CN108801531A - A kind of six-dimension force sensor and the method for improving six-dimension force sensor temperature drift - Google Patents
A kind of six-dimension force sensor and the method for improving six-dimension force sensor temperature drift Download PDFInfo
- Publication number
- CN108801531A CN108801531A CN201810882484.5A CN201810882484A CN108801531A CN 108801531 A CN108801531 A CN 108801531A CN 201810882484 A CN201810882484 A CN 201810882484A CN 108801531 A CN108801531 A CN 108801531A
- Authority
- CN
- China
- Prior art keywords
- temperature
- force sensor
- dimension force
- face
- foil gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000011888 foil Substances 0.000 claims abstract description 41
- 238000005259 measurement Methods 0.000 claims abstract description 11
- 229920001971 elastomer Polymers 0.000 claims description 16
- 239000000806 elastomer Substances 0.000 claims description 16
- 241001269238 Data Species 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000006872 improvement Effects 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
Abstract
The present invention relates to sensor technical fields, more particularly to the method for a kind of six-dimension force sensor and improvement six-dimension force sensor temperature drift, the six-dimension force sensor, including inner ring structure, if outer ring structure and the dry measure beam being evenly distributed between inner ring and outer ring structure, the measurement beam includes four arm faces, respectively upper arm face, the underarm face opposite with upper arm face, left arm face, the right arm face opposite with left arm face, it is equipped with foil gauge on the arm face, wherein, foil gauge on opposing arms face is a pair, the groove of even number is symmetrically offered on the inner ring structure, the surface of groove described in even number is extended with protrusion, the protrusion is equipped with the mutual corresponding first temperature-compensating foil gauge in position and second temperature dummy gauge.The 6 DOF sensor improves traditional six-dimension force sensor when mechanical arm tail end is close to heater, and there are temperature drifts caused by temperature difference for upper and lower surface.
Description
Technical field
The present invention relates to sensor technical field, more particularly to a kind of six-dimension force sensor and improvement six-dimension force sensor temperature
Spend the method for drift.
Background technology
Six-dimension force sensor is a kind of force snesor that can detect 3 force components and three moment component simultaneously, according to X,
Y, the force component and moment components of Z-direction can obtain resultant force and resultant moment.Resistance-strain type of dynamometer principle is current broad sense six
Most one kind is applied in dimensional force sensor.At least there are three beam is measured inside six-dimension force sensor, cross section is rectangle.Often
A measurement beam includes four upper wall surface, lower wall surface, left wall face and right wall faces, and wherein upper wall surface and lower wall surface is two opposite
Wall surface, left wall face and right wall are two opposite wall surfaces.And the stressing conditions master in six-dimension force sensor detection vertical direction
Situation is divided by two foil gauges of upper lower wall surface of sensor internal beam to detect.Due to resistance strain plate resistance value with
The variation of temperature will also generate variation and beam top and bottom often will appear the even phenomenon of uneven heating, especially specially fit over mechanical arm
When the six-dimension force sensor of end is close to heater, beam top and bottom can be such that the foil gauge of upper lower wall surface deposits since uneven heating is even
In voltage difference.Traditional temperature-compensating is to carry out temperature compensation by temperature sensor or in non-stress face paste monolithic foil gauge, upper
In the case that lower wall surface uneven heating is even, the numerical value of temperature sensor measurement can not correctly reflect the Temperature difference of beam or more,
In this way when the six-dimension force sensor of mechanical arm tail end is close to heater, traditional temperature-compensating will lose effect.
Invention content
In consideration of it, the present invention proposes a kind of six-dimension force sensor and improves the method for six-dimension force sensor temperature drift, use
To improve six-dimension force sensor when mechanical arm tail end is close to heater, there are temperature drifts caused by temperature difference for upper and lower surface.
In order to achieve the above object, technical scheme is as follows：
A kind of six-dimension force sensor, which is characterized in that including inner ring structure, outer ring structure and be evenly distributed on inner ring and
If the dry measure beam between outer ring structure, the measurement beam include four arm faces, respectively upper arm face and upper arm face it is opposite under
Arm face, the opposite right arm face in left arm face and left arm face are equipped with foil gauge on the arm face, wherein the strain on opposing arms face
Piece is a pair, symmetrically offers the groove of even number on the inner ring structure, and the surface of groove described in even number is extended with convex
It rises, the protrusion is equipped with the mutual corresponding first temperature-compensating foil gauge in position and second temperature dummy gauge.
Preferably, the cross section for measuring beam is rectangle.
Preferably, the inner ring structure includes inner ring and elastomer one, the inner ring is arranged in one side of elastomer；
The outer ring structure includes outer ring and elastomer two, and the outer ring is arranged in the side of elastomer two.
Preferably, described one end for measuring beam connects elastomer two, other end connects inner ring.
Preferably, one end of the first temperature-compensating foil gauge couples positive pole, the second temperature of other end coupling
Dummy gauge is spent, one end of the second temperature dummy gauge couples the first temperature-compensating foil gauge, other end coupling
Power cathode.
The present invention also provides a kind of methods improving six-dimension force sensor temperature drift, wherein the six-dimension force sensor is
Above-mentioned six-dimension force sensor, including：
The partial pressure for acquiring each pair of foil gauge under different temperatures on six-dimension force sensor opposing arms face, if obtaining main line voltage
Signal exports：CH1, CH2 ... CHX, at the same acquire the first temperature-compensating foil gauge of six-dimension force sensor, second temperature compensation answer
Become the partial pressure CH0 of piece；
To collected CH1, CH2 ... CHX voltage datas and CH0 voltage datas, correspondence is sought using method of least squares, is obtained
To the linear representation of CH1~CHX voltages and CH0 voltages:Δ CHX=Kx* Δ CH0, wherein X ranging from 1~X, KxIt is opposite
The temperature compensation coefficient of foil gauge voltage on arm face；
Temperature-compensating is carried out to the voltage of CH1~CHX according to the linear representation of calculating and obtains the voltage after temperature compensation:CHX
=CHX-Kx*ΔCH0。
Beneficial effects of the present invention：
1. improving six-dimension force sensor when mechanical arm tail end is close to heater, upper and lower surface causes there are temperature difference
Temperature drift；
2. reasonable for structure, principle is simple, easy to operation；
Description of the drawings
Fig. 1 is the front view of six-dimension force sensor；
Fig. 2 is the rearview of six-dimension force sensor；
Fig. 3 is the overall schematic of six-dimension force sensor；
Fig. 4 is the circuit connection diagram of the first temperature-compensating foil gauge and second temperature dummy gauge；
Fig. 5 is the sectional view of measuring arm；
Fig. 6 is the voltage measurement point at CH1 and CH2；
Wherein：1, outer ring structure, 11, elastomer two, 12, outer ring, 2, inner ring structure, 21, inner ring, 22, elastomer one, 3,
Measuring arm, 41, groove, 42, protrusion, the 5, first temperature-compensating foil gauge, 6, second temperature dummy gauge, 7, foil gauge, 8,
CH0 voltage measurement points, 9, CH1 voltage measurement points, 10, CH2 voltage measurement points.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
The every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
Illustrate exemplary embodiment of the present invention below in conjunction with concrete condition：
Please refer to Fig.1 and Fig. 3, a kind of six-dimension force sensor, which is characterized in that including inner ring structure, outer ring structure and
If the dry measure beam being evenly distributed between inner ring and outer ring structure, the cross section for measuring beam is rectangle, and it includes four to measure beam
The opposite underarm face in arm face, respectively upper arm face and upper arm face, the opposite right arm face in left arm face and left arm face, arm are all provided on face
There is foil gauge, wherein the foil gauge on opposing arms face is a pair, and the groove of even number, even number are symmetrically offered on inner ring structure
The surface of a groove is extended with protrusion, and protrusion is equipped with the mutual corresponding first temperature-compensating foil gauge in position and second
Temperature-compensating foil gauge.
Inner ring structure includes inner ring and elastomer one, and inner ring is arranged in one side of elastomer, outer ring structure include outer ring and
One end connection elastomer two that beam is measured in the side of elastomer two is arranged in elastomer two, outer ring, and other end connects inner ring.
Referring to FIG. 4, one end of the first temperature-compensating foil gauge couples positive pole, other end couples second temperature and mends
Foil gauge is repaid, one end of second temperature dummy gauge couples the first temperature-compensating foil gauge, and other end couples power cathode.
