CN100565292C

CN100565292C - Prevent the glass substrate carrier of static focus

Info

Publication number: CN100565292C
Application number: CNB2006101005648A
Authority: CN
Inventors: 郑瑞忠; 薛东瀛
Original assignee: Prime View International Co Ltd
Current assignee: Prime View International Co Ltd
Priority date: 2006-07-03
Filing date: 2006-07-03
Publication date: 2009-12-02
Anticipated expiration: 2026-07-03
Also published as: CN101101396A

Abstract

The present invention is a kind of glass substrate carrier that prevents static focus, and it includes a pedestal and a plurality of liner; This pedestal ground connection is formed with two upright seats on pedestal, these upright seats are conductor, horizontal respectively projection has two relative ㄇ shape carriages on each upright seat, these carriages are conductor, and there is at least one supporting part the both sides of each carriage end projection respectively, and these supporting parts are conductor; These liners are separately positioned on the supporting part, have elasticity and are conductor; Thus, liner, supporting part, carriage and upright seat constitute an electrostatic discharged path, can avoid excessive static focus and injure the glass circuit substrate that is seated on the carrier.

Description

Prevent the glass substrate carrier of static focus

Technical field

The invention belongs to a kind of glass substrate carrier, refer to a kind of glass substrate carrier that prevents static focus especially.

Background technology

Frivolous LCD screen has become main flow commodity at present, is widely used among the various occasions.

The core parts of LCD screen are glass substrate, in the manufacture process of liquid crystal panel, must on glass substrate, make thin film transistor (TFT) and line related, gold-tinted manufacture process wherein promptly is a coating layer of even photoresist on glass substrate, then in subsequent step, cooperate photomask on photoresist layer, to form circuit pattern, so that can carry out subsequent step such as exposure imaging.

Be that shilling this glass substrate is established and is positioned on the rotary photoresist coating machine at present in the mode of coating photoresist on the glass substrate, then drip an amount of photoresist liquid at the glass substrate center, then start the photoresist coating machine with the high speed rotating glass substrate, make photoresist liquid be subjected to centrifugal action and radially outward diffuse to be coated with completely whole glass substrate upper surface, solidify simultaneously.

Usually after the photoresist coating is finished, the formed burr of photoresist liquid that can leave excess diffusion at the glass substrate edge and solidify, therefore must utilize a carrier that the glass substrate on the photoresist coating machine is transported on the burr remover, remove burr with the burr remover, this carrier mainly on a pedestal that can move horizontally projection two in opposite directions horizontal trays are arranged, each carriage is provided with a plurality of liners, each carriage connects a vacuum pump by pipeline, make liner can provide pull of vacuum to adsorb glass substrate, make glass substrate firmly on carriage and can be transported to the burr remover by carrier.

Arrive the burr remover and make glass substrate break away from liner moment when carrier transports glass substrate, the static that produces on this liner can reach 15-16 kilovolt (Kilovolt, KV), and will damage glass substrate semiconductor elements and circuit, may cause when serious that glass substrate is whole to be scrapped, therefore greatly reduce the yield of glass substrate.

The inventor is easy to generate high-pressure electrostatic in view of existing carrier and glass substrate disengaging moment and damages the shortcoming of original semiconductor element and circuit on the glass substrate, improve its not enough and disappearance, and then invent out a kind of glass substrate carrier that can effectively discharge static electricity gathered.

Summary of the invention

The object of the present invention is to provide a kind of glass substrate carrier that prevents static focus, it can avoid excessive static focus in carrier and the contacted position of glass substrate, and then prevent that glass substrate breaks away from the moment of carrier, circuit component on a large amount electrostatic damage glass substrate effectively improves the yield of glass substrate.

