CN105675184A - Compensation method for zero point temperature drift of silicon strain gage bridge circuit - Google Patents
Compensation method for zero point temperature drift of silicon strain gage bridge circuit Download PDFInfo
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- CN105675184A CN105675184A CN201610091648.3A CN201610091648A CN105675184A CN 105675184 A CN105675184 A CN 105675184A CN 201610091648 A CN201610091648 A CN 201610091648A CN 105675184 A CN105675184 A CN 105675184A
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- temperature
- foil gauge
- bridge circuit
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
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- General Physics & Mathematics (AREA)
- Measurement Of Force In General (AREA)
Abstract
The invention discloses a compensation method for the zero point temperature drift of a silicon strain gage bridge circuit, and the method is characterized in that the method comprises the steps: carrying out the data collection of strain resistors at a plurality of temperature points, and calculating a series resistance value and a parallel resistance value through a software compensation algorithm and the collection data; and enabling the calculated series resistance value and parallel resistance value to meet a relational expression (shown in the description), wherein Rp is parallel resistance and Rs is series resistance. The method enables a six-axis force/torque sensor not to be affected by temperature, and has very high signal precision in the whole working temperature range.
Description
Technical field
The present invention relates to the silicon foil gauge bridge circuit temperature compensation in industry, it is specially adapted on six axle power/moment sensing devices and uses, make six axle power/moment sensing devices no longer by the impact of temperature variation.
Background technology
In non-electric power detection, the detection limit of pressure is maximum, so pressure transmitter is also use the sensor the most extensive, technology innovation is the fastest. Particularly silicon dridge type piezoresistance, pressure sensor with its good linearity, highly sensitive, volume is little, is convenient to the plurality of advantages such as integrated, is current most popular a kind of pressure transmitter. But the temperature profile due to semiconductor material, the output signal of silicon piezoresistance type pressure sensor can be affected along with the change of temperature, produces temperature drift, and the phenomenon of temperature drift governs the development of silicon piezoresistance type pressure sensor always.
Summary of the invention
It is an object of the invention to provide the equalising means of a kind of silicon foil gauge bridge circuit zero temperature drift, make six axle power/moment sensing devices no longer by the impact of temperature, in whole operating temperature range, possess very high signal accuracy.
The technical scheme adopted is:
An equalising means for silicon foil gauge bridge circuit zero temperature drift, comprises the steps:
One, on six axle power/moment sensing Qi Qiao road, at many temperature spots place, strain resistor is carried out data gathering;
Two, the relational expression of each strain resistor and temperature is obtained by the temperature data of collection, by series-parallel resistance value in software compensation algorithm calculation compensation circuit.
Three, compensating resistance calculation method
First to gather strain resistor data separate method of least squares and temperature carry out linear fit, obtain the linear representation of all 12 strain resistors and temperature, to half and half bridge calculation compensation resistance, for the linear representation of first bridge two foil gauges in electric bridge be:
If strain resistor is positive temperature coefficient, thenTime, compensating resistance select withCarry out series-parallel connection, on the contrary select withCarrying out series-parallel connection, series resistance is, shunting resistance is; Owing to six-dimensional force/moment works with the form of half bridge, so compensating resistance should make at any temperature, compensate two resistance values on back axle road identical:
, that is:
……(1)
Taylor's formula is utilized to launch to try to achieve by both sidesWith:
……(2)
In upper formula,,For the medial temperature of working sensor environment.
Shunting resistance can be tried to achieve by formula (2)Resistance, then calculate in conjunction with formula (1)Resistance.IfResistance is negative, thenChange intoCarry out connecting.
Tool of the present invention has the following advantages:
1) present method suitability is very strong, and the strain resistor collected and temperature data also can with other mathematical form matchings, and method is flexible.
2) this resistance calculations method has very high accuracy, and drift can be made to control at 0.5%F.S/30 DEG C.
3) present method compensation temperature range is wider, generally applicable in the situation of temperature compensation scope more than 80 DEG C, and different by arrangingThe temperature range of value control the optimal compensation effect.
Accompanying drawing explanation
Fig. 1 is hardware compensating schematic circuit.
Fig. 2 is equalising means schema.
Embodiment
An equalising means for silicon foil gauge bridge circuit zero temperature drift, comprises the steps:
1, tested elastomeric components is put into environmental test chamber, by temp probe as far as possible close to the foil gauge on elastomerics, but it is not corrupted to foil gauge.
2, environmental test chamber selects design temperature pattern, and design temperature is set as 1.50 DEG C, 7.30 DEG C, 12.50 DEG C, 17.50 DEG C, 22.50 DEG C, 27.50 DEG C, 32.40 DEG C, 37.70 DEG C respectively successively.
3, after setting relevant temperature, start to record the resistance of corresponding position foil gauge after 25 minutes, it is filled up in form, 5 minutes afterwards records one group, each temperature spot record 10 groups of data, and writing time, environmental test chamber panel temperature, thermometer temperature.
4, after record, close environmental test chamber, record data are input in computer.
5, application software compensates algorithm and calculates the resistance value needing to compensate, and resistance should meet relational expression
6, the resistance value obtained according to software algorithm, welding respective resistance values resistance is in circuit.
7, the circuit after compensation is carried out temperature experiment checking, to obtain final product.
Claims (5)
1. the equalising means of a silicon foil gauge bridge circuit zero temperature drift, it is characterised in that: it is included in many temperature spots place and strain resistor is carried out data gathering, utilize software compensation algorithm and image data to calculate series impedance and shunting resistance value;
Calculating series impedance and shunting resistance value should meet relational expression:
;
In formula, Rp is shunting resistance, and Rs is series resistance.
2. the equalising means of a kind of silicon foil gauge bridge circuit zero temperature drift according to claim 1, it is characterized in that: in strain resistor data gathering process, described multiple temperature spot, comprises 1.50 DEG C, 7.30 DEG C, 12.50 DEG C, 17.50 DEG C, 22.50 DEG C, 27.50 DEG C, 32.40 DEG C and 37.70 DEG C.
3. the equalising means of a kind of silicon foil gauge bridge circuit zero temperature drift according to claim 1 and 2, it is characterised in that: image data be make use of method of least squares and carries out linear fit by software compensation algorithm.
4. the equalising means of a kind of silicon foil gauge bridge circuit zero temperature drift according to claim 1, it is characterised in that: adjust compensation temperature range and the temperature range at compensation effect place by setting Ts.
5. the equalising means of a kind of silicon foil gauge bridge circuit zero temperature drift according to claim 1 and 2, it is characterised in that comprise the steps:
(1), by tested elastomeric components put into environmental test chamber, by temp probe as far as possible close to the foil gauge on elastomerics, but it is not corrupted to foil gauge;
(2), environmental test chamber select design temperature pattern, design temperature is set as 1.50 DEG C, 7.30 DEG C, 12.50 DEG C, 17.50 DEG C, 22.50 DEG C, 27.50 DEG C, 32.40 DEG C, 37.70 DEG C respectively successively;
(3), setting relevant temperature after, start to record the resistance of corresponding position foil gauge after 25 minutes, be filled up in form, 5 minutes afterwards record one group, each temperature spot record 10 groups of data, and writing time, environmental test chamber panel temperature, thermometer temperature;
(4), record after, close environmental test chamber, record data are input in computer;
(5), application software compensates algorithm and calculates the resistance value needing to compensate;
(6) resistance value, according to software algorithm obtained, welding respective resistance values resistance is in circuit;
(7), to the circuit after compensating carry out temperature experiment checking, to obtain final product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610091648.3A CN105675184A (en) | 2016-02-19 | 2016-02-19 | Compensation method for zero point temperature drift of silicon strain gage bridge circuit |
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| CN201610091648.3A CN105675184A (en) | 2016-02-19 | 2016-02-19 | Compensation method for zero point temperature drift of silicon strain gage bridge circuit |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107727305A (en) * | 2017-09-30 | 2018-02-23 | 江西洪都航空工业集团有限责任公司 | A kind of method for measuring hydraulic actuator axial force |
| CN108801531A (en) * | 2018-08-06 | 2018-11-13 | 海伯森技术（深圳）有限公司 | A kind of six-dimension force sensor and the method for improving six-dimension force sensor temperature drift |
| CN110174198A (en) * | 2018-02-19 | 2019-08-27 | 意法半导体股份有限公司 | Deformeter with mechanically decoupled temperature sensor |
| CN110546474A (en) * | 2017-04-25 | 2019-12-06 | 奥腾工业自动化(廊坊)有限公司 | Force/torque sensor temperature compensation |
| CN111175542A (en) * | 2019-12-12 | 2020-05-19 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | Temperature compensation method for Wheatstone bridge as AFM position sensor |
| CN111855078A (en) * | 2020-07-28 | 2020-10-30 | 中国电子科技集团公司第四十八研究所 | Automatic zero point adjusting circuit and method for bridge force measuring sensor |
| CN114777970A (en) * | 2022-05-23 | 2022-07-22 | 电子科技大学 | Film strain gauge bridge circuit based on flexible circuit board on high-rigidity force measuring knife handle |
| CN115425841A (en) * | 2022-11-03 | 2022-12-02 | 禹创半导体(深圳)有限公司 | Compensation circuit and control method and device thereof, electronic equipment and medium |
| CN117553946A (en) * | 2024-01-12 | 2024-02-13 | 锐马（福建）电气制造有限公司 | Temperature compensation method for force transducer |
| CN117889999A (en) * | 2024-03-14 | 2024-04-16 | 锐马（福建）电气制造有限公司 | Zero compensation method and system for six-dimensional force sensor |
| CN117553946B (en) * | 2024-01-12 | 2024-06-04 | 锐马（福建）电气制造有限公司 | Temperature compensation method for force transducer |
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| US20050049805A1 (en) * | 2003-08-28 | 2005-03-03 | Ulrich Bonne | Methods and systems for temperature compensation of physical property sensors |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110546474B (en) * | 2017-04-25 | 2022-01-21 | 奥腾工业自动化(廊坊)有限公司 | Method for temperature compensation of force/torque sensor |
| CN110546474A (en) * | 2017-04-25 | 2019-12-06 | 奥腾工业自动化(廊坊)有限公司 | Force/torque sensor temperature compensation |
| CN107727305A (en) * | 2017-09-30 | 2018-02-23 | 江西洪都航空工业集团有限责任公司 | A kind of method for measuring hydraulic actuator axial force |
| CN110174198A (en) * | 2018-02-19 | 2019-08-27 | 意法半导体股份有限公司 | Deformeter with mechanically decoupled temperature sensor |
| CN110174198B (en) * | 2018-02-19 | 2022-04-01 | 意法半导体股份有限公司 | Strain gauge with mechanically decoupled temperature sensor |
| CN108801531A (en) * | 2018-08-06 | 2018-11-13 | 海伯森技术（深圳）有限公司 | A kind of six-dimension force sensor and the method for improving six-dimension force sensor temperature drift |
| CN108801531B (en) * | 2018-08-06 | 2024-03-22 | 海伯森技术（深圳）有限公司 | Six-dimensional force sensor and method for improving temperature drift of six-dimensional force sensor |
| WO2021114335A1 (en) * | 2019-12-12 | 2021-06-17 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | Temperature compensation method for wheatstone bridge serving as afm position sensor |
| CN111175542A (en) * | 2019-12-12 | 2020-05-19 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | Temperature compensation method for Wheatstone bridge as AFM position sensor |
| CN111855078A (en) * | 2020-07-28 | 2020-10-30 | 中国电子科技集团公司第四十八研究所 | Automatic zero point adjusting circuit and method for bridge force measuring sensor |
| CN114777970A (en) * | 2022-05-23 | 2022-07-22 | 电子科技大学 | Film strain gauge bridge circuit based on flexible circuit board on high-rigidity force measuring knife handle |
| CN115425841A (en) * | 2022-11-03 | 2022-12-02 | 禹创半导体(深圳)有限公司 | Compensation circuit and control method and device thereof, electronic equipment and medium |
| CN117553946A (en) * | 2024-01-12 | 2024-02-13 | 锐马（福建）电气制造有限公司 | Temperature compensation method for force transducer |
| CN117553946B (en) * | 2024-01-12 | 2024-06-04 | 锐马（福建）电气制造有限公司 | Temperature compensation method for force transducer |
| CN117889999A (en) * | 2024-03-14 | 2024-04-16 | 锐马（福建）电气制造有限公司 | Zero compensation method and system for six-dimensional force sensor |
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Application publication date: 20160615 |