CN105628266A - Temperature compensation system and method of pressure sensor - Google Patents
Temperature compensation system and method of pressure sensor Download PDFInfo
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- CN105628266A CN105628266A CN201511003537.4A CN201511003537A CN105628266A CN 105628266 A CN105628266 A CN 105628266A CN 201511003537 A CN201511003537 A CN 201511003537A CN 105628266 A CN105628266 A CN 105628266A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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Abstract
The invention relates to a temperature compensation system and method of a pressure sensor. By taking input voltages of a pressure sensor to be compensated as temperature signals, an analog compensation module converts output voltages of the pressure sensor to be compensated to enable the relation between the converted output voltages and the input voltages of the pressure sensor to be compensated to be fitted by a quadratic polynomial curve under the condition of certain pressure so that a quadratic polynomial curve equation representing the relation between the converted output voltages and the input voltages under each calibration pressure can be determined only through three calibration temperature points in a digital compensation module, a value of measurement pressure is solved accordingly, and thus a whole temperature compensation process is completed. Through combining analog compensation with digital compensation, high-precision measurement of a constant-current source driving type silicon piezoresistive pressure sensor is realized only through the three calibration temperature points.
Description
Technical field
The present invention relates to pressure signal fields of measurement, in particular to temperature-compensated system and the method for a kind of pressure transmitter.
Background technology
Output is the natural characteristics of silicon piezoresistance type pressure sensor with the phenomenon of temperature drift, it is necessary to it exports the impact to eliminate temperature to take temperature compensation measure correction. At present, temperature compensation mode has three kinds: one to be analog compensation, at passive devices such as silicon piezoresistance type pressure sensor input/output terminal series and parallel connections resistance, thermal sensing elements, reduce silicon piezoresistance type pressure sensor by the mode of shunting or dividing potential drop and export the impact by temperature; The method circuit is simple, but debug difficulties, compensation precision is not high. Two is that numeral compensates, and measures output signal and the measuring tempeature signal of silicon piezoresistance type pressure sensor, and is converted to numerary signal, solves, by compensating algorithm, the numerical value measuring pressure; The method compensation precision height, but require more demarcation temperature spot, otherwise affect measuring accuracy. Three is that analog compensation combines with numeral compensation, the method utilizes analog compensation to reduce the impact of silicon piezoresistance type pressure sensor by temperature, to reduce the measuring error that measuring tempeature brings, but be in essence belong to numeral compensation, measuring accuracy be subject to demarcate temperature spot choose the impact with number.
Along with silicon piezoresistance type pressure sensor is in the widespread use of every field and development, operating temperature range and precision to silicon piezoresistance type pressure sensor are had higher requirement. But, operating temperature range is more wide, and silicon piezoresistance type pressure sensor exports and more is difficult to solve with temperature relation. Existing equalising means only increases demarcation temperature spot to adapt to wider operating temperature range, but for using only there to be the silicon piezoresistance type pressure sensor of three integrated signal conditioning chips demarcating temperature spot, then can lose measuring accuracy, even cannot complete temperature compensation.
Summary of the invention
It is an object of the present invention to provide the temperature-compensated system of a kind of pressure transmitter and method, solve the above-mentioned problems in the prior art.
The technical scheme that the present invention solves the problems of the technologies described above is as follows:
A temperature-compensated system for pressure transmitter, comprises pressure transmitter to be compensated and transmitter;
Described pressure transmitter to be compensated is constant current source drive-type silicon piezoresistance type pressure sensor;
Described transmitter comprises constant current source, analog compensation module, analog to digital conversion module and digital compensation modules;
Described constant current source, it is for providing the driving power supply of described pressure transmitter to be compensated;
Described analog compensation module, it is for changing the output voltage of described pressure transmitter to be compensated, makes conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve;
Described analog to digital conversion module, it demarcates pressure for demarcating temperature spots and two according to three preset, and is captured in demarcate described in each and demarcates the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure; It is also for gathering the described input voltage corresponding to measurement pressure and described conversion output voltage; Wherein, demarcate temperature spot in the operating temperature range of described pressure transmitter to be compensated for described three, demarcate pressure in the useful range of described pressure transmitter to be compensated for described two;
Described digital compensation modules, it, for demarcating described input voltage temperature spot corresponding to and described conversion output voltage described in each according to demarcating described in each under pressure, solves two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage; It is also for measuring the numerical value of pressure described in the described input voltage corresponding to described measurement pressure and described conversion output voltage, described two order polynomial curvilinear equations and described demarcation Pressure solution.
