CN207958482U - A kind of continuous low boiling point material thermal evaporation coating apparatus - Google Patents
A kind of continuous low boiling point material thermal evaporation coating apparatus Download PDFInfo
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- CN207958482U CN207958482U CN201721907354.XU CN201721907354U CN207958482U CN 207958482 U CN207958482 U CN 207958482U CN 201721907354 U CN201721907354 U CN 201721907354U CN 207958482 U CN207958482 U CN 207958482U
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Abstract
The utility model is related to a kind of continuous low boiling point material thermal evaporation coating apparatus, including：Crucible（1）And escape pipe（5）, escape pipe upper end is equipped with conical valve（6）, escape pipe upper end connecting gas transmission pipe（8）, the back segment of appendix（8B）It is middle that one group of nozzle is arranged using the linear alignment（9）, the back segment of appendix（8B）It is arranged in the vacuum chamber of coating wire；Crucible is equipped with the vacuum suction device being connected with its interlayer and the nitrogen device for being quickly cooled down crucible and gas pipeline；It is characterized in that：High temperature flapper valve is equipped in appendix 8（10）, the flapper valve and the second sealing ring and appendix that are provided with（8）Back segment（8B）Entrance formed sealing cooperation.The utility model has the beneficial effects that：Using such mode evaporation coating, equipment downtime can be greatly reduced, improves equipment mobility, improves production efficiency, saves production cost, adapts to large-scale continuous production.
Description
Technical field
The utility model is related to be used for field of vacuum coating in solar film battery production, more particularly to a kind of continuous
The device of low boiling point material thermal evaporation plated film.
Background technology
Thermal evaporation coating method is made using the methods of electric current heating, electron beam heating or laser heating in vacuum environment
Evaporation material become cluster, molecule or atom, nearly free movement is made with larger free path, when these free movements molecule or
Atomic collision just condenses on substrate to the lower substrate of temperature, and deposition, which is covered on substrate, forms film.Thermal evaporation is plated
Embrane method has the advantages that purity height, advantages of good crystallization, is usually used in the life of metallic film, semiconductive thin film, thin-film solar cells material
Production makes.
In production, the size of substrate is usually larger, so General Production Lines are all equal using multiple thermal evaporation sources nozzles
With or be orderly distributed in substrate side, substrate is deposited, carrying out the when of recharging raw material after evaporation raw material is finished needs
It vacuumizes, and such mode can be because evaporation source escape pipe and sealed nozzle be poor, there are operating difficulties, inefficiency to ask
Topic, it is difficult to carry out continuous production.
Invention content
It is exactly a kind of continuous low boiling point material provided for the technical problem more than solving for the purpose of this utility model
Thermal evaporation coating apparatus, can real continuous production, the equipment not stopped production by the inadequate problem of raw material.
The utility model is achieved through the following technical solutions：
A kind of continuous low boiling point material thermal evaporation coating apparatus, including：
The crucible of the double-layer structure of evaporation material is loaded, crucible internal layer is equipped with heating component, outer layer is equipped with cooling water pipe；
The side of crucible is equipped with feed inlet, is equipped with evaporation gas outlet above, and evaporation gas outlet is equipped with escape pipe, escape pipe
Upper end is equipped with conical valve, and conical valve is by Serve Motor Control；
One group of nozzle is arranged using the linear alignment in the back segment of appendix in the leading portion of escape pipe upper end connecting gas transmission pipe, defeated
The back segment of tracheae is arranged in the vacuum chamber of coating wire；
Crucible is equipped with the vacuum suction device being connected with its interlayer and the nitrogen for being quickly cooled down crucible and gas pipeline
Device of air；
It is characterized in that：High temperature flapper valve is equipped between the leading portion and back segment of appendix, it includes：
It is set to the valve body that cavity is carried between the leading portion of appendix and back segment, the leading portion and back segment of valve body and appendix 8
Unicom, valve body upper end are arranged a servo motor, connect an axle sleeve on output shaft, axle sleeve connect cooperation, lead screw with lead screw
Threaded portion connect cooperation, the smooth bar part of lead screw lower part and setting with the nut in the second bearing being arranged in body cavity
Through-hole connection cooperation in the first bearing in body cavity, the through-hole of the first support base is equipped with the first sealing ring and lead screw light
Shaft portion forms sealing cooperation, achievees the purpose that secondary seal；
Screw lower end connects a four-bar mechanism, and the four-bar mechanism other end connects flapper valve, and flapper valve is equipped with the
Two sealing rings, after lead screw extends downwardly in place, the entrance of flapper valve and the back segment of the second sealing ring and appendix forms sealing and matches
It closes.
