CN202047130U - Novel integrated device capable of supplying gas through multistage technology - Google Patents
Novel integrated device capable of supplying gas through multistage technology Download PDFInfo
- Publication number
- CN202047130U CN202047130U CN2011200599255U CN201120059925U CN202047130U CN 202047130 U CN202047130 U CN 202047130U CN 2011200599255 U CN2011200599255 U CN 2011200599255U CN 201120059925 U CN201120059925 U CN 201120059925U CN 202047130 U CN202047130 U CN 202047130U
- Authority
- CN
- China
- Prior art keywords
- pipe
- air
- gas
- valve plate
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to a gas supply system used for plating the vacuum evaporation, sputtering or ion injection of a cladding material, in particular to an integrated multistage system for gas supply as well as a method of inputting gas to a reaction chamber or modifying airflow in the reaction chamber. The technical scheme of the utility model aims at providing a novel integrated device capable of supplying the gas through the multistage technology, and the device comprises a solenoid valve, a solenoid valve plate and a passageway pipe, wherein the solenoid valve is fixedly arranged at the upper part of the solenoid valve plate and is connected with the solenoid valve plate in a sealing manner through pipe threads, the passageway pipe is arranged in the solenoid valve plate, a gas inlet is arranged at a side surface of the solenoid valve plate, and a gas outlet is arranged at the other side surface intersected with the side surface of the gas inlet.
Description
Technical field
The present invention relates to coating and form vacuum-evaporation, sputter or the ion implantation airing system that carries out plating of material, refer more particularly to multistage air feed integrated system and to reaction chamber input gas or in reaction chamber the method for modified stream.
Background technology
Evaporation coating as the physical gas phase deposition technology that is widely adopted now, ion film plating and magnetron sputtering plating, its Working environment requires under very harsh vacuum state, and need in vacuum cavity, to charge into the suitable process gas of proportioning, simultaneously, the homogeneity of gas also requires very harsh in the vacuum cavity, wherein, film quality and coating process adjustment are controlled and are charged into gas flow and contact directly, so the technology airing system is the part of core in the film coating manufacturing process.
At present, the airing system that domestic coating film production line adopts exists the layout complexity, assembles phenomenons such as loaded down with trivial details, though it also can reach the purpose of pilot-gas kind and tolerance, the shortcoming of Cun Zaiing has in actual use:
1, the flow control of process gas need rely on veteran process engineer rule of thumb to judge input tolerance, is difficult to accomplish accurate control.
2, steam line access confusion and interface are too much, cause great difficulty for the proportioning and the leak detection of process gas, have strengthened the difficulty of the maintenance and the maintenance of equipment.In addition, because single vacuum valve cost is very high on the market, interface is too much, has also increased the manufacturing cost of equipment virtually.
Publication number is that the Chinese patent of CN101497990A has disclosed a kind of Sputting film-plating apparatus, it has introduced a kind of gaseous species and flow of controlling induction trunk by gas flow controller, and the distribution situation that reaches adjusting process gas realizes the homogeneity of thickness is carried out the purpose of online adjustment, in this patent, only the control device to induction trunk improves, and the complicacy and the loaded down with trivial details property of intake ducting is not transformed.The loaded down with trivial details property and the complicacy of the installation of sputtering coating equipment and daily maintenance, and the difficulty of vacuum leak hunting all is not resolved.
Summary of the invention
The technical problem to be solved in the present invention is at the shortcoming of intake ducting complicacy in the prior art and loaded down with trivial details property, to provide a kind of novel multistage technology air feed integrating device.
For achieving the above object, the technical solution used in the present invention is, a kind of novel multistage technology air feed integrating device, comprise magnetic valve, electromagnetism valve plate, passage pipe, wherein, magnetic valve is arranged on the top of electromagnetism valve plate, be tightly connected with gas thread and electromagnetism valve plate, passage pipe is arranged in the electromagnetism valve plate, and the side of described electromagnetism valve plate is provided with air intake, and the another side of intersecting with side, air intake place is provided with the air outlet.
Further technical scheme, described multistage technology air feed integrating device, wherein, described air intake can be made as the multistage air intake, and described air outlet can be made as the multistage air outlet.