The invention has the beneficial effects as follows: utilize the input voltage of pressure transmitter to be compensated as temperature signal, the output voltage of pressure transmitter to be compensated is changed by analog compensation module, make the relation of conversion output voltage when pressure is certain and between the input voltage of pressure transmitter to be compensated can by two order polynomial fitting of a curve, thus under only needing three demarcation temperature spots can determine each demarcation pressure in digital compensation modules, characterize two order polynomial curvilinear equations of the relation between conversion output voltage and input voltage, and then solve the numerical value measuring pressure, complete whole temperature compensation procedure, analog compensation and numeral are compensated and combines, it is achieved only need the temperature compensation of three constant current source drive-type silicon piezoresistance type pressure sensors demarcating temperature spot, and transmitter in whole temperature compensation procedure without the need to gathering the working temperature of pressure transmitter to be compensated, transmitter and pressure transmitter to be compensated are removably installed, transmitter is avoided to be in the severe measurement environment residing for pressure transmitter to be compensated, and the operating temperature range making pressure transmitter to be compensated is no longer by the limitation of operating temperature range of transmitter, the present invention is applicable to the temperature compensation that needs are separated, operating temperature range is relatively wide, vary with temperature linearly poor constant current source drive-type silicon piezoresistance type pressure sensor with transmitter, while improving measuring accuracy, also reduces the manufacturing cost of product.
On the basis of technique scheme, the present invention can also do following improvement.
Further, described analog compensation module is resistor network.
The useful effect of above-mentioned further scheme is adopted to be that resistor network is beneficial to the structure of analog compensation module.
Further, described resistor network comprises the first resistance, the 2nd resistance, the 3rd resistance and the 4th resistance;
Described first resistance one end ground connection, the other end is electrically connected with the first negative input end of described pressure transmitter to be compensated;
Described 2nd resistance one end ground connection, the other end is electrically connected with the 2nd negative input end of described pressure transmitter to be compensated;
Described 3rd resistance one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the negative output terminal of described pressure transmitter to be compensated;
Described 4th resistance one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the positive output end of described pressure transmitter to be compensated.
The useful effect of above-mentioned further scheme is adopted to be beneficial to and change pressure transmitter Zero Drift of Temperature to be compensated, sensitivity and Man Weiwen drift.
Another technical scheme of the present invention is as follows:
A temperature compensation for pressure transmitter, comprises the steps:
Step 1, build analog compensation module, the output voltage of described pressure transmitter to be compensated is changed, makes conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve;
Step 2, in the operating temperature range of described pressure transmitter to be compensated, preset three demarcate temperature spot, in the useful range of described pressure transmitter to be compensated, preset two demarcate pressure, be captured in demarcate described in each and demarcate the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure; Demarcate described input voltage temperature spot corresponding to and described conversion output voltage described in each according to demarcating described in each under pressure, solve two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage;
Step 3, gather and measure described input voltage corresponding to pressure and described conversion output voltage, described input voltage corresponding to described measurement pressure and measure the numerical value of pressure described in described conversion output voltage, described two order polynomial curvilinear equations and described demarcation Pressure solution.
On the basis of technique scheme, the present invention can also do following improvement.
Further, described structure analog compensation module is implemented as structure resistor network, regulate the resistance of the resistance in described resistor network, make conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve.
