CN203339120U - An air inflation purifying system of a wafer/ photomask sealing carrier - Google Patents
An air inflation purifying system of a wafer/ photomask sealing carrier Download PDFInfo
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- CN203339120U CN203339120U CN2013203404281U CN201320340428U CN203339120U CN 203339120 U CN203339120 U CN 203339120U CN 2013203404281 U CN2013203404281 U CN 2013203404281U CN 201320340428 U CN201320340428 U CN 201320340428U CN 203339120 U CN203339120 U CN 203339120U
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- 238000007789 sealing Methods 0.000 title abstract 3
- 238000012545 processing Methods 0.000 claims abstract description 26
- 238000004140 cleaning Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 26
- 230000001105 regulatory effect Effects 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 13
- 238000012546 transfer Methods 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 6
- 239000002912 waste gas Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 230000003749 cleanliness Effects 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 8
- 239000000126 substance Substances 0.000 description 9
- 238000003860 storage Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 6
- 238000011068 loading method Methods 0.000 description 6
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 101000931462 Homo sapiens Protein FosB Proteins 0.000 description 2
- 102100020847 Protein FosB Human genes 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses an air inflation purifying system of a wafer/ photomask sealing carrier and especially relates to an air inflation purifying system, of a wafer/ photomask sealing carrier, capable of controlling air intake speed and achieving a high clean effect. The air inflation purifying system comprises at least one inflating module, an air supplying module, an air exhausting module, and a processing module. The inflating module is provided with at least one inlet valve connected with the air supplying module and at least one exhaust valve connected with the air exhausting module. A flow adjusting valve and a pressure flowmeter are disposed on an air intake loop between the air supplying module and the inlet valve. The flow adjusting valve is connected with the processing module in parallel. Thus, when the carrier is inflated on the inflating module, the air supplying state of the inflating module can be detected and displayed by the processing module and the flow and the pressure of the inflating module can be adjusted according to an actual condition. Therefore, the air inflation of the carrier can be completely rapidly and the incoming and outgoing stability of the clean air in the carrier is maintained so that the cleanliness in the carrier is enhanced.
Description
Technical field
The utility model is the inflation technical field about a kind of wafer/light shield sealed type carrier, specifically the inflation cleaning system of a kind of wafer/wafer that can effectively control and manage inflating condition/light shield sealed type carrier, increase the wafer yield to reach, improve output and the effect reduced costs.
Background technology
Electronic product is constantly towards compact, high frequency, the characteristic such as high-effect development, and wish meets the direction of this production development, core wafer for electronic product just needs microminiaturization and has high-effect, and want to make the wafer microminiaturization and tool high-effect, need to make the integrated circuit wire diameter miniaturization on wafer.Be subject to the impact cheaply of integrated circuit miniaturization and system, the size of wafer is increasing, but the wafer number of each wafer is more and more, wafer worth is constantly improved, so in technique, any problem on wafer all may cause great loss.
But wafer current/light shield is in making, clean, operation and storage, in the process of transportation, no matter be placed in the transfer container of accommodating wafer/light shield or the environment of dust free room, all have many particulates, aqueous vapor, gas, the harmful substances such as chemical solvent molecule, these harmful substances can be attached to wafer or light shield surface, and after the heating through long-time storage or exposure technology, can adhere in wafer or light shield surface generation particulate, crystallization, again or the phenomenon such as atomization, the light shield of take is applied to the gold-tinted lithography process as example, it can directly have influence on the light transmittance of light shield, and then make the aliasing on light shield, the phenomenon that it can cause the wafer yield to reduce, and increase cleaning and the time of improving, cause output to reduce, relatively go up the cost that also can improve operation,
Therefore, in order to address this problem, and in semiconductor technology, use automatic material transport system [Automated Material Handling System, AMHS], with isolation input and output material SMIF [Standard Mechanical Interface, SMIF] equipment, carry out light shield in the maintenance between the operating period not with transport, not only can replace the Traditional Man carrying, reduce building and maintenance cost of dust free room equipment, can also promote the cleanliness factor of light shield, reach superelevation and produce yield, therefore in recent years, it is the standard device standard of international semiconductor factory that AMHS and SMIF have been listed in.
