CN202837812U - Lens group for stepping-type exposure machine - Google Patents
Lens group for stepping-type exposure machine Download PDFInfo
- Publication number
- CN202837812U CN202837812U CN201220569958.9U CN201220569958U CN202837812U CN 202837812 U CN202837812 U CN 202837812U CN 201220569958 U CN201220569958 U CN 201220569958U CN 202837812 U CN202837812 U CN 202837812U
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- ring
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- gas
- lens group
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Abstract
The utility model relates to a lens group for a stepping-type exposure machine. The lens group comprises a casing, a plurality of lenses and an air spraying ring, wherein the plurality of lenses are arranged in the casing sequentially according to an optical path and comprise one lens; the air spraying ring is arranged in the casing and is positioned on the rear side of the lens; and a plurality of air spraying outlets are formed on the surface of the inner side of the air spraying ring and are capable of spraying out air so as to form an air curtain in a ring inner space of the air spraying ring. Thus, air particles leaking from the fine seams of the casing are prevented from polluting the lenses.
Description
Technical field
The utility model relates to a kind of lens group, particularly a kind of lens group that is applied to step-by-step exposure machine in the manufacture of semiconductor.
Background technology
In semi-conductive micro-photographing process, common Exposure mode roughly can be divided into contact exposure (contact print), close induction type exposure (proximity print) and projection exposure (project ion print).Wherein, projection exposure tends to carry out with step-by-step exposure machine.Its principle is the element structure graph that will prepare to be formed on the semiconductor crystal wafer, be produced on the light shield with certain magnification ratio first, then again the figure on the light shield, reduced projection is to semiconductor crystal wafer, and the required pattern of photoresist layer formation that is being coated with in advance.Because can make quite a lot of group integrated circuit on the block semiconductor wafer, therefore after a zone is studied carefully in exposure each time, can see through step-by-step movement and move, be exposed in another piece zone on the wafer again, until exposure program is all finished on the surface of monoblock semiconductor crystal wafer.
Because when carrying out micro-photographing process, usually deposit in advance or be coated with many material layers and photoresistance on the semiconductor crystal wafer, therefore in the process of whole little shadow exposure, often be flooded with a large amount of chemical gas and particulate in the reaction chamber, and can be infected with in the surface of the lens group of step-by-step exposure machine.Although most exposure machine all can coat with enclosed shell the eyeglass of lens group, inevitably, above-mentioned chemical gas and particulate in processing procedure, or can be penetrated among the lens group by the seam of shell, and adhere to and stick in lens surface.If things go on like this, just can affect the optical characteristics of eyeglass module, for example cause the bad refraction of light.The eyeglass higher to some susceptibility particularly, small pollution just can significantly be lowered its optical performance, and causes the pattern generating gross error that exposes.
In the prior art, in order addressing the above problem, to tend to see through regular maintenance, to disassemble whole lens group, and each lens surface is cleaned.But cleaning procedure obviously can tie down the output of overall throughput too frequently.
In addition, the step-by-step exposure machine of part also adopts the mode of input gases at high pressure to prevent in the gas particles infiltration lens group.Its mode is that positive delivery nitrogen is to lens group by the shell of pipeline by lens group.But what merit attention is, because the shell of whole lens group often has a plurality of seams, the nitrogen that therefore pours into may leak along the part seam, forms air-flow at a high speed.This high velocity air often can accelerate the outer contaminate particulate of lens group on the contrary, via other wiring on the shell, infiltrates in the lens group, and causes the pollution of lens surface more serious.
Although the step-by-step exposure machine in a new generation, attempted seeing through the design of can, prevent that lens group is subject to the infiltration of contaminate particulate, but for the step-by-step exposure machine in still using on the present product line, it still faces the problem of above-mentioned chemical gas particle contamination lens surface.In view of this, so the inventor wishes to provide a kind of design of improvement, effectively to address the above problem.
The utility model content
In order to solve defects of the prior art, the utility model provides a kind of lens group that is applied to step-by-step exposure machine, this lens group contains jet ring, can spray gas space in the ring of jet ring and form a gas curtain, prevents the gas particles pollution eyeglass that is leaked into by the shell finedraw.
