CN203421491U - Two-channel gas supply device for vacuum coating - Google Patents
Two-channel gas supply device for vacuum coating Download PDFInfo
- Publication number
- CN203421491U CN203421491U CN201320510088.2U CN201320510088U CN203421491U CN 203421491 U CN203421491 U CN 203421491U CN 201320510088 U CN201320510088 U CN 201320510088U CN 203421491 U CN203421491 U CN 203421491U
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- China
- Prior art keywords
- gas
- gas cylinder
- solenoid valve
- cylinder
- electromagnetic valve
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a two-channel gas supply device for vacuum coating. The device comprises a gas cylinder, wherein the gas cylinder comprises a first gas cylinder and a second cylinder which are connected by a gas outlet pipeline; a first electromagnetic valve for controlling the gas supply of the first gas cylinder and a second electromagnetic valve for controlling the gas supply of the second gas cylinder are arranged on the pipeline connected with the first gas cylinder and the second cylinder, respectively; a gas supply pipe communicated with vacuum coating equipment is connected to the pipeline between the first electromagnetic valve and the second electromagnetic valve; pressure sensors capable of detecting gas pressure are arranged in the first electromagnetic valve and the second electromagnetic valve; the first electromagnetic valve and the second electromagnetic valve are connected with a controller by a circuit. Through the automatic switching of the first gas cylinder and the second gas cylinder, the stability of the gas supply of the vacuum coating equipment is guaranteed, and the adverse effect on the coating quality caused by too low gas capacity or gas pressure in the gas cylinder is avoided.
Description
Technical field
The utility model relates to a kind of vacuum coating parallel gas feed device.
Background technique
In technique for vacuum coating, air supply system connects the mixed gas that target provides oxygen, argon gas, by permanent magnet, bombard and the mode such as cathode drive, makes coating material fine particle move and be attached on glass.The air feeder generally using in industry at present adopts single air cylinder air feed, when gas exhausts or gas pressure during lower than air feed standard, just need the artificial gas cylinder of changing, in Renewal process, can affect the stability of whole plated film, and often because the replacing time is artificial, grasp inaccurate, cause long period supply gas pressure not enough, affect plated film quality.
Model utility content
The technical problems to be solved in the utility model is: overcome the deficiency in prior art, a kind of gas circuit that can automatically switch is provided, stablizes the vacuum coating parallel gas feed device of air feed capacity and pressure.
The utility model solves the technological scheme that its technical problem adopts: a kind of vacuum coating parallel gas feed device, comprise gas cylinder, described gas cylinder comprises the first gas cylinder and the second gas cylinder that air outlet pipeline connects, connecting on the pipeline of the first gas cylinder and the second gas cylinder, be respectively equipped with the first solenoid valve of controlling the first gas cylinder air feed, control the second solenoid valve of the second gas cylinder air feed, on pipeline between the first solenoid valve and the second solenoid valve, be connected with the air supply pipe that leads to vacuum coating equipment, in the first solenoid valve and the second solenoid valve, be equipped with the pressure transducer of detectable gas pressure, the first solenoid valve and the second solenoid valve circuit are connected with controller.
The beneficial effects of the utility model are: the utility model is by the automatic switchover of the first gas cylinder and the second gas cylinder, guaranteed the stability of vacuum coating equipment use gas, avoided due to gas capacity in gas cylinder or the too low and adverse effect that coating quality is brought of air pressure.
Accompanying drawing explanation
Below in conjunction with drawings and embodiments, the utility model is further illustrated.
Fig. 1 is structural representation of the present utility model.
1. first gas cylinder 2. second gas cylinder 3. first solenoid valve 4. second solenoid valve 5. air supply pipe 6. controllers in figure
Embodiment
By reference to the accompanying drawings the utility model is further described now.The schematic diagram that these accompanying drawings are simplification only illustrates basic structure of the present utility model in a schematic way, so it only shows the formation relevant with the utility model.
A kind of vacuum coating parallel gas feed device as shown in Figure 1, comprise the first gas cylinder 1 and the second gas cylinder 2 that air outlet pipeline connects, connecting on the pipeline of the first gas cylinder 1 and the second gas cylinder 2, be respectively equipped with on the first solenoid valve 3, the second solenoid valve 4, the first solenoid valves 3 of controlling the second gas cylinder 2 air feed and the pipeline between the second solenoid valve 4 of controlling the first gas cylinder 1 air feed and be connected with the air supply pipe 5 that leads to vacuum coating equipment.
