CN202792948U - 具有热解氮化硼保护层的蒸发坩埚 - Google Patents
具有热解氮化硼保护层的蒸发坩埚 Download PDFInfo
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- CN202792948U CN202792948U CN 201220429012 CN201220429012U CN202792948U CN 202792948 U CN202792948 U CN 202792948U CN 201220429012 CN201220429012 CN 201220429012 CN 201220429012 U CN201220429012 U CN 201220429012U CN 202792948 U CN202792948 U CN 202792948U
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- boron nitride
- nitride protective
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- pyrolytic boron
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103114268A (zh) * | 2013-03-15 | 2013-05-22 | 福州赛瑞特新材料技术开发有限公司 | 一种粘接式氮化硼-石墨组合蒸发舟及其制作方法 |
CN110747434A (zh) * | 2019-12-05 | 2020-02-04 | 山东国晶新材料有限公司 | 一种分体式导电陶瓷舟 |
CN110835272A (zh) * | 2019-12-05 | 2020-02-25 | 山东国晶新材料有限公司 | 一种分体式导电陶瓷舟的制备方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103114268A (zh) * | 2013-03-15 | 2013-05-22 | 福州赛瑞特新材料技术开发有限公司 | 一种粘接式氮化硼-石墨组合蒸发舟及其制作方法 |
CN103114268B (zh) * | 2013-03-15 | 2015-08-12 | 福州赛瑞特新材料技术开发有限公司 | 一种粘接式氮化硼-石墨组合蒸发舟及其制作方法 |
CN110747434A (zh) * | 2019-12-05 | 2020-02-04 | 山东国晶新材料有限公司 | 一种分体式导电陶瓷舟 |
CN110835272A (zh) * | 2019-12-05 | 2020-02-25 | 山东国晶新材料有限公司 | 一种分体式导电陶瓷舟的制备方法 |
CN110747434B (zh) * | 2019-12-05 | 2021-10-08 | 山东国晶新材料有限公司 | 一种分体式导电陶瓷舟 |
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C14 | Grant of patent or utility model | ||
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Effective date of registration: 20190529 Address after: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Co-patentee after: Bo Yu (Chaoyang) semiconductor technology Co., Ltd. Patentee after: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. Co-patentee after: Bo Yu (Tianjin) semiconductor materials Co., Ltd. Address before: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Patentee before: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20200827 |
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CF01 | Termination of patent right due to non-payment of annual fee |