CN105628266B - The temperature compensation system and method for a kind of pressure sensor - Google Patents

The temperature compensation system and method for a kind of pressure sensor Download PDF

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Publication number
CN105628266B
CN105628266B CN201511003537.4A CN201511003537A CN105628266B CN 105628266 B CN105628266 B CN 105628266B CN 201511003537 A CN201511003537 A CN 201511003537A CN 105628266 B CN105628266 B CN 105628266B
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pressure
pressure sensor
corresponding
nominal
compensated
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CN201511003537.4A
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CN105628266A (en
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王博
欧阳敏
龚珊
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武汉中航传感技术有限责任公司
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Abstract

The present invention relates to the temperature compensation systems and method of a kind of pressure sensor, by the use of the input voltage of pressure sensor to be compensated as temperature signal, analog compensation module converts the output voltage of pressure sensor to be compensated, make relationship of the conversion output voltage in the case where pressure is certain between the input voltage of pressure sensor to be compensated can be by quadratic polynomial curve matching, so as to which three calibration temperature spots only be needed to can determine the quadratic polynomial curvilinear equation of the relationship under each nominal pressure between characterization conversion output voltage and input voltage in digital compensation modules, and then solve the numerical value for measuring pressure, complete entire temperature compensation procedure;Analog compensation and digital compensation are combined, realize the high-acruracy survey for the constant-current source drive-type silicon piezoresistance type pressure sensor for only needing three calibration temperature spots.

Description

The temperature compensation system and method for a kind of pressure sensor

Technical field

The present invention relates to pressure signal fields of measurement, the temperature compensation system of more particularly to a kind of pressure sensor and side Method.

Background technology

Output with the inherent characteristic that the phenomenon that temperature drift is silicon piezoresistance type pressure sensor needs that temperature-compensating is taken to arrange It applies and corrects its output to eliminate the influence of temperature.At present, there are three types of temperature-compensating modes:When analog compensation, in silicon piezoresistance type The passive devices such as the series connection of pressure sensor input/output terminal and parallel resistance, temperature-sensitive element, are dropped by way of shunting or dividing Low silicon piezoresistance type pressure sensor output is influenced by temperature;This method circuit is simple, but debugs difficulty, and compensation precision is not high. Second is that digital compensation, measures the output signal of silicon piezoresistance type pressure sensor and measures temperature signal, and be converted to digital signal, The numerical value for measuring pressure is solved by backoff algorithm;This method compensation precision is high, but requires more calibration temperature spot, otherwise Influence measurement accuracy.Third, analog compensation is combined with digital compensation, this method reduces silicon piezoresistance type pressure using analog compensation Sensor is influenced by temperature, and is measured measurement error caused by temperature, but be substantially to belong to digital compensation to reduce, is measured Precision is influenced by the selection and number of calibration temperature spot.

As silicon piezoresistance type pressure sensor is in the extensive use and development of every field, to silicon piezoresistance type pressure sensor Operating temperature range and precision propose higher requirement.But operating temperature range is wider, silicon piezoresistance type pressure sensor Output is more difficult to solve with temperature relation.Existing compensation method only increases calibration to adapt to broader operating temperature range Temperature spot, but for use may only there are three calibration temperature spot integrated signal conditioning chip silicon piezoresistance type pressure sensing Device can then lose measurement accuracy or even can not complete temperature-compensating.

Invention content

It is an object of the present invention to provide the temperature compensation systems and method of a kind of pressure sensor, solve to exist in the prior art The above problem.

The technical solution that the present invention solves above-mentioned technical problem is as follows:

A kind of temperature compensation system of pressure sensor, including pressure sensor to be compensated and transmitter;

The pressure sensor to be compensated is constant-current source drive-type silicon piezoresistance type pressure sensor;

The transmitter includes constant-current source, analog compensation module, analog-to-digital conversion module and digital compensation modules;

The constant-current source is used to provide the driving power of the pressure sensor to be compensated;

The analog compensation module is used to convert the output voltage of the pressure sensor to be compensated, makes to turn Changing relationship of the output voltage in the case where pressure is certain between the input voltage of the pressure sensor to be compensated can be by two Order polynomial curve matching;

The analog-to-digital conversion module is used to, according to preset three calibration temperature spots and two nominal pressures, acquire The input voltage corresponding to each calibration temperature spot and the conversion output voltage under each nominal pressure;Its The input voltage and the conversion output voltage being additionally operable to corresponding to acquisition measurement pressure;Wherein, three calibration temperature In the operating temperature range of the pressure sensor to be compensated, described two nominal pressures pass degree point in the pressure to be compensated In the measurement range of sensor;

The digital compensation modules are used for according to corresponding to the calibration temperature spot each under each nominal pressure The input voltage and the conversion output voltage, solve characterized under each nominal pressure the conversion output voltage with The quadratic polynomial curvilinear equation of relationship between the input voltage;It is additionally operable to according to the institute corresponding to the measurement pressure State the input voltage and conversion output voltage, the quadratic polynomial curvilinear equation and nominal pressure solves the measurement The numerical value of pressure.

The beneficial effects of the invention are as follows:By the use of the input voltage of pressure sensor to be compensated as temperature signal, simulation is mended Module is repaid to convert the output voltage of pressure sensor to be compensated, make conversion output voltage in the case where pressure is certain with Relationship between the input voltage of pressure sensor to be compensated can be by quadratic polynomial curve matching, so as in digital compensation modules In three calibration temperature spots is only needed to can determine under each nominal pressure that characterization converts the pass between output voltage and input voltage The quadratic polynomial curvilinear equation of system, and then the numerical value for measuring pressure is solved, complete entire temperature compensation procedure;By analog compensation It is combined with digital compensation, realizes the temperature for the constant-current source drive-type silicon piezoresistance type pressure sensor for only needing three calibration temperature spots Compensation;And transmitter need not acquire the operating temperature of pressure sensor to be compensated in entire temperature compensation procedure, transmitter and Pressure sensor to be compensated is removably installed, and transmitter is avoided to be in the severe measuring environment residing for pressure sensor to be compensated, And the operating temperature range of pressure sensor to be compensated is made no longer to be limited to by the operating temperature range of transmitter;The present invention is suitable For needing to detach with transmitter, operating temperature range is relatively wide, varies with temperature linear poor constant-current source drive-type silicon pressure drag The temperature-compensating of formula pressure sensor while measurement accuracy is improved, also reduces the manufacturing cost of product.

Based on the above technical solution, the present invention can also be improved as follows.

Further, the analog compensation module is resistor network.

Advantageous effect using above-mentioned further scheme is that resistor network is conducive to the structure of analog compensation module.

Further, the resistor network includes first resistor, second resistance, 3rd resistor and the 4th resistance;

First resistor one end ground connection, the first negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

Second resistance one end ground connection, the second negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

Described 3rd resistor one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The negative output terminal electrical connection of compensation pressure sensor;

Described 4th resistance one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The positive output end electrical connection of compensation pressure sensor.

Advantageous effect using above-mentioned further scheme is, conducive to pressure sensor zero point temperature drift to be compensated, sensitive is changed Degree and full position temperature drift.

Another technical solution of the present invention is as follows:

A kind of temperature-compensation method of pressure sensor, includes the following steps:

Step 1, analog compensation module is built, the output voltage of the pressure sensor to be compensated is converted, makes to turn Changing relationship of the output voltage in the case where pressure is certain between the input voltage of the pressure sensor to be compensated can be by two Order polynomial curve matching;

Step 2, three calibration temperature spots are preset in the operating temperature range of the pressure sensor to be compensated, described Two nominal pressures are preset in the measurement range of pressure sensor to be compensated, are acquired each described under each nominal pressure Demarcate the input voltage corresponding to temperature spot and the conversion output voltage;According to institute each under each nominal pressure The input voltage corresponding to calibration temperature spot and the conversion output voltage are stated, solves and is characterized under each nominal pressure The quadratic polynomial curvilinear equation of relationship between the conversion output voltage and the input voltage;

Step 3, acquisition measures the input voltage corresponding to pressure and the conversion output voltage, according to the measurement The input voltage and the conversion output voltage, the quadratic polynomial curvilinear equation and the calibration pressure corresponding to pressure Make every effort to solve the numerical value for measuring pressure.

Based on the above technical solution, the present invention can also be improved as follows.

Further, the structure analog compensation module is implemented as structure resistor network, adjusts in the resistor network Resistance resistance value, make input voltage of the conversion output voltage in the case where pressure is certain with the pressure sensor to be compensated Between relationship can be by quadratic polynomial curve matching.

Further, the resistor network includes first resistor, second resistance, 3rd resistor and the 4th resistance;

First resistor one end ground connection, the first negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

Second resistance one end ground connection, the second negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

Described 3rd resistor one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The negative output terminal electrical connection of compensation pressure sensor;

Described 4th resistance one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The positive output end electrical connection of compensation pressure sensor.

Further, the specific implementation of the step 1 includes the following steps:

Step 11, resistor network is built;

Step 12, the resistance value of the resistance in the resistor network is adjusted;

Step 13, the input voltage under each nominal pressure corresponding to multiple temperature spots and the conversion are acquired Output voltage;

Step 14, two are carried out to the input voltage corresponding to each nominal pressure and the conversion output voltage Order polynomial curve matching, and export the dependability parameter of characterization fitting precision;

Step 15, judge whether each dependability parameter meets following first formula;It is then to terminate the step 1; It is no, then it returns and performs the step 12;

First formula is as follows:

| 1-R | < 0.0002

Wherein, the R is the dependability parameter.

Advantageous effect using above-mentioned further scheme is verified corresponding to each nominal pressure by dependability parameter Input voltage and conversion output voltage are by the fitting precision of quadratic polynomial curve matching, and by the resistance value of regulation resistance and verification Fitting precision is combined, and fitting precision is continuously improved, and so as to improve analog compensation quality, ensures numerical compensation accuracy.

Further, the specific implementation of the step 2 includes the following steps:

Step 21, three calibration temperature spots are preset in the operating temperature range of the pressure sensor to be compensated, in institute It states and two nominal pressures is preset in the measurement range of pressure sensor to be compensated, acquire each institute under each nominal pressure State the input voltage corresponding to calibration temperature spot and the conversion output voltage;

Step 22, it builds and is characterized between the conversion output voltage and the input voltage under each nominal pressure The quadratic polynomial curvilinear equation of relationship;

The corresponding structure quadratic polynomial curvilinear equation of first nominal pressure is as shown in the second formula;Second nominal pressure pair The structure quadratic polynomial curvilinear equation answered is as shown in third formula;

Second formula is as described below:

U'O1=c01+c11UT1+c21UT1 2

The third formula is as described below:

U'O2=c02+c12UT2+c22UT2 2

Wherein, the U'O1And UT1The corresponding conversion output voltage variable of respectively the first nominal pressure and input voltage become Amount;The U'O2And UT2The corresponding conversion output voltage variable of respectively the second nominal pressure and input voltage variable;The c01、 c11And c21Coefficient for the corresponding quadratic polynomial curvilinear equation of the first nominal pressure to be solved;The c02、c12With c22Coefficient for the corresponding quadratic polynomial curvilinear equation of the second nominal pressure to be solved;

Step 23, it is the input voltage corresponding to the lower three calibration temperature spot of the first nominal pressure and the conversion is defeated Go out voltage and substitute into second formula respectively, build equation group, it is corresponding described to solve first nominal pressure to be solved The coefficient of quadratic polynomial curvilinear equation obtains the corresponding quadratic polynomial curvilinear equation such as the 4th formula of the first nominal pressure It is shown;By the input voltage corresponding to the lower three calibration temperature spot of the second nominal pressure and the conversion output voltage difference The third formula is substituted into, builds equation group, solves the corresponding quadratic polynomial of second nominal pressure to be solved The coefficient of curvilinear equation obtains the corresponding quadratic polynomial curvilinear equation of the second nominal pressure as shown in the 5th formula;

4th formula is as follows:

U'O1=a1+b1UT1+c1UT1 2

5th formula is as follows:

U'O2=a2+b2UT2+c2UT2 2

Wherein, a1、b1And c1The corresponding quadratic polynomial curvilinear equation of the first nominal pressure for solution is Number;The a2、b2And c2The coefficient of the corresponding quadratic polynomial curvilinear equation of the second nominal pressure for solution.

Further, the specific implementation of the step 3 includes the following steps:

Step 31, acquisition measures the input voltage corresponding to pressure and the conversion output voltage;

Step 32, the input voltage corresponding to the measurement pressure is brought into the first nominal pressure corresponding institute respectively Quadratic polynomial curvilinear equation and the corresponding quadratic polynomial curvilinear equation of the second nominal pressure are stated, is solved respectively described Under first nominal pressure with it is described measurement pressure corresponding to the corresponding conversion output voltage of the input voltage and Under second nominal pressure with it is described measurement pressure corresponding to the corresponding conversion output voltage of the input voltage;

Step 33, the numerical value of pressure is measured according to following 6th equations;

6th formula is as follows:

Wherein, the pcFor the numerical value of the measurement pressure to be solved, the p1For first nominal pressure, The p2For second nominal pressure, the U'OcIt is described for the conversion output voltage corresponding to the measurement pressure U'O1cThe corresponding conversion of the input voltage under first nominal pressure with the measurement pressure corresponding to Output voltage, the U'O2cIt is opposite with the input voltage corresponding to the measurement pressure under second nominal pressure The conversion output voltage answered.

Further, it is described three calibration temperature spot from low temperature to high temperature be respectively in the pressure sensor to be compensated most Temperature value on the basis of low operating temperature point after 10%, 50% and the 90% of floating temperature gap, wherein, the temperature gap Difference for maximum operating temperature point and minimum operating temperature point;Described two nominal pressures are respectively that the pressure to be compensated passes Any two pressure value corresponding to zero-bit, full position and midpoint in the measurement range of sensor.

Advantageous effect using above-mentioned further scheme is rationally disperseed three calibration temperature spots, using zero-bit, Man Wei With wantonly one or two of pressure value corresponding to midpoint as nominal pressure, compensation precision is improved.

Description of the drawings

Fig. 1 is a kind of system principle diagram of the temperature compensation system of pressure sensor of the present invention;

Fig. 2 is pressure sensor and analog compensation mould to be compensated in a kind of temperature compensation system of pressure sensor of the present invention The circuit diagram of block;

Fig. 3 is a kind of flow chart of the temperature-compensation method of pressure sensor of the present invention.

In attached drawing, parts list represented by the reference numerals are as follows:

1st, first resistor, 2, second resistance, 3,3rd resistor, the 4, the 4th resistance.

Specific embodiment

The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and It is non-to be used to limit the scope of the present invention.

As shown in Figure 1, a kind of temperature compensation system of pressure sensor, including pressure sensor to be compensated and transmitter;

The pressure sensor to be compensated is constant-current source drive-type silicon piezoresistance type pressure sensor;

The transmitter includes constant-current source, analog compensation module, analog-to-digital conversion module and digital compensation modules;

The constant-current source is used to provide the driving power of the pressure sensor to be compensated;

The analog compensation module is used to convert the output voltage of the pressure sensor to be compensated, makes to turn Changing relationship of the output voltage in the case where pressure is certain between the input voltage of the pressure sensor to be compensated can be by two Order polynomial curve matching;

The analog compensation module is resistor network.

As shown in Fig. 2, the resistor network includes first resistor 1, second resistance 2,3 and the 4th resistance 4 of 3rd resistor;

1 one end of first resistor ground connection, the first negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

2 one end of second resistance ground connection, the second negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

Described 3 one end of 3rd resistor is electrically connected with the positive input terminal of the pressure sensor to be compensated, the other end with it is described The negative output terminal electrical connection of pressure sensor to be compensated;

Described 4th resistance, 4 one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, the other end with it is described The positive output end electrical connection of pressure sensor to be compensated.

The analog-to-digital conversion module is used to, according to preset three calibration temperature spots and two nominal pressures, acquire The input voltage corresponding to each calibration temperature spot and the conversion output voltage under each nominal pressure;Its The input voltage and the conversion output voltage being additionally operable to corresponding to acquisition measurement pressure;Wherein, three calibration temperature In the operating temperature range of the pressure sensor to be compensated, described two nominal pressures pass degree point in the pressure to be compensated In the measurement range of sensor;

The digital compensation modules are used for according to corresponding to the calibration temperature spot each under each nominal pressure The input voltage and the conversion output voltage, solve characterized under each nominal pressure the conversion output voltage with The quadratic polynomial curvilinear equation of relationship between the input voltage;It is additionally operable to according to the institute corresponding to the measurement pressure State the input voltage and conversion output voltage, the quadratic polynomial curvilinear equation and nominal pressure solves the measurement The numerical value of pressure.

The digital compensation modules include quadratic polynomial curvilinear equation and solve module and measure pressure value solution module.

The quadratic polynomial curvilinear equation solves module, is used to build under each nominal pressure and characterizes described turn Change the quadratic polynomial curvilinear equation of the relationship between output voltage and the input voltage;

The corresponding structure quadratic polynomial curvilinear equation of first nominal pressure is as shown in the second formula;Second nominal pressure pair The structure quadratic polynomial curvilinear equation answered is as shown in third formula;

Second formula is as described below:

U'O1=c01+c11UT1+c21UT1 2

The third formula is as described below:

U'O2=c02+c12UT2+c22UT2 2

Wherein, the U'O1And UT1The corresponding conversion output voltage variable of respectively the first nominal pressure and input voltage become Amount;The U'O2And UT2The corresponding conversion output voltage variable of respectively the second nominal pressure and input voltage variable;The c01、 c11And c21Coefficient for the corresponding quadratic polynomial curvilinear equation of the first nominal pressure to be solved;The c02、c12With c22Coefficient for the corresponding quadratic polynomial curvilinear equation of the second nominal pressure to be solved;

By the input voltage corresponding to the lower three calibration temperature spot of the first nominal pressure and the conversion output voltage Second formula is substituted into respectively, builds equation group, and it is corresponding described secondary more to solve first nominal pressure to be solved The coefficient of item formula curvilinear equation, obtains the corresponding quadratic polynomial curvilinear equation of the first nominal pressure as shown in the 4th formula; The input voltage corresponding to the lower three calibration temperature spot of second nominal pressure and the conversion output voltage are substituted into respectively The third formula builds equation group, solves the corresponding quadratic polynomial curve of second nominal pressure to be solved The coefficient of equation obtains the corresponding quadratic polynomial curvilinear equation of the second nominal pressure as shown in the 5th formula;

4th formula is as follows:

U'O1=a1+b1UT1+c1UT1 2

5th formula is as follows:

U'O2=a2+b2UT2+c2UT2 2

Wherein, a1、b1And c1The corresponding quadratic polynomial curvilinear equation of the first nominal pressure for solution is Number;The a2、b2And c2The coefficient of the corresponding quadratic polynomial curvilinear equation of the second nominal pressure for solution.

The measurement pressure value solves module, is used to distinguish the input voltage corresponding to the measurement pressure It brings the corresponding quadratic polynomial curvilinear equation of the first nominal pressure into and the second nominal pressure is corresponding described secondary multinomial Formula curvilinear equation solves opposite with the input voltage corresponding to the measurement pressure under first nominal pressure respectively The conversion output voltage answered and under second nominal pressure with the measurement pressure corresponding to the input voltage The corresponding conversion output voltage;

The numerical value of pressure is measured according to following 6th equations;

6th formula is as follows:

Wherein, the pcFor the numerical value of the measurement pressure to be solved, the p1For first nominal pressure, The p2For second nominal pressure, the U'OcIt is described for the conversion output voltage corresponding to the measurement pressure U'O1cThe corresponding conversion of the input voltage under first nominal pressure with the measurement pressure corresponding to Output voltage, the U'O2cIt is opposite with the input voltage corresponding to the measurement pressure under second nominal pressure The conversion output voltage answered.

As shown in figure 3, a kind of temperature-compensation method of pressure sensor, includes the following steps:

Step 1, analog compensation module is built, the output voltage of the pressure sensor to be compensated is converted, makes to turn Changing relationship of the output voltage in the case where pressure is certain between the input voltage of the pressure sensor to be compensated can be by two Order polynomial curve matching;

The structure analog compensation module is implemented as structure resistor network, adjusts resistance in the resistor network Resistance value makes pass of the conversion output voltage in the case where pressure is certain between the input voltage of the pressure sensor to be compensated System can be by quadratic polynomial curve matching.

The resistor network includes first resistor 1, second resistance 2,3 and the 4th resistance 4 of 3rd resistor;

1 one end of first resistor ground connection, the first negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

2 one end of second resistance ground connection, the second negative input end of the other end and the pressure sensor to be compensated are electrically connected It connects;

Described 3 one end of 3rd resistor is electrically connected with the positive input terminal of the pressure sensor to be compensated, the other end with it is described The negative output terminal electrical connection of pressure sensor to be compensated;

Described 4th resistance, 4 one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, the other end with it is described The positive output end electrical connection of pressure sensor to be compensated.

The specific implementation of the step 1 includes the following steps:

Step 11, resistor network is built;

Step 12, the resistance value of the resistance in the resistor network is adjusted;

Step 13, the input voltage under each nominal pressure corresponding to multiple temperature spots and the conversion are acquired Output voltage;

Step 14, two are carried out to the input voltage corresponding to each nominal pressure and the conversion output voltage Order polynomial curve matching, and export the dependability parameter of characterization fitting precision;

Step 15, judge whether each dependability parameter meets following first formula;It is then to terminate the step 1; It is no, then it returns and performs the step 12;

First formula is as follows:

| 1-R | < 0.0002

Wherein, the R is the dependability parameter.

Step 2, three calibration temperature spots are preset in the operating temperature range of the pressure sensor to be compensated, described Two nominal pressures are preset in the measurement range of pressure sensor to be compensated, are acquired each described under each nominal pressure Demarcate the input voltage corresponding to temperature spot and the conversion output voltage;According to institute each under each nominal pressure The input voltage corresponding to calibration temperature spot and the conversion output voltage are stated, solves and is characterized under each nominal pressure The quadratic polynomial curvilinear equation of relationship between the conversion output voltage and the input voltage;

The specific implementation of the step 2 includes the following steps:

Step 21, three calibration temperature spots are preset in the operating temperature range of the pressure sensor to be compensated, in institute It states and two nominal pressures is preset in the measurement range of pressure sensor to be compensated, acquire each institute under each nominal pressure State the input voltage corresponding to calibration temperature spot and the conversion output voltage;

Step 22, it builds and is characterized between the conversion output voltage and the input voltage under each nominal pressure The quadratic polynomial curvilinear equation of relationship;

The corresponding structure quadratic polynomial curvilinear equation of first nominal pressure is as shown in the second formula;Second nominal pressure pair The structure quadratic polynomial curvilinear equation answered is as shown in third formula;

Second formula is as described below:

U'O1=c01+c11UT1+c21UT1 2

The third formula is as described below:

U'O2=c02+c12UT2+c22UT2 2

Wherein, the U'O1And UT1The corresponding conversion output voltage variable of respectively the first nominal pressure and input voltage become Amount;The U'O2And UT2The corresponding conversion output voltage variable of respectively the second nominal pressure and input voltage variable;The c01、 c11And c21Coefficient for the corresponding quadratic polynomial curvilinear equation of the first nominal pressure to be solved;The c02、c12With c22Coefficient for the corresponding quadratic polynomial curvilinear equation of the second nominal pressure to be solved;

Step 23, it is the input voltage corresponding to the lower three calibration temperature spot of the first nominal pressure and the conversion is defeated Go out voltage and substitute into second formula respectively, build equation group, it is corresponding described to solve first nominal pressure to be solved The coefficient of quadratic polynomial curvilinear equation obtains the corresponding quadratic polynomial curvilinear equation such as the 4th formula of the first nominal pressure It is shown;By the input voltage corresponding to the lower three calibration temperature spot of the second nominal pressure and the conversion output voltage difference The third formula is substituted into, builds equation group, solves the corresponding quadratic polynomial of second nominal pressure to be solved The coefficient of curvilinear equation obtains the corresponding quadratic polynomial curvilinear equation of the second nominal pressure as shown in the 5th formula;

4th formula is as follows:

U'O1=a1+b1UT1+c1UT1 2

5th formula is as follows:

U'O2=a2+b2UT2+c2UT2 2

Wherein, a1、b1And c1The corresponding quadratic polynomial curvilinear equation of the first nominal pressure for solution is Number;The a2、b2And c2The coefficient of the corresponding quadratic polynomial curvilinear equation of the second nominal pressure for solution.

Step 3, acquisition measures the input voltage corresponding to pressure and the conversion output voltage, according to the measurement The input voltage and the conversion output voltage, the quadratic polynomial curvilinear equation and the calibration pressure corresponding to pressure Make every effort to solve the numerical value for measuring pressure.

The specific implementation of the step 3 includes the following steps:

Step 31, acquisition measures the input voltage corresponding to pressure and the conversion output voltage;

Step 32, the input voltage corresponding to the measurement pressure is brought into the first nominal pressure corresponding institute respectively Quadratic polynomial curvilinear equation and the corresponding quadratic polynomial curvilinear equation of the second nominal pressure are stated, is solved respectively described Under first nominal pressure with it is described measurement pressure corresponding to the corresponding conversion output voltage of the input voltage and Under second nominal pressure with it is described measurement pressure corresponding to the corresponding conversion output voltage of the input voltage;

Step 33, the numerical value of pressure is measured according to following 6th equations;

6th formula is as follows:

Wherein, the pcFor the numerical value of the measurement pressure to be solved, the p1For first nominal pressure, The p2For second nominal pressure, the U'OcIt is described for the conversion output voltage corresponding to the measurement pressure U'O1cThe corresponding conversion of the input voltage under first nominal pressure with the measurement pressure corresponding to Output voltage, the U'O2cIt is opposite with the input voltage corresponding to the measurement pressure under second nominal pressure The conversion output voltage answered.

Three calibration temperature spot is respectively the minimum work in the pressure sensor to be compensated from low temperature to high temperature Temperature value on the basis of temperature spot after 10%, 50% and the 90% of floating temperature gap, wherein, the temperature gap is highest The difference of operating temperature point and minimum operating temperature point;Described two nominal pressures are respectively the pressure sensor to be compensated Any two pressure value corresponding to zero-bit, full position and midpoint in measurement range.

After completing the step 1 and step 2, the software and hardware of the pressure sensor to be compensated and the transmitter It has been determined that it need to only use step 3 that can solve any numerical value for measuring pressure in measurement process.

The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.

Claims (10)

1. a kind of temperature compensation system of pressure sensor, which is characterized in that including pressure sensor to be compensated and transmitter;
The pressure sensor to be compensated is constant-current source drive-type silicon piezoresistance type pressure sensor;
The transmitter includes constant-current source, analog compensation module, analog-to-digital conversion module and digital compensation modules;
The constant-current source is used to provide the driving power of the pressure sensor to be compensated;
The analog compensation module is used to convert the output voltage of the pressure sensor to be compensated, makes conversion defeated Going out relationship of the voltage in the case where pressure is certain between the input voltage of the pressure sensor to be compensated can be by secondary more Item formula curve matching;
The analog-to-digital conversion module is used to, according to preset three calibration temperature spots and two nominal pressures, acquire each The input voltage corresponding to each calibration temperature spot and the conversion output voltage under the nominal pressure;It is also used The input voltage and the conversion output voltage corresponding to pressure are measured in acquisition;Wherein, three calibration temperature spot In the operating temperature range of the pressure sensor to be compensated, described two nominal pressures are in the pressure sensor to be compensated Measurement range in;
The digital compensation modules are used for according to the institute corresponding to the calibration temperature spot each under each nominal pressure State input voltage and the conversion output voltage, solve characterized under each nominal pressure the conversion output voltage with it is described The quadratic polynomial curvilinear equation of relationship between input voltage;It is additionally operable to according to described defeated corresponding to the measurement pressure Enter the voltage and conversion output voltage, the quadratic polynomial curvilinear equation and nominal pressure solves the measurement pressure Numerical value.
A kind of 2. temperature compensation system of pressure sensor according to claim 1, which is characterized in that the analog compensation mould Block is resistor network.
A kind of 3. temperature compensation system of pressure sensor according to claim 2, which is characterized in that the resistor network packet Include first resistor (1), second resistance (2), 3rd resistor (3) and the 4th resistance (4);
First resistor (1) one end ground connection, the other end are electrically connected with the first negative input end of the pressure sensor to be compensated;
Second resistance (2) one end ground connection, the other end are electrically connected with the second negative input end of the pressure sensor to be compensated;
Described 3rd resistor (3) one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The negative output terminal electrical connection of compensation pressure sensor;
Described 4th resistance (4) one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The positive output end electrical connection of compensation pressure sensor.
4. a kind of temperature-compensation method of pressure sensor, which is characterized in that include the following steps:
Step 1, analog compensation module is built, the output voltage of pressure sensor to be compensated is converted, makes conversion output electricity Be pressed in pressure it is certain in the case of relationship between the input voltage of the pressure sensor to be compensated can be by quadratic polynomial Curve matching;
Step 2, three calibration temperature spots are preset in the operating temperature range of the pressure sensor to be compensated, wait to mend described It repays and two nominal pressures is preset in the measurement range of pressure sensor, acquire each calibration under each nominal pressure The input voltage and the conversion output voltage corresponding to temperature spot;According to the mark each under each nominal pressure Determine the input voltage corresponding to temperature spot and the conversion output voltage, solve under each nominal pressure described in characterization Convert the quadratic polynomial curvilinear equation of the relationship between output voltage and the input voltage;
Step 3, acquisition measures the input voltage corresponding to pressure and the conversion output voltage, according to the measurement pressure The corresponding input voltage and output voltage, the quadratic polynomial curvilinear equation and the nominal pressure converted are asked Solve the numerical value for measuring pressure.
5. a kind of temperature-compensation method of pressure sensor according to claim 4, which is characterized in that the structure simulation is mended It repays module and is implemented as structure resistor network, adjust the resistance value of the resistance in the resistor network, conversion output voltage is made to exist Relationship in the case that pressure is certain between the input voltage of the pressure sensor to be compensated can be by quadratic polynomial curve Fitting.
A kind of 6. temperature-compensation method of pressure sensor according to claim 5, which is characterized in that the resistor network packet Include first resistor (1), second resistance (2), 3rd resistor (3) and the 4th resistance (4);
First resistor (1) one end ground connection, the other end are electrically connected with the first negative input end of the pressure sensor to be compensated;
Second resistance (2) one end ground connection, the other end are electrically connected with the second negative input end of the pressure sensor to be compensated;
Described 3rd resistor (3) one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The negative output terminal electrical connection of compensation pressure sensor;
Described 4th resistance (4) one end is electrically connected with the positive input terminal of the pressure sensor to be compensated, and the other end is treated with described The positive output end electrical connection of compensation pressure sensor.
A kind of 7. temperature-compensation method of pressure sensor according to claim 5, which is characterized in that the tool of the step 1 Body realization includes the following steps:
Step 11, resistor network is built;
Step 12, the resistance value of the resistance in the resistor network is adjusted;
Step 13, the input voltage under each nominal pressure corresponding to multiple temperature spots and the conversion output are acquired Voltage;
Step 14, the input voltage corresponding to each nominal pressure and the conversion output voltage are carried out secondary more Item formula curve matching, and export the dependability parameter of characterization fitting precision;
Step 15, judge whether each dependability parameter meets following first formula;It is then to terminate the step 1;It is no, then It returns and performs the step 12;
First formula is as follows:
| 1-R | < 0.0002
Wherein, the R is the dependability parameter.
A kind of 8. temperature-compensation method of pressure sensor according to claim 4, which is characterized in that the tool of the step 2 Body realization includes the following steps:
Step 21, three calibration temperature spots are preset in the operating temperature range of the pressure sensor to be compensated, are treated described Two nominal pressures are preset in the measurement range of compensation pressure sensor, acquire each mark under each nominal pressure Determine the input voltage corresponding to temperature spot and the conversion output voltage;
Step 22, the relationship characterized under each nominal pressure between the conversion output voltage and the input voltage is built Quadratic polynomial curvilinear equation;
The corresponding structure quadratic polynomial curvilinear equation of first nominal pressure is as shown in the second formula;Second nominal pressure is corresponding Quadratic polynomial curvilinear equation is built as shown in third formula;
Second formula is as described below:
U'O1=c01+c11UT1+c21UT1 2
The third formula is as described below:
U'O2=c02+c12UT2+c22UT2 2
Wherein, the U'O1And UT1The corresponding conversion output voltage variable of respectively the first nominal pressure and input voltage variable;Institute State U'O2And UT2The corresponding conversion output voltage variable of respectively the second nominal pressure and input voltage variable;The c01、c11With c21Coefficient for the corresponding quadratic polynomial curvilinear equation of the first nominal pressure to be solved;The c02、c12And c22To treat The coefficient of the corresponding quadratic polynomial curvilinear equation of the second nominal pressure solved;
Step 23, by the input voltage corresponding to the lower three calibration temperature spot of the first nominal pressure and the conversion output electricity Pressure substitutes into second formula respectively, builds equation group, and it is corresponding described secondary to solve first nominal pressure to be solved The coefficient of polynomial curve equation obtains the corresponding quadratic polynomial curvilinear equation of the first nominal pressure such as the 4th formula institute Show;By the input voltages corresponding to the lower three calibration temperature spot of the second nominal pressure and conversion output voltage generation respectively Enter the third formula, build equation group, it is bent to solve the corresponding quadratic polynomial of second nominal pressure to be solved The coefficient of line equation obtains the corresponding quadratic polynomial curvilinear equation of the second nominal pressure as shown in the 5th formula;
4th formula is as follows:
U'O1=a1+b1UT1+c1UT1 2
5th formula is as follows:
U'O2=a2+b2UT2+c2UT2 2
Wherein, a1、b1And c1The coefficient of the corresponding quadratic polynomial curvilinear equation of the first nominal pressure for solution; The a2、b2And c2The coefficient of the corresponding quadratic polynomial curvilinear equation of the second nominal pressure for solution.
A kind of 9. temperature-compensation method of pressure sensor according to claim 8, which is characterized in that the tool of the step 3 Body realization includes the following steps:
Step 31, acquisition measures the input voltage corresponding to pressure and the conversion output voltage;
Step 32, the input voltage corresponding to the measurement pressure is brought into the first nominal pressure corresponding described two respectively Order polynomial curvilinear equation and the corresponding quadratic polynomial curvilinear equation of the second nominal pressure, solve respectively described first With the corresponding conversion output voltage of the input voltage corresponding to the measurement pressure and described under nominal pressure Under second nominal pressure with it is described measurement pressure corresponding to the corresponding conversion output voltage of the input voltage;
Step 33, the numerical value of pressure is measured according to following 6th equations;
6th formula is as follows:
Wherein, the pcFor the numerical value of the measurement pressure to be solved, the p1For first nominal pressure, the p2For Second nominal pressure, the U'OcFor the conversion output voltage corresponding to the measurement pressure, the U'O1cFor institute State under the first nominal pressure with it is described measurement pressure corresponding to the corresponding conversion output voltage of the input voltage, institute State U'O2cFor under second nominal pressure with the input voltage corresponding to the measurement pressure is corresponding described turns Change output voltage.
10. according to a kind of any temperature-compensation method of pressure sensor of claim 4 to 9, which is characterized in that described three A calibration temperature spot is respectively on the basis of the minimum operating temperature point of the pressure sensor to be compensated from low temperature to high temperature Temperature value after 10%, 50% and the 90% of floating temperature gap, wherein, the temperature gap is for maximum operating temperature point and most The difference of low operating temperature point;Described two nominal pressures are respectively zero in the measurement range of the pressure sensor to be compensated Any two pressure value corresponding to position, full position and midpoint.
CN201511003537.4A 2015-12-25 2015-12-25 The temperature compensation system and method for a kind of pressure sensor CN105628266B (en)

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