Further technical scheme, described multistage technology air feed integrating device, wherein, described threading a pipe, be divided into into gas passage pipe and outlet passageway pipe, describedly go into the gas passage pipe play ligation between air intake and magnetic valve, described outlet passageway pipe plays ligation between air outlet and magnetic valve.
Further technical scheme, described multistage technology air feed integrating device, wherein, described air outlet is divided into main gas outlet and assist gas air outlet again.
Further technical scheme, described multistage technology air feed integrating device, wherein, described outlet passageway pipe is divided into main gas outlet passageway pipe and assist gas outlet passageway pipe again, main gas outlet passageway Guan Yuzhu gas outlet communicates, and assist gas outlet passageway pipe communicates with the assist gas air outlet.
Further technical scheme, described multistage technology air feed integrating device, wherein, each air outlet also links to each other with mass flow controller by flexible pipe.
Further technical scheme, described multistage technology air feed integrating device, wherein, described mass flow controller is arranged on the vacuum hand valve circuit board, also be provided with vacuum hand valve in the described vacuum hand valve circuit board, described vacuum hand valve circuit board is fixedly installed in the vacuum cavity.
Compared with prior art, technique effect of the present invention is, when needs detect induction trunk, only need close vacuum hand valve and cut off vacuum cavity and extraneous passage, reaches the purpose of inspection gallery.
Owing to adopt magnetic valve and electromagnetism valve plate, can simplify the pipeline of induction trunk, thereby reduce the difficulty of vacuum leak hunting, and reduce the installation of equipment and the loaded down with trivial details property and the complicacy of daily maintenance.
The present invention is described further below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is the integral layout synoptic diagram of multistage technology air feed integrating device of the present invention;
Fig. 2 is the magnetic valve intralamellar part layout of multistage technology air feed integrating device of the present invention;
Fig. 3 is the outside synoptic diagram of the electromagnetism valve plate of multistage technology air feed integrating device of the present invention;
Fig. 4 is the electromagnetism valve plate side schematic view of multistage technology air feed integrating device of the present invention;
Fig. 5 is the structural representation of vacuum hand valve of the present invention.
1-electromagnetism valve plate; The 2-magnetic valve; The 3-mass flow controller; 4-vacuum hand valve circuit board; 5-vacuum hand valve; The 6-flexible pipe; 8-goes into the gas passage pipe; 9-master's gas outlet passageway pipe; 10-assist gas outlet passageway pipe; The 11-air intake; The 12-air outlet; 120-master's gas outlet, 121-assist gas air outlet.
Embodiment
What the present invention protected is a kind of novel multistage technology air feed integrating device, so long as those skilled in the art understand the embodiment of the invention, without performing creative labour, only is the replacement of equivalent technology, all belongs to protection scope of the present invention.
In conjunction with Fig. 1, shown in Figure 2, in the side of electromagnetism valve plate 1, be provided with air intake 11, wherein, air intake 11 can be made as multistage, promptly in arbitrary side of electromagnetism valve plate 1, digs more endoporus as air intake, to insert more process gas.Each air intake 11 has goes into gas passage pipe 8 with it one to one, in the present embodiment, is provided with three sections air intakes 11, every section air intake 11 external a kind of gases, and it can insert Ar, N
2And O
2In electromagnetism valve plate 1 and orthogonal another narrow side, side, air intake 11 place, be provided with six air outlets 12, be divided into a main gas outlet 120 and five assist gas air outlets 121, described magnetic valve 2 is arranged on electromagnetism valve plate 1 first half, is tightly connected with gas thread and electromagnetism valve plate 1.Gas feeding pipe 8 plays ligation between air intake 11 and magnetic valve 2.Main gas outlet passageway pipe 9 plays ligation between main gas outlet 120 and magnetic valve 2, assist gas outlet passageway pipe 10 plays ligation between assist gas air outlet 121 and magnetic valve 2, air outlet 12 is tightly connected by flexible pipe 6 and mass flow controller 3, mass flow controller 3 is arranged on the vacuum hand valve circuit board 4, and be tightly connected with it, also be provided with vacuum hand valve 5 in the vacuum hand valve circuit board 4.Vacuum hand valve circuit board 4 is fixedly installed in the vacuum cavity (not showing in the drawings).External process gas is through air intake 11, go into gas passage pipe 8, corresponding magnetic valve 2, a part is by main gas outlet passageway pipe 9, main gas outlet 120, flexible pipe 6, mass flow controller 3, vacuum hand valve circuit board 4 and vacuum hand valve 5, be input in the vacuum cavity at last, the external process gas of another part is through air intake 11, go into gas passage pipe 8, corresponding magnetic valve 2, assist gas outlet passageway pipe 12, assist gas air outlet 121, flexible pipe 6, mass flow controller 3, vacuum hand valve 5, be input in the vacuum cavity at last, wherein, in the present embodiment, main gas outlet 120 is provided with one, assist gas air outlet 121 is provided with five, and mass flow controller 3 here rises to be regulated and control action kou.
