CN202786036U - 具有碳化硅保护层的加热器 - Google Patents
具有碳化硅保护层的加热器 Download PDFInfo
- Publication number
- CN202786036U CN202786036U CN 201220429015 CN201220429015U CN202786036U CN 202786036 U CN202786036 U CN 202786036U CN 201220429015 CN201220429015 CN 201220429015 CN 201220429015 U CN201220429015 U CN 201220429015U CN 202786036 U CN202786036 U CN 202786036U
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- CN
- China
- Prior art keywords
- silicon carbide
- protective layer
- heater
- carbide protective
- utility
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Resistance Heating (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220429015 CN202786036U (zh) | 2012-08-27 | 2012-08-27 | 具有碳化硅保护层的加热器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220429015 CN202786036U (zh) | 2012-08-27 | 2012-08-27 | 具有碳化硅保护层的加热器 |
Publications (1)
Publication Number | Publication Date |
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CN202786036U true CN202786036U (zh) | 2013-03-13 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201220429015 Expired - Fee Related CN202786036U (zh) | 2012-08-27 | 2012-08-27 | 具有碳化硅保护层的加热器 |
Country Status (1)
Country | Link |
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CN (1) | CN202786036U (zh) |
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2012
- 2012-08-27 CN CN 201220429015 patent/CN202786036U/zh not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190529 Address after: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Co-patentee after: Bo Yu (Chaoyang) semiconductor technology Co., Ltd. Patentee after: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. Co-patentee after: Bo Yu (Tianjin) semiconductor materials Co., Ltd. Address before: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Patentee before: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20200827 |
|
CF01 | Termination of patent right due to non-payment of annual fee |