TWM456582U - Inflation base structure of reticle SMIF pod - Google Patents

Description

Inflator structure of reticle transfer box

The present invention relates to a ventilating seat technology for a reticle transfer box, and more particularly to an embossing seat structure for preventing a hood transfer box from being exposed by a gas guiding line, thereby increasing capacity and improving the convenience of operation.

According to the influence of the development of electronic products on the characteristics of light, short, high-frequency, high-efficiency, etc., the core chips used in electronic products are also miniaturized and highly efficient, and in order to make the wafers miniaturized and highly efficient, It is necessary to make the integrated circuit wire diameter on the wafer fine. Due to the miniaturization of the integrated circuit and the reduction of the manufacturing cost, the size of the wafer is getting larger and larger, but the number of wafers per wafer is increasing, so that the value of the wafer is continuously increased, so the wafer is processed in the process. Any problem can cause great losses. The success of the miniaturization of the integrated circuit on the wafer is mainly due to the yellow lithography process technology in the semiconductor process, and its key equipment is in the scanning stepper [Scanner] and the reticle [Reticle], especially on the surface of the reticle. Cleanliness is a direct impact on wafer yield.

However, in the process of production, cleaning, operation, storage and transportation of the reticle, there are many particles, moisture, gas, etc. in the environment of the carrier or the clean room in which the reticle is housed. Harmful substances such as chemical solvent molecules, which may adhere to the surface of the reticle, and after heating for a long time or exposure process, particles may adhere, crystallize, or atomize on the surface of the reticle to For example, the shadow process directly affects the light transmittance of the reticle, which in turn distort the pattern on the reticle, which causes the wafer yield to decrease, and increases the cleaning and improvement. Time, resulting in lower production, will also increase the cost of operations.

Therefore, in order to solve this problem, in the semiconductor manufacturing process, the automated material handling system (Automated Material Handling System, AMHS) is used, and the standard mechanical interface (SMIF) device is used to perform the mask without using the mask. During the maintenance and transportation, it can replace the traditional manual handling, reduce the construction and maintenance costs of the clean room equipment, and improve the cleanliness of the reticle to achieve high production yield. Therefore, in recent years, AMHS and SMIF have been Listed as the standard equipment specification for international semiconductor factories.

According to the above technical concept, in addition to the exposure, the reticle must be placed in a carrier with high cleanliness, good air tightness and low gas escaping during transportation or storage, such as Mask transfer box [Reticle SMIF Pod, RSP]. In order to improve the cleanliness of the carrier, the sealed carrier is usually filled with a clean inert gas [such as nitrogen (N2)] to reduce the harmful gas, but limited by the carrier's airtightness. The problem is that after a period of time, it will lose its effect due to air leakage. Therefore, in recent years, the industry has further developed an inflatable seat that injects a circulating clean gas, which can be designed and applied to various storage devices of the reticle transfer box. For example, the in-and-out-out station next to the process equipment, the storage cabinet for storage, the inflator cabinet or the reticle transport equipment, etc., for each of the reticle transfer boxes to be independently circulated and inflated.

The conventional inflatable seat is mainly composed of a plate body, and the inlet valve member and the exhaust valve member corresponding to the inlet and outlet gas valves of the reticle transfer box are respectively arranged, and the intake valve member is arranged therein. And through the joint parts and pipelines to the gas supply module that supplies the clean inert gas, and the exhaust valve member is connected The head part and the pipeline are connected to an exhaust module for recovering exhaust gas. However, the conventional photomask transfer box is placed up and down. Therefore, the inlet and outlet valve members are also arranged in an up-and-down manner, and the joints and pipes on the subsequent air passages are downwardly extended, so that the lower inflating is usually performed. When the seat is set, in addition to considering the space in which the reticle transfer box enters and exits, it is also necessary to consider the space for avoiding the interference between the joint and the pipeline. At present, it is necessary to increase the space by 5 to 8 cm, and the invisible space can be reduced to accommodate the reticle transfer box. Capacity.

Furthermore, the joint and the pipe need to be fixed to the bottom surface of the plate body of each of the inflatable seats by a belt or the like, and the size of the parts cannot be uniformized and simplified, so that the processing time and delivery time are increased, and the feeling of clutter is given. Moreover, due to the inconsistency of the fixing method and the position, the inconvenience of the robot arm in and out of the reticle transfer box may be caused, and a slight accident may cause collision or outline the condition of the joint and the pipeline, which affects the smoothness and efficiency of the work. Moreover, the exposed pipeline may also rupture due to external factors, causing waste of gas and even causing danger. Therefore, how to solve these problems is a very important issue.