In the following, for there are three the six-dimension force sensor for measuring beam, the principle of temperature-compensating is specifically told about：
Six-dimension force sensor includes 12 foil gauges, and foil gauge is vertical or horizontal to be pasted onto measurement according to the same direction
On each wall surface of beam, for measuring the longitudinal strain and the transverse strain that measure each wall surface of beam, it is pasted onto on opposing arms face
Foil gauge is that a pair calculates any direction on wall surface by measuring the partial pressure on each each pair of foil gauge of opposite wall surface
Strain value.
Symmetrically offer the groove of even number on inner ring structure, the surface of groove described in even number is extended with protrusion, convex
It rises and is equipped with the mutual corresponding first temperature-compensating foil gauge in position and second temperature dummy gauge, the first temperature-compensating strain
Piece and second temperature dummy gauge are cascaded, the voltage at the i.e. CH0 of partial pressure by measuring them, to other measurement beams
The partial pressure of each pair of foil gauge carries out temperature-compensating.
In addition, due to resistance strain plate resistance value with temperature variation also by generate variation, when upper lower wall surface exist temperature
When poor, the foil gauge resistance value of upper wall surface or lower wall surface will change, and CH0 voltages will change, in upper lower wall
Can still there be good compensation temperature effect in the case that face uneven heating is even.
Referring to FIG. 6, Fig. 6 is the partial pressure measurement point of CH1 and CH2, therefore can be passed by acquiring six-dimensional force under different temperatures
The partial pressure of each pair of foil gauge on sensor opposing arms face obtains 6 tunnel voltage division signals：CH1, CH2 ... CH6, while acquiring six-dimensional force
First temperature-compensating foil gauge of sensor, the partial pressure CH0 of second temperature dummy gauge；
To collected CH1, CH2 ... CH6 voltage datas and CH0 voltage datas, correspondence is sought using method of least squares, is obtained
To the linear representation of CH1~CH6 voltages and CH0 voltages:Δ CHX=Kx* Δ CH0, wherein X ranging from 1~6, KxIt is opposite
The temperature compensation coefficient of foil gauge voltage on arm face；
Temperature-compensating is carried out to the voltage of CH1~CH6 according to the linear representation of calculating and obtains the voltage after temperature compensation:CHX
=CHX-Kx*ΔCH0。
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning
Covering non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only that
A little elements, but also include other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged
Except there is also other identical elements in the process, method, article or apparatus that includes the element.
Specific implementation mode provided by the present invention is described in detail above, specific case pair used herein
The principle of the present invention and embodiment are expounded, and the explanation of above example is only intended to help to understand method of the invention
And its core concept；Meanwhile for those of ordinary skill in the art, according to the thought of the present invention, in specific implementation mode and
There will be changes in application range, in conclusion the content of the present specification should not be construed as limiting the invention.
Claims (6)
1. a kind of six-dimension force sensor, which is characterized in that including inner ring structure, outer ring structure and be evenly distributed on inner ring and outer
If the dry measure beam between coil structures, the measurement beam includes four arm faces, the respectively opposite underarm in upper arm face and upper arm face
Face, the opposite right arm face in left arm face and left arm face are equipped with foil gauge on the arm face, wherein the foil gauge on opposing arms face
For a pair, the groove of even number is symmetrically offered on the inner ring structure, the surface of groove described in even number is extended with protrusion,
The protrusion is equipped with the mutual corresponding first temperature-compensating foil gauge in position and second temperature dummy gauge.
2. six-dimension force sensor according to claim 1, which is characterized in that the cross section for measuring beam is rectangle.
3. six-dimension force sensor according to claim 1, which is characterized in that the inner ring structure includes inner ring and elastomer
One, the inner ring is arranged in one side of elastomer；
The outer ring structure includes outer ring and elastomer two, and the outer ring is arranged in the side of elastomer two.
4. six-dimension force sensor according to claim 1 or 3, which is characterized in that one end connection elasticity for measuring beam
Body two, other end connect inner ring.
5. six-dimension force sensor according to claim 1, which is characterized in that one end of the first temperature-compensating foil gauge
Positive pole is coupled, other end couples second temperature dummy gauge, one end coupling of the second temperature dummy gauge
First temperature-compensating foil gauge, other end couple power cathode.
