CN203588981U - Inflating seat structure and inflating cabinet using same - Google Patents
Inflating seat structure and inflating cabinet using same Download PDFInfo
- Publication number
- CN203588981U CN203588981U CN201320631732.1U CN201320631732U CN203588981U CN 203588981 U CN203588981 U CN 203588981U CN 201320631732 U CN201320631732 U CN 201320631732U CN 203588981 U CN203588981 U CN 203588981U
- Authority
- CN
- China
- Prior art keywords
- matrix
- seat structure
- inflating seat
- light shield
- inflating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011159 matrix material Substances 0.000 claims description 73
- 230000005540 biological transmission Effects 0.000 claims description 11
- 230000007306 turnover Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 4
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000012797 qualification Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Landscapes
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Abstract
The utility model relates to an inflating seat structure and an inflating cabinet using same. The inflating seat structure comprises a basic body equipped with inflation installing holes for locking inflating valve members and exhaust installing holes for locking exhaust valve members. A main flow channel is formed in the basic body. A first locking portion for locking a pipeline connector is disposed on the front end face, close to the basis body, of the main flow channel, and a second locking portion for locking a locking bolt is disposed on the rear end face, close to the basis body, of the main flow channel. Mutually-communicated bypassing channels are arranged between the inflation installing holes and the main flow channel. The inflating seat structure can be accommodated manually or accommodated by a mechanical arm. The basic body is just required to be rotated horizontally and the pipeline connector is selectively locked on the first locking portion or the second locking portion of the main flow channel. Thus, the positions of the various inflating valve members on the basic body can be changed in order to adapt to different accommodating manners. The inflating seat structure has a sharing property and modularity and is not required to be produced in a classified manner. Additionally, the inflating seat structure may decrease subsequent processing time and is easy to repair and assemble.
Description
Technical field
The utility model is about a kind of technical field of inflation, refers to especially the inflating seat structure that a kind of changeable surface is used and applies its gas-filling cabinet.
Background technology
Light shield is in making at present, clean, operation and storage, in the process of transportation, no matter the light shield that is placed in accommodating light shield transmits the environment of box or dust free room, all have many particulates, aqueous vapor, gas, the harmful substances such as chemical solvent molecule, these harmful substances can be attached to light shield surface, and in storage process or after the heating of exposure manufacture craft, these harmful substances can produce particulate on light shield surface and adhere to, the phenomenon such as crystallization or atomization, the yellow light lithography manufacture craft of take is example, it can directly have influence on the light transmittance of light shield, and then make the aliasing on light shield, the phenomenon that it can cause wafer qualification rate to reduce, and increase cleaning and the time of improving, cause output to reduce, relatively also can improve the cost of operation.
In order to address this problem, and in semiconductor fabrication process, conventionally use automatic material transport system (Automated Material Handling System, AMHS) with isolation input and output material SMIF (Standard Mechanical Interface, the equipment such as SMIF), carry out light shield in the storage between the operating period not with transport, to replace the construction and maintenance cost of Traditional Man carrying, reduction dust free room equipment, can promote the cleanliness factor of light shield, reach the production qualification rate of superelevation simultaneously.
And according to the technological concept of AMHS in semiconductor factory and SMIF, except when manufacture craft is used, light shield is between the process of transporting or storage life, the light shield of all must be placed on a high-cleanness, high, air-tightness is good and low gas is overflowed (Outgassing) transmits in box (Reticle SMIF Pod, RSP).And in order to improve aforementioned light shield, transmit the cleanliness factor of box, conventionally can be in aforementioned sealed type light shield transmits box the clean inert gas of filling (as nitrogen (N
2)), to reduce the harm of pernicious gas, yet be limited to the problem that light shield transmits box air-tightness deficiency, conventionally over time, can be because gas leakage loses effect, therefore industry is further developed the inflating seat that has injection circulation clean gas in recent years, this inflating seat also can be designed to be applied on various device, as the other input and output material work station of manufacture craft equipment, the gas-filling cabinet that stores use or transporting equipment etc., for being transmitted to box, each light shield carries out independently circulation inflatable.