The utility model for the technical scheme that solves its technical matters employing is: a kind of lens group that is applied to step-by-step exposure machine, be applied in the step-by-step exposure machine, and main element comprises a shell; A plurality of eyeglasses sequentially are arranged in this shell according to the optical path of setting; An and jet ring, be arranged in this shell, and be arranged at the rear side of De Yi Mirror sheet in these a plurality of eyeglasses, circumferential outer rim and this outer casing inner wall of this jet ring are tightly connected, the ring inner surface of this jet ring is provided with a plurality of puff prots, and this puff prot can spray gas stops the gas particles that is leaked into by the shell finedraw in the ring inner space formation one of this jet ring gas curtain.
This jet ring can be divided into semi-ring and lower semi-ring, and semi-ring and this time semi-ring are all hollow structure on this, and has separately an inner space.
These a plurality of puff prots are arranged on the ring inner surface of semi-ring on this, and are communicated in the inner space of semi-ring on this.
Also comprise a gas transmission line, be arranged on the anchor ring of semi-ring, and be communicated with the inner space of semi-ring on this that this gas transmission line can transport gas extremely be somebody's turn to do the upward inner space of semi-ring, and outwards sprays gas by these a plurality of puff prots.
This gas transmission line comprises: a cylindric air intake opening, be erected on the anchor ring of semi-ring on this, and extraneous gas can be poured into semi-ring on this; The delivery pipe of one bending, the anchor ring of semi-ring distributes on this, and the front opening of delivery pipe just in time is communicated with the hole on the cylindric air intake opening tube wall; And a plurality of communicating pipes, being evenly distributed on the anchor ring of semi-ring on this, the upper end open of each communicating pipe is communicated with this crooked delivery pipe, and the lower ending opening of each communicating pipe is communicated with the inner space of semi-ring on this.
The ring inner surface of this time semi-ring is provided with a plurality of air entries for sucking gas, and this air entry is communicated in the inner space of this time semi-ring, gas can be sucked.
Also comprise the pipeline of bleeding, be arranged on the anchor ring of lower semi-ring, and be communicated with the inner space of this time semi-ring that this pipeline of bleeding can detach the gas of this time semi-ring inner space.
This pipeline of bleeding comprises: a cylindric bleeding point is erected on the anchor ring of this time semi-ring; The delivery pipe of one bending, along the anchor ring distribution of this time semi-ring, the front opening of delivery pipe just in time is communicated with the hole on the cylindric bleeding point tube wall; And a plurality of communicating pipes, be evenly distributed on the anchor ring of this time semi-ring, the upper end open of each communicating pipe is communicated with this crooked delivery pipe, and the lower ending opening of each communicating pipe is communicated with the inner space of this time semi-ring, in order to can detach via the gas of this cylindric bleeding point with this time semi-ring inner space.
This eyeglass is convex lens.
Also comprise a gas transmission line, be connected in this jet ring, this gas transmission line can transport gas to this jet ring, and outwards spray through these a plurality of puff prots.
The utility model has the advantages that, by installing one jet ring in the shell of lens group, and be arranged on to the more sensitive eyeglass rear side of contaminate particulate the gas curtain that can produce by jet ring, block the chemical gas particulate that is leaked into by the external world, stain the surface of this eyeglass.So, can effectively prevent the eyeglass in the lens group, affect its optical characteristics because of particulate contaminants, and then reduced optical characteristics and the usefulness of whole lens group.Particularly, for the step-by-step exposure machine in using on the present production line, as long as see through the design of this case, just can solve immediately problem and puzzlement that it is infiltrated the particle contamination eyeglass for a long time.
Description of drawings
About lens group described in the utility model, can show by following description and accompanying drawing to be further understood.
Fig. 1 is the intraware synoptic diagram of lens group that the utility model provides.
Fig. 2 provides the jet structure of rings synoptic diagram that is arranged at the lens group inboard in one embodiment for the utility model.
Fig. 3 provides the jet structure of rings synoptic diagram that is arranged at the lens group inboard in another embodiment for the utility model.
The main element symbol description:
1. lens group 10. shells
12. many eyeglass 14. jet rings
120. eyeglass 142. puff prots
14a. semi-ring under the upper semi-ring 14b.
144. air entry 15. gas transmission lines
15a. cylindric air intake opening 15b. delivery pipe
The pipeline 15c. communicating pipe 17. bleeds
17a. cylindric bleeding point 17b. delivery pipe
17c. communicating pipe
Embodiment
Please refer to Fig. 1, the utility model provides a kind of lens group 1 that is applied to step-by-step exposure machine.The main member of this lens group 1 comprises a shell 10, a plurality of eyeglass 12 and a jet ring 14.Described a plurality of eyeglass 12 can according to the arrangement of optical path, sequentially be arranged in the shell 10.In a plurality of eyeglasses 12 and comprise an eyeglass 120, this eyeglass 120 to be subject to especially easily the contamination of chemical gas particulate and affect and change its optical characteristics.As for, jet ring 14 also is arranged in the shell 10, and is positioned over the rear side of this eyeglass 120.
Please refer to Fig. 2, in one embodiment, described jet ring 14 can be a circular ring structure.On the ring inner surface of jet ring 14, be provided with a plurality of puff prots 142, can spray gas, and form a gas curtain at the ring inner space of jet ring 14, stop thus the chemical gas particulate that is leaked into by the shell finedraw, and reach the effect that prevents this eyeglass 120 of chemical gas particle contamination.
In one embodiment, described jet ring 14 is a hollow structure, and has an inner space.As for, a plurality of puff prots 142 are arranged on the ring inner surface of jet ring 14, and are communicated in the inner space of this jet ring 14.Thus, as long as pour into gas by the outside facing to the hollow structure of this jet ring 14, just can outwards spray via a plurality of puff prots 142.
In a preferred embodiment, see also shown in Figure 2, jet ring 14 can divide into two the part, be respectively semi-ring 14a and lower semi-ring 14b.As for, a plurality of puff prots 142 then be to be arranged on the ring inner surface of semi-ring 14a, and the emission direction of a plurality of puff prot 142 are all towards the center of circle.Certainly, the emission direction of puff prot 142 can optionally and in addition be adjusted, for example can all be adjusted into towards under spray gas.
Please refer to Fig. 3, in another embodiment, except the ring inner surface of meeting at jet ring 14 arranges a plurality of puff prots 142, also can corresponding a plurality of air entries 144 be set at its relative ring inner surface.That is a plurality of puff prots 142 and a plurality of air entry 144 can be separately positioned on the relative both sides of jet ring 14 its ring inner surfaces.
In a preferred embodiment, jet ring 14 can be divided into two parts, is respectively semi-ring 14a and lower semi-ring 14b.Wherein, upper semi-ring 14a and lower semi-ring 14b are all hollow structure, have separately an inner space.A plurality of puff prots 142 are to be arranged on the ring inner surface of semi-ring 14a, and are communicated in the inner space of semi-ring 14a.As for, 144 of a plurality of air entries are arranged on the ring inner surface of lower semi-ring 14b, are communicated in the inner space of lower semi-ring 14b, in order to gas is sucked.As shown in FIG., be distributed in the puff prot 142 of semi-ring 14a ring inner surface, its direction is all towards the center of circle of jet ring 14.As for, be distributed in the air entry 144 that lower semi-ring 14b encircles inner surface, corresponding to puff prot 142, and direction also is the center of circle towards jet ring 14.See through the corresponding collocation of puff prot 142 and air entry 144, can in the space of jet ring 14 its annulus inboards, form a stable gas curtain, and can effectively stop the chemical gas particulate by and be attached to the surface of eyeglass 120.
What specify is, in the above-described embodiments, though be to form jet ring 14 with a circular ring structure, in actual applications, the periphery of jet ring can be made into arbitrarily shape.And, when being locked in jet ring assembling in the shell 10, can make as much as possible outer perimeter and the outer casing inner wall driving fit of jet ring, in case stopping leak enters the chemical gas particulate in the shell, infiltrate along the bonding station between jet ring and shell.
In addition, as aforementioned, a described eyeglass 120 refers to the eyeglass with respect to other, is subject to the impact of chemical gas particulate and reduces the eyeglass of optical characteristics easilier.In general, the eyeglass in whole lens group 1 has roughly comprised lens, prism and optical filter, and wherein employed convex lens just are easy to be subject to the impact of contaminate particulate, and makes the light that passes through produce bad refraction or scattering.Therefore, as shown in fig. 1, wherein this eyeglass 120 is convex lens.
