CN202224393U - Device for cleaning back surface of wafer - Google Patents
Device for cleaning back surface of wafer Download PDFInfo
- Publication number
- CN202224393U CN202224393U CN2011203754892U CN201120375489U CN202224393U CN 202224393 U CN202224393 U CN 202224393U CN 2011203754892 U CN2011203754892 U CN 2011203754892U CN 201120375489 U CN201120375489 U CN 201120375489U CN 202224393 U CN202224393 U CN 202224393U
- Authority
- CN
- China
- Prior art keywords
- cleaning device
- wafer rear
- wafer
- remover liquid
- rear cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011203754892U CN202224393U (en) | 2011-09-28 | 2011-09-28 | Device for cleaning back surface of wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011203754892U CN202224393U (en) | 2011-09-28 | 2011-09-28 | Device for cleaning back surface of wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202224393U true CN202224393U (en) | 2012-05-23 |
Family
ID=46075001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011203754892U Expired - Fee Related CN202224393U (en) | 2011-09-28 | 2011-09-28 | Device for cleaning back surface of wafer |
Country Status (1)
Country | Link |
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CN (1) | CN202224393U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105470177A (en) * | 2016-01-05 | 2016-04-06 | 天津华海清科机电科技有限公司 | Wafer cleaning and drying apparatus |
CN105891552A (en) * | 2016-01-06 | 2016-08-24 | 苏州捷芯威半导体有限公司 | Wafer fixation clamp |
CN108818987A (en) * | 2018-08-23 | 2018-11-16 | 重庆市嘉凌新科技有限公司 | Chip cutting cleaning equipment |
-
2011
- 2011-09-28 CN CN2011203754892U patent/CN202224393U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105470177A (en) * | 2016-01-05 | 2016-04-06 | 天津华海清科机电科技有限公司 | Wafer cleaning and drying apparatus |
CN105470177B (en) * | 2016-01-05 | 2018-09-07 | 清华大学 | Wafer cleaning drying device |
CN105891552A (en) * | 2016-01-06 | 2016-08-24 | 苏州捷芯威半导体有限公司 | Wafer fixation clamp |
CN108818987A (en) * | 2018-08-23 | 2018-11-16 | 重庆市嘉凌新科技有限公司 | Chip cutting cleaning equipment |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130423 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130423 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20180928 |