And existing known inflating seat is mainly consisted of a plate body, on plate body, be arranged with corresponding light shield and transmit the charge, exhaust valve member that box carries out charge, exhaust, to provide clean gas to light shield to transmit box.Aforementioned inflating seat faces maximum problem in the use time, when manually to take in or when this light shield of mechanical arm automatic accomodation transmits box, be limited to operating environment and pattern, the direction that this light shield transmission box is placed on inflating seat is just contrary, and the smooth and easy and validity flowing in this light shield transmits box in order to maintain gas, the same fixed-direction that its Inlet Position transmits box by light shield enters, and so causes for manually taking in or the inflating seat of mechanical arm automatic accomodation cannot be shared.
Moreover, entering of existing inflating seat, exhaust valve member passes through joint part, pipeline is connected to the source of the gas of the clean inert gas of supply, invisible complexity that increases structure, and cause the inconvenience of assembly, and joint and pipeline need be fixedly arranged on band etc. the plate body bottom surface of each inflating seat, not only accessory size cannot unification and simplification, make to increase rear process time processed and friendship phase, give the mixed and disorderly sensation of people simultaneously, again because fixed form and position cannot be unified, also cause mechanical arm turnover to capture the inconvenience that light shield transmits box, slightly accidentally may bump or sketch the contours the situation of aforementioned joint and pipeline, smooth and easy and the efficiency that the work of impact is carried out, and the pipeline exposing also may be because of the external factor gas leakage of breaking, cause the waste of gas, initiation potential even, therefore how to address these problems, it is considerable problem.
Utility model content
In view of this, main purpose of the present utility model is to provide a kind of inflating seat structure, with the gas-filling cabinet that can make this inflating seat structure be shared on manually to take in or mechanical arm is taken in, and can simplify member, and can improve the qualification rate of its manufacture, thereby reduce its manufacturing cost; So that inlet and outlet loop is formed at inside, and without the pipeline that exposes, and reduce interference and the damage of part and pipeline, and while being applied to gas-filling cabinet, can effectively dwindle the spacing of upper and lower adjacent inflating seat structure, to increase the amount of taking in of gas-filling cabinet.
In order to reach above-mentioned purpose, the utility model provides a kind of inflating seat structure, and it carries a light shield and transmits box, and the bottom surface that this light shield transmits box has respectively at least two charge valves and at least two vent valves, and this inflating seat structure comprises:
At least two inflation valve members, its charge valve corresponding and this light shield transmission box forms gas and is communicated with;
At least two exhaust valve members, its vent valve corresponding and this light shield transmission box forms gas and is communicated with; And
One matrix, its periphery is also respectively equipped with a front-end edge, an end edge, a left side ora terminalis and a right side ora terminalis, an and upper and lower upper surface and a lower surface of being respectively equipped with of this matrix, and the upper surface of this matrix has respectively at least two confessions inflation installing hole that respectively this inflation valve member lock is pulled, and the upper surface of this matrix has respectively at least two confessions exhaust installing hole that respectively this exhaust valve member lock is pulled; The inside of this matrix has a mainstream channel between the end face of forward and backward ora terminalis, and this mainstream channel has respectively one and establishes in order to selectivity lock one first lock-joining part and one second lock-joining part that a pipe joint or is stopped payment bolt in the end of contiguous forward and backward ora terminalis, and between respectively this inflation installing hole of this matrix and mainstream channel, there is a split channel being interconnected, this split channel has one in openend and establishes a lock-joining part of stopping payment bolt in order to selectivity lock, and respectively this exhaust installing hole has at least one exhaust passage.
As the preferred version of above-mentioned a kind of inflating seat structure, wherein the periphery corner of the upper surface of this matrix is respectively equipped with a use and for light shield, transmits the L shaped posting of box location.
As the preferred version of above-mentioned a kind of inflating seat structure, wherein this matrix is formed with respectively one and is positioned at centre and uses the positive breach for a mechanical arm turnover between the adjacent positioned frame of the forward and backward ora terminalis of correspondence.
