CN202297872U - Silicon-wafer diffusion furnace for solar cell - Google Patents
Silicon-wafer diffusion furnace for solar cell Download PDFInfo
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- CN202297872U CN202297872U CN2011202188977U CN201120218897U CN202297872U CN 202297872 U CN202297872 U CN 202297872U CN 2011202188977 U CN2011202188977 U CN 2011202188977U CN 201120218897 U CN201120218897 U CN 201120218897U CN 202297872 U CN202297872 U CN 202297872U
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- quartz boat
- silicon chip
- silicon
- heater
- solar cell
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CN2011202188977U CN202297872U (en) | 2011-06-27 | 2011-06-27 | Silicon-wafer diffusion furnace for solar cell |
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CN2011202188977U CN202297872U (en) | 2011-06-27 | 2011-06-27 | Silicon-wafer diffusion furnace for solar cell |
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CN202297872U true CN202297872U (en) | 2012-07-04 |
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CN2011202188977U Expired - Lifetime CN202297872U (en) | 2011-06-27 | 2011-06-27 | Silicon-wafer diffusion furnace for solar cell |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103409803A (en) * | 2013-08-22 | 2013-11-27 | 天威新能源控股有限公司 | Flow homogenizing plate used for crystalline silicon diffusion and crystalline silicon diffusion technology furnace comprising same |
CN103436967A (en) * | 2013-08-12 | 2013-12-11 | 英利集团有限公司 | Method for optimizing air flow distribution of tubular diffusion furnace of solar cell piece |
CN104419909A (en) * | 2013-08-27 | 2015-03-18 | 茂迪(苏州)新能源有限公司 | Film-coated furnace tube |
CN105839190A (en) * | 2016-05-12 | 2016-08-10 | 温州海旭科技有限公司 | High-temperature diffusion device |
CN110440595A (en) * | 2019-09-05 | 2019-11-12 | 杨鸿苍 | Gas phase process furnace |
CN115233186A (en) * | 2022-07-20 | 2022-10-25 | 无锡松煜科技有限公司 | Method for improving LPCVD surface coating process |
-
2011
- 2011-06-27 CN CN2011202188977U patent/CN202297872U/en not_active Expired - Lifetime
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103436967A (en) * | 2013-08-12 | 2013-12-11 | 英利集团有限公司 | Method for optimizing air flow distribution of tubular diffusion furnace of solar cell piece |
CN103436967B (en) * | 2013-08-12 | 2015-09-30 | 英利集团有限公司 | A kind of method optimizing solar battery sheet tubular diffusion furnace air flow method |
CN103409803A (en) * | 2013-08-22 | 2013-11-27 | 天威新能源控股有限公司 | Flow homogenizing plate used for crystalline silicon diffusion and crystalline silicon diffusion technology furnace comprising same |
CN103409803B (en) * | 2013-08-22 | 2016-12-28 | 天威新能源控股有限公司 | Even flow plate and crystalline silicon diffusion technique stove thereof for crystalline silicon diffusion |
CN104419909A (en) * | 2013-08-27 | 2015-03-18 | 茂迪(苏州)新能源有限公司 | Film-coated furnace tube |
CN104419909B (en) * | 2013-08-27 | 2016-12-28 | 茂迪(苏州)新能源有限公司 | A kind of plated film boiler tube |
CN105839190A (en) * | 2016-05-12 | 2016-08-10 | 温州海旭科技有限公司 | High-temperature diffusion device |
CN105839190B (en) * | 2016-05-12 | 2018-07-06 | 温州海旭科技有限公司 | A kind of High temperature diffusion device |
CN110440595A (en) * | 2019-09-05 | 2019-11-12 | 杨鸿苍 | Gas phase process furnace |
CN115233186A (en) * | 2022-07-20 | 2022-10-25 | 无锡松煜科技有限公司 | Method for improving LPCVD surface coating process |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 074000 new industrial zone of Hebei, Gaobeidian Province, light green new energy Limited by Share Ltd Patentee after: Guangwei Green Energy Technology Co.,Ltd. Address before: 074000 new industrial zone of Hebei, Gaobeidian Province, light green new energy Limited by Share Ltd Patentee before: Lightway Green New Energy Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20160714 Address after: 074000, Baoding City, Hebei province Gaobeidian City Road on the north side of the west side of prosperous street Patentee after: BAODING LIGHTWAY GREEN ENERGY TECHNOLOGY CO.,LTD. Address before: 074000 new industrial zone of Hebei, Gaobeidian Province, light green new energy Limited by Share Ltd Patentee before: Guangwei Green Energy Technology Co.,Ltd. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20120704 |