The object of the present invention is achieved like this, and a kind of glass substrate carrier that prevents static focus includes:

One pedestal, be ground connection and can moving horizontally, on pedestal, be formed with two upright seats, these upright seats are conductor, horizontal respectively projection has two relative ㄇ shape carriages on each upright seat, these carriages are conductor, and there is at least one supporting part the both sides of each carriage end projection respectively, and these supporting parts are conductor;

A plurality of liners are separately positioned on the supporting part, have elasticity and are conductor; Thus, liner, supporting part, carriage and upright seat constitute an electrostatic discharged path, can avoid excessive static focus and injure the glass circuit substrate that is seated on the carrier.

Aforementioned liner is to be made of carbonaceous material and to possess conductive characteristic.

Aforementioned each liner contains graphite and possesses conductive characteristic.

Aforementioned each liner contains metal and possesses conductive characteristic.

The resistance of aforementioned each liner is 103-105 ohm (Ω)/square (ohms/sq).

Run through on aforementioned each supporting part and be formed with a perforation, run through on each liner and be formed with a perforation that is communicated with corresponding perforation, can make the supporting part pass through pipeline and an external vacuum pump thus, so that make liner produce pull of vacuum.

Aforementioned each supporting part end face is formed with the pickup groove that holds corresponding liner respectively.

Aforementioned each liner is made up of liner on a lower liner, the O shape ring and, this lower liner is an annular, be arranged in the pickup groove of corresponding supporting part, be formed with annular flange at the lower liner inwall, this O shape ring is arranged in the lower liner, be formed with an outer ring bead that is interlocked with interior annular flange on O shape ring outer wall, liner is set on O shape and encircles the top this on, runs through to be formed with at least one through hole that is connected with the supporting part perforation on last liner.

By above-mentioned technological means, the electrostatic discharged path that each liner, supporting part, carriage and upright seat are constituted, can avoid static focus between liner and glass substrate, so when glass substrate breaks away from liner, do not have the original circuit on the excessive electrostatic damage glass substrate, can avoid glass substrate to scrap thus, thereby can lifting glass substrate yield and reduction glass substrate cost.

Description of drawings

Fig. 1: the stereo appearance figure of the present invention and photoresist coating machine and burr remover.

Fig. 2: the three-dimensional exploded view of liner of the present invention.

Fig. 3: the side cutaway view of liner of the present invention.

Drawing reference numeral:

10 pedestals, 11 carriages

12 supporting parts, 121 perforations

123 pickup grooves, 15 upright seats

20 liners, 21 lower liners

Annular flange 230 shapes ring in 211

Liner on the 231 outer ring beads 25

251 through holes, 80 photoresist coating machines

90 burr removers

Embodiment

Please refer to Fig. 1～Fig. 3, the glass substrate carrier that prevents static focus of the present invention, can between a photoresist coating machine 80 and a burr remover 90, move horizontally back and forth, a glass substrate that is positioned on the photoresist coating machine 80 can be transported on the burr remover 90 thus.

This glass substrate carrier that prevents static focus includes: a pedestal 10 and a plurality of liner 20.

This pedestal 10 can move horizontally and ground connection, on pedestal 10, be formed with two upright seats 15, these upright seats 15 are conductor, horizontal respectively projection has two relative ㄇ shape carriages 11 on each upright seat 15, these carriages are conductor, there is at least one supporting part 12 that constitutes with conductor the both sides of each carriage 11 end projection respectively, run through respectively on each supporting part 12 and be formed with a perforation 121, and each supporting part 12 end face is formed with a pickup groove 123 that is communicated with perforation 121 respectively, in addition, the perforation 121 of each supporting part 12 can be connected with a vacuum pump by many pipelines, thus, when bleeding, can make perforation 121 produce suction when the vacuum pump startup.

A plurality of liners 20 are conductor, be arranged in the pickup groove 123 of each supporting part 12, be to mix with resilient material and conductive material to make, possesses elasticity and electric conductivity, resilient material can be rubber, conductive material can be carbonaceous material, graphite or metal, thus, liner 20, supporting part 12, the upright seat 15 of carriage 11 and ground connection constitutes an electrostatic discharged path, make static to be thrown into outside the pedestal by ground connection smoothly, the preferably, liner 20 can have the resistance of a 103-105 ohm (Ω)/square (ohms/sq), runs through on each liner 20 to form the perforation that at least one and corresponding perforation 121 is connected.