Preferred version as above-mentioned a kind of inflating seat structure, wherein this matrix is formed with respectively an off normal breach between the adjacent positioned frame of corresponding left and right side ora terminalis, respectively this off normal breach is positioned at the place, corresponding oblique angle of left and right side ora terminalis, and is assembled with a read element in order to radio-frequency (RF) identification.
As the preferred version of above-mentioned a kind of inflating seat structure, wherein this mainstream channel is positioned at the middle position between these matrix both sides.
As the preferred version of above-mentioned a kind of inflating seat structure, wherein the exhaust passage of this matrix is formed at the bottom surface of this exhaust installing hole respectively and runs through the lower surface of this matrix.
Preferred version as above-mentioned a kind of inflating seat structure, respectively this inflation installing hole of this matrix endless groove together with the peripheral surface of this exhaust installing hole is respectively formed with in this exhaust valve member in this inflation valve member wherein, and in this endless groove, be embedded with a seal that can press distortion.
The utility model also provides a kind of gas-filling cabinet, comprising:
One cabinet, it has at least one hack lever, and the exterior circumferential of this hack lever is covered with side plate; And
At least one inflating seat structure described above, it is fixedly arranged in the hack lever of this cabinet.
The utility model also provides another inflating seat structure, and it carries a light shield and transmits box, and the bottom surface that this light shield transmits box has respectively at least one charge valve and at least one vent valve, and this inflating seat structure comprises:
At least one inflates valve member, and its at least one charge valve corresponding and this light shield transmission box forms gas and is communicated with;
At least one exhaust valve member, its at least one vent valve corresponding and this light shield transmission box forms gas and is communicated with; And
One matrix, it has at least one inflation installing hole of pulling in order at least one inflation valve member lock of relative confession, and at least one exhaust installing hole of pulling in order at least one exhaust valve member lock of relative confession; This matrix has more a mainstream channel, the two opposite end edge faces that it is arranged at the inside of this matrix and can be locked on this matrix.
Inflating seat structure of the present utility model, it can be employed respectively manually takes in or mechanical arm is taken in, and only need the matrix of inflating seat structure to horizontally rotate 180 degree, and make the alternative interlocking of pipe joint in the first lock-joining part or second lock-joining part of mainstream channel, so can make respectively this inflation valve member on matrix shift one's position, to be suitable for the different modes of taking in, make the utility model inflating seat structure there is sharing, and without classification manufacture in addition; Moreover, its mainstream channel and split channel are formed at the inside of matrix, can avoid occurring because pipeline exposes, causing the phenomenon of breaking and leaking gas as known, can not cause mechanical arm turnover to capture the inconvenience that light shield transmits box yet, smooth and easy and the efficiency that the work of guaranteeing is carried out, add between the matrix of adjacent inflating seat structure without settings such as part or pipelines, so can effectively save space, significantly increase same Inflatable cabinet body amount of storage; Simultaneously its matrix is because part, size and interlocking position can unifications, and can save process time processed afterwards, and can be for ease of maintenaince and assembly.
Accompanying drawing explanation
Fig. 1 is the schematic appearance of the utility model inflating seat structure;
Fig. 2 is the perspective exploded view of the utility model inflating seat structure, for its element state of explanation and relativeness;
Fig. 3 is that after horizontally rotating, another implements the schematic appearance of state to inflating seat structure of the present utility model;
Fig. 4 is the schematic appearance that inflating seat structure of the present utility model is actually used in gas-filling cabinet.
[main element symbol description]
10-inflating seat structure; 11-matrix; 111-front-end edge; 112-end edge; 113-left side ora terminalis; 114-right side ora terminalis; 115-upper surface; 116-lower surface; 12-posting; The positive breach of 121-; 122-off normal breach; 13-inflates installing hole; 14-exhaust installing hole; 15-mainstream channel; 151-the first lock-joining part; 152-the second lock-joining part; 155-pipe joint; 156-stops payment bolt; 16-split channel; 161-lock-joining part; 165-stops payment bolt; 17-exhaust passage; 18-endless groove; 19-seal;
20-inflates valve member;
30-exhaust valve member;
40-read element;
50-light shield transmits box; 55-intake valve; 56-vent valve;
60-cabinet; 61-hack lever; 65-side plate; 66-door-plate.