See also Fig. 2, in one embodiment, described lens group 1 more comprises a gas transmission line 15, is connected in jet ring 14, in order to the inner space of transport gas to jet ring 14, sees through a plurality of puff prots 142 again and outwards sprays.
As shown in FIG., in a preferred embodiment, whole group of gas transmission line 15 can be divided into three parts, comprised delivery pipe 15b and a plurality of communicating pipe 15c of a cylindric air intake opening 15a, a bending.Wherein, cylindric air intake opening 15a stands on the anchor ring of jet ring 14, can link with the gas transmission line in the external world, by the outside gas is poured into jet ring 14.As for the delivery pipe 15b of bending, then the anchor ring along jet ring 14 distributes, and its front opening just in time is connected in the hole on the cylindric air intake opening 15a tube wall.A plurality of communicating pipe 15c then are evenly distributed on the anchor ring of jet ring 14, and the upper end open of communicating pipe 15c is communicated in delivery pipe 15b, then are communicated in the inner space of jet ring 14 as for the lower ending opening of communicating pipe 15c.So, by the gas of cylindric air intake opening 15a input, understand sequentially via delivery pipe 15b and communicating pipe 15c, and be delivered in the jet ring 14, outwards sprayed by puff prot 142 again.
As in the embodiments of figure 3, when described jet ring 14 is provided with the design of puff prot 142 and air entry 144 simultaneously, gas transmission line 15 then can be set on the anchor ring of upper semi-ring 14a, and the inner space of semi-ring 14a in the connection, in order to the inner space of the supreme semi-ring 14a of transport gas, and see through a plurality of puff prots 142 and outwards spray.In addition, then arrange and bleed pipeline 17 on the anchor ring of lower semi-ring 14b, and be communicated with the inner space of lower semi-ring 14b, in order to gas is detached lower semi-ring 14b.
In a preferred embodiment, gas transmission line 15 can be divided into three parts, has comprised delivery pipe 15b and the three communicating pipes 15c of a cylindric air intake opening 15a, a bending.Wherein, cylindric air intake opening 15a is erected on the anchor ring of semi-ring 14a, can link with the gas transmission line in the external world, provides outside gas is poured into upper semi-ring 14a.As for the delivery pipe 15b of bending, then the anchor ring along upper semi-ring 14a distributes, and its front opening just in time is connected in the hole on the cylindric air intake opening 15a tube wall.A plurality of communicating pipe 15c, the three communicating pipes 15c shown in the figure for example, then be evenly distributed on the anchor ring of semi-ring 14a, the upper end open of each communicating pipe 15c is communicated in delivery pipe 15b, and the lower ending opening of each communicating pipe 15c then is communicated in the inner space of semi-ring 14a.So, by the gas of cylindric air intake opening 15a input, can be sequentially via delivery pipe 15b and communicating pipe 15c, and be delivered to the inner space of semi-ring 14a, outwards sprayed by puff prot 142 again.
In addition, then arrange and bleed pipeline 17 on the anchor ring of lower semi-ring 14b, in order to gas is detached lower semi-ring 14b.In a preferred embodiment, gas transmission line 17 can be divided into three parts, has comprised delivery pipe 17b and a plurality of communicating pipe 17c of a cylindric bleeding point 17a, a bending.Wherein, cylindric bleeding point 17a is erected on the anchor ring of lower semi-ring 14b.As for, crooked delivery pipe 17b, then the anchor ring along lower semi-ring 14b distributes, and its front opening just in time is communicated with the hole on the cylindric bleeding point 17a tube wall.A plurality of communicating pipe 17c, three communicating pipes 17c as shown in the figure, be evenly distributed on the anchor ring of lower semi-ring 14b, the upper end open of each communicating pipe 17c wherein, be communicated with crooked delivery pipe 17b, and each should communicating pipe 17c lower ending opening be communicated with the inner space of lower semi-ring 14b, in order to via cylindric bleeding point 17a the gas of lower semi-ring 14b inner space is detached.
To specify herein, by allowing communicating pipe 15c, be distributed in uniformly on the semi-ring 14a anchor ring, can make the gas that is poured into by cylindric air intake opening 15a, be transported to uniformly the inner space of semi-ring 14a.So, can allow the flow of each puff prot 142 ejection gas identical.In like manner, by allowing communicating pipe 17c, be distributed in uniformly on the lower semi-ring 14b anchor ring, also can allow the flow of each air entry 144 suction gas identical.