6. a kind of method improving six-dimension force sensor temperature drift, which is characterized in that the six-dimension force sensor is wanted for right
1 to 6 any one of them six-dimension force sensor is sought, including：
The partial pressure for acquiring each pair of foil gauge under different temperatures on six-dimension force sensor opposing arms face, if obtaining main line voltage signal
Output：CH1, CH2 ... CHX, while acquiring the first temperature-compensating foil gauge, the second temperature dummy gauge of six-dimension force sensor
Partial pressure CH0；
To collected CH1, CH2 ... CHX voltage datas and CH0 voltage datas, correspondence is sought using method of least squares, is obtained
The linear representation of CH1~CHX voltages and CH0 voltages:Δ CHX=Kx* Δ CH0, wherein X ranging from 1~X, KxFor opposing arms
The temperature compensation coefficient of foil gauge voltage on face；
Temperature-compensating is carried out to the voltage of CH1~CHX according to the linear representation of calculating and obtains the voltage after temperature compensation:CHX=
CHX-Kx*ΔCH0。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810882484.5A CN108801531B (en) | 2018-08-06 | 2018-08-06 | Six-dimensional force sensor and method for improving temperature drift of six-dimensional force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810882484.5A CN108801531B (en) | 2018-08-06 | 2018-08-06 | Six-dimensional force sensor and method for improving temperature drift of six-dimensional force sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108801531A true CN108801531A (en) | 2018-11-13 |
| CN108801531B CN108801531B (en) | 2024-03-22 |
Family
ID=64079354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810882484.5A Active CN108801531B (en) | 2018-08-06 | 2018-08-06 | Six-dimensional force sensor and method for improving temperature drift of six-dimensional force sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108801531B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109238531A (en) * | 2018-11-16 | 2019-01-18 | 合肥工业大学 | A kind of dicyclic six-dimension force sensor |
| CN110274725A (en) * | 2019-01-17 | 2019-09-24 | 上海肇擎传感技术有限公司 | A kind of six-axis force sensor sensitive structure based on quartz vibration beam |
| CN111198062A (en) * | 2020-01-09 | 2020-05-26 | 安徽农业大学 | Strain type six-dimensional force sensor |
| CN113167669A (en) * | 2019-01-28 | 2021-07-23 | 日本电产科宝电子株式会社 | Elastic body and force sensor using same |
| CN113820062A (en) * | 2021-09-30 | 2021-12-21 | 浙江大学 | Temperature compensation method of six-dimensional force sensor |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4763531A (en) * | 1986-04-04 | 1988-08-16 | Deutsche Forschungs-Und Versuchsanstalt Fur Luft Und Raumfahrt E.V. | Force-torque sensor |
| US5534773A (en) * | 1994-06-23 | 1996-07-09 | Mitsubishi Denki Kabushiki Kaisha | Method for compensating an offset voltage temperature drift in a semiconductor strain gage sensor |
| JP2007078570A (en) * | 2005-09-15 | 2007-03-29 | Fanuc Ltd | Force sensor |
| CN200972421Y (en) * | 2006-09-29 | 2007-11-07 | 中国石化股份胜利油田分公司河口采油厂 | Fixed load sensor for pumping well measuring diagram |
| CN101131335A (en) * | 2007-09-07 | 2008-02-27 | 南京航空航天大学 | Two-dimension force transducer with small measuring range |
| US20080066562A1 (en) * | 2006-08-30 | 2008-03-20 | Honda Motor Co., Ltd. | Chip for force sensor and force sensor |
| CN101210850A (en) * | 2006-12-29 | 2008-07-02 | 中国直升机设计研究所 | Multi-component force sensor |
| CN102156019A (en) * | 2011-03-28 | 2011-08-17 | 豪展医疗科技股份有限公司 | Pressure sensor |
| WO2011115386A2 (en) * | 2010-03-18 | 2011-09-22 | 고려대학교 산학협력단 | Temperature compensation load cell having strain gauges |