The reason is that this creation is to solve the problems faced by the inflatable seat of the existing reticle transfer box, and through the creator's long-term experience in research and development and production of related industries, through continuous improvement, finally successfully developed a reticle transfer box. The inflatable seat structure can overcome the trouble and inconvenience caused by the existing inflatable seat due to the exposed pipeline.

Therefore, the main purpose of the present invention is to provide an inflatable seat structure of a reticle transfer box capable of increasing capacity, thereby forming an intake and exhaust circuit formed inside without an exposed pipe to reduce parts and piping. interference, The spacing between the upper and lower adjacent inflatable seats can be effectively reduced, thereby increasing the storage capacity of the same space.

Moreover, another object of the present invention is to provide an inflatable seat structure for a reticle transfer box which can improve work efficiency, thereby making the size of the parts uniform and simple, thereby saving post-processing time and delivery time, thereby improving work. Smooth and efficient.

Furthermore, another object of the present invention is to provide an inflatable seat structure of a reticle transfer case which is not easily damaged, and the overall appearance and the position of the parts are unified, so that the inconvenience of the mechanical arm entering and exiting the reticle transfer box is not caused, nor Collisions or sketches can occur to avoid gas leakage due to pipe rupture.

Based on this, the present invention mainly implements the foregoing objectives and effects through the following technical means; it can be placed in a reticle transfer box, and at least one air valve for air intake is respectively disposed on the reticle transfer box and At least one air valve for exhausting; the inflatable seat structure is formed by a carrier plate, and the carrier plate is formed with a plurality of slots corresponding to the air valve for intake, wherein the slot is provided with a lock a valve member, and a recessed intake groove is formed in a center of each of the bottom surfaces of the slots, and an intake through hole communicating with each other is formed between the intake slots of the slots, and the outlet end of the intake through hole is connected An inlet joint; a plurality of recessed grooves corresponding to the exhaust gas valve are formed on the carrier plate, and an exhaust valve member is disposed in the recessed groove, and a recessed exhaust groove is formed in a center of each of the bottom surfaces of the recessed grooves An exhaust passage opening communicating with each other is formed between the intake slots of the slots, and an exhaust joint is connected to the outlet end of the exhaust passage.

In another embodiment of the present invention, the inflatable seat structure of the present invention can be placed in a reticle transfer box, and the reticle transfer box is provided with a plurality of air valves, and the inflatable seat structure comprises a carrier plate having at least a horizontal wall surface and at least one vertical wall surface, wherein the at least one horizontal wall surface is disposed for the reticle transfer box and is gas-connected to the gas valve, the carrier plate further has: an intake through hole and an intake joint , an exhaust through hole and an exhaust connector.

Wherein the intake through hole is embedded in the carrier plate and is gas-connectable to one of the gas valves when the reticle transfer box is placed on the at least one horizontal wall surface. An intake joint is disposed on the at least one vertical wall and is in gas connection with the intake through hole. The exhaust through hole is embedded in the carrier plate and is gas-connectable to one of the gas valves when the reticle transfer box is placed on the at least one horizontal wall surface. An exhaust joint is disposed on the at least one vertical wall and is in gas connection with the exhaust through hole.

Thereby, through the foregoing technical means, the inlet and outlet through holes of the inflatable seat structure of the created reticle transfer box are respectively formed inside the carrier plate, and the inlet and outlet joints can be laterally connected to the carrier plate side. On the side, there are no parts or pipelines between the upper and lower adjacent inflatable seat plates, which can effectively save space, greatly increase the capacity of the same storage space, and can be consistent and simple due to parts, dimensions and locking positions. It can save the processing time and shorten the delivery time, and it will not cause the inconvenience of the robot arm to enter and exit the reticle transfer box, and it will not cause collision or outline the parts and pipelines, ensuring smooth and efficient work. And avoid causing the pipeline to leak due to damage to prevent the waste of gas.

In order to enable the review board to further understand the composition, characteristics and other purposes of the creation, the following are some of the preferred embodiments of the creation, and the detailed description of the creation is as follows, while allowing those skilled in the art to Enough implementation.

