CN202543391U - Polysilicon ingot furnace - Google Patents
Polysilicon ingot furnace Download PDFInfo
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- CN202543391U CN202543391U CN2012201329703U CN201220132970U CN202543391U CN 202543391 U CN202543391 U CN 202543391U CN 2012201329703 U CN2012201329703 U CN 2012201329703U CN 201220132970 U CN201220132970 U CN 201220132970U CN 202543391 U CN202543391 U CN 202543391U
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- insulation cage
- graphite paper
- polycrystalline silicon
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Abstract
The utility model provides a polysilicon ingot furnace. The furnace comprises a copper electrode, a graphite electrode, a lateral heating plate, a top heating board, a graphite support platform, a stainless heat insulation cage, a heat insulation cage lateral surface heat preservation plate, first graphite paper, a lower furnace body and an upper furnace body. The first graphite paper is adhered on the internal side of the heat insulation cage lateral surface heat preservation plate. The heat insulation cage lateral surface heat preservation plate and the graphite paper jointly form the internal heat preservation layer of the polysilicon ingot furnace. The graphite paper is adhered on the internal side of the heat insulation cage body, so that the gap between the heat insulation cage lateral surface heat preservation plate and the heat insulation cage can effectively sealed, and the internal heat preservation layer becomes an enclosed heat preservation layer, therefore the polysilicon ingot furnace has a good heat preservation property.
Description
Technical field
The utility model relates to field of polysilicon technology, relates in particular to a kind of polycrystalline silicon ingot or purifying furnace.
Background technology
The energy is a large focal spot problem of the world today, and a large amount of uses of traditional energy are on the rise problem of environmental pollution.Sun power is a kind of renewable energy source of cleaning, and in the utilization of sun power, solar cell is present most important a kind of product.Solar cell mainly is the raw material production solar-grade polysilicon with silicon.
Producing solar-grade polysilicon equipment commonly used is polycrystalline silicon ingot or purifying furnace.In the making processes of solar panel; Polycrystalline silicon ingot or purifying furnace makes its fusing with the polycrystalline silicon raw material heating; Through changing the relative position of polycrystalline silicon ingot or purifying furnace well heater and polycrystalline silicon material, make the directed from bottom to top cooled and solidified of polycrystalline silicon material of fusing form polycrystal silicon ingot then.
The material of materials such as the thermal field of polycrystalline silicon ingot or purifying furnace, heat-conducting block and bolt is graphite material; This is because graphite material has resistance to elevated temperatures preferably; Higher heat-conductivity conducting property and good chemicalstability and corrosion resistance, so graphite material is used widely in polycrystalline silicon ingot or purifying furnace.
The thermal field of polycrystalline silicon ingot or purifying furnace is made up of graphite heater, heat-insulation cage, heat preservation carbon felt and graphite heat conducting piece in the prior art.The heat-insulation cage of polycrystalline silicon ingot or purifying furnace is a skeleton construction; Heat preservation carbon felt is placed the inboard inner thermal insulating layer that constitutes polycrystalline silicon ingot or purifying furnace of heat-insulation cage, be spliced, inevitably can have the slit between heat preservation carbon felt and the heat-insulation cage but heat preservation carbon felt is a polylith; It is serious that heat is scattered and disappeared, and heat insulation effect is poor.The lagging material of polycrystalline silicon ingot or purifying furnace all is to use porous insert carbon felt material in addition, and its thermal absorption property is better, and heat reflectivity is very poor, can not play good heat insulation effect.
The utility model content
In view of this, the utility model provides a kind of polycrystalline silicon ingot or purifying furnace with good heat preservation effect.
For realizing above-mentioned purpose, the utility model provides following technical scheme:
A kind of polycrystalline silicon ingot or purifying furnace; Comprise: copper electrode, Graphite Electrodes, side hot-plate, top heat plate, graphite support platform, stainless steel heat-insulation cage, heat-insulation cage side warming plate, lower furnace body and upper furnace body, also comprising fits is arranged on the first inboard graphite paper of heat-insulation cage side warming plate.
Preferably, said heat-insulation cage side warming plate runs through through screw with said first graphite paper and is connected.