| CN102252790A (en) * | 2011-05-31 | 2011-11-23 | 上海交通大学 | Flow adjustable reciprocating pump crankshaft impact load on-line real-time detection device |
| CN105628266A (en) * | 2015-12-25 | 2016-06-01 | 武汉中航传感技术有限责任公司 | Temperature compensation system and method of pressure sensor |
| CN105675184A (en) * | 2016-02-19 | 2016-06-15 | 沈阳埃克斯邦科技有限公司 | Compensation method for zero point temperature drift of silicon strain gage bridge circuit |
| CN205879107U (en) * | 2016-08-18 | 2017-01-11 | 哈尔滨汽轮机厂有限责任公司 | Resistance strain sensor |
| CN107167267A (en) * | 2017-06-09 | 2017-09-15 | 海伯森技术（深圳）有限公司 | Multi-dimension force sensor and calibration method |
| CN107574750A (en) * | 2017-09-13 | 2018-01-12 | 中交瑞通路桥养护科技有限公司 | Bridge overload early warning bearing |
| CN107860507A (en) * | 2017-10-31 | 2018-03-30 | 南京卓砾智测控技术有限公司 | Pressure sensor calibration force snesor and its calibration method |
| CN107941417A (en) * | 2017-11-10 | 2018-04-20 | 苏州华兴源创电子科技有限公司 | The output calibrating installation and method of a kind of pressure sensor |
| CN208704938U (en) * | 2018-08-06 | 2019-04-05 | 海伯森技术（深圳）有限公司 | A kind of six-dimension force sensor |
-
2018
- 2018-08-06 CN CN201810882484.5A patent/CN108801531B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4763531A (en) * | 1986-04-04 | 1988-08-16 | Deutsche Forschungs-Und Versuchsanstalt Fur Luft Und Raumfahrt E.V. | Force-torque sensor |
| US5534773A (en) * | 1994-06-23 | 1996-07-09 | Mitsubishi Denki Kabushiki Kaisha | Method for compensating an offset voltage temperature drift in a semiconductor strain gage sensor |
| JP2007078570A (en) * | 2005-09-15 | 2007-03-29 | Fanuc Ltd | Force sensor |
| US20080066562A1 (en) * | 2006-08-30 | 2008-03-20 | Honda Motor Co., Ltd. | Chip for force sensor and force sensor |
| CN200972421Y (en) * | 2006-09-29 | 2007-11-07 | 中国石化股份胜利油田分公司河口采油厂 | Fixed load sensor for pumping well measuring diagram |
| CN101210850A (en) * | 2006-12-29 | 2008-07-02 | 中国直升机设计研究所 | Multi-component force sensor |
| CN101131335A (en) * | 2007-09-07 | 2008-02-27 | 南京航空航天大学 | Two-dimension force transducer with small measuring range |
| WO2011115386A2 (en) * | 2010-03-18 | 2011-09-22 | 고려대학교 산학협력단 | Temperature compensation load cell having strain gauges |
| CN102156019A (en) * | 2011-03-28 | 2011-08-17 | 豪展医疗科技股份有限公司 | Pressure sensor |
| CN102252790A (en) * | 2011-05-31 | 2011-11-23 | 上海交通大学 | Flow adjustable reciprocating pump crankshaft impact load on-line real-time detection device |
| CN105628266A (en) * | 2015-12-25 | 2016-06-01 | 武汉中航传感技术有限责任公司 | Temperature compensation system and method of pressure sensor |
| CN105675184A (en) * | 2016-02-19 | 2016-06-15 | 沈阳埃克斯邦科技有限公司 | Compensation method for zero point temperature drift of silicon strain gage bridge circuit |
| CN205879107U (en) * | 2016-08-18 | 2017-01-11 | 哈尔滨汽轮机厂有限责任公司 | Resistance strain sensor |
| CN107167267A (en) * | 2017-06-09 | 2017-09-15 | 海伯森技术（深圳）有限公司 | Multi-dimension force sensor and calibration method |
| CN107574750A (en) * | 2017-09-13 | 2018-01-12 | 中交瑞通路桥养护科技有限公司 | Bridge overload early warning bearing |
| CN107860507A (en) * | 2017-10-31 | 2018-03-30 | 南京卓砾智测控技术有限公司 | Pressure sensor calibration force snesor and its calibration method |
| CN107941417A (en) * | 2017-11-10 | 2018-04-20 | 苏州华兴源创电子科技有限公司 | The output calibrating installation and method of a kind of pressure sensor |
| CN208704938U (en) * | 2018-08-06 | 2019-04-05 | 海伯森技术（深圳）有限公司 | A kind of six-dimension force sensor |
Non-Patent Citations (2)
| Title |
|---|
| 李小换;张世名;邹其利;郭志萍;: "灵敏度温度自补偿薄膜压力传感器的研制", 遥测遥控, no. 1, 15 November 2007 (2007-11-15) * |
| 韩康;王智;李昂;夏明一;霍琦;: "大量程六维力传感器设计与标定研究", 传感器与微系统, no. 05, 31 December 2016 (2016-12-31) * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109238531A (en) * | 2018-11-16 | 2019-01-18 | 合肥工业大学 | A kind of dicyclic six-dimension force sensor |
| CN109238531B (en) * | 2018-11-16 | 2023-09-26 | 合肥工业大学 | Double-ring six-dimensional force sensor |
| CN110274725A (en) * | 2019-01-17 | 2019-09-24 | 上海肇擎传感技术有限公司 | A kind of six-axis force sensor sensitive structure based on quartz vibration beam |
| CN113167669A (en) * | 2019-01-28 | 2021-07-23 | 日本电产科宝电子株式会社 | Elastic body and force sensor using same |
| CN111198062A (en) * | 2020-01-09 | 2020-05-26 | 安徽农业大学 | Strain type six-dimensional force sensor |
| CN113820062A (en) * | 2021-09-30 | 2021-12-21 | 浙江大学 | Temperature compensation method of six-dimensional force sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108801531B (en) | 2024-03-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108801531A (en) | A kind of six-dimension force sensor and the method for improving six-dimension force sensor temperature drift | |
| CN208704938U (en) | A kind of six-dimension force sensor | |
| CN202903128U (en) | Strain measuring device for concrete structural body | |
| DE3867041D1 (en) | CALIBRATION METHOD FOR FORCE OR TORQUE MEASURING DEVICES. | |
| CN103575435A (en) | Three-dimensional force sensor used for automobile rear axle test system | |
| CN106441376A (en) | Graphite grid flexible resistance strain gauge and manufacturing method thereof | |
| CN108917587B (en) | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle | |
| KR101179169B1 (en) | Temperature compensated load cell comprising strain gauges | |
| CN104655489B (en) | A kind of method for measuring slab banjo fixing butt jointing welding toe stress concentration | |
| CN205719350U (en) | A kind of parallel five-dimensional force sensor | |
| EP0067643A3 (en) | Method for determining the dimensions and/or form of surfaces | |
| CN108181038A (en) | Torque-indicating wrench and its torque measuring method | |
| CN104299483B (en) | A kind of bridge type Young's modulus combination instrument | |
| CN208333411U (en) | High-speed railway simply supported beam expansion joint monitoring device | |
| CN208653387U (en) | Flatness reads displayable detection ruler | |
| CN208282973U (en) | The vertical load power system of high-precision pivoted arm force-measuring framework tests structure | |
| CN105758902A (en) | Water content measuring probe based on PCB and electric field marginal effect, and manufacturing method of water content measuring probe | |
| CN211717557U (en) | Liquid level detection system based on fiber bragg grating pressure sensing array | |
| CN106124073A (en) | A kind of comprehensive temperature measuring equipment | |
| CN102997837B (en) | Condenser type super large strain transducer | |
| CN207163432U (en) | Compensating concrete detection means and system | |
| CN207487858U (en) | A kind of torsion sensor main body and torsion sensor | |
| CN204155503U (en) | A kind of bridge type Young modulus combination instrument | |
| JPS585203Y2 (en) | Electrostatic probe for displacement meter | |
| TWI684764B (en) | Method for measuring strain of concrete beam capable of eliminating temperature effect |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 518000 Floor 1, Building E, Huafeng International Robot Industrial Park, Nanchang Community Avenue, Xixiang Street, Baoan District, Shenzhen City, Guangdong Province Applicant after: HYPERSEN TECHNOLOGIES CO.,LTD. Address before: 518000 Room 526, 5th Floor, Building A, Science and Technology Innovation Park, Huafeng Baoan Zhigu, 4 Yintian Road, Xixiang Street, Baoan District, Shenzhen City, Guangdong Province Applicant before: HYPERSEN TECHNOLOGIES CO.,LTD. |
|
| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |