CN102901557A - Isolation shear type piezoelectric acceleration transducer with internal integrated circuit - Google Patents
Isolation shear type piezoelectric acceleration transducer with internal integrated circuit Download PDFInfo
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- CN102901557A CN102901557A CN 201110216051 CN201110216051A CN102901557A CN 102901557 A CN102901557 A CN 102901557A CN 201110216051 CN201110216051 CN 201110216051 CN 201110216051 A CN201110216051 A CN 201110216051A CN 102901557 A CN102901557 A CN 102901557A
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Abstract
The invention belongs to the field of vibration detection transducers, and particularly relates to an isolation shear type piezoelectric acceleration transducer with an internal integrated circuit. The isolation shear type piezoelectric acceleration transducer is used for vibration test of aerospace, machinery, mining, buildings and the like. A high-voltage invariable piezoelectric crystal or piezoelectric ceramic is used as a sensitive element, sensitivity of the transducer is greatly improved by means of a d15 shear transduction mode of a piezoelectric material, and the internal integrated circuit consisting of a charge amplifier is used for signal conditioning to enable the transducer to obtain quick and accurate voltage sensitivity output. The isolation shear type piezoelectric acceleration transducer with the internal integrated circuit has the advantages of wide frequency response range, stable temperature sensitivity, high temperature resistance, long service life, small size, light weight, excellent dynamic response and the like. Further, unique structural design and insulation design enable the transducer to have excellent tightness to prevent infiltration of water and oil, and the transducer is fine in corrosion resistance, capable of preventing interference of electromagnetic signals and high in reliability.
Description
Technical field
The present invention relates to a kind of piezoelectric acceleration sensor of isolating shearing built-in integrated circuit, belong to the vibration detecting sensor field, be used for Aero-Space, metallurgy, machinery, mining, automobile, build a bridge, life-detection instrument etc. need to be carried out the place of vibration monitoring or test.
Background technology
All objects all have vibration, and the size of vibratory output and in time detection can reflect whether the operation conditions of an object, equipment and health is good.The acceleration transducer that is used for vibration detection has a wide range of applications in fields such as Aeronautics and Astronautics, mining safety, the accurate guidance of guided missile, communication, automotive safety detection, bridge construction safety monitoring, life detection and rescues.Therefore, the responsive first material of development high-performance sensors and acceleration transducer device have a wide range of applications safely to industry, national defence and the people's livelihood, also have Important Academic meaning and social economic value.
Piezoelectric acceleration sensor is to use maximum sensors in the vibration detection.Take automobile as example, an automobile uses sensor to reach more than 100, sensor is the critical component of Auto Electronic Controlled System, it also is the core content of automotive electronic technology research field, the domestic automobile sensor not yet forms independently industry at present, external blockade on new techniques causes the in short supply of the backwardness of domestic technique and market, the annual automobile sensor of wanting more than the millions of covers of import of China.Acceleration transducer is widely used in the parts such as safe automobile air bag, automotive crash safety detection, engine control system, control system of speed variator, suspension control system.Take the vehicle collision safety test as example, the domestic automobile collision safety detect to use all is the acceleration transducer of external Endevco company, expensive, each collision needs to install about 20-50 acceleration transducer, the acceleration transducer quantity of installing is more, the installation position is more comprehensive, and the information of reflection is more.The present situation of Sensors For The Safe Gasbag In Automobiles is also similar with it.
When the piezoelectric acceleration device was used for vibration-testing, stability and life-span were important indexs, depend primarily on the stability of responsive first material and the stability of sensor construction.In addition, also have the important indicators such as the temperature variant relation of operating frequency range, sensitivity, cross sensitivity, sensitivity of acceleration transducer and volume size weight.
Summary of the invention
[0005] adopt the structure of compression different from general piezoelectric acceleration sensor, this product has adopted the shearing structure of isolation, is subject to producing the corresponding electric signal principle that is directly proportional after the shearing force by responsive unit and designs.Base is and the housing one to require base to have very high flatness and the minimum error of perpendicularity.This is the key that determines the sensor frequency responding range.The shearing structure of this isolation is to consider to be applied to the application scenarios such as degree of precision, external interference be larger.The structure of the shearing built-in integrated circuit acceleration transducer of isolation of the present invention is comprised of following part as shown in Figure 1, and each several part and each several part Relations Among are respectively:
1 is shell, and its inside is divided into 3 cavitys, and signal conductor, ICP integrated circuit, sensor sensing unit and other parts are installed respectively.The shell both sides are opened 2 or 4 mounting holes and are used for fixation of sensor, and the upper surface is used for the welded seal cover plate.
2 is base, with the shell body Integral design and be processed as one middle perforate.Base can be one or more, is used for installing the also parts such as the responsive unit of fixation of sensor, mass, insulating trip.Requirement has very high stiffness coefficient.
3 is the pretension screw, and 4 is pre-load nut.Pretension screw and pre-load nut are united and are formed pre-tightening mechanism the base (2) of mass (5), insulating trip (7), piezoelectric crystal or piezoelectric ceramic piece (6) and sensor is rigidly connected, and generally adopt self-locking thread in case anti-avulsion falls; Also can adopt Strong Adhesive or high-temp strong adhesive stick to replace pretension screw (3) and pre-load nut (4), base (2) rigidity of mass (5), insulating trip (7), piezoelectric ceramic piece (6) and the sensor of piezoelectric sensor is sticked together.
5 is mass, adopts high specific gravity alloy material processing, and it is the determinative that determines the transducer sensitivity parameter, can change as required its size and weight and control transducer sensitivity.
6 is piezoelectric crystal or piezoelectric ceramic piece, and it is the core sensitive element of whole sensor.The piezoelectric crystal of its employing high piezoelectric constant or piezoelectric ceramic piece adopt the d of piezoelectric as the core sensitive element
15Shear the transducing pattern, in 0-150 ℃ of scope, require to shear piezoelectric coefficient d
15Less than 5%, require to have higher resistivity with the temperature dynamic variation error, loss is less than 3%; The nonparallelism of the shear-sensitive unit that processes and roughness are all less than 0.002mm.
7 is insulating trip, adopts to have the inorganic material of high insulation resistance, and its purpose is the effect of shielding the earth undesired signal is played in output signal and the earth isolation.
8 is integrated circuit, and its effect is conditioning and the impedance transformation of realizing sensor sensing unit signal.The general principle that adopts charge amplifier cooperates the design circuit that adds, and whole preparation becomes the ICP thick film integrated circuit.As required, also can not use built-in integrated circuit, directly draw sensor signal and process or show use at additional equipment.
9 is wire of output terminal, generally adopts the four-core shielded conductor.The pumping signal of connecting sensor and output signal.
10 is cover plate, is welded on the upper surface of shell body, welds together with sensor outer housing (1) and the earth forms the loop, and sensor is played sealing and shielding action, guarantees that sensor water-proof, grease proofing, anticorrosion and shielding external electromagnetic signal disturb.
Built-in integrated circuit piezoelectric acceleration utensil is sheared in isolation of the present invention following advantage:
1, the present invention has adopted to isolate shearing structure, so that sensor has very little cross sensitivity (＜2%), compares the compression sensor and has larger lateral error, and this sensor has obvious advantage.
2, the d of the shearing employing piezoelectric of isolation
15Shear the transducing pattern, so that the precision of acceleration transducer improves, antijamming capability improves, and the acceleration signal noise reduces, and the pedestal strain sensitivity reduces.
3, built-in integrated circuit piezoelectric acceleration device is sheared in isolation, has adopted built-in modular ICP integrated circuit, and a sensor sensing unit signal is out nursed one's health with the fastest speed, and decay and the degree of distortion of signal are little.Isolate the two the combination of shearing design and built-in ICP integrated circuit, not only so that the precision of sensor, reliability be significantly improved, and the conditioning of sensor signal can be very large scope in adjust, differently require for satisfying, the design and development of different measuring range acceleration sensors provides free wide space.
4, the present invention is the side output form, be applicable to the less occasion of measurement space, sensor bulk is little, quality is light (be about 2-3 gram (not containing wire)), good waterproof is arranged, drains the oil, anticorrosion, anti electromagnet interference function, for measurement provides great convenience.
Description of drawings
Fig. 1 shears the structural representation of built-in integrated circuit piezoelectric acceleration device for isolation.
Fig. 2 is the photo figure in kind of present embodiment.
Fig. 3 is that material object and common installation of offshore company's sensor of present embodiment is applied to the photo figure that automobile safety collision detects.
Fig. 4 is the material object of present embodiment and the acceleration signal comparison diagram that offshore company's sensor obtains in car crass detects.
Embodiment
Built-in integrated circuit piezoelectric acceleration device is sheared in the isolation of side output: base, shell adopt light aluminum alloy processing, and surperficial anodic oxidation is anticorrosion.Mass is processed with high-density alloy, and its two flatness, the depth of parallelism, roughness are all less than 0.002mm.Insulating trip uses 85 aluminium oxide ceramics, and its machining precision is consistent with the high-density alloy mass.(loss is less than 3%, dynamically d for PZT base piezoelectric ceramic after piezoelectric crystal uses and to process through special processing and polarization process
15=450pc/N, d
15Vary with temperature error less than 5%).Adopt a base, two piezoelectric sensitivity units are installed, two masses and two insulating trips are installed.Behind sensor erection welding, the signal scaling, total quality 2 grams.
Claims (5)
1. the shearing piezoelectric acceleration sensor of the isolation of a built-in integrated circuit, use the shearing structural design of isolation, sensor housing and mount pad design are processed as one, built-in integrated circuit, sensor construction comprises housing (1), base (2), pretension screw (3), pre-load nut (4), mass (5), piezoelectric crystal or piezoelectric ceramic piece (6), insulating trip (7), ICP thick film integrated circuit (8), signal conductor (9), cover plate (10), after the sensor assembling is finished, bridge welding is encapsulated in the upper surface of sensor housing, form seal cavity, be the clear sensor internal structure that shows, this synoptic diagram does not draw cover plate, it is characterized in that: pretension screw (3) and the mass (5) of pre-load nut (4) with piezoelectric sensor, insulating trip (7), the base (2) of piezoelectric crystal or piezoelectric ceramic piece (6) and sensor is rigidly connected, the shell of base and sensor itself designs and is processed into as a whole, 2 or 4 mounting holes are arranged on the base, being convenient to sensor is connected with the installation of extraneous tested vibration position, structure by shell and base one, outside vibration is sent in the sensor sensing unit of vibration detection, adopt the design can make sensor integral body have very closely rigidity, thereby guarantee that sensor is responded and wide frequency response range fast; Pretension screw (3) and pre-load nut (4) are rigidly connected the base (2) of mass (5), insulating trip (7), piezoelectric crystal or piezoelectric ceramic piece (6) and the sensor of piezoelectric sensor, have the frequency response range that very high stiffness coefficient can improve sensor; Also can adopt Strong Adhesive or high-temp strong adhesive stick to replace pretension screw (3) and pre-load nut (4), mass (5) with piezoelectric sensor, insulating trip (7), base (2) rigidity of piezoelectric crystal or piezoelectric ceramic piece (6) and sensor is sticked together, guarantee high stiffness coefficient, sensor outer housing (1) is the rigid design of one with base (2), form the loop with the cover plate that is welded on the housing upper surface (10) and the earth, sensor is played sealing and shielding action, guarantee waterproof, grease proofing, the effect that anticorrosion and shielding external electromagnetic signal disturb.
2. by the shearing piezoelectric acceleration sensor of isolation of built-in integrated circuit claimed in claim 1, it is characterized in that adopting d
15The piezoelectric sensitivity unit material of transducing pattern, the quantity that is integral the base that is connected with housing design can be that 1-10 is individual with interior positive integer, responsive unit (6), the quantity of mass (5) and insulating trip (7) can be that 1-20 is with interior positive integer sheet, each responsive unit (6) is combined into a sensor vibration sensing unit with a mass (5) and an insulating trip (7), adopt the machinery series connection between the responsive unit (6) of each sensor vibration sensing unit, the mode of electricity parallel connection connects, be convenient to the charge signal that each sensor vibration sensing unit obtains is stacked up, form different transducer sensitivity output.
3. press the shearing piezoelectric acceleration sensor of isolation of built-in integrated circuit claimed in claim 1, it is characterized in that adopting high specific gravity alloy material 97w sintered alloy or other high density material as mass (5), adopt inorganic material 85 aluminium oxide that have high insulation resistance under the high temperature or other insulating material as insulating trip (7).
4. press the shearing piezoelectric acceleration sensor of isolation of the described a kind of built-in integrated circuit of claim l, it is characterized in that adopting the built-in integrated circuit (8) that is formed by charge amplifier, the charge signal of sensor sensing unit output nursed one's health with ratio amplify, the output of acquisition voltage signal, the charge signal that also can not use built-in integrated circuit that sensor sensing unit is exported is nursed one's health and is amplified, and directly obtains charge signal output.
5. press the shearing piezoelectric acceleration sensor of isolation of the described a kind of built-in integrated circuit of claim l, the enclosure interior that it is characterized in that sensor is designed to three cavitys and one and is used for the output terminal cylindrical shell that sensor conductor is drawn, the side that output terminal cylindrical shell (9) is used for signal conductor connects, 3 cavitys in the housing: adjacent cavity is used for welding or draws wire with drawing conductor wire end, middle cavity is used for sealing and fixing ICP built-in integrated circuit, the cavity of rear end maximum is used for being designed to one or more base (2), and the responsive unit (6) of some is installed, mass (5) and insulating trip (7).
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110216051 CN102901557A (en) | 2011-07-30 | 2011-07-30 | Isolation shear type piezoelectric acceleration transducer with internal integrated circuit |
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| CN 201110216051 CN102901557A (en) | 2011-07-30 | 2011-07-30 | Isolation shear type piezoelectric acceleration transducer with internal integrated circuit |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103968938A (en) * | 2014-05-14 | 2014-08-06 | 广州铁路职业技术学院 | Vibrating frequency detecting device |
| CN104810472A (en) * | 2015-04-10 | 2015-07-29 | 北京大学 | Piezoelectric ceramic with piezoelectric coefficient of d36 and preparation method thereof |
| WO2016206094A1 (en) * | 2015-06-26 | 2016-12-29 | 厦门乃尔电子有限公司 | Shear-type piezoelectric sensor |
| CN107830876A (en) * | 2017-10-16 | 2018-03-23 | 厦门乃尔电子有限公司 | A kind of preparation method of piezoelectric sensing device assembly |
| CN107923750A (en) * | 2015-08-21 | 2018-04-17 | 株式会社电装 | Compound sensor |
| CN108008148A (en) * | 2017-11-08 | 2018-05-08 | 中国航空工业集团公司金城南京机电液压工程研究中心 | A kind of passive acceleration transducer of piezoelectric type |
| CN108445257A (en) * | 2018-04-13 | 2018-08-24 | 北京强度环境研究所 | A kind of piezoelectric type high G-value shock transducer core |
| CN112611886A (en) * | 2020-12-12 | 2021-04-06 | 山东利恩斯智能科技有限公司 | Internal ground insulation type acceleration sensor |
| CN113884175A (en) * | 2021-09-09 | 2022-01-04 | 国家石油天然气管网集团有限公司华南分公司 | Piezoelectric vibration sensor of shear type sensitive element |
| CN113985066A (en) * | 2021-12-29 | 2022-01-28 | 山东利恩斯智能科技有限公司 | High-impact acceleration sensor and manufacturing method thereof |
-
2011
- 2011-07-30 CN CN 201110216051 patent/CN102901557A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103968938A (en) * | 2014-05-14 | 2014-08-06 | 广州铁路职业技术学院 | Vibrating frequency detecting device |
| CN104810472A (en) * | 2015-04-10 | 2015-07-29 | 北京大学 | Piezoelectric ceramic with piezoelectric coefficient of d36 and preparation method thereof |
| CN104810472B (en) * | 2015-04-10 | 2017-06-06 | 北京大学 | With piezoelectric coefficient d36Piezoelectric ceramics and preparation method thereof |
| WO2016206094A1 (en) * | 2015-06-26 | 2016-12-29 | 厦门乃尔电子有限公司 | Shear-type piezoelectric sensor |
| CN107110885A (en) * | 2015-06-26 | 2017-08-29 | 厦门乃尔电子有限公司 | Shearing-type piezoelectric transducer |
| GB2555348A (en) * | 2015-06-26 | 2018-04-25 | Xiamen Niell Electronics Co Ltd | Shear-type piezoelectric sensor |
| CN107923750B (en) * | 2015-08-21 | 2021-05-07 | 株式会社电装 | Composite sensor |
| CN107923750A (en) * | 2015-08-21 | 2018-04-17 | 株式会社电装 | Compound sensor |
| CN107830876A (en) * | 2017-10-16 | 2018-03-23 | 厦门乃尔电子有限公司 | A kind of preparation method of piezoelectric sensing device assembly |
| CN108008148A (en) * | 2017-11-08 | 2018-05-08 | 中国航空工业集团公司金城南京机电液压工程研究中心 | A kind of passive acceleration transducer of piezoelectric type |
| CN108445257A (en) * | 2018-04-13 | 2018-08-24 | 北京强度环境研究所 | A kind of piezoelectric type high G-value shock transducer core |
| CN108445257B (en) * | 2018-04-13 | 2023-06-16 | 北京强度环境研究所 | Piezoelectric type high G value impact sensor core |
| CN112611886A (en) * | 2020-12-12 | 2021-04-06 | 山东利恩斯智能科技有限公司 | Internal ground insulation type acceleration sensor |
| CN113884175A (en) * | 2021-09-09 | 2022-01-04 | 国家石油天然气管网集团有限公司华南分公司 | Piezoelectric vibration sensor of shear type sensitive element |
| CN113985066A (en) * | 2021-12-29 | 2022-01-28 | 山东利恩斯智能科技有限公司 | High-impact acceleration sensor and manufacturing method thereof |
| CN113985066B (en) * | 2021-12-29 | 2022-05-13 | 山东利恩斯智能科技有限公司 | High-impact acceleration sensor and manufacturing method thereof |
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Application publication date: 20130130 |