEMS sensitive core body 6 is encapsulated in package structure 5 inside and measures; Package structure 5 is fixed on probe 2 inside, and opening communicates with high pressure pressure tappings 8 and low pressure pressure tappings 9 respectively; High pressure pressure tappings 8 all designs on probe 2 with low pressure pressure tappings 9, is positioned at sounding pipe 1 inside; Two pressure pipes of MEMS sensitive core body 6 contact high pressure and low-pressure fluid through high pressure pressure tappings 8 with low pressure pressure tappings 9 respectively; Signaling line 7 with draw sounding pipe 1 to flowmeter secondary meter 4 after MEMS sensitive core body 6 is connected; Pressure transducer 10 is measured the pressure signal of sounding pipe 1; Signal acquisition process equipment 11 receives from the flux signal of flowmeter secondary meter 4 and the pressure signal of pressure transducer 10, and the two is obtained power signal after treatment.Described MEMS sensitive core body 6 is the little piezoresistance type of silicon, piezoelectricity type or capacitive micro pressure/pressure reduction sensitive core body.
Principle of the present invention is: according to Bernoulli's equation as can be known, fluid can produce the pressure difference signal corresponding to the flow size when flowing through probe, record this pressure difference signal with MEMS sensitive core body 6, and draw sounding pipe 1 by signaling line 7 and deliver to flowmeter secondary meter 4.Pressure can directly be recorded by pressure transducer 10.According to flow rate pressure-power numerical relationship model and on-the-spot actual the demarcation, can realize dynamic and steady state measurement to flow.
According to formula:
P＝Q×p
Wherein:
The P-hydraulic power
Fluid flow in the Q-pipeline
The p-pipeline is at this some place pressure
The invention has the beneficial effects as follows: propose a kind of new flow-measuring method, realized the on-line measurement of hydraulic system power based on this, for hydraulic system status monitoring and fault diagnosis etc. need provide testing apparatus.By the measurement of flow and pressure, the situation that the online power measurement of the hydraulic system that is through with can't be realized.
Description of drawings
Fig. 1 is the schematic representation that the present invention is based on the hydraulic system power measurement apparatus embodiment 1 of MEMS plug-in type flow transducer;
Fig. 2 is the schematic representation that the present invention is based on the hydraulic system power measurement apparatus embodiment 2 of MEMS plug-in type flow transducer.
Among the figure: 1, sounding pipe, 2, probe, 3, fixing device, 4, the flowmeter secondary meter, 5, package structure, 6, the MEMS sensitive core body, 7, signaling line, 8, the high pressure pressure tappings, 9, the low pressure pressure tappings, 10, pressure transducer, 11, signal acquisition process equipment.
Embodiment
As shown in Figure 1, probe 2 is fixed on sounding pipe 1 inside by fixing device 3, and 2 front and back of popping one's head in have high pressure pressure tappings 8 and low pressure pressure tappings 9 respectively; In the MEMS sensitive core body 6 packed package structures 5, place in the probe 2; Signaling line 7 with draw sounding pipe 1 after MEMS sensitive core body 6 is connected.Fluid in the sounding pipe 1 is flowed through and was popped one's head in 2 o'clock, in the probe 2 anterior high-pressure areas that produce, produce the area of low pressure at probe 2 rear portions, according to the bernoulli principle as can be known, these 2 front and back of popping one's head in produce the pressure difference corresponding to the flow size, are recorded by MEMS sensitive core body 6 and draw sounding pipe 1 by signaling line 7 and deliver to flowmeter secondary meter 4.According to flow-differential pressure numerical relationship model and on-the-spot actual the demarcation, can realize dynamic and steady state measurement to flow.Pressure transducer 10 measures the pressure of this point in the pipeline.Pressure signal and flux signal are sent in the signal acquisition process equipment 11 simultaneously, obtain power signal.
As shown in Figure 2, probe 2 is fixed on sounding pipe 1 inside by fixing device 3, and high pressure pressure tappings 8 and low pressure pressure tappings 9 are arranged respectively at the anterior and bottom of probe 2; In the MEMS sensitive core body 6 packed package structures 5, place in the probe 2; Signaling line 7 with draw sounding pipe 1 after MEMS sensitive core body 6 is connected.Fluid in the sounding pipe 1 is flowed through and was popped one's head in 2 o'clock, in the probe 2 anterior high-pressure areas that produce, produce the area of low pressure in probe 2 bottoms, according to the bernoulli principle as can be known, these probe 2 front portions and bottom produce the pressure difference corresponding to the flow size, are recorded by MEMS sensitive core body 6 and draw sounding pipe 1 by signaling line 7 and deliver to flowmeter secondary meter 4.According to flow-differential pressure numerical relationship model and on-the-spot actual the demarcation, can realize dynamic and steady state measurement to flow.Pressure transducer 10 measures the pressure of this point in the pipeline.Pressure signal and flux signal are sent in the signal acquisition process equipment 11 simultaneously, obtain power signal.