Further, described resistor network comprises the first resistance, the 2nd resistance, the 3rd resistance and the 4th resistance;
Described first resistance one end ground connection, the other end is electrically connected with the first negative input end of described pressure transmitter to be compensated;
Described 2nd resistance one end ground connection, the other end is electrically connected with the 2nd negative input end of described pressure transmitter to be compensated;
Described 3rd resistance one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the negative output terminal of described pressure transmitter to be compensated;
Described 4th resistance one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the positive output end of described pressure transmitter to be compensated.
Further, the specific implementation of described step 1 comprises the steps:
Step 11, builds resistor network;
Step 12, regulates the resistance of the resistance in described resistor network;
Step 13, gathers under demarcating pressure described in each the described input voltage corresponding to multiple temperature spot and described conversion output voltage;
Step 14, to demarcating the described input voltage corresponding to pressure described in each and described conversion output voltage carries out two order polynomial fitting of a curve, and derives the reliability parameter characterizing fitting precision;
Step 15, judges whether each reliability parameter all meets following first formula; It is then terminate described step 1; No, then return and perform described step 12;
Described first formula is as follows:
| 1-R | < 0.0002
Wherein, described R is described reliability parameter.
The useful effect of above-mentioned further scheme is adopted to be, verify that each is demarcated the input voltage corresponding to pressure and changes output voltage by the fitting precision of two order polynomial fitting of a curve by reliability parameter, and the resistance of regulating resistance and checking fitting precision are combined, improve constantly fitting precision, thus improve analog compensation quality, ensure numerical compensation accuracy.
Further, the specific implementation of described step 2 comprises the steps:
Step 21, in the operating temperature range of described pressure transmitter to be compensated, preset three demarcate temperature spot, in the useful range of described pressure transmitter to be compensated, preset two demarcate pressure, be captured in demarcate described in each and demarcate the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure;
Step 22, builds two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage;
First demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 2nd formula; 2nd demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 3rd formula;
Described 2nd formula as follows described in:
U'O1=c01+c11UT1+c21UT1 2
Described 3rd formula as follows described in:
U'O2=c02+c12UT2+c22UT2 2
Wherein, described U'O1And UT1It is respectively conversion output voltage variable corresponding to the first demarcation pressure and input voltage variable; Described U'O2And UT2It is respectively conversion output voltage variable corresponding to the 2nd demarcation pressure and input voltage variable; Described c01��c11And c21For the coefficient of the to be solved first demarcation described two order polynomial curvilinear equations corresponding to pressure; Described c02��c12And c22For the coefficient of the to be solved the 2nd demarcation described two order polynomial curvilinear equations corresponding to pressure;
Step 23, described input voltage corresponding to lower for first demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 2nd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described first demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the first demarcation pressure as shown in the 4th formula; Described input voltage corresponding to lower for 2nd demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 3rd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described 2nd demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the 2nd demarcation pressure as shown in the 5th formula;
Described 4th formula is as follows:
U'O1=a1+b1UT1+c1UT1 2
Described 5th formula is as follows:
U'O2=a2+b2UT2+c2UT2 2
Wherein, described a1��b1And c1For solving first demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure; Described a2��b2And c2For solving the 2nd demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure.
Further, the specific implementation of described step 3 comprises the steps:
Step 31, the described input voltage corresponding to pressure and described conversion output voltage are measured in collection;
Step 32, described input voltage corresponding to described measurement pressure is brought into respectively described two order polynomial curvilinear equations corresponding to the first demarcation pressure and the 2nd and demarcates described two order polynomial curvilinear equations corresponding to pressure, solve described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure respectively, with described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure;
Step 33, solves the numerical value of described measurement pressure according to following 6th formula;
Described 6th formula is as follows:
Wherein, described pcFor the numerical value of described measurement pressure to be solved, described p1For described first demarcation pressure, described p2For described 2nd demarcation pressure, described U'OcDescribed conversion output voltage corresponding to described measurement pressure, described U'O1cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure, described U'O2cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure.