Embodiment
The utility model provides a kind of inflating seat structure and applies its gas-filling cabinet, in the illustrative the utility model specific embodiment of the figure that encloses and member thereof, all about front and rear, left and right, top and bottom surface, top and bottom and level and vertical reference, only for being conveniently described, and unrestricted the utility model, also non-its member is limited to any position or direction in space.
The detailed formation of the utility model inflating seat structure, please refer to Fig. 1, shown in Fig. 2, this inflating seat structure 10 is consisted of a matrix 11, for carrying one light shield, transmit box 50, the bottom that this light shield transmits box 50 has at least two corresponding intake valves 55 and two corresponding vent valves 56, and matrix 11 is provided with at least two inflation valve members 20 and at least two exhaust valve members 30, respectively this inflation valve member 20 of matrix 11 and this exhaust valve member 30 be respectively the intake valve 55 of corresponding aforementioned light shield transmission box 50 respectively, vent valve 56, making inflating seat structure 10 transmit box 50 to this light shield fills, exhaust.
And the periphery of this matrix 11 be respectively equipped with a front-end edge 111, an end edge 112, a left side ora terminalis 113 and a right side ora terminalis 114, an and upper and lower upper surface 115 and a lower surface 116 of being respectively equipped with of matrix 11; The upper surface 115 periphery corners of this matrix 11 are respectively equipped with a L shaped posting 12 again, respectively this posting 12 can be corresponding light shield transmit the corner profile of box 50, allow light shield transmit box 50 and can be guided the upper surface 115 that is positioned matrix 11, and 12 of the adjacent positioned frames of the corresponding front-end edge 111 of matrix 11, end edge 112 are formed with respectively a positive breach 121, respectively these positive breach 121 right positions are in the central authorities of front-end edge 111, end edge 112, so that mechanical arm turnover; 12 of the adjacent positioned frames of the corresponding left side of matrix 11 ora terminalis 113, right side ora terminalis 114 are formed with respectively an off normal breach 122 again, respectively this off normal breach 122 is positioned at the place, corresponding oblique angle of left side ora terminalis 113, right side ora terminalis 114, so that the read element 40 of assembling one radio-frequency (RF) identification (RFID).
Moreover, on matrix 11, in aforementioned respectively this inflation valve member 20 of correspondence, be formed with respectively an inflation installing hole 13 and an exhaust installing hole 14 with these exhaust valve member 30 places respectively, matrix 11 inside are formed with a mainstream channel 15 between the end face of front-end edge 111, end edge 112 again, and mainstream channel 15 is positioned at the middle position between matrix 11 both sides, so that pipeline serial connection; This mainstream channel 15 is formed with respectively one first lock-joining part 151 and one second lock-joining part 152 in the end of adjacent front end edge 111, end edge 112 again, establishes a pipe joint 155 or stop payment bolt 156 for the lock of selectivity respectively; Respectively this inflation installing hole 13 and 15 of the mainstream channels of matrix 11 have a split channel being interconnected 16 again, the arbitrary end of this split channel 16 in contiguous left side ora terminalis 113, right side ora terminalis 114 has opening, and on opening, be formed with a lock-joining part 161, selective property lock is established one and is stopped payment bolt 165, and gas can be entered in inflation installing hole 13 via mainstream channel 15 and split channel 16.In addition, the bottom surface of aforesaid respectively this exhaust installing hole 14 has respectively the exhaust passage 17 of at least one lower surface that runs through matrix 11 116.
And the peripheral surface of respectively this inflation installing hole 13 of matrix 11 and this exhaust installing hole 14 is respectively endless groove 18 together with being formed with in the scope of inflation valve member 20 and exhaust valve member 30, and in endless groove 18, be embedded with one and supply inflation valve member 20 or exhaust valve member 30 to press the seal 19 of distortion, make to inflate the better airtight effect of 11 formation of matrix of valve member 20 and exhaust valve member 30 and inflating seat structure 10.
In brief, group forms a tool sharing and inflating seat structure simple in structure.
And the utility model is when practical application, as shown in Fig. 1 and Fig. 4, inflating seat structure 10 of the present utility model can be applied to making apparatus other input and output material work station, transporting equipment or gas-filling cabinet etc., wherein the side plate 65 of the cabinet 60 of this gas-filling cabinet by the vertical hack lever 61 of establishing of series and around being surrounded on formed, and respectively the matrix 11 of this inflating seat structure 10 is located at 61 of adjacent hack levers with matrix-style layering apportion, and wherein on side plate 65, there is the door-plate 66 that alternative opens and closes, for utilizing respectively 10 pairs other light shields transmission boxes 50 of this inflating seat structure to inflate.
Realization via aforementioned techniques means, as Fig. 1, shown in Fig. 2, the gas-filling cabinet that inflating seat structure 10 of the present utility model can manually be taken in by being used in respectively or mechanical arm is taken in, for example make the first lock-joining part 151 of pipe joint 155 interlockings mainstream channel 15 adjacent front end edge 111 in matrix 11 of inflating seat structure 10, stop payment bolt 156 corresponding lock pull in the second lock-joining part 152 of mainstream channel 15 adjacent back end edge 112, the first lock-joining part 151 ends that so source of the gas can enter matrix 11 mainstream channels 15 by the place ahead enter, and inject through mainstream channel 15 and split channel 16 respectively this inflation valve member 20 (as shown in Figure 1) that is positioned at matrix 11 the place aheads.
Otherwise, when inflating seat structure 10 turns to demand, as Fig. 2, shown in Fig. 3, first lock-joining part 151 at mainstream channel 15 two ends of matrix 11 will be locked on originally, the pipe joint 155 of the second lock-joining part 152 and stop payment bolt 156 and pull down respectively, and make the matrix 11 horizontal rotary turnbacks of inflating seat structure 10, make the first lock-joining part 151 and second lock-joining part 152 dislocations of the mainstream channel 15 on matrix 11, then pipe joint 155 interlockings are positioned to second lock-joining part 152 in the place ahead in mainstream channel 15, stop payment bolt 156 lock pull and in mainstream channel 15, be positioned at first lock-joining part 151 at rear, and read element 40 is locked on again to the opposite side edge of matrix 11, the second lock-joining part 152 ends that so source of the gas can enter the mainstream channel 15 of matrix 11 by the place ahead enter, and inject through mainstream channel 15 and split channel 16 respectively this inflation valve member 20 (as shown in Figure 3) that is positioned at matrix 11 rears, that is, the mainstream channel of matrix 11 15 optionally selectivity be locked on two opposite end edge faces of matrix 11.
Realization via aforementioned techniques means, inflating seat structure 10 of the present utility model can be employed respectively manually takes in or mechanical arm is taken in, and only need the matrix of inflating seat structure 10 11 to horizontally rotate 180 degree, and make pipe joint 155 interlockings in the first lock-joining part 151 or second lock-joining part 152 of mainstream channel 15, stop payment bolt 156 corresponding lock pull in the second lock-joining part 152 or first lock-joining part 151 of mainstream channel 15, so can make respectively this inflation valve member 20 on matrix 11 shift one's position, to be suitable for the different modes of taking in, make the matrix 11 of the utility model inflating seat structure 10 there is sharing, and without classification manufacture in addition.