The present invention relates to a ventilating seat structure of a reticle transfer box, and in the specific embodiment and its components exemplified by the drawings, all related to front and rear, left and right, top and bottom, upper and lower, and horizontal and vertical The references are for convenience of description only and are not intended to limit the creation of the invention, nor to limit its components to any position or spatial orientation. The drawings and the dimensions specified in the specification may be varied according to the design and needs of the specific embodiments of the present invention, without departing from the scope of the invention.

For the detailed structure of the inflatable seat structure of the reticle transfer box, please refer to the figures shown in the first and second figures. The inflatable seat (10) can be applied to the loading and unloading station next to the process equipment and the storage cabinet for storage ( 60) [as shown in the fourth figure], an inflator or a reticle transport device, for individually inflating the individual reticle transfer boxes (50), and at least each of the reticle transfer boxes (50) An air valve (55) for intake air and at least one air valve (55) for exhaust gas.

The inflatable seat (10) is composed of a carrier plate (11). The peripheral corners of the carrier plate (11) are respectively provided with a plurality of positioning frames (12), and the positioning frames (12) can correspond to the reticle transfer box. In the corner of (50), the reticle transfer box (50) can be restricted and positioned, and the carrier plate (11) is formed with a plurality of corresponding ventilator transfer boxes (50) for the intake air valve (55). a slot (13), wherein the slot (13) is provided with an intake valve member (20), and a recessed air inlet groove (130) is formed in the center of the bottom surface of the recessed groove (13). 13) The inner bottom surface has a ring groove (131) on the periphery of the air inlet groove (130), and the ring groove (131) can be An annular seal (132) is provided to improve the airtightness between the intake valve member (20) and the recessed groove (13), and further between the intake slots (130) of the recessed grooves (13) An inlet through hole (14) is formed in the carrier plate (11), and the inlet through hole (14) of the embodiment is parallel to the horizontal wall surface (111) of the carrier plate (11). The outlet end of the air through hole (14) is located on the vertical wall surface (112) of the carrier plate (11), and is connected with an air inlet connector (15) for selectively connecting a gas supply module (not shown).

The carrier plate (11) is formed with a plurality of slots (16) corresponding to the ventilating box (50) for exhausting the air valve (55), and the slot (16) is provided with an exhaust valve member ( 25) The center of the bottom surface of the recessed groove (16) is formed with a recessed exhaust groove (160), and the inner bottom surface of the recessed groove (16) has a ring groove (161) at the periphery of the exhaust groove (160), the ring groove An annular seal (162) is provided in (161) to improve the airtightness between the exhaust valve member (25) and the recessed groove (16), and the exhaust of the recessed grooves (16) An exhaust through hole (17) is formed between the slots (160) to be embedded in the carrier plate (11), and the horizontal wall surface (111) of the exhaust through hole (17) and the carrier plate (11) of the embodiment is also Parallel to each other, the outlet end of the exhaust through hole (17) is located on the vertical wall surface (112) of the carrier plate (11), and is connected with an exhaust joint (18) for selectively connecting an exhaust module. Not shown in the middle].

Furthermore, the surface of the carrier plate (11) is provided with a plurality of positioning sensing members (19) for detecting whether the reticle transfer box (50) is inflated, and further the carrier plates (11) of the inflatable seats (10) Further, a radio frequency reading component (not shown) of the radio frequency identification system can be provided, and the radio frequency reading component can be used for transmitting and reading the photomask transfer box (50). Information about the line RF tag.

In addition, when the air inlet connector (15) of the inflatable seat (10) is connected to the air supply module, a flow regulating valve (30) and a pressure flow meter (35) may be separately arranged for controlling the flow rate and checking immediately. Knowing the flow rate and pressure of the intake air, and the exhaust joint (18) of the inflatable seat (10) is connected and provided with a detecting component (not shown) for detecting the flow rate of the exhaust gas.

Thereby, the group constitutes an inflatable seat structure of the reticle transfer case which can save space and does not interfere with the work.