According to above-mentioned technological concept, except when exposure is used, wafer and light shield are between the process of transporting or storage life, all wafer or light shield must be placed on to a high-cleanness, high, good and the low gas of air-tightness is overflowed in the carrier of [Outgassing], as wafer transfer box [FOUP], wafer transport case [FOSB], light shield transmits box [Reticle SMIF Pod, RSP], for example United States Patent (USP) US 4, 532, No. 970 and United States Patent (USP) US 4, 534, the wafer of No. 389, light is put airtight transfer system, effectively prevent that wafer and light shield from being polluted, so that the particulate of guaranteeing the Zhou Yuanhuan border is unlikely, enter in the environment that is close to light shield and wafer.
According to above-mentioned technological concept, except when exposure is used, light shield is between the process of transporting or storage life, all must be placed on good, the low gas of a high-cleanness, high, air-tightness overflow [Outgassing] transmit box [Reticle SMIF Pod with the light shield of antistatic protection [ESD], RSP] in, to prevent that wafer and light shield from being polluted, guarantee the high-cleanness, high and the high yield of producing of light shield.
And in order to improve the cleanliness factor of aforementioned sealed type carrier, usually can be in aforementioned sealed type carrier the clean inert gas of filling [as nitrogen (N
2)], to reduce causing harm of pernicious gas, so be limited to the problem of carrier air-tightness deficiency, usually over time, can be because gas leakage loses effect, therefore industry is further developed the gas charging system that injection circulation clean gas is arranged in recent years.Precisely because can't effectively control its inflation rate and effect, also can't effectively keep the balance of its inlet, outlet, reduce its clean effect, can't meet the demand of long-time storage.Moreover, those existing is in order to work conveniently, its gas charging system is not had management design usually, cause the continuous continuity of its gas to discharge, cause unnecessary inert gas waste, not only increase material cost, a large amount of inert gases enters in operational environment simultaneously, also can staff's health be threatened.In other words, how developing the system that a kind of inflation rate is good and can control for management, is considerable problem.
The utility model content
In view of this, the utility model is to solve above-mentioned wafer/light shield and can't keeps for a long time clean problem.
In order to solve the problems of the technologies described above, the utility model provides the inflation cleaning system of a kind of wafer/light shield sealed type carrier, can't maintain for a long time the problem of cleanliness factor so as to overcoming those existing, further increases the usefulness of inflation management.
The utility model provides the inflation cleaning system of a kind of wafer/light shield sealed type carrier, and its sealed type carrier at least one accommodating wafer or light shield carries out circulation inflatable, and this system includes:
At least one inflation module, be arranged with at least one air inlet valve member on this inflation module, and separately be arranged with at least one exhaust valve member on this inflation module;
One provides the air feed module of clean inert gas, this air feed module utilizes the inlet manifold of an air inlet pipeline and the described inflation module of at least one connection to form an air inlet loop, wherein this inlet manifold connects the air inlet valve member of inflation module, and this correspondence is respectively inflated on the inlet manifold of module the differential pressure flow meter that flow rate regulating valve and that string respectively is provided with a control flow detects flow air pressure again;
One for the exhaust module that reclaims waste gas, and this exhaust module utilizes the exhaust manifold of exhaust manifolds and the described inflation module of at least one connection to form an exhausting loop, and wherein this inlet manifold connects the air inlet valve member of inflation module;
One processes module, this is processed module and is connected with flow rate regulating valve and the differential pressure flow meter of air feed module respectively, receive it and detect signal and data, and process module and be connected with one and control the man-machine interface of flow rate regulating valve, and process module and be connected with the display unit that a demonstration pressure flow counts;
The air inlet valve member that this carrier has corresponding inflation module intake valve part and an exhaust valve member with give vent to anger valve member, group forms one to be made to inflate module carrier thereon carries out the inflation cleaning system of the wafer of circulation inflatable/light shield sealed type carrier to setting.
As optimal technical scheme, this inflation module surface is provided with a plurality of confessions and detects carrier whether with regard to the location sensing member of aerating position, and this location sensing member is connected to the processing module.
As optimal technical scheme, be arranged with the less radio-frequency read element of a radio frequency identification system on this inflation module, and the less radio-frequency read element is connected to the processing module, and carrier is provided with corresponding radio frequency label.
As optimal technical scheme, this air feed module is provided with the main flow control valve of a controllable flow rate and pressure in air inlet pipeline, and main flow control valve is connected to the processing module.
As optimal technical scheme, this exhaust module is respectively equipped with one for the element that detects that detects extraction flow on exhaust manifold, and this detects element and is connected to the processing module.
As optimal technical scheme, this processing module connects one and carries out the far-end computer of system monitoring in far-end for the staff.
As optimal technical scheme, this carrier is that wafer transfer box, wafer transport case or light shield transmit box.
The utility model also provides a kind of inflation cleaning system, and gas is connected to one wafer/light shield sealed type carrier, it is characterized in that, this system includes:
One inflation module, gas is connected to this wafer/light shield sealed type carrier;
The one air feed module that provides an inert gas to give this inflation module, this air feed modular gas is connected to this inflation module; And
One controls the flow of this inert gas that flows into this inflation module and/or the processing module of pressure, and this processing module is electrically connected to this air feed module.
As optimal technical scheme, the flow rate regulating valve and that this air feed module has a control flow detects the differential pressure flow meter of flow air pressure, is electrically connected to respectively this processing module.
The utility model can reach following technique effect:
The inflation cleaning system of the wafer that can maintain for a long time cleanliness factor that the utility model provides/light shield sealed type carrier, make wafer/light shield in storage process, can guarantee that particulate, harmful substance do not contact and be attached to wafer or light shield film surface, and then the lifting process yield.
The utility model provides the inflation cleaning system of a kind of controllable wafer/light shield sealed type carrier, so as to accelerating inflation rate, and maintain the balance of inlet, outlet and stablize, and further can control and manage for far-end, promote the usefulness of integrated artistic management, and can reduce the waste of gas material.
The inflation cleaning system of wafer of the present utility model/light shield sealed type carrier is when application, when carrier is placed in inflation while being inflated on module, can detect and show the air feed situation of inflating module by processing module, and adjust its flow and pressure according to actual state, and can complete rapidly the inflation of carrier, and keep advancing of inside carrier clean gas, go out stability, effectively improve its inner cleanliness factor, can guarantee particulate, harmful substance does not contact and is attached to wafer or light shield film surface, and then lifting process yield, can reduce the waste of gas simultaneously, avoid having influence on staff's health, and can be for far-end warning monitoring, make wafer/light shield in storage process, its storage condition can effectively be monitored, promote the usefulness of integrated artistic management.
The accompanying drawing explanation
The schematic appearance of the inflation cleaning system that Fig. 1 is wafer of the present utility model/light shield sealed type carrier, it illustrates aspect and the relativeness thereof of each assembly.
The schematic appearance of the inflation cleaning system pilot group device that Fig. 2 is wafer of the present utility model/light shield sealed type carrier.
The generalized section of inflation cleaning system before covering that Fig. 3 is wafer of the present utility model/light shield sealed type carrier.
The generalized section of inflation cleaning system after covering that Fig. 4 is wafer of the present utility model/light shield sealed type carrier.
[main element symbol description]
10, inflation module; 11, air inlet valve member;
12, exhaust valve member; 13, location sensing member;
20, air feed module; 21, air inlet pipeline;
22, main flow control valve; 25, inlet manifold;
26, flow rate regulating valve; 27, differential pressure flow meter;
30, exhaust module; 31, exhaust manifolds;
32, exhaust manifold; 35, detect element;
40, process module; 41, man-machine interface;
42, display unit; 45, far-end computer;
50, inflating seat; 51, loading plate;
52, posting; 53, inlet suction port;
54, exhaust joint; 60, carrier;
65, air inlet valve member; 66, the valve member of giving vent to anger.
Embodiment
The utility model is the inflation cleaning system of a kind of wafer/light shield sealed type carrier, in the illustrative the utility model specific embodiment of the figure that encloses and member thereof, all about front and rear, left and right, top and bottom surface, top and bottom and level and vertical reference, only for conveniently being described, and unrestricted the utility model, also non-its member is limited to any position or direction in space.Specified size in graphic and specification, when can, in not leaving protection range of the present utility model, being changed according to design and the demand of specific embodiment of the utility model.
The detailed formation of the inflation cleaning system of the utility model wafer/light shield sealed type carrier, please refer to Fig. 1,2 shown, it can supply wafer transfer box [FOUP], wafer transport case [FOSB], light shield to transmit box [Reticle SMIF Pod, RSP] etc. sealed type carrier 60 application of wafer/light shield, and carrier 60 is provided with at least one air inlet valve member 65 and at least one valve member 66 of giving vent to anger, this inflation cleaning system includes at least one inflation module 10, an air feed module 20, an exhaust module 30 and a processing module 40.
Be arranged with at least one air inlet valve member 11 on this inflation module 10, and be arranged with in addition at least one exhaust valve member 12 on this inflation module 10, inflate again module 10 surfaces and be provided with a plurality of location sensing member 13, for whether detecting carrier 60 with regard to aerating position, moreover further can be arranged with a data transmission element on this inflation module 10, in the present embodiment, this data transmission element can be for example less radio-frequency read element [not shown in the figures] of a typical radio radio-frequency recognition system, but not as limit.This less radio-frequency read element can be for transmission and the relevent information that reads radio frequency label on carrier 60.
This air feed module 20 can provide clean inert gas [as nitrogen (N again
2)], and air feed module 20 utilizes the inlet manifold 25 of an air inlet pipeline 21 and the aforementioned inflation module 10 of a plurality of connection to form an air inlet loop, wherein the air inlet valve member 11 of module 10 is inflated in this inlet manifold 25 connection, air feed module 20 is provided with the main flow control valve 22 of a controllable flow rate and pressure in air inlet pipeline 21 again, moreover the flow rate regulating valve 26 and that on corresponding inlet manifold 25 of respectively inflating module 10, string is provided with a control flow respectively detects the differential pressure flow meter 27 of flow air pressure.
Another exhaust module 30 can be for reclaiming waste gas, this exhaust module 30 utilizes the exhaust manifold 32 of exhaust manifolds 31 and the aforementioned inflation module 10 of a plurality of connection to form an exhausting loop, wherein the exhaust valve member 12 of module 10 is inflated in this exhaust manifold 32 connection, exhaust module 30 is respectively equipped with one and detects element 35 on exhaust manifold 32 again, for the flow that detects exhaust.
Moreover, this process module 40 respectively with the main flow control valve 22 of air feed module 20, connect the flow rate regulating valve 26 and differential pressure flow meter 27 of respectively inflating module 10, and the element 35 that detects of exhaust module 30 connects, and process location sensing member 13 and less radio-frequency reader that module 40 further connects inflation module 10, detect signal and data for receiving it, and process module 40 and be connected with a man-machine interface 41, to control and to adjust pressure size and the flow rate of main flow control valve 22 and flow rate regulating valve 26, and process module 40 and be connected with a display unit 42, for showing differential pressure flow meter 27 and detecting the data that element 35 predicts, moreover processing module 40 further connects far-end computers 45, carry out the monitoring of system in far-end for the staff.
Whereby, make inflation module 10 to carry out circulation inflatable to the carrier 60 arranged thereon, allow clean inert gas constantly inject in carrier 60 under condition that can be monitored, not only can avoid outer particle and harmful substance to enter, take away harmful substance, and the interior environment of control carrier 60, thereby improve the cleanliness factor in carrier 60 interior spaces, more can under monitored situation, open, close or adjust flow and the pressure of air feed module, thereby group forms an intelligent inflation cleaning system, overcome the problems such as gas waste that existing gas charging system continuity air feed causes and aggravating working environment.
