CN103551921B - Piezoresistive integrated three-dimensional turning force sensor - Google Patents
Piezoresistive integrated three-dimensional turning force sensor Download PDFInfo
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- CN103551921B CN103551921B CN201310473528.6A CN201310473528A CN103551921B CN 103551921 B CN103551921 B CN 103551921B CN 201310473528 A CN201310473528 A CN 201310473528A CN 103551921 B CN103551921 B CN 103551921B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
- B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
- B23Q17/0966—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining by measuring a force on parts of the machine other than a motor
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- Mechanical Engineering (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Abstract
The invention relates to a piezoresistive integrated three-dimensional turning force sensor. A turning tool is installed in a head turning tool slot of a sensor main structure, a first vertical octagonal semi-ring and a second vertical octagonal semi-ring are arranged on an upper surface and a lower surface of a middle portion of the sensor main structure respectively, a front side and a rear side of the middle portion of the sensor major structure are connected with a first horizontal octagonal semi-ring and a second horizontal octagonal semi-ring respectively, a tail portion of the sensor major structure is provided with a sensor handle, and a micro-electromechanical system (MEMS) silicon micro force sensor chip is packaged on an outer surface of the octagonal semi-ring. According to the piezoresistive integrated three-dimensional turning force sensor, two octagonal ring structures which are perpendicular to each other are used so that independent measurement of three-dimensional turning forces is achieved, and interaction influence and coupling among effective lateral forces are reduced; the MEMS silicon micro force sensor chip is used, so that measurement accuracy and sensitivity of the chip are greatly improved, and measurement of stress and stain can be achieved by only packaging the MEMS silicon micro force sensor chip in one place; accurate measurement of three-dimensional turning forces is achieved, and both dynamic forces and static forces can be measured.
Description
Technical field
The present invention relates to intelligent manufacturing equipment technical field, particularly to a kind of pressure resistance type integrated three-dimension lathe power sensing
Device.
Background technology
In metal cutting process, turnery processing is one of modal processing method.Cutting Force is reflection turning process
Important indicator, the size of Cutting Force and turning process change closely related, each minor variations of turning state can be transferred through
The change of Cutting Force reflects.Cutting Force size and tool wear, machining accuracy, turning temperature, power consumption etc. have close
Cut relation, therefore how accurate measurement Cutting Force is extremely important to improving processing characteristics.
Traditional Cutting Force dynamometer mainly has the types such as resistance-strain type, piezoelectric type, current type, optical fiber type, condenser type,
But there is the contradiction of sensitivity and rigidity in resistance-strain type of dynamometer instrument；Piezoelectric type dynamometer can not be tested due to charge leakage
Static force, natural frequency improve by assemble contact stiffness limited, safeguard extremely inconvenient, expensive；Current type dynamometer
Certainty of measurement is not high, and because electric current sluggishness leads to not meet the high requirement to Cutting Force real-time monitoring；Optical fiber type and
Capacitance type sensor is easily affected and cannot accurately be measured by extraneous vibration and temperature change.
Recently as the development of various micro-nano sensors, for cutting quality control in lathe process tool cutting process
System, cutter life prediction and Intelligent Machining demand, research and develop and detect small volume, the power consumption controlling for processes such as Tool in Cutting
Low, function admirable micro-nano sensor seems particularly urgent and necessary.
Content of the invention
For the defect overcoming above-mentioned prior art to exist, it is an object of the invention to provide a kind of pressure resistance type integrated three
Dimension turning force transducer, catches surface of elastomer stress with the quick chip of the micro- power of MEMS silicon, realizes the accurate measurement of three-dimension lathe power.
In order to achieve the above object, the technical scheme is that and be achieved in that：
A kind of integrated three-dimension lathe force transducer of pressure resistance type, including sensor body structure 7, lathe tool 1 is arranged on sensing
In the head lathe tool slot 8 of device agent structure 7, the middle part top and bottom of sensor body structure 7 are respectively equipped with the first vertical anise
Semi-ring 4 and the second vertical anise semi-ring 5, it is anistree that the vertical anise semi-ring 5 of the first vertical anise semi-ring 4, second forms vertical direction
Ring, as the elastomer structure of vertical direction, former and later two sides of the middle part of sensor body structure 7 connect first level respectively
Anistree semi-ring 2 and the second level anise semi-ring 3, first level anise semi-ring 2 and the second level anise semi-ring 3 form horizontal direction
Octagonal ring, as the elastomer structure of horizontal direction, the afterbody of sensor body structure 7 is sensor handle, and sensor handle is to cut
Face is the cuboid bar of rectangle, in the first vertical anise semi-ring 4, the second vertical anise semi-ring 5, first level anise semi-ring 2 and
Second level anise semi-ring 3 outer surface is packaged with the quick chip 6 of the micro- power of MEMS silicon respectively.
Described lathe tool slot 8 is section is square hollow slot, has screwed hole 9 in the middle part of lathe tool slot 8 side.
The quick chip 6 of the micro- power of described MEMS silicon is the ess-strain conversion element being made by MEMS technology, and chip internal is integrated
Pressure drag Hui Sidun full-bridge circuit.
The invention has the beneficial effects as follows：First, the present invention, according to the feature of octagonal ring stress deformation, is hung down mutually using two
Straight anistree ring structure achieves the independence measurement of three-dimension lathe power, reduces each influencing each other between power and couples；Phase
Ratio in traditional metal strain chip Cutting Force sensor, using the quick chip of the micro- power of MEMS silicon, not only the certainty of measurement of chip and
Sensitivity greatly improves, and is often all integrated with Hui Sidun full-bridge circuit on the quick chip of the micro- power of a piece of MEMS silicon it is only necessary to one
Place's quick chip of the micro- power of package of MEMS silicon just can realize the measurement to stress, strain, and conventional metals strain-gauge transducer needs
Paste metal strain plate respectively to form resistance bridge in four specific paries, be readily incorporated coupling and error；Compared to pressure
Electric-type turning force transducer can only measure the defect of dynamic force, and the present invention not only can measure dynamic force, is also applied for measuring quiet
State power.
Brief description
Fig. 1 is present configuration schematic diagram.
Fig. 2 is the structural representation of inventive sensor agent structure 7.
Fig. 3 is the schematic diagram of level anise semi-ring of the present invention.
Fig. 4 is scheme of installation on lathe saddle for the present invention.
Fig. 5 is stress diagram of the present invention.
Fig. 6 is the present invention horizontal octagonal ring force analysis schematic diagram.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail.
With reference to Fig. 1, Fig. 2 and Fig. 3, a kind of integrated three-dimension lathe force transducer of pressure resistance type, including sensor body structure
7, lathe tool 1 is arranged in the head lathe tool slot 8 of sensor body structure 7, and is bolted lathe tool 1, sensor main body
The middle part top and bottom of structure 7 are respectively equipped with the first vertical anise semi-ring 4 and the second vertical anise semi-ring 5, the first vertical anise half
The vertical anise semi-ring 5 of ring 4, second forms vertical direction octagonal ring, as the elastomer structure of vertical direction；Sensor main body is tied
Former and later two sides of the middle part of structure 7 connect first level anise semi-ring 2 and the second level anise semi-ring 3, first level eight respectively
Angle semi-ring 2 and the second level anise semi-ring 3 form horizontal direction octagonal ring, as the elastomer structure of horizontal direction, sensor master
The afterbody of body structure 7 is sensor handle, and sensor handle is the cuboid bar of rectangular cross-section, for this sensor is fixed on car
On bed knife rest 10, in the first vertical anise semi-ring 4, the second vertical anise semi-ring 5, first level anise semi-ring 2 and the second level
Anistree semi-ring 3 outer surface is packaged with the quick chip 6 of the micro- power of MEMS silicon respectively, thus constituting turning force transducer.
With reference to Fig. 2, described lathe tool slot 8 is that section is square, has certain thickness hollow slot, for inserting car
Knife 1, has screwed hole 9 in lathe tool slot 8 side, for inserting bolt fixing lathe tool 1.
The quick chip 6 of the micro- power of described MEMS silicon is the ess-strain conversion element being made by MEMS technology, and chip internal is integrated
Pressure drag Hui Sidun full-bridge circuit.
The operation principle of the present invention is：
During use, with reference to Fig. 4, the tail sensor handle of sensor agent structure 7 is fixed on lathe saddle 10, motor
11 drive blade holder turns realize tool changing function.
With reference to Fig. 5, hard alloy rotatable lathe tool 1 in turning process by Cutting Force can be analyzed to three orthogonal
Active force, be main Cutting Force FC respectively, centripetal force Ff and radial-thrust force Fp.The main body of deformation that wherein main Cutting Force FC causes
On present first vertical anise semi-ring 4, the second vertical anise semi-ring 5, the deformation that centripetal force Ff causes is mainly reflected in the first water
On flat anise semi-ring 2, the second level anise semi-ring 3, the deformation that radial-thrust force Fp causes is embodied in first vertical anistree half respectively
On the vertical anise semi-ring 5 of ring 4, second and first level anise semi-ring 2, the second level anise semi-ring 3.
The one end of the horizontal octagonal ring forming with reference to Fig. 6, first level anise semi-ring 2, the second level anise semi-ring 3 is solid
Fixed, the other end is acted on by centripetal force Ff and radial-thrust force Fp, and in figure t represents anistree ring thickness, and r represents octagonal ring average half
Footpath.Due to octagonal ring symmetrical configuration, and it is similar to that annulus, therefore take the right semi-ring to carry out point using annulus analysis method
Analysis, then the moment of flexure on arbitrary section is：
Ignore the impact of axle power, then ring textures stress is：
（W is module of anti-bending section）,
It can be seen that when θ=90 °, ring textures stress only with radial-thrust force FpRelevant, when or140.6 ° of θ=39.4 °, circle
Ring surface stress only with centripetal force FfRelevant.Found by infrastest, for anistree ring structure, in anistree ring surface θ=90 °
With the quick chip 6 of the micro- power of package of MEMS silicon suitable at the position of or135 ° of θ=45 °.First level anise semi-ring 2, the second level are anistree
Octagonal ring surface stress can be strained and be converted to electricity output, by demarcating by the quick chip 6 of the micro- power of MEMS silicon on semi-ring 3 surface
Can achieve the measurement to centripetal force Ff and radial-thrust force Fp.
In the same manner, the first vertical anise semi-ring 4, the quick chip 6 of the micro- power of MEMS silicon of encapsulation is permissible on the second vertical anise semi-ring 5
Realize the measurement to main Cutting Force FC.
Claims (1)
1. the integrated three-dimension lathe force transducer of a kind of pressure resistance type, including sensor body structure (7) it is characterised in that：Lathe tool
(1) it is arranged in head lathe tool slot (8) of sensor body structure (7), the middle part top and bottom of sensor body structure (7) are divided
It is not provided with the first vertical anise semi-ring (4) and the second vertical anise semi-ring (5), the first vertical anistree semi-ring (4), second vertical eight
Angle semi-ring (5) forms vertical direction octagonal ring, as the elastomer structure of vertical direction, the middle part of sensor body structure (7)
Former and later two sides connect first level anise semi-ring (2) and the second level anise semi-ring (3), first level anise semi-ring respectively
(2) and the second level anise semi-ring (3) forms horizontal direction octagonal ring, as the elastomer structure of horizontal direction, vertical direction
The respectively just anistree ring structure of octagonal ring, horizontal direction octagonal ring, the afterbody of sensor body structure (7) is sensor handle, passes
Sensor handle is the cuboid bar of rectangular cross-section, in the first vertical anise semi-ring (4), the second vertical anise semi-ring (5), the first water
Flat anise semi-ring (2) and the second level anise semi-ring (3) outer surface are packaged with the quick chip of the micro- power of MEMS silicon (6), MEMS silicon respectively
The quick chip (6) of micro- power is attached to 45 °, 90 ° or 135 °；
Described lathe tool slot (8) is section is square hollow slot, has screwed hole in the middle part of lathe tool slot (8) side
(9)；
The quick chip (6) of the micro- power of described MEMS silicon is the ess-strain conversion element being made by MEMS technology, the integrated pressure of chip internal
Resistance Hui Sidun full-bridge circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310473528.6A CN103551921B (en) | 2013-10-10 | 2013-10-10 | Piezoresistive integrated three-dimensional turning force sensor |
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| CN201310473528.6A CN103551921B (en) | 2013-10-10 | 2013-10-10 | Piezoresistive integrated three-dimensional turning force sensor |
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| CN103551921A CN103551921A (en) | 2014-02-05 |
| CN103551921B true CN103551921B (en) | 2017-02-15 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105081370B (en) * | 2015-09-22 | 2017-08-11 | 天津商业大学 | A kind of vertical lathe turning force measuring device |
| CN107101755B (en) * | 2017-06-15 | 2019-04-09 | 西安交通大学 | A kind of strain-type three-dimensional force sensor |
| CN107322368B (en) * | 2017-06-15 | 2019-04-16 | 西安交通大学 | A kind of cutting force measurement device based on manganin micro-nano sensing unit |
| CN107462358B (en) * | 2017-09-19 | 2023-08-01 | 江苏徐工工程机械研究院有限公司 | Simulation test device for surface milling cutter |
| CN109175418A (en) * | 2018-10-17 | 2019-01-11 | 中北大学 | A kind of combined type Cutting Force measurement tooling system being embedded in thin film sensor |
| CN109175419A (en) * | 2018-10-17 | 2019-01-11 | 中北大学 | A kind of integral type Cutting Force measurement tooling system being embedded in thin film sensor |
| CN111198061B (en) * | 2018-10-30 | 2021-11-30 | 中车株洲电力机车研究所有限公司 | Decoupling method of three-dimensional turning force, force measuring structure design method and force measuring structure |
| CN115921967B (en) * | 2023-03-15 | 2023-05-12 | 中北大学 | Milling force measuring tool system with nested compression type sensitive structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| GB1407236A (en) * | 1972-10-10 | 1975-09-24 | Coal Industry Patents Ltd | Cutting force sensor |
| SU1516237A1 (en) * | 1987-06-09 | 1989-10-23 | Московский станкоинструментальный институт | Pickup for measuring powder parameters when turning |
| SE458965B (en) * | 1987-10-13 | 1989-05-22 | Sandvik Ab | POWER SUPPLIER PUTS A TOOL MACHINE BASED ON A METHOD OF DISCONNECTING FORCES ARISING IN THE WORKING OF A WORK PIECE IN A TOOL MACHINE |
| CN2360210Y (en) * | 1998-10-23 | 2000-01-26 | 嘉兴市中等专业学校 | Drilling-cutting ergograph for normal lathe |
| CN101804584A (en) * | 2010-03-31 | 2010-08-18 | 沈阳理工大学 | Three-way cutting force measurement instrument for turning and milling processing |
| CN201926527U (en) * | 2010-11-18 | 2011-08-10 | 东南大学 | Six-dimensional force sensor |
| CN102873353B (en) * | 2012-10-15 | 2015-02-18 | 哈尔滨工业大学 | Intelligent cutter with micro three-way cutting force measurement system |
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Effective date of registration: 20171030 Address after: 710077 1 industrial buildings, 1 floors, 10101 rooms, two industrial buildings in the east side of No. 85, No. 3 Road, Xi'an, Shaanxi Patentee after: Xi'an Wan Wei tool Limited by Share Ltd Address before: 710049 Xianning Road, Shaanxi, China, No. 28, No. Patentee before: Xi'an Jiaotong University |
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Address after: 710077 1 industrial buildings, 1 floors, 10101 rooms, two industrial buildings in the east side of No. 85, No. 3 Road, Xi'an, Shaanxi Patentee after: Xi'an Wan Wei machinery manufacturing Limited by Share Ltd Address before: 710077 1 industrial buildings, 1 floors, 10101 rooms, two industrial buildings in the east side of No. 85, No. 3 Road, Xi'an, Shaanxi Patentee before: Xi'an Wan Wei tool Limited by Share Ltd |