As for the practical application of the present invention, as shown in the second, third and fourth figures, the inflatable seat (10) can be applied to a frame (60) for lining the reticle transfer box (50), the frame (60) lining and fixing the carrier plates (11) of the inflatable seats (10) by using a series of erecting rods (65), when the reticle transfer boxes (50) are respectively placed in the corresponding inflatable seats ( 10) When the carrier plate (11) is placed, the reticle transfer box (50) can be restrained by the positioning frame (12) at the edge of the carrier plate (11), and the hood of the reticle transfer box (50) can be used for inlet and exhaust. The valve (55) respectively corresponds to the intake valve member (20) and the exhaust valve member (25) on the carrier plate (11), and simultaneously transmits the positioning sensing member (19) on the carrier plate (11) to further detect the light. Whether the cover transfer box (50) is flat, because the air inlet connector (15) and the exhaust connector (18) of the air bearing seat (10) carrier plate (11) are respectively connected to the air supply module and the exhaust module, so that The inside of the reticle transfer case (50) is selectively circulated to maintain the cleanliness of the internal environment of the reticle transfer case (50).

In the process of use, the flow regulating valve (20), the pressure flow meter (25) and the detecting component of each of the inflatable seats (10) can be used to allow the worker to The flow operation can be carried out according to the actual conditions to increase the inflation rate and ensure the circulation stability of the gas inside the reticle transfer box (50), so as to save the effect of the inert gas, and further control the environment inside the reticle transfer box (50). Conditions such as humidity, temperature, etc.

Through the implementation of the foregoing technical means, since the inlet and outlet through holes (14, 17) of the inflatable seat (10) of the present reticle transfer case are respectively formed inside the carrier plate (11), the external factors can be effectively avoided. The rupture leaks, and the inlet and outlet joints (15, 18) can be laterally connected to the side of the carrier plate, and there is no part or pipeline between the adjacent inflatable seat (10) carrier plate (11). The arrangement can save space and greatly increase the storage capacity of the reticle transfer box (50) of the same storage cabinet frame (60), and the parts, dimensions and locking positions can be unified and simplified, thereby saving The processing time and shortened delivery time will not cause the inconvenience of the robot arm entering and exiting the reticle transfer box (50), ensuring the smoothness and efficiency of the work, and avoiding leakage of the pipeline due to damage to prevent gas. waste.

In this way, it can be understood that this creation is a creative new creation. In addition to effectively solving the problems faced by the practitioners, the effect is greatly enhanced, and the same or similar product creation or disclosure is not seen in the same technical field. The use, at the same time, has an improvement in efficacy. Therefore, this creation has met the requirements of "newness" and "progressiveness" of the new patent, and is applying for a new type of patent according to law.

(10) ‧‧‧ inflatable seat

(11)‧‧‧ Carrying board

(111)‧‧‧Horizontal wall

(112)‧‧‧Vertical wall

(12)‧‧‧ Positioning frame

(13)‧‧‧Inlay

(130)‧‧‧Air intake slots

(131)‧‧‧ Ring groove

(132)‧‧‧Seal

(14)‧‧‧Intake through hole

(15)‧‧‧Intake joints

(16)‧‧‧Inlay

(160)‧‧‧Exhaust trough

(161) ‧‧‧ Ring groove

(162)‧‧‧Seal

(17)‧‧‧Intake through hole

(18)‧‧‧Exhaust joints

(19) ‧‧‧ Positioning sensing parts

(20)‧‧‧Intake valve parts

(25)‧‧‧Exhaust valve parts

(30)‧‧‧Flow adjustment valve

(35)‧‧‧ Pressure flowmeter

(50)‧‧‧Photomask transfer box

(55)‧‧‧ gas valve

(60)‧‧‧ cabinet

(65)‧‧‧ pole

The first picture is a schematic view of the appearance of the inflatable seat structure of the present reticle transfer box.

The second picture: the partial decomposition of the inflatable seat structure of the original reticle transfer box Schematic diagram illustrating the aspects of each component and their relative relationships.

The third figure is a schematic diagram of the state in which the inflatable seat structure of the reticle transfer box is actually used.

The fourth picture is a schematic view of the appearance of the inflatable seat structure of the present reticle transfer box applied to the storage cabinet.

(10) ‧‧‧ inflatable seat

(11)‧‧‧ Carrying board

(111)‧‧‧Horizontal wall

(112)‧‧‧Vertical wall

(12)‧‧‧ Positioning frame

(13)‧‧‧Inlay

(130)‧‧‧Air intake slots

(131)‧‧‧ Ring groove

(132)‧‧‧Seal

(14)‧‧‧Intake through hole

(15)‧‧‧Intake joints

(16)‧‧‧Inlay

(160)‧‧‧Exhaust trough

(161) ‧‧‧ Ring groove

(162)‧‧‧Seal

(17)‧‧‧Intake through hole

(18)‧‧‧Exhaust joints

(19) ‧‧‧ Positioning sensing parts

(20)‧‧‧Intake valve parts

(25)‧‧‧Exhaust valve parts

(30)‧‧‧Flow adjustment valve

(35)‧‧‧ Pressure flowmeter

Claims (10)

An inflatable seat structure of a reticle transfer box, which can be placed in a reticle transfer box, and at least one air valve for air intake and at least one air valve for exhausting are respectively disposed on the reticle transfer box; The seat structure is formed by a carrier plate, and the carrier plate is formed with a plurality of recessed grooves corresponding to the air intake valve, and the inlet groove is provided with an intake valve member, and the bottom surface of each groove is formed. a recessed air inlet groove is formed, and an intake air passage hole communicating with each other is formed between the air inlet slots of the recessed slots, and an air inlet joint is connected to the outlet end of the air inlet through hole; There is a plurality of recessed grooves corresponding to the exhaust gas valve, and an exhaust valve member is disposed in the recessed groove, and a recessed exhaust groove is formed in a center of each of the bottom surfaces of the recessed grooves, and the groove is formed between the inlet grooves An exhausting through hole is formed, and an exhausting joint is connected to the outlet end of the exhausting through hole; thereby forming a pedestal structure of the reticle transfer box which can save space and does not interfere with the operation . The inflatable seat structure of the reticle transfer box according to the first aspect of the invention, wherein the peripheral corners of the carrier plate are respectively provided with a plurality of positioning frames, and the positioning frame can correspondingly limit the corners of the reticle transfer box. The inflatable seat structure of the reticle transfer case according to the first aspect of the invention, wherein the inner bottom surface of the inserting groove of the carrying plate has a ring groove at the periphery of the inlet and the exhaust groove, and the ring groove is provided with a ring groove. An annular seal to improve the airtightness between the inlet and outlet valve components and the groove. The ventilating seat structure of the reticle transfer case according to claim 1, wherein the outlet end of the inlet and outlet through holes of the carrier plate is located on the wall surface of the carrier plate. The inflatable seat structure of the reticle transfer case according to the first aspect of the invention, wherein the surface of the carrier plate is provided with a plurality of positioning sensing members, and the sensing component is positioned and connected to the processing module for detecting the reticle transmission Whether the box is inflated. The accommodating structure of the reticle transmission box according to claim 1, wherein the carrier board is provided with a radio frequency reading component of a radio frequency identification system, and the radio frequency reading component is connected to the processing module. The reticle transfer box is provided with a corresponding radio frequency tag. The inflatable seat structure of the reticle transfer case according to claim 1, wherein the venting seat is provided with a flow regulating valve and a pressure flow meter on the air inlet joint. The inflatable seat structure of the reticle transfer case according to claim 1, wherein the venting seat is provided with a detecting component on the exhaust joint for detecting the flow rate of the exhaust gas. The inflatable seat structure of the reticle transfer case according to claim 1, wherein the inflatable seat can be applied to an infeed and discharge station, a storage cabinet, an inflator or a reticle transport device beside the process equipment. The utility model relates to an inflatable seat structure, which can be arranged for a reticle transfer box, wherein the reticle transfer box is provided with a plurality of gas valves, and the inflatable seat structure comprises: a carrier plate having at least one horizontal wall surface and at least one vertical wall surface, wherein the at least one horizontal wall surface is disposed for the reticle transfer box and is gas-connected to the gas valve, the carrier plate further having: an intake air inlet a hole embedded in the carrier plate and fluidly connected to one of the gas valves when the reticle transfer box is disposed on the at least one horizontal wall surface; an air inlet connector disposed on the at least one vertical wall surface And a gas connection with the air inlet through hole; an exhaust through hole buried in the carrier plate and being gas connectable to the gas when the reticle transfer box is placed on the at least one horizontal wall One of the valves; an exhaust joint disposed on the at least one vertical wall and in gas connection with the exhaust through hole.