Lead screw moves down after so that flapper valve is stretched out in place, and four-bar mechanism provides a support from the baffle back side automatically
Power, make valve tightness in the case that pressure at both sides is identical also can better seal.
The technical solution advanced optimized is：
Valve body upper end is equipped with the sleeve sealing cooperation that magnet fluid sealing is connect with servo motor, perfectly solves under high temperature
Traditional ORING is revealed because of caused by ring wear and problem of aging；
The technical solution advanced optimized is：It is arranged one in valve body side and vacuumizes outlet, vacuumizes outlet connection and take out
Vacuum tube, is also connected with nitrogen tube on vacuum-pumping tube, vacuum-pumping tube and nitrogen tube respectively with vacuum suction device and nitrogen device phase
Even；
This region is handled when so design is sealing fortuitous event generation in order to prevent, while can also be to herein
Effect is rinsed or is quickly cooled down with nitrogen.
High temperature flapper valve gives up traditional cylinder-driven guard seal mode, passes through spiral sleeve rotation pair using servo motor
Sealing baffle carries out open-close ways, and so design avoids reveal hidden danger caused by Telescopic-cylinder well.
The beneficial effects of the invention are as follows：The mobility of the producing line equipment performance performance assessment criteria important as one, and use
Such mode evaporation coating can greatly reduce equipment downtime, improve equipment mobility, improve production efficiency.It saves
Production cost.Adapt to large-scale continuous production.
Description of the drawings
Fig. 1 thermal evaporation coating system schematic diagrames；
Fig. 2 is the structural schematic diagram of continuous coating apparatus；
Fig. 3 is the structural schematic diagram of high temperature resistant flapper valve.
Specific implementation mode
Specific embodiment of the present utility model is described in detail below in conjunction with the accompanying drawings.
1, as shown in Figure 1, evaporation source A and B described in the utility model is mounted in traditional continuous coating producing line, including
Vacuum film coating chamber, transition chamber one, transition chamber two, chip automatic feed platform, chip automatic blanking platform, vaporizing-source system A steam
Origination system B, the pumped vacuum systems of each room.Evaporation source A and evaporation source B is distributed in the same side of coating chamber, appendix respectively
Road B extend into vertical with substrate transfer direction holdings in coating chamber, and for nozzle above chip, jet hole and chip holding are vertical
Directly.Appendix back segment B is arranged in vacuum coating room, appendix leading portion A connection crucibles.
2, as shown in Fig. 2, a kind of continuous coating apparatus preventing sealing valve deposited metal film described in the utility model, packet
It includes：The crucible 1 of the double-layer structure of evaporation material is loaded, crucible internal layer is equipped with heating component 2, outer layer is equipped with cooling water pipe 3；Crucible
Side is equipped with feed inlet 4, is equipped with evaporation gas outlet above, and evaporation gas outlet is equipped with escape pipe 5 with dissection, on escape pipe
End is equipped with conical valve 6, it has the control of servo motor 7；The leading portion 8A of escape pipe upper end connect band appendix 8 with dissection, it is defeated
One group of fumarole is arranged using the linear alignment in the back segment 8B of tracheae, each fumarole, which uses, is threadedly coupled nozzle 9, appendix
Back segment 8B is arranged in the vacuum chamber of coating wire.
