CN202692937U - Large-caliber phase shifting interferometer - Google Patents
Large-caliber phase shifting interferometer Download PDFInfo
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- CN202692937U CN202692937U CN 201220302741 CN201220302741U CN202692937U CN 202692937 U CN202692937 U CN 202692937U CN 201220302741 CN201220302741 CN 201220302741 CN 201220302741 U CN201220302741 U CN 201220302741U CN 202692937 U CN202692937 U CN 202692937U
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Abstract
The utility model discloses a large-caliber phase shifting interferometer which aims to overcome the defects of poor detection accuracy and complex structure due to the adoption of a mechanical phase shifting mode in the prior art. The large-caliber phase shifting interferometer comprises a laser module, an image acquisition system and a computer, wherein an output interface of the laser module is respectively and sequentially connected with a beam expanding and focusing system, an aligning system, an imaging system and a standard lens; the laser module is a wavelength tunable laser; an input interface of the image acquisition system is connected with an output interface of the aligning system; an output interface of the image acquisition system is connected with an input interface of the computer; and an output interface of the computer is connected with an input interface of the wavelength tunable laser. The large-caliber phase shifting interferometer is used for carrying out high accuracy detection on the surface shape of an optical part by adopting a wavelength phase shifting changing mode.
Description
Technical field
The utility model relates to a kind of optical detecting instrument, especially a kind of phase shifting interferometer.
Background technology
The patent No. is 93111560.4, and notification number is that the Chinese invention patent of CN1038781C discloses a kind of " high-precision large aperture phase-shifting digital planar interferometer ".It mainly comprises Feisuo type interferometer, laser instrument, image capturing system, phase shifter, drive source and computing machine, printer etc.Feisuo type interferometer is vertical structure, and the reference plane of the systematic error that rectifies an instrument is liquid level; Phase shifter is arranged in the bottom of Feisuo type interferometer reference planes mirror, is comprised of three piezoceramics crystals, and it is driven by drive source and holds the together displacement of reference planes mirror.Below the reference planes mirror in interferometer a multifunctional workstation is arranged.This worktable comprises self-equilibrating brace table, rotating disc, lead screw transmission mechanism and level(l)ing mechanism.It provides a kind of liquid level that can adopt under general working environment as rectifying an instrument the absolute reference of systematic error, nonlinear displacement error that can the automatic calibration phase shifter and can make detection aperture expand to the high-precision large aperture phase-shifting digital planar interferometer of 500 millimeters of diameters.The problem that this interferometer exists is, because it is the mode that has adopted mechanical phase shift, namely promotes the displacement of reference planes mirror with the piezoceramics crystal in the phase shifter and realizes phase-shifted, and its accuracy is low, has therefore reduced the precision of measuring.And its complicated structure, manufacturing cost certainly will be higher.
Summary of the invention
The purpose of this utility model is the defective of the above-mentioned prior art that overcomes, and a kind of heavy caliber phase shifting interferometer of on-mechanical phase shift mode simple in structure is provided, and changes wavelength phase shift mode and carries out the face shape high precision of optical element and detect and adopt.
In order to realize above-mentioned purpose, can adopt following technical scheme: the heavy caliber phase shifting interferometer of this programme comprises:
One laser module, the output interface of this laser module respectively with expand focusing system, colimated light system, imaging system and be connected with the standard mirror and be connected, laser module wherein is a Wavelength tunable laser; Also comprise in addition an image capturing system and a computing machine; The input interface of image capturing system wherein is connected with the output interface of colimated light system, and its output interface is connected with the input interface of computing machine; The output interface of computing machine is connected with the input interface of Wavelength tunable laser.
In order to realize above-mentioned purpose, also can adopt following the second technical scheme: the heavy caliber phase shifting interferometer of this programme comprises:
One laser module, the output interface of this laser module respectively with expand focusing system, colimated light system, imaging system and be connected with the standard mirror and be connected, laser module wherein comprises a tunable laser and a LASER Light Source controller; Also comprise in addition an image capturing system and a computing machine; The input interface of image capturing system wherein is connected with the output interface of colimated light system, and its output interface is connected with the input interface of computing machine; The output interface of computing machine is connected with the input interface of LASER Light Source controller, and the output interface of LASER Light Source controller is connected with the input interface of tunable laser.
When detecting the face shape of optical element, the interference cavity length of supposing Wavelength tunable laser is A, and centre wavelength is λ., adopting m step phase shift, total phase changing capacity is β, then the phase changing capacity in per step is π/m; Then can calculate the wavelength increment Δ λ that each phase place changes required change with following formula:
Δλ＝β(λ。)
2/4πA
Then Wavelength tunable laser is changed m time with this wavelength increment Δ λ, finish whole phase shift process; Interference fringe when each phase place changes calculates the data of wavefront by computing machine after being phase-shifted the analysis software record with phase shift algorithm, thereby the face shape of finishing optical element is detected.