Further, described three demarcate temperature spots be respectively from low temperature to high temperature on the basis of the minimum working temperature point of described pressure transmitter to be compensated to float temperature gap 10%, 50% and 90% after temperature value, wherein, described temperature gap is maximum operating temperature point and the difference of minimum working temperature point; Described two any two force value corresponding to zero-bit, full position and mid point demarcated pressure and be respectively in the useful range of described pressure transmitter to be compensated.
Adopt the useful effect of above-mentioned further scheme to be demarcate temperature spot by three and rationally disperse, adopt wantonly one or two force value corresponding to zero-bit, full position and mid point as demarcation pressure, it is to increase compensation precision.
Accompanying drawing explanation
Fig. 1 is the system principle diagram of the temperature-compensated system of a kind of pressure transmitter of the present invention;
Fig. 2 be a kind of pressure transmitter of the present invention temperature-compensated system in the circuit diagram of pressure transmitter to be compensated and analog compensation module;
Fig. 3 is the schema of the temperature compensation of a kind of pressure transmitter of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, the first resistance, the 2, the 2nd resistance, the 3, the 3rd resistance, the 4, the 4th resistance.
Embodiment
The principle of the present invention and feature being described below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit the scope of the present invention.
As shown in Figure 1, the temperature-compensated system of a kind of pressure transmitter, comprises pressure transmitter to be compensated and transmitter;
Described pressure transmitter to be compensated is constant current source drive-type silicon piezoresistance type pressure sensor;
Described transmitter comprises constant current source, analog compensation module, analog to digital conversion module and digital compensation modules;
Described constant current source, it is for providing the driving power supply of described pressure transmitter to be compensated;
Described analog compensation module, it is for changing the output voltage of described pressure transmitter to be compensated, makes conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve;
Described analog compensation module is resistor network.
As shown in Figure 2, described resistor network comprises the first resistance 1, the 2nd resistance 2, the 3rd resistance 3 and the 4th resistance 4;
Described first resistance 1 one end ground connection, the other end is electrically connected with the first negative input end of described pressure transmitter to be compensated;
Described 2nd resistance 2 one end ground connection, the other end is electrically connected with the 2nd negative input end of described pressure transmitter to be compensated;
Described 3rd resistance 3 one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the negative output terminal of described pressure transmitter to be compensated;
Described 4th resistance 4 one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the positive output end of described pressure transmitter to be compensated.
Described analog to digital conversion module, it demarcates pressure for demarcating temperature spots and two according to three preset, and is captured in demarcate described in each and demarcates the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure; It is also for gathering the described input voltage corresponding to measurement pressure and described conversion output voltage; Wherein, demarcate temperature spot in the operating temperature range of described pressure transmitter to be compensated for described three, demarcate pressure in the useful range of described pressure transmitter to be compensated for described two;
Described digital compensation modules, it, for demarcating described input voltage temperature spot corresponding to and described conversion output voltage described in each according to demarcating described in each under pressure, solves two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage; It is also for measuring the numerical value of pressure described in the described input voltage corresponding to described measurement pressure and described conversion output voltage, described two order polynomial curvilinear equations and described demarcation Pressure solution.
Described digital compensation modules comprise two order polynomial curvilinear equations solve module and measure pressure value solve module.