As for practical application of the present utility model, as Fig. 1, shown in 2, when usining bottom tool light shield while transmitting box as the main embodiment of carrier 60, but system framework of the present utility model transmits the inflating seat 50 of box in a light shield, this inflating seat 50 has a plurality of loading plates 51, and loading plate 51 edges are provided with a plurality of postings 52 for carrier 60 location, loading plate 51 surfaces are provided with two air inlet valve members 11 and two exhaust valve members 12 again, moreover further be provided with a plurality of location sensing member 13 on loading plate 51, for detecting the whether smooth setting of carrier 60, moreover the inlet suction port 53 and that is respectively equipped with this air inlet valve member 11 of a connection on the loading plate 51 of inflating seat 50 is communicated with the exhaust joint 54 of this exhaust valve member 12, wherein inlet suction port 53 is connected respectively air feed module 20 and exhaust module 30 with exhaust joint 54,
And during practical operation, as Fig. 2, 3, shown in 4, each carrier 60 sequentially is placed on corresponding inflating seat 50, make the air inlet valve member 11 that 65 pairs of this carrier 60 air inlet valve members should inflating seat 50 inflation modules 10, carrier 60 give vent to anger valve member 66 to should inflating seat the exhaust valve member 12 of 50 inflation modules 10, the location sensing member 13 of inflating modules 10 when this inflating seat 50 detects carrier 60 with regard to after locating, then by processing module 40 startups to the flow rate regulating valve 26 on should the inlet manifold 25 of inflating mold group 10, so that clean inert gas to be provided, and discharged by exhaust module 30 through exhaust valve member 12, for carrying out circulation inflatable,
In use procedure, can obtain the differential pressure flow meter 27 of respectively inflating module 10 and the data that detect element 35 by processing module 40, and be shown on display unit 42, allow the staff carry out the flow operation by man-machine interface 41 or far-end computer 45 according to actual state, to improve inflation rate, guarantee the cyclical stability of carrier 60 internal gas, and can control and open and close by corresponding flow rate regulating valve 26 according to whether thering is carrier 60 on each inflating seat 50, to reach the effect of saving inert gas, further can control the environmental condition of carrier 60 inside, as humidity, temperature etc.
Moreover, utilize each inflation module 10 can be by differential pressure flow meter 27, detect element 35, and finely tuned by the man-machine interface 41 of processing module 40, and be presented at display unit 45 screens or far-end computer 45 monitoring, and the function of accomplishing abnormal warning.
Via the realization of aforementioned techniques means, the utility model, except aforesaid usefulness, further has more following usefulness and effect and promotes:
1, by circulation inflatable design of the present utility model, make carrier 60 inner spaces keep barotropic state, therefore outside particulate, hydrone etc. can't enter in this carrier 60, therefore be applied to carrier 60 of the present utility model not under the condition of the special air tightness of tool, still can effectively guarantee to transfer the cleanliness factor of environment in container, so can reduce design, manufacture and the assembly cost of carrier 60.
2, because the utility model can be taken the interior hydrone of carrier 60, particulate and harmful substance rapidly out of, and constantly inject clean gas, make these carrier 60 internal environments remain for a long time clean, the particulate that reduces wafer/light shield surface adheres to and the phenomenons such as atomization, crystallization, what wafer while preventing subsequent technique/light shield generation can not be expected is stained, can effectively promote yield, and reduce the cleaning of wafer/light shield and the time of heavy industry, can increase output, and cut operating costs.
3, again the utility model by the circulation clean gas of suitable flow and pressure is provided under the monitoring condition of processing module, can further accelerate disengaging of the harmful substances such as carrier 60 material medium sulphide contents and ammonia, simultaneously according to the needs of different process, control its internal environment by the gas injected in advance, as humidity, temperature, even special process gas or material etc., with the handling process that reduces subsequent technique the consumption of saving clean gas, but still can promote yield and cut operating costs.
4, brought forward is described, because the utility model can maintain and cleanliness factor and the stability of controlling carrier 60 internal environments for a long time, therefore do not need to be particularly limited a certain principle when storing wafer/light shield, as early advanced the principles such as go out morning, and reduce the number of times again cleaned, therefore can promote the convenience of wafer/light shield management, further reduce the cost of management and operation.
The above embodiment is only the preferred embodiment for absolutely proving that the utility model is lifted, and protection range of the present utility model is not limited to this.Being equal to that those skilled in the art do on the utility model basis substitutes or conversion, all within protection range of the present utility model.Protection range of the present utility model is as the criterion with claims.
Claims (9)
1. the inflation cleaning system of wafer/light shield sealed type carrier, its sealed type carrier at least one accommodating wafer or light shield carries out circulation inflatable, it is characterized in that, and this system includes:
At least one inflation module, be arranged with at least one air inlet valve member on this inflation module, and separately be arranged with at least one exhaust valve member on this inflation module;
One provides the air feed module of clean inert gas, this air feed module utilizes the inlet manifold of an air inlet pipeline and the described inflation module of at least one connection to form an air inlet loop, wherein this inlet manifold connects the air inlet valve member of inflation module, and this correspondence is respectively inflated on the inlet manifold of module the differential pressure flow meter that flow rate regulating valve and that string respectively is provided with a control flow detects flow air pressure again;
One for the exhaust module that reclaims waste gas, and this exhaust module utilizes the exhaust manifold of exhaust manifolds and the described inflation module of at least one connection to form an exhausting loop, and wherein this inlet manifold connects the air inlet valve member of inflation module;
One processes module, this is processed module and is connected with flow rate regulating valve and the differential pressure flow meter of air feed module respectively, receive it and detect signal and data, and process module and be connected with one and control the man-machine interface of flow rate regulating valve, and process module and be connected with the display unit that a demonstration pressure flow counts;
The air inlet valve member that this carrier has corresponding inflation module intake valve part and an exhaust valve member with give vent to anger valve member, group forms one to be made to inflate module carrier thereon carries out the inflation cleaning system of the wafer of circulation inflatable/light shield sealed type carrier to setting.
2. according to the inflation cleaning system of wafer claimed in claim 1/light shield sealed type carrier, it is characterized in that, this inflation module surface is provided with a plurality of confessions and detects carrier whether with regard to the location sensing member of aerating position, and this location sensing member is connected to the processing module.
3. comply with the inflation cleaning system of wafer claimed in claim 1/light shield sealed type carrier, it is characterized in that, be arranged with the less radio-frequency read element of a radio frequency identification system on this inflation module, and the less radio-frequency read element is connected to the processing module, and carrier is provided with corresponding radio frequency label.
4. according to the inflation cleaning system of wafer claimed in claim 1/light shield sealed type carrier, it is characterized in that, this air feed module is provided with the main flow control valve of a controllable flow rate and pressure in air inlet pipeline, and main flow control valve is connected to the processing module.
5. according to the inflation cleaning system of wafer claimed in claim 1/light shield sealed type carrier, it is characterized in that, this exhaust module is respectively equipped with one for the element that detects that detects extraction flow on exhaust manifold, and this detects element and is connected to the processing module.
6. according to the inflation cleaning system of wafer claimed in claim 1/light shield sealed type carrier, it is characterized in that, this processing module connects one and carries out the far-end computer of system monitoring in far-end for the staff.
7. according to the inflation cleaning system of wafer claimed in claim 1/light shield sealed type carrier, it is characterized in that, this carrier is that wafer transfer box, wafer transport case or light shield transmit box.
8. inflate cleaning system for one kind, gas is connected to one wafer/light shield sealed type carrier, it is characterized in that, this system includes:
One inflation module, gas is connected to this wafer/light shield sealed type carrier;
The one air feed module that provides an inert gas to give this inflation module, this air feed modular gas is connected to this inflation module; And
One controls the flow of this inert gas that flows into this inflation module and/or the processing module of pressure, and this processing module is electrically connected to this air feed module.
9. according to inflation cleaning system claimed in claim 8, it is characterized in that, the flow rate regulating valve and that this air feed module has a control flow detects the differential pressure flow meter of flow air pressure, is electrically connected to respectively this processing module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203404281U CN203339120U (en) | 2013-06-14 | 2013-06-14 | An air inflation purifying system of a wafer/ photomask sealing carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203404281U CN203339120U (en) | 2013-06-14 | 2013-06-14 | An air inflation purifying system of a wafer/ photomask sealing carrier |
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| CN203339120U true CN203339120U (en) | 2013-12-11 |
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| CN2013203404281U Expired - Fee Related CN203339120U (en) | 2013-06-14 | 2013-06-14 | An air inflation purifying system of a wafer/ photomask sealing carrier |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109290321A (en) * | 2017-07-25 | 2019-02-01 | 春田科技顾问股份有限公司 | Blowing-out device and blowing-out method for loading port |
| CN109298737A (en) * | 2017-07-25 | 2019-02-01 | 华景电通股份有限公司 | The control method of wafer inflation load platform |
-
2013
- 2013-06-14 CN CN2013203404281U patent/CN203339120U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109290321A (en) * | 2017-07-25 | 2019-02-01 | 春田科技顾问股份有限公司 | Blowing-out device and blowing-out method for loading port |
| CN109298737A (en) * | 2017-07-25 | 2019-02-01 | 华景电通股份有限公司 | The control method of wafer inflation load platform |
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