Claims (2)
1, based on the hydraulic system power measurement apparatus of MEMS plug-in type flow transducer, it is characterized in that, this device is by sounding pipe (1), probe (2), fixing device (3), high pressure pressure tappings (8), low pressure pressure tappings (9), and MEMS sensitive core body (6), package structure (5), signaling line (7), the flowmeter secondary meter (4) of pressure transducer (10), signal acquisition process equipment (11) and flow transducer part constitute; Probe (2) is fixed on sounding pipe (1) inside by fixing device (3); MEMS sensitive core body (6) is encapsulated in package structure (5) inside and measures; Package structure (5) is fixed on probe (2) inside, and opening communicates with high pressure pressure tappings (8) and low pressure pressure tappings (9) respectively; High pressure pressure tappings (8) all designs on probe (2) with low pressure pressure tappings (9), is positioned at sounding pipe (1) inside; Two pressure pipes of MEMS sensitive core body (6) contact high pressure and low-pressure fluid through high pressure pressure tappings (8) with low pressure pressure tappings (9) respectively; Signaling line (7) with draw sounding pipe (1) to flowmeter secondary meter (4) after MEMS sensitive core body (6) is connected; Flowmeter secondary meter (4) is connected with signal acquisition process equipment (11) with pressure transducer (10).
2, the hydraulic system power measurement apparatus based on the MEMS plug-in type flow transducer according to claim 1 is characterized in that, described MEMS sensitive core body (6) is the little piezoresistance type of silicon, piezoelectricity type or capacitive micro pressure/pressure reduction sensitive core body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810012824A CN100582498C (en) | 2008-08-12 | 2008-08-12 | Hydraulic system power measuring device based on MEMS insert type flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810012824A CN100582498C (en) | 2008-08-12 | 2008-08-12 | Hydraulic system power measuring device based on MEMS insert type flow sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101403402A true CN101403402A (en) | 2009-04-08 |
| CN100582498C CN100582498C (en) | 2010-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810012824A Expired - Fee Related CN100582498C (en) | 2008-08-12 | 2008-08-12 | Hydraulic system power measuring device based on MEMS insert type flow sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102840192A (en) * | 2012-06-28 | 2012-12-26 | 三一重工股份有限公司 | System and method for monitoring power of hydraulic system |
| CN103674120A (en) * | 2012-09-20 | 2014-03-26 | 廊坊新衡科技有限公司 | Composite gas flow measuring device based on MEMS (micro-electromechanical system) sensitive elements and measuring method thereof |
| CN104089669A (en) * | 2013-04-01 | 2014-10-08 | 湖北泽越电子科技有限公司 | High-accuracy zero-pressure-loss electronic flowmeter |
| CN112212926A (en) * | 2020-08-07 | 2021-01-12 | 北京协同创新研究院 | Flow measurement method based on porous throttling and MEMS pressure sensor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105587704B (en) * | 2016-01-28 | 2018-04-10 | 太仓市高泰机械有限公司 | A kind of hydraulic shock power detects formula hydraulic valve |
-
2008
- 2008-08-12 CN CN200810012824A patent/CN100582498C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102840192A (en) * | 2012-06-28 | 2012-12-26 | 三一重工股份有限公司 | System and method for monitoring power of hydraulic system |
| CN102840192B (en) * | 2012-06-28 | 2015-03-18 | 三一重工股份有限公司 | System and method for monitoring power of hydraulic system |
| CN103674120A (en) * | 2012-09-20 | 2014-03-26 | 廊坊新衡科技有限公司 | Composite gas flow measuring device based on MEMS (micro-electromechanical system) sensitive elements and measuring method thereof |
| CN103674120B (en) * | 2012-09-20 | 2018-07-06 | 新奥科技发展有限公司 | A kind of compound gas flow metering device and its measuring method based on MEMS sensing elements |
| CN104089669A (en) * | 2013-04-01 | 2014-10-08 | 湖北泽越电子科技有限公司 | High-accuracy zero-pressure-loss electronic flowmeter |
| CN112212926A (en) * | 2020-08-07 | 2021-01-12 | 北京协同创新研究院 | Flow measurement method based on porous throttling and MEMS pressure sensor |
| CN112212926B (en) * | 2020-08-07 | 2022-04-08 | 北京协同创新研究院 | Flow measurement method based on porous throttling and MEMS pressure sensor |
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| Publication number | Publication date |
|---|---|
| CN100582498C (en) | 2010-01-20 |
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Granted publication date: 20100120 Termination date: 20120812 |