CN202420750U - Automobile machine oil pressure transducer based on MEMS technology - Google Patents
Automobile machine oil pressure transducer based on MEMS technology Download PDFInfo
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- CN202420750U CN202420750U CN2011203940190U CN201120394019U CN202420750U CN 202420750 U CN202420750 U CN 202420750U CN 2011203940190 U CN2011203940190 U CN 2011203940190U CN 201120394019 U CN201120394019 U CN 201120394019U CN 202420750 U CN202420750 U CN 202420750U
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- silicon
- pressure transducer
- mems technology
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- oil pressure
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Abstract
An automobile machine oil pressure transducer based on an MEMS technology comprises a structure housing. An intermediate sensitive structure unit with a sensing element, a switch plate and a sealing ring positioned on an intermediate piece is arranged in the structure housing; a silicon isolated solid state piezoresistive chip integrally packaged on a glass silicon cup is arranged in the intermediate sensitive structure unit; a lead is weldingly connected with the switch plate; a locking structure of the structure housing locks the housing; and the intermediate piece and the structure housing are sealed by the sealing ring. According to the utility model, a pressure resistance sensitive member is prepared from the silicon isolated (SOI) solid state piezoresistive chip by employing micromation designed micro mechanical processing technology, the packaging of the intermediate piece and a double-rotating structure is improved, the automobile machine oil pressure transducer based on the MEMS technology is characterized in that sensitivity, precision and reliability are high, the volume is small, and the weight is small, and because of the introduction of the intermediate piece, cost can be reduced, production efficiency can be raised and product quality can be promoted in production of large amounts.
Description
Technical field
The utility model relates to a kind of automobile pressure transducer, and particularly a kind of volume with MEMS technology development is little, in light weight, response is fast, highly sensitive, be easy to produce in batches, engine oil pressure pickup cheaply.
Background technology
Automobile sensor is the critical component of Auto Electronic Controlled System as the information source of Auto Electronic Controlled System, also is one of core content of technical field of automotive electronics research.Automobile sensor carries out in real time, measures accurately and controls various information such as temperature, pressure, position, rotating speed, acceleration and vibrations.The key of weighing modern sedan limousine control system level just is the quantity and the level of its sensor.
Microelectromechanical systems (MEMS) technology of coming from the SIC (semiconductor integrated circuit) technical development is day by day ripe; Utilize this technology can make various microsensors, the volume and the energy consumption of these sensors are little, can realize many brand-new functions; Be convenient in enormous quantities and made with high precision; Cost per unit is low, is prone to constitute extensive and multifunctional array, is highly suitable on the automobile and uses.
Because the MEMS sensor has irreplaceable advantage, traditional automobile with pressure transducer will be progressively replace by its.MEMS motor car engine machine oil and abs pressure sensor are by the domestic cumulative year after year of current needs; Maturation along with domestic MEMS automobile pressure transducer technology; Having the MEMS pressure transducer of characteristics such as microminiaturization, low-power consumption, high sensitivity, high reliability, will be the focus of global automobile sensor market product demand.
At present, what automobile MEMS pressure transducer can be provided is main with offshore company mainly, and companies such as U.S. Kai Leer, extraordinary measurement, SSI, Fei Erke, Texas Instrument, German Bosch, Japan electric coating are arranged, and annual production is more than 2,000,000.The automobile MEMS pressure transducer of international renowned company Development and Production such as external Motorola, Infineon, GE adopts folded silicon technology mostly, and technologies such as bulk silicon technological have highly sensitive; Characteristics such as precision height; Range 50 to 1400KPa, precision 0.03%FS, but also have complex manufacturing technology in some aspects; High-precision capacitance pressure transducer, receives environmental disturbances easily, and receives problem such as disturb between pollution and the many signals of environment easily.
The utility model content
The purpose of the utility model is to overcome the shortcoming of above-mentioned prior art; A kind of engine oil pressure pickup has been proposed; The integrated piezoresistance force sensing element that adopts the technological micromachined technology of MEMS to process; And adopted unique package, have highly sensitive, precision is high, dynamic perfromance good, reliability is high, the characteristics that low cost can be mass-produced.
The purpose of the utility model is to realize through following technical scheme:
A kind of automobile engine oil pressure transducer based on the MEMS technology; Comprise a structure housing (1); The inside of structure housing (1) is equipped with the middle sensitive structure unit that has sensitive element, card extender (6) and O-ring seal (4) that is positioned on the middleware (2); Dispose the integrated silicon that is encapsulated on the glass silicon cup in the middle sensitive structure unit and isolate solid-state pressure resistance type chip (3), an end of spun gold (5) is isolated solid-state pressure resistance type chip (3) with silicon and is linked to each other, and the other end of spun gold (5) links to each other with card extender (6); Lead (7) links to each other card extender (9); The same card extender of lead (10) (9) is welded to connect, locking mechanism (11) locking shell of structure housing (1), and middleware (2) is realized sealing with structure housing (1) through O-ring seal (4).