Described two order polynomial curvilinear equations solve module, its for build demarcate pressure described in each under characterize two order polynomial curvilinear equations of the relation between described conversion output voltage and described input voltage;
First demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 2nd formula; 2nd demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 3rd formula;
Described 2nd formula as follows described in:
U'O1=c01+c11UT1+c21UT1 2
Described 3rd formula as follows described in:
U'O2=c02+c12UT2+c22UT2 2
Wherein, described U'O1And UT1It is respectively conversion output voltage variable corresponding to the first demarcation pressure and input voltage variable; Described U'O2And UT2It is respectively conversion output voltage variable corresponding to the 2nd demarcation pressure and input voltage variable; Described c01��c11And c21For the coefficient of the to be solved first demarcation described two order polynomial curvilinear equations corresponding to pressure; Described c02��c12And c22For the coefficient of the to be solved the 2nd demarcation described two order polynomial curvilinear equations corresponding to pressure;
Described input voltage corresponding to lower for first demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 2nd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described first demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the first demarcation pressure as shown in the 4th formula; Described input voltage corresponding to lower for 2nd demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 3rd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described 2nd demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the 2nd demarcation pressure as shown in the 5th formula;
Described 4th formula is as follows:
U'O1=a1+b1UT1+c1UT1 2
Described 5th formula is as follows:
U'O2=a2+b2UT2+c2UT2 2
Wherein, described a1��b1And c1For solving first demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure; Described a2��b2And c2For solving the 2nd demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure.
Described measurement pressure value solves module, it for bringing described two order polynomial curvilinear equations corresponding to the first demarcation pressure and the 2nd demarcation described two order polynomial curvilinear equations corresponding to pressure respectively into by the described input voltage corresponding to described measurement pressure, solve described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure respectively, with described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure;
The numerical value of described measurement pressure is solved according to following 6th formula;
Described 6th formula is as follows:
Wherein, described pcFor the numerical value of described measurement pressure to be solved, described p1For described first demarcation pressure, described p2For described 2nd demarcation pressure, described U'OcDescribed conversion output voltage corresponding to described measurement pressure, described U'O1cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure, described U'O2cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure.
As shown in Figure 3, the temperature compensation of a kind of pressure transmitter, comprises the steps:
Step 1, build analog compensation module, the output voltage of described pressure transmitter to be compensated is changed, makes conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve;
Described structure analog compensation module is implemented as structure resistor network, regulate the resistance of the resistance in described resistor network, make conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve.
Described resistor network comprises the first resistance 1, the 2nd resistance 2, the 3rd resistance 3 and the 4th resistance 4;
Described first resistance 1 one end ground connection, the other end is electrically connected with the first negative input end of described pressure transmitter to be compensated;
Described 2nd resistance 2 one end ground connection, the other end is electrically connected with the 2nd negative input end of described pressure transmitter to be compensated;
Described 3rd resistance 3 one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the negative output terminal of described pressure transmitter to be compensated;
Described 4th resistance 4 one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the positive output end of described pressure transmitter to be compensated.
The specific implementation of described step 1 comprises the steps:
Step 11, builds resistor network;
Step 12, regulates the resistance of the resistance in described resistor network;
Step 13, gathers under demarcating pressure described in each the described input voltage corresponding to multiple temperature spot and described conversion output voltage;
Step 14, to demarcating the described input voltage corresponding to pressure described in each and described conversion output voltage carries out two order polynomial fitting of a curve, and derives the reliability parameter characterizing fitting precision;
Step 15, judges whether each reliability parameter all meets following first formula; It is then terminate described step 1; No, then return and perform described step 12;
Described first formula is as follows:
| 1-R | < 0.0002
Wherein, described R is described reliability parameter.