Preferably, the thickness of said first graphite paper is 0.2mm～0.8mm.
Preferably, the number of plies of said first graphite paper is 1 layer～4 layers.
Preferably, also comprise the heat-insulation cage top warming plate and second graphite paper, the applying of warming plate bottom is provided with said second graphite paper at said heat-insulation cage top.
Preferably, said heat-insulation cage top warming plate runs through through screw with said second graphite paper and is connected.
Preferably, the thickness of said second graphite paper is 0.2mm～0.8mm.
Preferably, the number of plies of said second graphite paper is 1 layer～4 layers.
Compared with prior art, the inboard applying of warming plate is provided with graphite paper to the utility model in polycrystalline silicon ingot or purifying furnace heat-insulation cage side, and heat-insulation cage side warming plate and graphite paper constitute the inner thermal insulating layer of polycrystalline silicon ingot or purifying furnace jointly.At first graphite paper being fitted, to be arranged at the heat-insulation cage body inboard, can effective seal heat-insulation cage side warming plate and heat-insulation cage between the slit, make inner thermal insulating layer become the thermal insulation layer of a sealing, thereby make polycrystalline silicon ingot or purifying furnace have good heat retaining property.Secondly because graphite has high thermal conductivity, after temperature raise, thermal conductivity descended, and in the process of production of polysilicon, under high temperature, graphite becomes the heat insulation body, makes the polycrystalline silicon ingot or purifying furnace thermal field have good heat retaining property; The hot reflection coefficient of graphite is high, and the reflect heat that the well heater radiation is come is gone back to heat the silicon material, can effectively reduce heat and scatter and disappear, thereby reach energy-conservation effect.In addition, also can be according to the long brilliant needs of ingot casting, the height of regulating graphite paper cooperates the lifting of heat-insulation cage, forms the vertical temperature gradient in the stove, more helps the silicon ingot directional long crystal.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the polycrystalline silicon ingot or purifying furnace that Fig. 1 provides for the utility model embodiment 1;
The structural representation of the polycrystalline silicon ingot or purifying furnace that Fig. 2 provides for the utility model embodiment 2.
Embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Embodiment 1
As shown in Figure 1; The utility model embodiment 1 provides a kind of polycrystalline silicon ingot or purifying furnace; Comprise: warming plate 7 inboard applyings are provided with in the heat-insulation cage side for copper electrode 1, Graphite Electrodes 2, side hot-plate 3, top heat plate 4, graphite support platform 5, stainless steel heat-insulation cage 6, heat-insulation cage side warming plate 7, first graphite paper 8, lower furnace body 9 and upper furnace body 10, the first graphite papers 8.
In order to make polycrystalline silicon ingot or purifying furnace have better heat insulation effect, heat-insulation cage side warming plate 7 preferably runs through through screw with first graphite paper 8 and is connected.For fear of in the polycrystalline silicon growth process, adding impurity, first graphite paper 8 is preferably high purity graphite paper, and the purity of first graphite paper 8 is 99.8%.The thickness of first graphite paper 8 is preferably 0.2mm～0.8mm, if graphite paper thickness is excessive, then increases the possibility of graphite paper conduction, if the thickness of graphite paper is too small, does not then have heat insulation effect.The number of plies of first graphite paper 8 is preferably 1 layer～4 layers, and more preferably 1 layer, in warming plate inboard, heat-insulation cage side one deck graphite paper is set, can effectively avoid the untight problem of multilayer graphite paper dislocation applying, make the polycrystalline silicon ingot or purifying furnace better heat preservation.
Embodiment 2
As shown in Figure 2; The utility model embodiment 2 also provides a kind of polycrystalline silicon ingot or purifying furnace; Comprise: copper electrode 1, Graphite Electrodes 2, side hot-plate 3, top heat plate 4, graphite support platform 5, stainless steel heat-insulation cage 6, heat-insulation cage side warming plate 7, first graphite paper 8, lower furnace body 9, upper furnace body 10, heat-insulation cage top warming plate 11 and second graphite paper 12; Warming plate 7 inboard applyings are provided with first graphite paper 8 in the heat-insulation cage side, and warming plate 11 inboard applyings are provided with second graphite paper 12 at the heat-insulation cage top.