The preferably, each liner 20 can be made up of liner 25 on a lower liner 21, the O shape ring 23 and; This lower liner 21 is an annular, is arranged in the pickup groove 123 of supporting part 12, has a center pit, is formed with annular flange 211 at lower liner 21 inwalls; This O shape ring 23 is arranged in the lower liner 21, has a center pit, encircles O shape to be formed with an outer ring bead 231 that is interlocked with interior annular flange 211 on 23 outer walls; Upward liner 25 is set on O shape and encircles 25 tops, runs through to be formed with at least one through hole 251 that is connected with supporting part 12 perforations 121 on last liner 25, and this through hole 251 cooperates the center pit of O shapes ring 23 and lower liner, constitutes the perforation of liner 20 jointly.

When transporting glass substrate with the glass substrate carrier, make glass substrate be seated on the liner 20, then start vacuum pump and produce pull of vacuum so that the absorption glass substrate in perforation place of each liner 20, when glass substrate is transported arrival burr remover 90, stop vacuum pump, and make the glass substrate carrier break away from glass substrate, because liner 20, supporting part 12, the upright seat 10 of carriage 11 and ground connection constitutes an electrostatic discharged path, the static that it is produced in the time of can effectively discharging liner 20 with glass substrate moment disengaging, avoid static focus between liner 20 and glass substrate, so when glass substrate breaks away from liner 20, do not have the original circuit on the excessive electrostatic damage glass substrate, can avoid glass substrate to scrap thus, thereby can lifting glass substrate yield and reduction glass substrate cost.

Claims

1. glass substrate carrier that prevents static focus is characterized in that including:

One pedestal, its ground connection and can moving horizontally, on pedestal, be formed with two upright seats, described upright seat is a conductor, horizontal respectively projection has a ㄇ shape carriage on each upright seat, and two ㄇ shape carriages are oppositely arranged, and described carriage is a conductor, there is at least one supporting part the both sides of each carriage end projection respectively, and described supporting part is a conductor;

A plurality of liners are separately positioned on the supporting part, have elasticity and are conductor; Thus, liner, supporting part, carriage and upright seat constitute an electrostatic discharged path, can avoid excessive static focus and damage the glass substrate that is seated on the carrier.

2. the glass substrate carrier that prevents static focus as claimed in claim 1, it is characterized in that: each liner contains carbonaceous material and possesses electric conductivity.

3. the glass substrate carrier that prevents static focus as claimed in claim 1, it is characterized in that: each liner contains graphite and possesses electric conductivity.

4. the glass substrate carrier that prevents static focus as claimed in claim 1, it is characterized in that: each liner contains metal and possesses electric conductivity.

5. as each described glass substrate carrier that prevents static focus of claim 1 to 4, it is characterized in that: run through on each supporting part and be formed with a perforation, run through on each liner and be formed with a perforation that is communicated with corresponding perforation, can make the supporting part pass through pipeline and an external vacuum pump thus, so that make liner produce pull of vacuum.

6. as each described glass substrate carrier that prevents static focus of claim 1 to 4, it is characterized in that: each supporting part end face is formed with the pickup groove that holds corresponding liner respectively.

7. the glass substrate carrier that prevents static focus as claimed in claim 6, it is characterized in that: each liner is made up of liner on a lower liner, the O shape ring and, this lower liner is an annular, be arranged in the pickup groove of corresponding supporting part, be formed with annular flange at the lower liner inwall, this 0 shape ring is arranged in the lower liner, on O shape ring outer wall, be formed with an outer ring bead that is interlocked with interior annular flange, upward liner is set on O shape ring top, runs through to be formed with at least one through hole that is connected with the supporting part perforation on last liner.