And the mainstream channel 15 and the split channel 16 that transmit the inflating seat structure 10 of box due to the utility model light shield are formed at the inside of matrix 11, it can avoid occurring because pipeline exposes, causing the phenomenon of breaking and leaking gas as known, can not cause mechanical arm turnover to capture the inconvenience that light shield transmits box 50 yet, smooth and easy and the efficiency that the work of guaranteeing is carried out, add 11 of the matrixes of adjacent inflating seat 10 without settings such as part or pipelines, so can effectively save space, significantly increase the amount of storage of same Inflatable cabinet body 60, matrix 11 of the present utility model is due to part simultaneously, size and interlocking position can unifications, and process time processed after saving, and can be for ease of maintenaince and assembly, therefore can effectively promote its economic benefit.
The above, be only preferred embodiment of the present utility model, and not in order to limit scope of patent protection of the present utility model, the equivalence variation that other utilization the utility model patent spirit is done etc., all should in like manner belong to scope of patent protection of the present utility model.
Claims (9)
1. an inflating seat structure, it carries a light shield and transmits box, and the bottom surface that this light shield transmits box has respectively at least two charge valves and at least two vent valves, and this inflating seat structure comprises:
At least two inflation valve members, its charge valve corresponding and this light shield transmission box forms gas and is communicated with;
At least two exhaust valve members, its vent valve corresponding and this light shield transmission box forms gas and is communicated with; And
One matrix, its periphery is also respectively equipped with a front-end edge, an end edge, a left side ora terminalis and a right side ora terminalis, an and upper and lower upper surface and a lower surface of being respectively equipped with of this matrix, and the upper surface of this matrix has respectively at least two confessions inflation installing hole that respectively this inflation valve member lock is pulled, and the upper surface of this matrix has respectively at least two confessions exhaust installing hole that respectively this exhaust valve member lock is pulled; It is characterized in that:
The inside of this matrix has a mainstream channel between the end face of forward and backward ora terminalis, and this mainstream channel has respectively one and establishes in order to selectivity lock one first lock-joining part and one second lock-joining part that a pipe joint or is stopped payment bolt in the end of contiguous forward and backward ora terminalis, and between respectively this inflation installing hole of this matrix and mainstream channel, there is a split channel being interconnected, this split channel has one in openend and establishes a lock-joining part of stopping payment bolt in order to selectivity lock, and respectively this exhaust installing hole has at least one exhaust passage.
2. inflating seat structure as claimed in claim 1, is characterized in that: the periphery corner of the upper surface of this matrix is respectively equipped with a use and for light shield, transmits the L shaped posting of box location.
3. inflating seat structure as claimed in claim 2, is characterized in that: this matrix is formed with respectively one and is positioned at centre and uses the positive breach for a mechanical arm turnover between the adjacent positioned frame of the forward and backward ora terminalis of correspondence.
4. inflating seat structure as claimed in claim 2, it is characterized in that: this matrix is formed with respectively an off normal breach between the adjacent positioned frame of corresponding left and right side ora terminalis, respectively this off normal breach is positioned at the place, corresponding oblique angle of left and right side ora terminalis, and is assembled with a read element in order to radio-frequency (RF) identification.
5. inflating seat structure as claimed in claim 1, is characterized in that: this mainstream channel is positioned at the middle position between these matrix both sides.
6. inflating seat structure as claimed in claim 1, is characterized in that: the exhaust passage of this matrix is formed at the bottom surface of this exhaust installing hole respectively and runs through the lower surface of this matrix.
7. inflating seat structure as claimed in claim 1, it is characterized in that: respectively this inflation installing hole of this matrix is endless groove together with the peripheral surface of this exhaust installing hole is respectively formed with in this exhaust valve member in this inflation valve member, and in this endless groove, be embedded with a seal that can press distortion.
8. a gas-filling cabinet, is characterized in that: comprising:
One cabinet, it has at least one hack lever, and the exterior circumferential of this hack lever is covered with side plate; And
At least one inflating seat structure as claimed in claim 1, it is fixedly arranged in the hack lever of this cabinet.
9. an inflating seat structure, it carries a light shield and transmits box, and the bottom surface that this light shield transmits box has respectively at least one charge valve and at least one vent valve, and this inflating seat structure comprises:
At least one inflates valve member, and its at least one charge valve corresponding and this light shield transmission box forms gas and is communicated with;
At least one exhaust valve member, its at least one vent valve corresponding and this light shield transmission box forms gas and is communicated with; And
One matrix, it has at least one inflation installing hole that at least one inflation valve member lock of relative confession is pulled, and at least one exhaust installing hole of relatively pulling at least one exhaust valve member lock; It is characterized in that:
This matrix has more a mainstream channel, the two opposite end edge faces that it is arranged at the inside of this matrix and can be locked on this matrix.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320631732.1U CN203588981U (en) | 2013-10-14 | 2013-10-14 | Inflating seat structure and inflating cabinet using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320631732.1U CN203588981U (en) | 2013-10-14 | 2013-10-14 | Inflating seat structure and inflating cabinet using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203588981U true CN203588981U (en) | 2014-05-07 |
Family
ID=50586851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320631732.1U Expired - Fee Related CN203588981U (en) | 2013-10-14 | 2013-10-14 | Inflating seat structure and inflating cabinet using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203588981U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI549870B (en) * | 2014-06-05 | 2016-09-21 | 中勤實業股份有限公司 | A substrate carrier and a transmission device for the same |
-
2013
- 2013-10-14 CN CN201320631732.1U patent/CN203588981U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI549870B (en) * | 2014-06-05 | 2016-09-21 | 中勤實業股份有限公司 | A substrate carrier and a transmission device for the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102064123B (en) | Vacuum processing system and vacuum processing method of semiconductor processing substrate | |
| US7416998B2 (en) | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system | |
| CN203185174U (en) | Vacuum absorption fixing platform | |
| CN203588981U (en) | Inflating seat structure and inflating cabinet using same | |
| CN203404383U (en) | Inflatable seat and air valve structure thereof | |
| CN103975416B (en) | Gold-tinted chamber system | |
| TWM456582U (en) | Inflation base structure of reticle SMIF pod | |
| CN208422883U (en) | Width-adjusting mobile mechanism | |
| CN203386050U (en) | Wireless monitoring system of storage cabinet inflation system | |
| CN104238474B (en) | The wireless supervisory control system of storage cabinet inflation system | |
| CN206998600U (en) | A kind of polishing vacuum absorption device for strengthening adsorption | |
| CN104235386B (en) | Air valve structure and apply the inflating seat of this air valve structure | |
| CN202629095U (en) | Automatic blocking inflation valve | |
| CN203300612U (en) | Inflatable seat of reticle SMIF pod | |
| TWM471027U (en) | Structure of gas guide valve of gas charging base | |
| CN104576470B (en) | Wireless transport module and apply its inflating seat and gas-filling cabinet | |
| CN203339120U (en) | An air inflation purifying system of a wafer/ photomask sealing carrier | |
| CN104755123B (en) | The filter cylinder of oxygen concentrating device | |
| CN203585473U (en) | Air pressure valve structure, air inflation base applying same and air inflation cabinet | |
| CN212314898U (en) | Anti-falling suction jig | |
| TWM471028U (en) | Inflating seat structure and inflatable cabinet applying the same | |
| CN207946196U (en) | Tap air-tightness detection device | |
| TW201439452A (en) | Air valve structure and inflation base using the same | |
| TW201440002A (en) | Wireless monitoring system for inflation system of storage cabinet | |
| CN202570566U (en) | Highly magnetic coupled inserting plate type powder valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: LIU HONGWEI ZHENG YOUXUAN Effective date: 20140618 Owner name: JIADENG PRECISE INDUSTRY CO., LTD. Free format text: FORMER OWNER: CHEN MINGSHENG Effective date: 20140618 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140618 Address after: The central road Tucheng China Taiwan New Taipei 4 No. 2 9 floor Patentee after: Jiadeng Precise Industry Co., Ltd. Address before: Taichung City, Taiwan, China west side of the South Road, section 158, No. 7, building 6 Patentee before: Chen Mingsheng Patentee before: Liu Hongwei Patentee before: Zheng Youxuan |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140507 Termination date: 20171014 |