In order to make polycrystalline silicon ingot or purifying furnace have better heat insulation effect, heat-insulation cage top warming plate 11 preferably runs through through screw with second graphite paper 12 and is connected.The thickness of second graphite paper 11 is preferably 0.2mm～0.8mm, if graphite paper thickness is excessive, then increases the possibility of graphite paper conduction, if the thickness of graphite paper is too small, does not then have heat insulation effect.The number of plies of second graphite paper 11 is preferably 1 layer～4 layers, and more preferably 1 layer, in warming plate inboard, heat-insulation cage side one deck graphite paper is set, can effectively avoid the untight problem of multilayer graphite paper dislocation applying, make ingot furnace have better heat insulation effect.
The thermal field of the polycrystalline silicon ingot or purifying furnace of the utility model selects graphite paper as inner thermal insulating layer; This is that make graphite have a series of special nature: 1) resistance to elevated temperatures: the graphite fusing point is high, is 3850 ± 50 ℃ in a vacuum owing to the unique crystalline structure of graphite; Different with general high temperature material; Graphite is not only not softening when temperature raises, and intensity increases on the contrary, doubles when the tensile strength of graphite is on the contrary than room temperature in the time of 2500 ℃; 2) heat conduction, electroconductibility: because the carbon atom on the netted plane layer of hexagonal has excess electron, and the excess electron of carbon atom is present between the netted plane as electronic cloud on the adjacent plane, makes graphite have good thermal conductivity and electroconductibility.The thermal conductivity of graphite and common metal material are just in time opposite, at room temperature have very high thermal conductivity, but after temperature raise, thermal conductivity descended on the contrary, under excessive temperature, and graphite even become the heat insulation body; 3) special anti-seismic performance: the expansion tool anisotropy of graphite, thereby macroscopical coefficient of expansion is little.Under the situation of temperature shock, the graphite volume change is little; Add its good heat-conducting, thereby the graphite thermal shock resistance is good; 4) oilness: graphite layers is a Van der Waals force, a little less than the bonding force, makes it to have oilness; 5) good chemicalstability and corrosion resistance: graphite has good chemical stability at normal temperatures, does not receive any strong acid, the erosion of highly basic and organic solvent.Therefore place warming plate inboard, heat-insulation cage side can play good heat insulation effect graphite paper.
The utility model is provided with graphite paper in the warming plate inboard, heat-insulation cage side of polycrystalline silicon ingot or purifying furnace; Heat-insulation cage side warming plate and graphite paper constitute the inner thermal insulating layer of polycrystalline silicon ingot or purifying furnace jointly, and heat-insulation cage side warming plate and graphite paper constitute the inner thermal insulating layer of polycrystalline silicon ingot or purifying furnace jointly.At first graphite paper being fitted, to be arranged at the Thermal insulation cage body inboard, can effective seal heat-insulation cage side warming plate and heat-insulation cage between the slit, make inner thermal insulating layer become the thermal insulation layer of a sealing, make polycrystalline silicon ingot or purifying furnace have good heat retaining property.Secondly because graphite has high thermal conductivity, after temperature raise, thermal conductivity descended, and in the process of production of polysilicon, under high temperature, graphite becomes the heat insulation body, makes polycrystalline silicon ingot or purifying furnace have good heat retaining property; Its schungite has the characteristics of high hot reflection coefficient, and the reflect heat that the well heater radiation is come is gone back to heat the silicon material, can effectively reduce heat and scatter and disappear, thereby make polycrystalline silicon ingot or purifying furnace have good energy-saving effect.In addition, also can be according to the long brilliant needs of ingot casting, the height of regulating graphite paper cooperates the lifting of heat-insulation cage, forms the vertical temperature gradient in the stove, more helps the silicon ingot directional long crystal.