As shown in Figure 3, described electromagnetism valve plate 1 is a circuit board, be set with magnetic valve 2 on the top of electromagnetism valve plate 1, the optional Direct Action Type of described magnetic valve, the magnetic valve of distribution Direct Action Type or pilot-operated type, the principle of work of described direct-acting electromagnetic valve are, during its energising, solenoid produces electromagnetic force and closuremember is mentioned valve open from valve seat; During outage, electromagnetic force disappears, and the spring handle closuremember is pressed on the valve seat, closes.The principle of work of guide electromagnetic valve is, during its energising, electromagnetic force is opened pilot hole, and upper chamber's pressure descends rapidly, forms low high pressure reduction around closuremember, and hydrodynamicpressure promotes closuremember and moves up, and opens; During outage, spring force cuts out pilot hole, and inlet pressure is hanged down high pressure reduction by the rapid chamber of by-pass port under forming around the valve member of pass, and hydrodynamicpressure promotes closuremember and moves down, and closes.The principle of work of described distribution Direct Action Type is, it is a kind of straight moving and pilot-operated type principle of combining, and when inlet and outlet did not have pressure reduction, after the energising, electromagnetic force was directly upwards mentioned valve open to little valve of guide and main valve closuremember successively.When inlet and outlet reach startup pressure reduction, after the energising, the little valve of electromagnetic force guide, cavity pressure rises under the main valve, and upper cavity pressure descends, thereby utilizes pressure reduction that main valve is upwards pushed open; During outage, pilot valve utilizes spring force or pressure medium to promote closuremember, moves down, and makes and closes.
As shown in Figure 3,, be provided with three air intakes 11, be provided with six air outlets, be divided into a main air outlet 120 and five auxiliary air outlets 121 at its major opposing side in the side of electromagnetism valve plate 1.Its upper end is built-in with six magnetic valves 2.
As shown in Figure 4, to the statement more intuitively that has been integrated with of electromagnetism valve plate 1, magnetic valve 2 is arranged on the broad side surface of electromagnetism valve plate one end.
In Fig. 5 of present embodiment, provided a kind of structural representation of vacuum hand valve.
Claims (7)
1. novel multistage technology air feed integrating device, it comprises magnetic valve, electromagnetism valve plate, passage pipe, it is characterized in that, described magnetic valve is fixedly installed on the top of electromagnetism valve plate, be tightly connected with gas thread and electromagnetism valve plate, passage pipe is arranged in the electromagnetism valve plate, and the side of described electromagnetism valve plate also is provided with air intake, and described another side of intersecting with air intake place face is provided with the air outlet.
2. according to the described multistage technology of claim 1 air feed integrating device, it is characterized in that described air intake is provided with the air intake more than at least one section, described air outlet is provided with the air outlet more than at least one section.
3. according to the described multistage technology of claim 1 air feed integrating device, it is characterized in that described threading a pipe, be divided into into the gas passage pipe, the outlet passageway pipe is describedly gone into the gas passage pipe play ligation between air intake and magnetic valve, and described outlet passageway pipe plays ligation between air outlet and magnetic valve.
4. according to the described novel multistage technology air feed integrating device of claim 1, it is characterized in that described air outlet is divided into main gas outlet and assist gas air outlet.
5. according to claim 3 or 4 described multistage technology air feed integrating devices, it is characterized in that, described outlet passageway pipe is divided into main gas outlet passageway pipe and assist gas outlet passageway pipe again, main gas outlet passageway Guan Yuzhu gas outlet communicates, and assist gas outlet passageway pipe communicates with the assist gas air outlet.
6. according to the described novel multistage technology air feed integrating device of claim 1, it is characterized in that each air outlet also links to each other with mass flow controller by flexible pipe.
7. according to the described novel multistage technology air feed integrating device of claim 6, it is characterized in that, described mass flow controller is arranged on the vacuum hand valve circuit board, also is provided with vacuum hand valve in the described vacuum hand valve circuit board, and described vacuum hand valve circuit board is fixedly installed in the vacuum cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200599255U CN202047130U (en) | 2011-03-09 | 2011-03-09 | Novel integrated device capable of supplying gas through multistage technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200599255U CN202047130U (en) | 2011-03-09 | 2011-03-09 | Novel integrated device capable of supplying gas through multistage technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202047130U true CN202047130U (en) | 2011-11-23 |
Family
ID=44987447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200599255U Expired - Lifetime CN202047130U (en) | 2011-03-09 | 2011-03-09 | Novel integrated device capable of supplying gas through multistage technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202047130U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102168245A (en) * | 2011-03-09 | 2011-08-31 | 上海子创镀膜技术有限公司 | Novel multi-section technology air supply assembly system |
| CN105316637A (en) * | 2015-11-20 | 2016-02-10 | 苏州赛森电子科技有限公司 | Cavity protecting device of magnetic control direct current sputtering system |
-
2011
- 2011-03-09 CN CN2011200599255U patent/CN202047130U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102168245A (en) * | 2011-03-09 | 2011-08-31 | 上海子创镀膜技术有限公司 | Novel multi-section technology air supply assembly system |
| CN105316637A (en) * | 2015-11-20 | 2016-02-10 | 苏州赛森电子科技有限公司 | Cavity protecting device of magnetic control direct current sputtering system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10782165B2 (en) | Flow control system, method, and apparatus | |
| CN105552001B (en) | A kind of vacuum system | |
| CN202047130U (en) | Novel integrated device capable of supplying gas through multistage technology | |
| CN104233176B (en) | Supersonic flame spraying system | |
| CN203843137U (en) | Die cooling system | |
| CN109357885A (en) | A kind of discharge coefficient Intelligent Calibration system of multichannel nozzle | |
| CN203421491U (en) | Two-channel gas supply device for vacuum coating | |
| CN106382745B (en) | Automatic energy-saving boiler device | |
| CN102168245A (en) | Novel multi-section technology air supply assembly system | |
| EP4303419A3 (en) | Systems and methods for bleed valve control in fuel systems | |
| CN204700424U (en) | A kind of electric current of fine plasma cutting machine and gas control system | |
| CN107741296B (en) | Automatic pressure sensor debugging device with electric proportional valve | |
| CN202263847U (en) | Automatic oil spray gun | |
| US9207688B2 (en) | Aircraft bleed system and method of controlling an aircraft bleed system | |
| CN204459296U (en) | A kind of combined valve | |
| CN202881379U (en) | Oil supply control system for vacuum aluminizing machine | |
| CN205501407U (en) | Air supply plant that vacuum ion coating used | |
| CN202562739U (en) | Valve static pressure life test system | |
| CN102242738A (en) | Siphon type airflow control device and method | |
| CN106122515A (en) | A kind of gas-liquid double-purpose electromagnetic valve | |
| CN205651750U (en) | Automatic spout steam device | |
| WO2013102362A1 (en) | Atomic layer deposition apparatus | |
| CN201022072Y (en) | Etcher | |
| CN204752785U (en) | Relay of two converter gas chambers and network system | |
| CN212177204U (en) | Mine dust settling host capable of realizing accurate control and mine dust settling system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20161229 Address after: 243001 Anhui City, Ma'anshan Province Economic and Technological Development Zone, Jinshan Road, No. 1188, building No. 13, No. 201 Patentee after: A saddle hill Functional Membrane Technology Research Institute Co. Ltd. Address before: Tang Road, Songjiang District town Shihudang 201617 Shanghai City No. 277 Patentee before: Shanghai Zichuang Coating Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111123 |