Step 2, in the operating temperature range of described pressure transmitter to be compensated, preset three demarcate temperature spot, in the useful range of described pressure transmitter to be compensated, preset two demarcate pressure, be captured in demarcate described in each and demarcate the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure; Demarcate described input voltage temperature spot corresponding to and described conversion output voltage described in each according to demarcating described in each under pressure, solve two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage;
The specific implementation of described step 2 comprises the steps:
Step 21, in the operating temperature range of described pressure transmitter to be compensated, preset three demarcate temperature spot, in the useful range of described pressure transmitter to be compensated, preset two demarcate pressure, be captured in demarcate described in each and demarcate the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure;
Step 22, builds two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage;
First demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 2nd formula; 2nd demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 3rd formula;
Described 2nd formula as follows described in:
U'O1=c01+c11UT1+c21UT1 2
Described 3rd formula as follows described in:
U'O2=c02+c12UT2+c22UT2 2
Wherein, described U'O1And UT1It is respectively conversion output voltage variable corresponding to the first demarcation pressure and input voltage variable; Described U'O2And UT2It is respectively conversion output voltage variable corresponding to the 2nd demarcation pressure and input voltage variable; Described c01��c11And c21For the coefficient of the to be solved first demarcation described two order polynomial curvilinear equations corresponding to pressure; Described c02��c12And c22For the coefficient of the to be solved the 2nd demarcation described two order polynomial curvilinear equations corresponding to pressure;
Step 23, described input voltage corresponding to lower for first demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 2nd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described first demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the first demarcation pressure as shown in the 4th formula; Described input voltage corresponding to lower for 2nd demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 3rd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described 2nd demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the 2nd demarcation pressure as shown in the 5th formula;
Described 4th formula is as follows:
U'O1=a1+b1UT1+c1UT1 2
Described 5th formula is as follows:
U'O2=a2+b2UT2+c2UT2 2
Wherein, described a1��b1And c1For solving first demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure; Described a2��b2And c2For solving the 2nd demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure.
Step 3, gather and measure described input voltage corresponding to pressure and described conversion output voltage, described input voltage corresponding to described measurement pressure and measure the numerical value of pressure described in described conversion output voltage, described two order polynomial curvilinear equations and described demarcation Pressure solution.
The specific implementation of described step 3 comprises the steps:
Step 31, the described input voltage corresponding to pressure and described conversion output voltage are measured in collection;
Step 32, described input voltage corresponding to described measurement pressure is brought into respectively described two order polynomial curvilinear equations corresponding to the first demarcation pressure and the 2nd and demarcates described two order polynomial curvilinear equations corresponding to pressure, solve described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure respectively, with described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure;
Step 33, solves the numerical value of described measurement pressure according to following 6th formula;
Described 6th formula is as follows:
Wherein, described pcFor the numerical value of described measurement pressure to be solved, described p1For described first demarcation pressure, described p2For described 2nd demarcation pressure, described U'OcDescribed conversion output voltage corresponding to described measurement pressure, described U'O1cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure, described U'O2cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure.
Described three demarcate temperature spots be respectively from low temperature to high temperature on the basis of the minimum working temperature point of described pressure transmitter to be compensated to float temperature gap 10%, 50% and 90% after temperature value, wherein, described temperature gap is maximum operating temperature point and the difference of minimum working temperature point; Described two any two force value corresponding to zero-bit, full position and mid point demarcated pressure and be respectively in the useful range of described pressure transmitter to be compensated.
After completing described step 1 and step 2, the software and hardware of described pressure transmitter to be compensated and described transmitter is determined, only step 3 need to be adopted can to solve the numerical value of arbitrary described measurement pressure in measuring process.
The foregoing is only the better embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment of doing, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the temperature-compensated system of a pressure transmitter, it is characterised in that, comprise pressure transmitter to be compensated and transmitter;
Described pressure transmitter to be compensated is constant current source drive-type silicon piezoresistance type pressure sensor;
Described transmitter comprises constant current source, analog compensation module, analog to digital conversion module and digital compensation modules;
Described constant current source, it is for providing the driving power supply of described pressure transmitter to be compensated;
Described analog compensation module, it is for changing the output voltage of described pressure transmitter to be compensated, makes conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve;
Described analog to digital conversion module, it demarcates pressure for demarcating temperature spots and two according to three preset, and is captured in demarcate described in each and demarcates the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure; It is also for gathering the described input voltage corresponding to measurement pressure and described conversion output voltage; Wherein, demarcate temperature spot in the operating temperature range of described pressure transmitter to be compensated for described three, demarcate pressure in the useful range of described pressure transmitter to be compensated for described two;
Described digital compensation modules, it, for demarcating described input voltage temperature spot corresponding to and described conversion output voltage described in each according to demarcating described in each under pressure, solves two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage; It is also for measuring the numerical value of pressure described in the described input voltage corresponding to described measurement pressure and described conversion output voltage, described two order polynomial curvilinear equations and described demarcation Pressure solution.