The explanation of above embodiment just is used to help to understand the method and the core concept thereof of the utility model.Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model principle, can also carry out some improvement and modification to the utility model, these improvement and modification also fall in the protection domain of the utility model claim.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (8)
1. polycrystalline silicon ingot or purifying furnace; Comprise: copper electrode (1), Graphite Electrodes (2), side hot-plate (3), top heat plate (4), graphite support platform (5), stainless steel heat-insulation cage (6), heat-insulation cage side warming plate (7), lower furnace body (9) and upper furnace body (10); It is characterized in that also comprising fits is arranged on inboard first graphite paper (8) of heat-insulation cage side warming plate (7).
2. polycrystalline silicon ingot or purifying furnace according to claim 1 is characterized in that, said heat-insulation cage side warming plate (7) runs through through screw with said first graphite paper (8) and is connected.
3. polycrystalline silicon ingot or purifying furnace according to claim 1 is characterized in that, the thickness of said first graphite paper (8) is 0.2mm～0.8mm.
4. polycrystalline silicon ingot or purifying furnace according to claim 1 is characterized in that, the number of plies of said first graphite paper (8) is 1 layer～4 layers.
5. polycrystalline silicon ingot or purifying furnace according to claim 1 is characterized in that, also comprises heat-insulation cage top warming plate (11) and second graphite paper (12), and said second graphite paper (12) is fitted in said heat-insulation cage top warming plate (11) bottom and is provided with.
6. polycrystalline silicon ingot or purifying furnace according to claim 5 is characterized in that, said heat-insulation cage top warming plate (11) runs through through screw with said second graphite paper (12) and is connected.
7. polycrystalline silicon ingot or purifying furnace according to claim 5 is characterized in that, the thickness of said second graphite paper (12) is 0.2mm～0.8mm.
8. polycrystalline silicon ingot or purifying furnace according to claim 5 is characterized in that, the number of plies of said second graphite paper (12) is 1 layer～4 layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201329703U CN202543391U (en) | 2012-03-31 | 2012-03-31 | Polysilicon ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201329703U CN202543391U (en) | 2012-03-31 | 2012-03-31 | Polysilicon ingot furnace |
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| CN202543391U true CN202543391U (en) | 2012-11-21 |
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| CN2012201329703U Expired - Lifetime CN202543391U (en) | 2012-03-31 | 2012-03-31 | Polysilicon ingot furnace |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105019021A (en) * | 2015-07-20 | 2015-11-04 | 无锡荣能半导体材料有限公司 | Polysilicon cast ingot thermal field structure |
| CN105386123A (en) * | 2015-12-21 | 2016-03-09 | 晶科能源有限公司 | Polycrystalline ingot casting furnace and side portion thermal insulation apparatus thereof |
| CN109269877A (en) * | 2018-11-02 | 2019-01-25 | 航天特种材料及工艺技术研究所 | A kind of ultra-temperature mechanical performance test high temperature furnace and its heating means |
| CN113233450A (en) * | 2021-05-24 | 2021-08-10 | 山西贝特瑞新能源科技有限公司 | Lithium battery negative electrode material inside-string graphitization furnace |
-
2012
- 2012-03-31 CN CN2012201329703U patent/CN202543391U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105019021A (en) * | 2015-07-20 | 2015-11-04 | 无锡荣能半导体材料有限公司 | Polysilicon cast ingot thermal field structure |
| CN105386123A (en) * | 2015-12-21 | 2016-03-09 | 晶科能源有限公司 | Polycrystalline ingot casting furnace and side portion thermal insulation apparatus thereof |
| CN109269877A (en) * | 2018-11-02 | 2019-01-25 | 航天特种材料及工艺技术研究所 | A kind of ultra-temperature mechanical performance test high temperature furnace and its heating means |
| CN113233450A (en) * | 2021-05-24 | 2021-08-10 | 山西贝特瑞新能源科技有限公司 | Lithium battery negative electrode material inside-string graphitization furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190612 Address after: No. 16 Weiliu Road, New Chemical Materials Industrial Park, Shihezi Economic Development Zone, Xinjiang Uygur Autonomous Region, 832000 Patentee after: Xinjiang DAQO New Energy Co., Ltd. Address before: No. 666 Longdu Avenue, Wanzhou District, Chongqing City, 404000 Patentee before: Chongqing Daqo New Energy Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |