CN114777970A - Film strain gauge bridge circuit based on flexible circuit board on high-rigidity force measuring knife handle - Google Patents

Film strain gauge bridge circuit based on flexible circuit board on high-rigidity force measuring knife handle Download PDF

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Publication number
CN114777970A
CN114777970A CN202210562455.7A CN202210562455A CN114777970A CN 114777970 A CN114777970 A CN 114777970A CN 202210562455 A CN202210562455 A CN 202210562455A CN 114777970 A CN114777970 A CN 114777970A
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resistor
film strain
registration
resistors
thin film
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CN202210562455.7A
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CN114777970B (en
Inventor
丁杰雄
赖俊杰
王林江
吴宇舟
王伟
林震
王啸东
段莹瑞
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225Measuring circuits therefor
    • G01L1/2262Measuring circuits therefor involving simple electrical bridges
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061Force sensors associated with industrial machines or actuators
    • G01L5/0076Force sensors associated with manufacturing machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses a thin film strain gauge bridge circuit based on a flexible circuit board on a high-rigidity force measuring knife handle, which adopts a multi-stage resistance parallel registration structure and comprises two thin film strain resistors R1、R2And four registration resistors R3、R4、R5、R6(ii) a Register resistance R4、R5、R6After being connected in parallel with a registration resistor R3Connected in series and then connected in series with a thin film strain resistor R1And R2Parallel connection; series thin film strain resistance R1And R2The connection points of the two ends of the flexible circuit board are film strain resistor welding points, and the two ends of the registration resistors connected in series are respectively welded at the welding points of the film strain resistors. The invention adopts the adjustment mode of multi-stage resistor parallel connection, and adopts the original circuitOn the basis of the method, two registration resistors are connected in parallel; theoretically, resistors with any resistance value can be combined; and a near registration principle is provided, and the registration resistor is welded near the thin film strain resistor, so that the length of a wire between the registration resistor and the thin film strain resistor is reduced, the additional resistor is reduced, and the circuit stability is improved.

Description

Flexible circuit board-based thin film strain gauge bridge circuit on high-rigidity force measuring knife handle
Technical Field
The invention relates to a thin film strain gauge bridge circuit based on a flexible circuit board on a high-rigidity force measuring knife handle.
Background
The milling force is an important physical parameter in the process of reflecting milling. The measurement of dynamic milling force in milling is the most direct and key information for monitoring the running state of the machine tool and eliminating the fault of the machine tool. By measuring the milling force in real time, the parameters of the cutter can be optimized, the milling condition can be improved, the state of the cutter can be reflected, the roughness of the machined surface can be predicted, and irreversible damage to a workpiece can be avoided. The milling force is usually measured indirectly by sensing the mechanical deformation of the tool holder in a manner of measuring the milling force at the tool end, and the sensing element is generally a resistance strain gauge. The cutter handle for measuring the milling force has the characteristics of high rigidity, small deformation and high sensitivity.
The resistance strain gauge adopts a film strain gauge, namely, the film growth mode is better. Over the last two decades, resistance strain gauges often use metal foil type strain gauges, which need to be attached to the surface of a measured object by means of adhesive for measurement, which often causes problems of measurement lag, creep, and the like, and the stability of the resistance strain gauges changes along with changes of time and temperature. The force measuring knife handle rotates at a high speed and vibrates along with high frequency when working, the temperature is high, and the metal foil type strain gauge is difficult to accurately measure a strain signal generated by the deformation of the knife handle. If a thin film strain gauge is adopted, the problems caused by a metal foil type strain gauge can be well solved. The film strain gauge is made by depositing metal, alloy and semiconductor materials on a substrate (or an elastomer) by methods of vacuum evaporation, plasma chemical vapor deposition and the like, and the film strain gauge is connected with each other in an inorganic manner without using an adhesive, so that creep and hysteresis hardly occur, the film strain gauge has good stability, and has excellent heat resistance and moisture resistance, and the defects lie in that the production process is complicated.
The strain gauge bridge circuit generally adopts a full-bridge differential bridge, which has the advantages of high sensitivity and good temperature compensation performance, while the film strain gauge bridge circuit adopts a half-bridge differential bridge, which is better. The production process of the film strain gauge is complex, the accurate resistance value of the film strain gauge cannot be guaranteed, and the actual resistance value and the theoretical resistance value have large uncertain errors. If a full-bridge differential bridge is adopted, the resistance values of the thin film strain resistors on the four arms of the full-bridge differential bridge are difficult to control to be completely equal, the output of the bridge in a balanced state is difficult to be zero, and certain interference can be caused to useful signals. If a half-bridge differential bridge is adopted, two arms of the bridge are thin film strain resistors, the other two arms adopt resistors with high precision and high stability, and the resistors are registration resistors, and the resistance value of the registration resistors is adjusted, so that the output of the bridge in a balanced state can be zero (or the influence degree on useful signals is small), and the influence caused by inaccurate resistance value of the thin film strain gauge can be well solved. The half-bridge type thin film strain gauge is shown in FIG. 1, and the half-bridge differential bridge type thin film strain gauge is shown in FIG. 2, where R1、R2Is a thin film strain resistance, R3、R4To register the resistance.
The rigidity of the force measuring knife handle is high, and the deformation generated in the milling process is small, so that the change of the resistance value of the film strain gauge is very small, the output of a bridge circuit is usually in a uV level, and a weak signal is easily interfered. The force measuring knife handle rotates at a high speed in the milling process and vibrates along with the high frequency, so that the lead of the half-bridge differential bridge of the film strain gauge is easy to bend and deform, the resistance value of the lead is changed due to the deformation of the lead, and an additional resistor is introduced into a circuit. The half-bridge differential bridge of the thin film strain gauge is now shown in FIG. 3, where R1、R2Is a thin film strain resistance, R3、R4To register resistance, R'3、R′4Is an additional resistance. The weak signal U output by the bridge is generated by additional resistance introduced by the deformation of the lead wire of the block part of the figure 20Causing interference that introduces noise into the bridge circuit that is not cancelled.
The additional resistor has a large influence on a weak signal output by the bridge circuit, and is mainly caused by the fact that a wire at the end of a registration resistor in the bridge circuit is too long. From qualitative angle analysis, the output of the half-bridge circuit of the film strain gauge is a voltage signal, and the introduction of the additional resistor can cause the voltage drop on a bridge arm of the registration resistor to influence the output of the bridge circuit; after the additional resistor is introduced from the quantitative analysis, the output of the bridge circuit is U0=(R1(R4+R′4)-R2(R3+R′3))*UAc/((R1+R1)(R3+R4+R′3+R′4)),R′3、R′4Will have an effect on the useful weak signal.
The output of the half-bridge differential bridge of the thin film strain gauge is usually in the uV level, the weak signal is very easy to be interfered, in order to make the output of the bridge in the balanced state zero or not to influence the weak signal, the output of the bridge in the balanced state needs to be adjusted by using a registration resistor, and theoretically, R in FIG. 2 needs to be reached1/R2=R4/R3. Because the high-precision resistor in the market is generally a standard resistor, the resistance value is not arbitrary, and if two resistors R are directly adopted3And R4The registration is carried out, and the ratio of the resistance values of the two registration resistors is difficult to control to be equal to the ratio of the resistance values of the thin film strain resistors; and the resistors have errors, the higher the precision of the resistors is, the higher the cost is, and the less the selectable resistance values are.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, and provides a method for welding a registration resistor near a thin film strain resistor, so that the length of a lead between the registration resistor and the thin film strain resistor is reduced, and the introduced additional resistor is reduced; and a multistage parallel structure is adopted, and a thin film strain gauge bridge circuit based on a flexible circuit board is arranged on the high-rigidity force measuring knife handle for fundamentally reducing additional resistance generated by the deformation of a lead.
Hair brushThe purpose is realized by the following technical scheme: a flexible circuit board-based thin film strain gauge bridge circuit on a high-rigidity force measuring knife handle adopts a multi-stage resistance parallel registration structure and comprises two thin film strain resistors R1、R2And four registration resistors R3、R4、R5、R6(ii) a Register resistance R4、R5、R6After parallel connection, the resistor R is connected with the register resistor3Connected in series and then connected in series with a thin film strain resistor R1And R2Parallel connection;
the film strain resistor R1、R2Depositing on the surface of the tool handle in a film growth mode, and registering the resistor R3、R4、R5、R6The flexible circuit board is welded on the flexible circuit board and is connected with a subsequent circuit through the flexible circuit board; series film strain resistance R1And R2The connection points of the two ends of the flexible circuit board are film strain resistor welding points, and the two ends of the registration resistors connected in series are respectively welded at the welding points of the film strain resistors.
Further, the registration resistance R4、R5、R6Parallel resistor R after parallel connectionaThe calculation method comprises the following steps:
1/Ra=1/R4+1/R5+1/R6
parallel resistor RaTotal resistance value of (2) from R4、R5、R6Combined regulation, ensuring R1/R2=Ra/R3
The beneficial effects of the invention are:
1. in order to ensure that the registration is carried out by adopting the standard resistor, the invention adopts a registration mode of connecting a plurality of resistors in parallel and adopts R4、R5、R6And R3Accurately registering the bridge circuit, and connecting two registering resistors in parallel on the basis of the original circuit; by R4、R5Coarse tuning RaResistance value of R6Trimming RaThe resistance value of (2) can be combined into a resistor with any resistance value theoretically, so that R can be realized with high precision1/R2=Ra/R3
2. The invention provides a near registration principle aiming at a weak signal interfered by additional resistance introduced by the bending of a lead, and the registration resistance is welded at the welding point of the film strain resistance (the film strain resistance is deposited on the surface of the knife handle in a film growth mode, the registration resistance is welded on the flexible circuit board and is connected with a subsequent circuit through the flexible circuit board), so that the length of the lead between the registration resistance and the film strain resistance is reduced, the additional resistance generated by the deformation of the lead is fundamentally reduced, the influence on a bridge circuit due to the bending deformation of the lead is reduced, and the stability of the circuit is improved.
Drawings
FIG. 1 is a half-bridge thin film strain gauge;
FIG. 2 is a half-bridge differential bridge of a thin film strain gauge;
FIG. 3 is a half-bridge differential bridge circuit diagram of a thin film strain gauge incorporating an additional resistor;
FIG. 4 is a circuit diagram of a thin film strain gauge bridge circuit of the present invention;
fig. 5 is a schematic diagram of a flexible circuit board.
Detailed Description
The technical scheme of the invention is further explained by combining the attached drawings.
As shown in FIG. 4, the thin film strain gauge bridge circuit based on the flexible circuit board on the high-rigidity force measuring knife handle adopts a multi-stage resistor parallel registration structure and comprises two thin film strain resistors R1、R2And four registration resistors R3、R4、R5、R6(ii) a Register resistance R4、R5、R6After parallel connection, the resistor R is connected with the register resistor3Connected in series and then connected in series with a thin film strain resistor R1And R2Connecting in parallel;
the film strain resistor R1、R2Depositing on the surface of the tool handle in a film growth mode, and registering the resistor R3、R4、R5、R6The flexible circuit board is welded on the flexible circuit board and is connected with a subsequent circuit through the flexible circuit board; series thin film strain resistance R1And R2The two ends of the registration resistor are respectively welded at the welding points of the thin film strain resistors, as shown in fig. 5 (the welding point in the middle of fig. 5 is an output pin of U0, and the welding points at the two ends are the welding points connected with the registration resistor). The registration resistance welding point is close to the thin film strain resistor, the length of a lead on a bridge arm where the registration resistor is located is reduced, the problem can be fundamentally relieved, and the stability of a bridge circuit is improved. Under the same working condition, the shorter lead is not easy to bend and deform, and the additional resistance R 'is generated after deformation'3、R′4The resistance value of the part of the conducting wire is approximately considered to be not changed along with the vibration of the force measuring knife handle, so that the influence on the output voltage of the bridge circuit is small.
Further, the register resistance R4、R5、R6Parallel resistor R after parallel connectionaThe calculation method comprises the following steps:
1/Ra=1/R4+1/R5+1/R6
parallel resistor RaTotal resistance value of (2) from R4、R5、R6Combined regulation by R4、R5Coarse tuning RaResistance value of R6Trimming RaThe resistance value of (2) can be theoretically combined into a resistor with any resistance value, which facilitates high-precision R realization1/R2=Ra/R3
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.