In the inside of the first solenoid valve 3, be provided with the pressure transducer that can detect the first gas cylinder 1 interior gas pressure, the second solenoid valve 4 inside are equally also provided with the pressure transducer that can detect the second gas cylinder 2 interior gas pressures, the first solenoid valve 3 is connected with the second solenoid valve 4 circuits, the first solenoid valve 3 and the second solenoid valve 4 connections have controller 6 simultaneously, pressure transducer is transferred to controller 6 by testing signal, by controller 6, send instruction, open or close the first solenoid valve 3 or the second solenoid valve 4.
During work, the first solenoid valve 3 is set first to be opened, the first gas cylinder 1 is to vacuum coating equipment air feed, after work a period of time, it is not enough that pressure transducer in the first solenoid valve 3 detects the interior gas of the first gas cylinder 1, when air pressure is on the low side, controller 6 sends instruction, close the first solenoid valve 3, open the second solenoid valve 4, air feeder automatically switches to the second gas cylinder 2 air feed, then a period of time operator can be replaced by gassiness new gas cylinder by the first gas cylinder 1, thereby effectively guaranteed the stable of interior Vacuum Magnetic sputter coating use gas of certain operating time, be conducive to improve coating quality.
The utility model, by the automatic switchover between the first gas cylinder 1 and the second gas cylinder 2, has guaranteed the stability of vacuum coating equipment use gas, avoided due to the first gas cylinder 1 or the interior gas capacity of the second gas cylinder 2 or air pressure too low, and the adverse effect that coating quality is brought.
Above-mentioned mode of execution is only explanation technical conceive of the present utility model and feature; its object is to allow person skilled in the art can understand content of the present utility model and be implemented; can not limit protection domain of the present utility model with this; all equivalences of doing according to the utility model Spirit Essence change or modify, and all should be encompassed in protection domain of the present utility model.
Claims (1)
1. a vacuum coating parallel gas feed device, comprise gas cylinder, it is characterized in that: described gas cylinder comprises the first gas cylinder (1) and the second gas cylinder (2) that air outlet pipeline connects, connecting on the pipeline of the first gas cylinder (1) and the second gas cylinder (2), be respectively equipped with the first solenoid valve (3) of controlling the first gas cylinder (1) air feed, control second solenoid valve (4) of the second gas cylinder (2) air feed, on pipeline between the first solenoid valve (3) and the second solenoid valve (4), be connected with the air supply pipe (5) that leads to vacuum coating equipment, in the first solenoid valve (3) and the second solenoid valve (4), be equipped with the pressure transducer of detectable gas pressure, the first solenoid valve (3) and the second solenoid valve (4) connection have controller (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320510088.2U CN203421491U (en) | 2013-08-20 | 2013-08-20 | Two-channel gas supply device for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320510088.2U CN203421491U (en) | 2013-08-20 | 2013-08-20 | Two-channel gas supply device for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203421491U true CN203421491U (en) | 2014-02-05 |
Family
ID=50020590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320510088.2U Expired - Fee Related CN203421491U (en) | 2013-08-20 | 2013-08-20 | Two-channel gas supply device for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203421491U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105548418A (en) * | 2016-01-15 | 2016-05-04 | 国家电网公司 | Movable carrier gas supply system |
| CN106695121A (en) * | 2017-01-09 | 2017-05-24 | 上海交通大学 | Cladding layer removing device and method through laser melting assisted by compressed air |
| CN110819960A (en) * | 2019-12-19 | 2020-02-21 | 苏州凯利昂光电科技有限公司 | Continuous gas supply device for sputtering coating |
| CN111678042A (en) * | 2020-05-22 | 2020-09-18 | 湖州贝德流体设备有限公司 | Semi-automatic switching system of ASC |
-
2013
- 2013-08-20 CN CN201320510088.2U patent/CN203421491U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105548418A (en) * | 2016-01-15 | 2016-05-04 | 国家电网公司 | Movable carrier gas supply system |
| CN106695121A (en) * | 2017-01-09 | 2017-05-24 | 上海交通大学 | Cladding layer removing device and method through laser melting assisted by compressed air |
| CN110819960A (en) * | 2019-12-19 | 2020-02-21 | 苏州凯利昂光电科技有限公司 | Continuous gas supply device for sputtering coating |
| CN111678042A (en) * | 2020-05-22 | 2020-09-18 | 湖州贝德流体设备有限公司 | Semi-automatic switching system of ASC |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140205 Termination date: 20160820 |