Thus, need only the flow by gas in regulation and control gas transmission line 15 and the pipeline 17 of bleeding, just can control the flow velocity of puff prot 142 ejection gases, and and then allow the gas curtain that is formed at jet ring 14 inner spaces have the effect that better completely cuts off particulate.
The design of this case has suitable advantage.By the shell 10 interior installing one jet rings 14 in lens group 1, and be arranged on more sensitive eyeglass 120 rear sides of contaminate particulate, the gas curtain that can produce by jet ring 14 blocks the chemical gas particulate that is leaked into by the external world, stains the surface of eyeglass.So, can effectively prevent the eyeglass in the lens group 1, affect its optical characteristics because of particulate contaminants, and then reduced optical characteristics and the usefulness of whole lens group 1.Particularly, for the step-by-step exposure machine in using on the present production line, as long as see through the design of this case, just can solve immediately problem and puzzlement that it is infiltrated the particle contamination eyeglass for a long time.
Though the utility model is illustrated as above with preferred embodiments, so it is not to limit spirit of the present utility model and entity only terminates in above-described embodiment.The modification of doing in the spirit that does not break away from this creation and scope all should be included in the application's the protection domain.
Claims (10)
1. a lens group that is applied to step-by-step exposure machine is characterized in that, comprises:
One shell;
A plurality of eyeglasses sequentially are arranged in this shell according to the optical path of setting; And
One jet ring, be arranged in this shell, and be arranged at the rear side of De Yi Mirror sheet in these a plurality of eyeglasses, circumferential outer rim and this outer casing inner wall of this jet ring are tightly connected, the ring inner surface of this jet ring is provided with a plurality of puff prots, and this puff prot can spray gas stops the gas particles that is leaked into by the shell finedraw in the ring inner space formation one of this jet ring gas curtain.
2. lens group as claimed in claim 1 is characterized in that, this jet ring is divided into semi-ring and lower semi-ring, and semi-ring and this time semi-ring are all hollow structure on this, and have separately an inner space.
3. lens group as claimed in claim 2 is characterized in that, these a plurality of puff prots are arranged on the ring inner surface of semi-ring on this, and is communicated in the inner space of semi-ring on this.
4. lens group as claimed in claim 3 is characterized in that, also comprises a gas transmission line, is arranged on the anchor ring of semi-ring, and is communicated with the inner space of semi-ring on this, and this gas transmission line can transport gas extremely be somebody's turn to do the upward inner space of semi-ring.
5. lens group as claimed in claim 4 is characterized in that, this gas transmission line comprises:
One cylindric air intake opening is erected on the anchor ring of semi-ring on this, extraneous gas can be poured into semi-ring on this;
The delivery pipe of one bending, the anchor ring of semi-ring distributes on this, and the front opening of delivery pipe is communicated with the hole on the cylindric air intake opening tube wall; And
A plurality of communicating pipes are evenly distributed on the anchor ring of semi-ring on this, and the upper end open of each communicating pipe is communicated with this crooked delivery pipe, and the lower ending opening of each communicating pipe is communicated with the inner space of semi-ring on this.
6. lens group as claimed in claim 3 is characterized in that, the ring inner surface of this time semi-ring is provided with a plurality of air entries for sucking gas, and this air entry is communicated in the inner space of this time semi-ring.
7. lens group as claimed in claim 6 is characterized in that, also comprises the pipeline of bleeding, and is arranged on the anchor ring of lower semi-ring, and is communicated with the inner space of this time semi-ring, and this pipeline of bleeding can detach the gas of this time semi-ring inner space.
8. lens group as claimed in claim 7 is characterized in that, this pipeline of bleeding comprises:
One cylindric bleeding point is erected on the anchor ring of this time semi-ring;
The delivery pipe of one bending, along the anchor ring distribution of this time semi-ring, the front opening of delivery pipe is communicated with the hole on the cylindric bleeding point tube wall; And
A plurality of communicating pipes, be evenly distributed on the anchor ring of this time semi-ring, the upper end open of each communicating pipe is communicated with this crooked delivery pipe, and the lower ending opening of each communicating pipe is communicated with the inner space of this time semi-ring, can detach via the gas of this cylindric bleeding point with this time semi-ring inner space.
9. lens group as claimed in claim 1 is characterized in that, this eyeglass is convex lens.
10. lens group as claimed in claim 1 is characterized in that, also comprises a gas transmission line, is connected in this jet ring, this gas transmission line can transport gas to this jet ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220569958.9U CN202837812U (en) | 2012-11-01 | 2012-11-01 | Lens group for stepping-type exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220569958.9U CN202837812U (en) | 2012-11-01 | 2012-11-01 | Lens group for stepping-type exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202837812U true CN202837812U (en) | 2013-03-27 |
Family
ID=47949477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220569958.9U Expired - Fee Related CN202837812U (en) | 2012-11-01 | 2012-11-01 | Lens group for stepping-type exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202837812U (en) |
Cited By (6)
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| WO2014194478A1 (en) * | 2013-06-04 | 2014-12-11 | Luo Yi | Mist preventing apparatus for camera lens |
| WO2018041099A1 (en) * | 2016-08-30 | 2018-03-08 | 上海微电子装备（集团）股份有限公司 | Lens contamination prevention device and method |
| WO2019015687A1 (en) * | 2017-07-21 | 2019-01-24 | 上海微电子装备（集团）股份有限公司 | Objective lens protection device, objective lens system and lithographic device |
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| CN112748641A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Air curtain protection device at bottom of lens |
| CN114054964A (en) * | 2020-07-31 | 2022-02-18 | 上海微电子装备（集团）股份有限公司 | Lens protection device and photoetching machine |
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2012
- 2012-11-01 CN CN201220569958.9U patent/CN202837812U/en not_active Expired - Fee Related
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| WO2014194478A1 (en) * | 2013-06-04 | 2014-12-11 | Luo Yi | Mist preventing apparatus for camera lens |
| US10539887B2 (en) | 2016-08-30 | 2020-01-21 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Lens contamination prevention device and method |
| WO2018041099A1 (en) * | 2016-08-30 | 2018-03-08 | 上海微电子装备（集团）股份有限公司 | Lens contamination prevention device and method |
| CN107783283A (en) * | 2016-08-30 | 2018-03-09 | 上海微电子装备（集团）股份有限公司 | Eyeglass environmental control system and method |
| CN107783283B (en) * | 2016-08-30 | 2020-01-24 | 上海微电子装备（集团）股份有限公司 | Lens anti-pollution device and method |
| EP3508920A4 (en) * | 2016-08-30 | 2019-09-04 | Shanghai MicroElectronics Equipment (Group) Co., Ltd. | Lens contamination prevention device and method |
| CN109283797A (en) * | 2017-07-21 | 2019-01-29 | 上海微电子装备（集团）股份有限公司 | Object lens protective device, objective system and lithographic equipment |
| WO2019015687A1 (en) * | 2017-07-21 | 2019-01-24 | 上海微电子装备（集团）股份有限公司 | Objective lens protection device, objective lens system and lithographic device |
| KR20200022498A (en) * | 2017-07-21 | 2020-03-03 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | Objective lens protectors, objective lens systems and lithographic apparatus |
| TWI704423B (en) * | 2017-07-21 | 2020-09-11 | 大陸商上海微電子裝備（集團）股份有限公司 | Objective lens protection device, objective lens system and photoetching equipment |
| US10983448B2 (en) | 2017-07-21 | 2021-04-20 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Objective lens protection device, objective lens system and lithographic device |
| CN109283797B (en) * | 2017-07-21 | 2021-04-30 | 上海微电子装备（集团）股份有限公司 | Objective lens protection device, objective lens system and lithographic apparatus |
| KR102370165B1 (en) * | 2017-07-21 | 2022-03-04 | 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 | Objective Lens Protector, Objective Lens System and Lithographic Apparatus |
| CN110554570A (en) * | 2018-05-31 | 2019-12-10 | 上海微电子装备（集团）股份有限公司 | Pollution control device and method, objective system and photoetching machine equipment |
| CN112748641A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Air curtain protection device at bottom of lens |
| CN114054964A (en) * | 2020-07-31 | 2022-02-18 | 上海微电子装备（集团）股份有限公司 | Lens protection device and photoetching machine |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130327 Termination date: 20141101 |
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