Said silicon is isolated solid-state pressure resistance type chip (3) and is formed the Hui Sideng measuring bridge by four resistance R 1, R3, R2 and R4, and resistance R 1, R3, R2 and R4 couple together through pressure welding point (12), pressure welding point (13), pressure welding point (14), pressure welding point (15), the pressure welding point (16) that lead-in wire is formed respectively.
Adopt middleware (2), and said middleware (2) is isolated solid-state pressure resistance type chip (3), card extender (6), lead (7) and seal (4) by silicon and is formed.
Said card extender (6) switching silicon is isolated solid-state pressure resistance type chip (3) and is connected with the electrical equipment of outer lead.
Said card extender (6) is isolated being electrically connected of solid-state pressure resistance type chip (3) with silicon and is adopted the spun gold lead-in wire.
Said structure housing (1) and middleware (2) are the stainless steel element.
The utility model adopts two flap structures, places a card extender respectively in middleware (2) and the pressure ring (8), is convenient to realize simplification and product reliable and stable of packaging and testing process.Structure housing (1) and middleware (2) adopt stainless steel.
The silicon of the utility model is isolated the integrated piezoresistance force sensing element that (SOI) solid-state pressure resistance type chip has adopted the micromachined technology of miniaturized design to process; Encapsulation through middleware, two flap structures improves; Have highly sensitive, precision is high, reliability is high, volume is little, lightweight characteristics; And since the introducing of middleware can in production in enormous quantities, reduce cost and improve production efficiency and product quality.
Description of drawings
According to accompanying drawing and embodiment the utility model is done further explain below.
Fig. 1 is the physical construction encapsulation figure of the utility model.
Fig. 2 is the middleware unit encapsulating structure figure of the utility model.
Fig. 3 isolates the structural drawing of solid-state pressure resistance type chip for the silicon of the utility model.
Fig. 4 isolates the Wheatstone bridge measuring principle figure that solid-state pressure resistance type chip is formed for the silicon of the utility model.
Embodiment
As shown in Figure 1, the utility model is isolated (SOI) solid-state pressure resistance type chip 3, O-ring seal 4, card extender 6, pressure ring 8, card extender 9, spun gold 5, adapter cable 7, outlet cable 10, locking member 11 etc. by architecture housing 1, middleware 2, microminiaturized silicon and is formed.During encapsulation; At first carry out isolating the encapsulation of the middle sensitive element unit that (SOI) solid-state pressure resistance type chip 3, card extender 6, lead 7 form by middleware 2, microminiaturized silicon; After the sensitive element unit package is good; Packaged sensitive element unit is installed in the O-ring seal 4 dress people structure housing 1, and sensing unit in the middle of the pressure ring 8 of packing into is fixed is packed card extender 9 into and is fixed with glue in the pressure ring; Lead 7 is soldered on the card extender 9, and cable 10 respective lead are welded on card extender 9 respective pad through drawing after locking member 11 lockings.During working sensor, the pressure of medium is isolated on the sensitive element of (SOI) solid-state pressure resistance type chip 3 through the microminiaturized silicon that tracting pressuring hole acts on the integrated glass silicon cup, and sensitive element is exported the voltage signal with pressure correlation under the pressure effect in the external world.
With reference to Fig. 2, the structural principle of the sensitive element unit package of the utility model is: the glass silicon cup with integrated packaged microminiaturized silicon isolation (SOI) solid-state pressure resistance type chip 3 is encapsulated on the middleware through the glass dust sintering process; Card extender is fixed on the installation site of middleware design with glue.By being encapsulated in after microminiaturized silicon on the glass silicon cup isolates the corresponding pad welding of spun gold 5 that (SOI) solid-state pressure resistance type chip 3 draws and card extender 6, lead 7 is soldered on the corresponding pad of card extender.At last, O-ring seal 4 is installed in the sensitive element unit be pressed in the stainless steel structure structure housing 1, be fixed and clamped, realize sealing and fixing with pressure ring 8.
With reference to Fig. 3; Silicon is isolated (SOI) solid-state pressure resistance type chip 3 and is formed the Hui Sideng measuring bridge by four resistance R 1, R3, R2 and R4, and resistance R 1, R3, R2 and R4 couple together through pressure welding point 12, pressure welding point 13, pressure welding point 14, pressure welding point 15, the pressure welding point 16 that lead-in wire is formed respectively.Through pressure welding point, pressure welding lead-in wire 5 has been realized outer lead in the sensor chip.Four resistance R 1, R3, R2 and R4 of Hui Sideng measuring bridge maximally utilise the piezoresistive effect of silicon semiconductor along the edge of cup structure, measure sensitivity to improve it.
With reference to Fig. 4; When measuring resistance R1, R3, R2 and R4 being formed open loop Hui Sideng circuit through pressure welding point and pressure welding lead-in wire; Pressure welding point 12 lead-in wire for power supply just; Pressure welding point 15 is power-with pressure welding point 16 lead-in wires, and pressure welding point 13 is to link to each other the output of sensor with an end of spun gold 5 with pressure welding point 14 lead-in wires.
