CN202830157U - Target poisoning releasing device for magnetic control film plating machine - Google Patents
Target poisoning releasing device for magnetic control film plating machine Download PDFInfo
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- CN202830157U CN202830157U CN 201220037477 CN201220037477U CN202830157U CN 202830157 U CN202830157 U CN 202830157U CN 201220037477 CN201220037477 CN 201220037477 CN 201220037477 U CN201220037477 U CN 201220037477U CN 202830157 U CN202830157 U CN 202830157U
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- target
- closed loop
- control instrument
- gas
- loop flow
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Abstract
The utility model relates to the technical field of mechanical production devices and specifically relates to a target poisoning releasing device for a magnetic control film plating machine. The device is characterized in that an electromagnetic valve, a mass flow controller and a closed loop flow control instrument are sequentially connected through gas pipes; one or more manual micro-adjustable valve is arranged on the closed loop flow control instrument, a gas supply pipe is connected with the manual micro-adjustable valve, one or more gas blowing port is arranged on the gas supply pipe, and the gas blowing position of the gas blowing port corresponds to a magnetic control target. According to the target poisoning releasing device, the gas quantity can be adjusted according to actual using conditions, the whole structure is simple, the operability is high, the adjustment is convenient, and the using effects are obvious.
Description
Technical field
The utility model relates to the machinery production equipment technical field, is specifically related to a kind of magnetic control film coating machine and removes target poisoning device.
Technical background
Magnetic controlling target poisoning long-term existence is in magnetic control film coating technique, its origin cause of formation comprises: positive ion is piled up---when target is poisoned, target surface forms one deck insulating film, stopping owing to insulation layer when positive ion arrives cathode target surface, can not directly enter cathode target surface, but be deposited on the target surface, easily produce awkward silence at a meeting and cause arc discharge and beat arc, cathode sputtering can't be gone on.When disappearing anode---target is poisoned, also deposited insulating film on the vacuum-chamber wall of ground connection, the electronics that arrives anode can't enter anode, forms the disappearing anode phenomenon.
Summary of the invention
The utility model purpose is to be for the deficiencies in the prior art for the purpose of this utility model, provides a kind of simple in structure, workable, easy to adjust, and result of use is significantly removed target poisoning device.
The purpose of this utility model is achieved through the following technical solutions:
A kind of magnetic control film coating machine is removed target poisoning device, and it is characterized in that: magnetic valve, mass flow controller, closed loop flow quantity control instrument connect by tracheae successively; Be provided with one or more manual fine-tuning valve at described closed loop flow quantity control instrument, be connected with air-supply duct at this manual fine-tuning valve; Described air-supply duct is provided with one or more puff port, and this puff port blow-out position is corresponding with magnetic controlling target.
Described closed loop flow quantity control instrument is provided with 4 manual fine-tuning valves.
Described puff port arranges in pairs.
The beneficial effects of the utility model are: closed loop flow quantity control instrument and manual fine-tuning valve arrangement can equably reactant gases be distributed in target around, the ratio of reactant gases and sputter gas around the control target, effectively prevent the target poisoning, one-piece construction is simple, workable, easy to adjust, result of use is obvious.
Description of drawings
The utility model is described in further detail to utilize accompanying drawing, but the embodiment in the accompanying drawing does not consist of any restriction of the present utility model.
Fig. 1 is the utility model schematic diagram.
In Fig. 1, comprise:
1, inlet mouth, 2, magnetic valve, 3, mass flow controller, 4, the closed loop flow quantity control instrument, 5, the manual fine-tuning valve, 6, air-supply duct, 7, puff port, 8, magnetic controlling target.
Embodiment
Below in conjunction with embodiment the utility model is elaborated.
Among Fig. 1, magnetic valve 2, mass flow controller 3, closed loop flow quantity control instrument 4 connect by tracheae successively; Be provided with one or more manual fine-tuning valve 5 at described closed loop flow quantity control instrument 4, be connected with air-supply duct 6 at this manual fine-tuning valve 5; Described air-supply duct 6 is provided with one or more puff port 7, and these puff port 7 blow-out positions are corresponding with magnetic controlling target 8.
Described closed loop flow quantity control instrument 4 is provided with 4 manual fine-tuning valves 5.
Described puff port 7 arranges in pairs.
Under low vacuum state, target surface is cleaned, magnetic valve 2 is connected, gas enters mass flow controller 3 by inlet mouth 1, the gas of adjusting flow through mass flow controller 3 enters closed loop flow quantity control instrument 4,5 pairs of gas flows of manual fine-tuning valve on closed loop flow quantity control instrument 4 are finely tuned output, blow out by the puff port 7 on the air-supply duct 6 at last, magnetic controlling target 8 surfaces are cleaned.
Should be noted that at last; above embodiment is only in order to the technical solution of the utility model to be described but not to the restriction of the utility model protection domain; although with reference to preferred embodiment the utility model has been done detailed description; those of ordinary skill in the art is to be understood that; can make amendment or be equal to replacement the technical solution of the utility model, and not break away from essence and the scope of technical solutions of the utility model.
Claims (3)
1. a magnetic control film coating machine is removed target poisoning device, and it is characterized in that: magnetic valve (2), mass flow controller (3), closed loop flow quantity control instrument (4) connect by tracheae successively; Be provided with one or more manual fine-tuning valve (5) at described closed loop flow quantity control instrument (4), be connected with air-supply duct (6) at this manual fine-tuning valve (5); Described air-supply duct (6) is provided with one or more puff port (7), and this puff port (7) blow-out position is corresponding with magnetic controlling target (8).
2. releasing target poisoning device according to claim 1, it is characterized in that: described closed loop flow quantity control instrument (4) is provided with 4 manual fine-tuning valves (5).
3. releasing target poisoning device according to claim 1 is characterized in that: the paired setting of described puff port (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220037477 CN202830157U (en) | 2012-02-07 | 2012-02-07 | Target poisoning releasing device for magnetic control film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220037477 CN202830157U (en) | 2012-02-07 | 2012-02-07 | Target poisoning releasing device for magnetic control film plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202830157U true CN202830157U (en) | 2013-03-27 |
Family
ID=47941911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220037477 Expired - Fee Related CN202830157U (en) | 2012-02-07 | 2012-02-07 | Target poisoning releasing device for magnetic control film plating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202830157U (en) |
-
2012
- 2012-02-07 CN CN 201220037477 patent/CN202830157U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 526060 Xinghua Road two, Duanzhou science and Technology Park, Duanzhou, Guangdong, Zhaoqing Patentee after: Guangdong Zhen Hua Technology Co., Ltd. Address before: 526060 Xinghua Road two, Duanzhou science and Technology Park, Duanzhou, Guangdong, Zhaoqing Patentee before: Zhaoqing Zhenhua Vacuum Machinery Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130327 Termination date: 20210207 |