Claims (2)

1. The film strain gauge bridge circuit based on the flexible circuit board on the high-rigidity force measuring knife handle is characterized in that a multi-stage resistor is adopted to be connected in parallelRegistered structure comprising two thin-film strain resistors R1、R2And four registration resistors R3、R4、R5、R6(ii) a Register resistance R4、R5、R6After being connected in parallel with a registration resistor R3Connected in series and then connected in series with a thin film strain resistor R1And R2Connecting in parallel;
the film strain resistor R1、R2Depositing on the surface of the tool handle in a film growth mode, and registering the resistor R3、R4、R5、R6The flexible circuit board is welded on the flexible circuit board and is connected with a subsequent circuit through the flexible circuit board; series thin film strain resistance R1And R2The connection points of the two ends of the flexible circuit board are film strain resistor welding points, and the two ends of the registration resistors connected in series are respectively welded at the welding points of the film strain resistors.
2. The flex-circuit-board-based thin film strain gauge bridge circuit on a high stiffness force measuring tool handle of claim 1 wherein the registration resistor R is4、R5、R6Parallel resistor R after parallel connectionaThe calculation method comprises the following steps:
1/Ra=1/R4+1/R5+1/R6
parallel resistor RaTotal resistance value of (2) from R4、R5、R6Combined regulation, ensuring R1/R2=Ra/R3
CN202210562455.7A 2022-05-23 2022-05-23 Film strain gauge bridge circuit based on flexible circuit board on high-rigidity force measuring knife handle Active CN114777970B (en)

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* Cited by examiner, † Cited by third party
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CN114061799A (en) * 2021-11-08 2022-02-18 珠海格力电器股份有限公司 Wheatstone bridge and multidimensional force sensor
CN113953893A (en) * 2021-11-23 2022-01-21 电子科技大学 Signal transmission processing method of tool end strain type milling force measuring device
CN114322740A (en) * 2021-12-03 2022-04-12 电子科技大学长三角研究院(湖州) Composite film strain gauge based on magnetron sputtering and preparation method thereof

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