Claims (5)
1. automobile engine oil pressure transducer based on MEMS technology; Comprise a structure housing (1); It is characterized in that the inside of structure housing (1) is equipped with the middle sensitive structure unit that has sensitive element, card extender (6) and O-ring seal (4) that is positioned on the middleware (2), disposes the integrated silicon that is encapsulated on the glass silicon cup in the middle sensitive structure unit and isolates solid-state pressure resistance type chip (3); One end of spun gold (5) is isolated solid-state pressure resistance type chip (3) with silicon and is linked to each other; The other end of spun gold (5) links to each other with card extender (6), and lead (7) links to each other card extender (9), and the same card extender of lead (10) (9) is welded to connect; Locking mechanism (11) locking shell of structure housing (1), middleware (2) is realized sealing with structure housing (1) through O-ring seal (4).
2. according to the said a kind of automobile engine oil pressure transducer of claim 1 based on the MEMS technology; It is characterized in that; Said silicon is isolated solid-state pressure resistance type chip (3) and is formed the Hui Sideng measuring bridge by four resistance R 1, R3, R2 and R4, and resistance R 1, R3, R2 and R4 couple together through pressure welding point (12), pressure welding point (13), pressure welding point (14), pressure welding point (15), the pressure welding point (16) that lead-in wire is formed respectively.
3. according to the said a kind of automobile engine oil pressure transducer of claim 1 based on the MEMS technology; It is characterized in that; Adopt middleware (2), and said middleware (2) is isolated solid-state pressure resistance type chip (3), card extender (6), lead (7) and seal (4) by silicon and is formed.
4. according to the said a kind of automobile engine oil pressure transducer of claim 1, it is characterized in that said card extender (6) switching silicon is isolated solid-state pressure resistance type chip (3) and is connected with the electrical equipment of outer lead based on the MEMS technology.
5. according to the said a kind of automobile engine oil pressure transducer of claim 1, it is characterized in that said structure housing (1) and middleware (2) are the stainless steel element based on the MEMS technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203940190U CN202420750U (en) | 2011-10-17 | 2011-10-17 | Automobile machine oil pressure transducer based on MEMS technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203940190U CN202420750U (en) | 2011-10-17 | 2011-10-17 | Automobile machine oil pressure transducer based on MEMS technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202420750U true CN202420750U (en) | 2012-09-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203940190U Expired - Lifetime CN202420750U (en) | 2011-10-17 | 2011-10-17 | Automobile machine oil pressure transducer based on MEMS technology |
Country Status (1)
| Country | Link |
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| CN (1) | CN202420750U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980692A (en) * | 2012-11-19 | 2013-03-20 | 西安微纳传感器研究所有限公司 | High-temperature impact-pressure-resistant sensor and production method thereof |
| CN103615530A (en) * | 2013-11-28 | 2014-03-05 | 盛瑞传动股份有限公司 | Automotive pressure transducer used for transmission |
| CN104236789A (en) * | 2014-09-24 | 2014-12-24 | 昆山超强光电设备有限公司 | Liquid pressure sensor |
| CN107120157A (en) * | 2017-06-16 | 2017-09-01 | 芜湖瑞德机械科技有限公司 | Engine oil pressure pickup band adjusts sliding equipment |
| CN110082009A (en) * | 2019-03-26 | 2019-08-02 | 南京史利姆电子科技有限公司 | A method of the fixed diffusion silicon chip of sealing |
| CN112229567A (en) * | 2020-11-04 | 2021-01-15 | 麦克传感器股份有限公司 | Pressure sensor testing device with automatic air pressure compensation sealing function |
-
2011
- 2011-10-17 CN CN2011203940190U patent/CN202420750U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980692A (en) * | 2012-11-19 | 2013-03-20 | 西安微纳传感器研究所有限公司 | High-temperature impact-pressure-resistant sensor and production method thereof |
| CN102980692B (en) * | 2012-11-19 | 2015-08-19 | 西安微纳传感器研究所有限公司 | Shock-resistant pressure transducer of a kind of high temperature and preparation method thereof |
| CN103615530A (en) * | 2013-11-28 | 2014-03-05 | 盛瑞传动股份有限公司 | Automotive pressure transducer used for transmission |
| CN104236789A (en) * | 2014-09-24 | 2014-12-24 | 昆山超强光电设备有限公司 | Liquid pressure sensor |
| CN107120157A (en) * | 2017-06-16 | 2017-09-01 | 芜湖瑞德机械科技有限公司 | Engine oil pressure pickup band adjusts sliding equipment |
| CN110082009A (en) * | 2019-03-26 | 2019-08-02 | 南京史利姆电子科技有限公司 | A method of the fixed diffusion silicon chip of sealing |
| CN112229567A (en) * | 2020-11-04 | 2021-01-15 | 麦克传感器股份有限公司 | Pressure sensor testing device with automatic air pressure compensation sealing function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120905 |
|
| CX01 | Expiry of patent term |