2. the temperature-compensated system of a kind of pressure transmitter according to claim 1, it is characterised in that, described analog compensation module is resistor network.
3. the temperature-compensated system of a kind of pressure transmitter according to claim 2, it is characterized in that, described resistor network comprises the first resistance (1), the 2nd resistance (2), the 3rd resistance (3) and the 4th resistance (4);
Described first resistance (1) one end ground connection, the other end is electrically connected with the first negative input end of described pressure transmitter to be compensated;
Described 2nd resistance (2) one end ground connection, the other end is electrically connected with the 2nd negative input end of described pressure transmitter to be compensated;
Described 3rd resistance (3) one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the negative output terminal of described pressure transmitter to be compensated;
Described 4th resistance (4) one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the positive output end of described pressure transmitter to be compensated.
4. the temperature compensation of a pressure transmitter, it is characterised in that, comprise the steps:
Step 1, build analog compensation module, the output voltage of described pressure transmitter to be compensated is changed, makes conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve;
Step 2, in the operating temperature range of described pressure transmitter to be compensated, preset three demarcate temperature spot, in the useful range of described pressure transmitter to be compensated, preset two demarcate pressure, be captured in demarcate described in each and demarcate the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure; Demarcate described input voltage temperature spot corresponding to and described conversion output voltage described in each according to demarcating described in each under pressure, solve two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage;
Step 3, gather and measure described input voltage corresponding to pressure and described conversion output voltage, described input voltage corresponding to described measurement pressure and measure the numerical value of pressure described in described conversion output voltage, described two order polynomial curvilinear equations and described demarcation Pressure solution.
5. the temperature compensation of a kind of pressure transmitter according to claim 4, it is characterized in that, described structure analog compensation module is implemented as structure resistor network, regulate the resistance of the resistance in described resistor network, make conversion output voltage when pressure is certain and relation between the input voltage of described pressure transmitter to be compensated can by two order polynomial fitting of a curve.
6. the temperature compensation of a kind of pressure transmitter according to claim 5, it is characterized in that, described resistor network comprises the first resistance (1), the 2nd resistance (2), the 3rd resistance (3) and the 4th resistance (4);
Described first resistance (1) one end ground connection, the other end is electrically connected with the first negative input end of described pressure transmitter to be compensated;
Described 2nd resistance (2) one end ground connection, the other end is electrically connected with the 2nd negative input end of described pressure transmitter to be compensated;
Described 3rd resistance (3) one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the negative output terminal of described pressure transmitter to be compensated;
Described 4th resistance (4) one end is electrically connected with the positive input terminal of described pressure transmitter to be compensated, and the other end is electrically connected with the positive output end of described pressure transmitter to be compensated.
7. the temperature compensation of a kind of pressure transmitter according to claim 5, it is characterised in that, the specific implementation of described step 1 comprises the steps:
Step 11, builds resistor network;
Step 12, regulates the resistance of the resistance in described resistor network;
Step 13, gathers under demarcating pressure described in each the described input voltage corresponding to multiple temperature spot and described conversion output voltage;
Step 14, to demarcating the described input voltage corresponding to pressure described in each and described conversion output voltage carries out two order polynomial fitting of a curve, and derives the reliability parameter characterizing fitting precision;
Step 15, judges whether each reliability parameter all meets following first formula; It is then terminate described step 1; No, then return and perform described step 12;
Described first formula is as follows:
| 1-R | < 0.0002
Wherein, described R is described reliability parameter.