The utility model has the advantages that:
Forgone complex structure, mechanical phase shift mode that degree of accuracy is lower, and employing changes the mode of tunable laser wavelength, the series that its phase place is carried out repeatedly moves, further by the phase shift analysis software records, and the data that calculate wavefront by computing machine with phase shift algorithm, thereby realize the high precision of bigbore optical element face shape is detected.
In order to make the utility model be convenient to understand with more clear, below by drawings and Examples it is described further.
Description of drawings
Fig. 1 is the structure block diagram of heavy caliber phase shifting interferometer embodiment 1 of the present utility model.
Fig. 2 is the structure block diagram of heavy caliber phase shifting interferometer embodiment 2 of the present utility model.
Embodiment
When the interferometer work of the present embodiment, the operator to computing machine 8 gradation input the wavelength increment Δ λ that each phase place changes required change, the phase shift analysis software that is installed in the computing machine 8 sends instruction to Wavelength tunable laser 1, so Wavelength tunable laser 1 is launched laser beam, this laser beam is by after expanding focusing system 2, colimated light system 3 and imaging system 4, form interference field at standard mirror 5 and 6 of measured lens, the interference fringe that interference field produces is passed in the computing machine 8 after being gathered by image capturing system 7.Wavelength tunable laser 1 changes the wavelength of the laser that penetrates by time sequence staged, make interference fringe produce the superposition phase of constant, by after analysis software collection, calculating and the analysis in the computing machine 8, export the original wavefront data on tested optical element surface again, finish Detection task.
The difference of the present embodiment and embodiment 1 only is that its laser module 9 comprises a tunable laser 91 and a LASER Light Source controller 92, to replace the Wavelength tunable laser 1 among the embodiment 1.Driven the laser beam of tunable laser 91 emissions by LASER Light Source controller 92.
LASER Light Source controller 92 can be realized control to the output wavelength of tunable laser 91 by the driving voltage of control tunable laser 91.This voltage one wavelength variations curved line relation is an approximate linear relationship.In order to improve the precision of detection, need to carry out meticulous adjusting to voltage, and voltage one wavelength curve is proofreaied and correct.Specifically, can at first measure voltage one wavelength curve of tunable laser 91 with spectrometer, again according to central wavelength lambda.Laser output wavelength when calculating each phase place variation with above-mentioned formula, driving voltage when then finding out each wavelength output according to voltage one wavelength curve, when the phase shift analysis software in computing machine 8 sends the phase shift instruction, LASER Light Source controller 92 is namely according to this driving voltage, and drive the laser beam of tunable laser 91 each specific wavelengths of output according to time series, make the dried striped of penetrating produce predetermined constant phase shift increment, realized the phase shift process of interference fringe.
Only be the preferred embodiment of the utility model below, but it does not limit practical range of the present utility model, the equivalent variations and the modification that namely do not depart from claim of the present utility model and done must belong to the protection domain of the utility model.
Claims (2)
1. heavy caliber phase shifting interferometer, it is characterized in that comprising: a laser module, the output interface of this laser module respectively with expand focusing system, colimated light system, imaging system and be connected with the standard mirror and be connected, laser module wherein is a Wavelength tunable laser; Also comprise in addition an image capturing system and a computing machine; The input interface of image capturing system wherein is connected with the output interface of colimated light system, and its output interface is connected with the input interface of computing machine; The output interface of computing machine is connected with the input interface of Wavelength tunable laser.
2. heavy caliber phase shifting interferometer, it is characterized in that comprising: a laser module, the output interface of this laser module respectively with expand focusing system, colimated light system, imaging system and be connected with the standard mirror and be connected, laser module wherein comprises a tunable laser and a LASER Light Source controller; Also comprise in addition an image capturing system and a computing machine; The input interface of image capturing system wherein is connected with the output interface of colimated light system, and its output interface is connected with the input interface of computing machine; The output interface of computing machine is connected with the input interface of LASER Light Source controller, and the output interface of LASER Light Source controller is connected with the input interface of tunable laser.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220302741 CN202692937U (en) | 2012-06-26 | 2012-06-26 | Large-caliber phase shifting interferometer |
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| CN 201220302741 CN202692937U (en) | 2012-06-26 | 2012-06-26 | Large-caliber phase shifting interferometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN106500589A (en) * | 2016-12-05 | 2017-03-15 | 苏州大学 | A kind of measuring method of multi-wavelength tunable micro-interference and its device |
| CN109029244A (en) * | 2018-07-10 | 2018-12-18 | 中国科学院上海光学精密机械研究所 | Multiwavelength laser interferometer |
-
2012
- 2012-06-26 CN CN 201220302741 patent/CN202692937U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN105675262B (en) * | 2016-01-14 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | The high depth of parallelism wavefront of optical components detection device of heavy caliber |
| CN106500589A (en) * | 2016-12-05 | 2017-03-15 | 苏州大学 | A kind of measuring method of multi-wavelength tunable micro-interference and its device |
| CN109029244A (en) * | 2018-07-10 | 2018-12-18 | 中国科学院上海光学精密机械研究所 | Multiwavelength laser interferometer |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130123 Termination date: 20190626 |
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| CF01 | Termination of patent right due to non-payment of annual fee |