Crucible 1 is equipped with interlayer through vacuum exhaust pipe 11 and nitrogen tube 12, is filled respectively with vacuum suction device, nitrogen
Set it is connected, to be quickly cooled down crucible；
3, as shown in figure 3, being equipped with high temperature flapper valve 10 between the leading portion 8A and back segment 8B of appendix 8, it includes：
The valve body 105 that cavity is carried between the leading portion 8A of appendix 8 and back segment 8B is set to, before valve body and appendix 8
Section and back segment unicom.A servo motor 101 is arranged in valve body upper end, connects an axle sleeve 103 on output shaft, axle sleeve 103 with
The connection cooperation of lead screw 104,104 threaded portion of lead screw is connect with the nut in the second bearing 107a being arranged in body cavity matches
It closes, the smooth bar part of 104 lower part of lead screw connect cooperation with the through-hole in the first bearing 107 being arranged in body cavity, and first
The through-hole of support base forms sealing cooperation equipped with the first sealing ring 106 and lead screw optical axis portion, achievees the purpose that secondary seal.
Screw lower end connects a four-bar mechanism 108, and the four-bar mechanism other end connects flapper valve 109, flapper valve
109 are equipped with the second sealing ring 110, after lead screw extends downwardly in place, flapper valve 109 and the second sealing ring 110 and appendix 8
Back segment 8B entrance formed sealing cooperation.
Lead screw moves down after so that flapper valve is stretched out in place, and four-bar mechanism provides a support from the baffle back side automatically
Power, make valve tightness in the case that pressure at both sides is identical also can better seal.
105 upper end of valve body is equipped with the sealing cooperation of axle sleeve 103 that magnet fluid sealing 102 is connect with servo motor, perfect to solve
The tradition ORING under high temperature that determined is revealed because of caused by ring wear and problem of aging；
It is arranged one in 105 side of valve body and vacuumizes outlet, vacuumize and export connection vacuum-pumping tube 11, on vacuum-pumping tube 11
It is also connected with nitrogen tube 12, vacuum-pumping tube 11 and nitrogen tube 12 are connected with vacuum suction device and nitrogen device respectively.
This region is handled when so design is sealing fortuitous event generation in order to prevent, while can also be to herein
Effect is rinsed or is quickly cooled down with nitrogen.
When 4, working normally, evaporation raw material is put into crucible, and crucible is heated by heating component, and raw material flashes to gas
By gas pipeline and front end nozzle after body, it is agglomerated to formation film on the lower substrate of temperature and reaches deposition purpose.
Vaporizing-source system A raw materials evaporate, and turn off gas pipeline valve（High temperature resistant flapper valve）, open vaporizing-source system
B continues hydatogenesis and carries out continuous production.
To realize that the realization for sealing gas pipeline under high temperature, high temperature resistant flapper valve of the invention are accomplished by the following way,
Control system PC assigns shutdown command by PLC and servomotor controller to high temperature resistant flapper valve, and servomotor controller is logical
It crosses servo motor and carries out spinning movement, servo motor is rotated by axle sleeve drives silk pavilion to rotate,（Axle sleeve rotation is close by magnetic fluid
Envelope achievees the purpose that the inside and outside connection of vacuum environment）Sealing baffle is set to generate displacement by wire rod thread, after reaching gas transmission pipe port,
By the four-bar mechanism at sealing baffle back, makes sealing baffle because of the power by horizontal direction, generated with the second sealing good
Sealing, reach sealing purpose.
It is passed through nitrogen between the crucible ectonexine of vaporizing-source system A to be cooled down within five minutes, is then evacuated, then qi of chong channel ascending adversely, takes out
Gas so recycles, and until crucible temperature is less than 30 degrees Celsius, opening crucible feeding mouth is filled raw material operation, has filled
Finish, seal feeding mouth, vacuumized between crucible ectonexine, is evacuated half an hour, is heated, it is stand-by, wait evaporation
Source system B, evaporates, switches over, to achieve the purpose that continuous coating produces
The above is only the preferred embodiment of this patent, it is noted that for the ordinary skill people of the art
For member, under the premise of not departing from the art of this patent principle, several improvement and replacement can also be made, these improve and replace
Also it should be regarded as the protection domain of this patent.
Claims (3)
1. a kind of continuous low boiling point material thermal evaporation coating apparatus, it is characterised in that including：
Load the crucible of the double-layer structure of evaporation material（1）, crucible internal layer is equipped with heating component（2）, outer layer be equipped with cooling water pipe
（3）；
The side of crucible is equipped with feed inlet（4）, above be equipped with evaporation gas outlet, evaporation gas outlet be equipped with escape pipe（5）, outlet
Pipe upper end is equipped with conical valve（6）, conical valve（6）By servo motor（7）Control；
Escape pipe upper end connecting gas transmission pipe（8）Leading portion（8A）, the back segment of appendix（8B）It is middle to be arranged one group using the linear alignment
Nozzle（9）, the back segment of appendix（8B）It is arranged in the vacuum chamber of coating wire；
Crucible is equipped with the vacuum suction device being connected with its interlayer and the nitrogen for being quickly cooled down crucible and gas pipeline fills
It sets；
It is characterized in that：
Appendix（8）Leading portion（8A）With back segment（8B）Between be equipped with high temperature flapper valve（10）, it includes：
It is set to appendix（8）Leading portion（8A）With back segment（8B）Between carry cavity valve body（105）, valve body and appendix
（8）Leading portion and back segment unicom, a servo motor is arranged in valve body upper end（101）, an axle sleeve is connected on output shaft
（103）, axle sleeve（103）With lead screw（104）Connection cooperation, lead screw（104）Threaded portion and be arranged in body cavity second
Bearing（107a）In nut connection cooperation, lead screw（104）The smooth bar part of lower part and be arranged in body cavity first
Seat（107）In through-hole connection cooperation, the through-hole of the first support base is equipped with the first sealing ring（106）It is formed with lead screw optical axis portion
Sealing cooperation, achievees the purpose that secondary seal；
Screw lower end connects a four-bar mechanism（108）, four-bar mechanism other end connection flapper valve（109）, flapper valve
（109）It is equipped with the second sealing ring（110）, after lead screw extends downwardly in place, flapper valve（109）And second sealing ring（110）With
Appendix（8）Back segment（8B）Entrance formed sealing cooperation.
2. a kind of continuous low boiling point material thermal evaporation coating apparatus according to claim 1, it is characterised in that valve body（105）
Upper end is equipped with magnet fluid sealing（102）The axle sleeve being connect with servo motor（103）Sealing cooperation.
3. a kind of continuous low boiling point material thermal evaporation coating apparatus according to claim 1, it is characterised in that in valve body
（105）Side is arranged one and vacuumizes outlet, vacuumizes outlet connection vacuum-pumping tube（11）, vacuum-pumping tube（11）On be also connected with nitrogen
Tracheae（12）, vacuum-pumping tube（11）And nitrogen tube（12）It is connected respectively with vacuum suction device and nitrogen device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721907354.XU CN207958482U (en) | 2017-12-30 | 2017-12-30 | A kind of continuous low boiling point material thermal evaporation coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721907354.XU CN207958482U (en) | 2017-12-30 | 2017-12-30 | A kind of continuous low boiling point material thermal evaporation coating apparatus |
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| Publication Number | Publication Date |
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| CN207958482U true CN207958482U (en) | 2018-10-12 |
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| CN201721907354.XU Active CN207958482U (en) | 2017-12-30 | 2017-12-30 | A kind of continuous low boiling point material thermal evaporation coating apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103448A (en) * | 2017-12-30 | 2018-06-01 | 凯盛光伏材料有限公司 | A kind of continuous low boiling point material thermal evaporation coating apparatus |
| CN113458422A (en) * | 2021-07-01 | 2021-10-01 | 上海交通大学 | Molten metal injection molding control device and method |
-
2017
- 2017-12-30 CN CN201721907354.XU patent/CN207958482U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108103448A (en) * | 2017-12-30 | 2018-06-01 | 凯盛光伏材料有限公司 | A kind of continuous low boiling point material thermal evaporation coating apparatus |
| CN113458422A (en) * | 2021-07-01 | 2021-10-01 | 上海交通大学 | Molten metal injection molding control device and method |
| CN113458422B (en) * | 2021-07-01 | 2024-01-19 | 上海交通大学 | Molten metal injection molding control method |
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