8. the temperature compensation of a kind of pressure transmitter according to claim 4, it is characterised in that, the specific implementation of described step 2 comprises the steps:
Step 21, in the operating temperature range of described pressure transmitter to be compensated, preset three demarcate temperature spot, in the useful range of described pressure transmitter to be compensated, preset two demarcate pressure, be captured in demarcate described in each and demarcate the described input voltage corresponding to temperature spot and described conversion output voltage described in each under pressure;
Step 22, builds two order polynomial curvilinear equations of the relation characterized under demarcating pressure described in each between described conversion output voltage and described input voltage;
First demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 2nd formula; 2nd demarcates structure two order polynomial curvilinear equation corresponding to pressure as shown in the 3rd formula;
Described 2nd formula as follows described in:
U'O1=c01+c11UT1+c21UT1 2
Described 3rd formula as follows described in:
U'O2=c02+c12UT2+c22UT2 2
Wherein, described U'O1And UT1It is respectively conversion output voltage variable corresponding to the first demarcation pressure and input voltage variable; Described U'O2And UT2It is respectively conversion output voltage variable corresponding to the 2nd demarcation pressure and input voltage variable; Described c01��c11And c21For the coefficient of the to be solved first demarcation described two order polynomial curvilinear equations corresponding to pressure; Described c02��c12And c22For the coefficient of the to be solved the 2nd demarcation described two order polynomial curvilinear equations corresponding to pressure;
Step 23, described input voltage corresponding to lower for first demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 2nd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described first demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the first demarcation pressure as shown in the 4th formula; Described input voltage corresponding to lower for 2nd demarcation pressure three demarcation temperature spots and described conversion output voltage are substituted into described 3rd formula respectively, build system of equations, solve the coefficient of described two order polynomial curvilinear equations corresponding to described 2nd demarcation pressure to be solved, obtain described two order polynomial curvilinear equations corresponding to the 2nd demarcation pressure as shown in the 5th formula;
Described 4th formula is as follows:
U'O1=a1+b1UT1+c1UT1 2
Described 5th formula is as follows:
U'O2=a2+b2UT2+c2UT2 2
Wherein, described a1��b1And c1For solving first demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure; Described a2��b2And c2For solving the 2nd demarcates the coefficient of described two order polynomial curvilinear equations corresponding to pressure.
9. the temperature compensation of a kind of pressure transmitter according to claim 8, it is characterised in that, the specific implementation of described step 3 comprises the steps:
Step 31, the described input voltage corresponding to pressure and described conversion output voltage are measured in collection;
Step 32, described input voltage corresponding to described measurement pressure is brought into respectively described two order polynomial curvilinear equations corresponding to the first demarcation pressure and the 2nd and demarcates described two order polynomial curvilinear equations corresponding to pressure, solve described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure respectively, with described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure;
Step 33, solves the numerical value of described measurement pressure according to following 6th formula;
Described 6th formula is as follows:
Wherein, described pcFor the numerical value of described measurement pressure to be solved, described p1For described first demarcation pressure, described p2For described 2nd demarcation pressure, described U'OcDescribed conversion output voltage corresponding to described measurement pressure, described U'O1cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described first demarcation pressure, described U'O2cFor described conversion output voltage corresponding with the described input voltage corresponding to described measurement pressure under described 2nd demarcation pressure.
10. according to the temperature compensation of the arbitrary described a kind of pressure transmitter of claim 4 to 9, it is characterized in that, described three demarcate temperature spots be respectively from low temperature to high temperature on the basis of the minimum working temperature point of described pressure transmitter to be compensated to float temperature gap 10%, 50% and 90% after temperature value, wherein, described temperature gap is maximum operating temperature point and the difference of minimum working temperature point; Described two any two force value corresponding to zero-bit, full position and mid point demarcated pressure and be respectively in the useful range of described pressure transmitter to be compensated.
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| CN106895929B (en) * | 2017-01-06 | 2019-04-05 | 慧石（上海）测控科技有限公司 | Improve the temperature pressure compensation method of embedded pressure sensor output accuracy |
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