CN104162527B - Cleaning to back-panel glass in a kind of thin-film solar cells production - Google Patents

Cleaning to back-panel glass in a kind of thin-film solar cells production Download PDF

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Publication number
CN104162527B
CN104162527B CN201310345690.XA CN201310345690A CN104162527B CN 104162527 B CN104162527 B CN 104162527B CN 201310345690 A CN201310345690 A CN 201310345690A CN 104162527 B CN104162527 B CN 104162527B
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cleaning
chamber
panel glass
nozzle
solar cells
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CN104162527A (en
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李岩
李兆廷
朱华
郭婷婷
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CHENGDU ZHONGPU TECHNOLOGY Co.,Ltd.
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CHENGDU XUSHUANG SOLAR TECHNOLOGY Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

Cleaning to back-panel glass in a kind of thin-film solar cells production, this technique is applicable to the back-panel glass after edging chamfering to carry out prerinse, belong to manufacture of solar cells Xian tetra-road cleanings, mainly scrub by round brush, rinsing, the processes such as air knife oven dry, remove the impurity such as particulate, organic matter, grease, chip of the back-panel glass remained on surface after edging chamfering, can effectively improve the follow-up lamination process quality of production line, the efficiency that improves battery is played to vital effect.

Description

Cleaning to back-panel glass in a kind of thin-film solar cells production
Technical field
The invention belongs to thin-film solar cells manufacturing technology field, relate to clear in thin-film solar cells production processWash technique, be specifically applicable to the cleaning of carrying out the back-panel glass after edging chamfering before lamination.
Background technology
Cleaning to the back-panel glass after edging chamfering before lamination on existing amorphous silicon thin-film solar cell production lineMachine is all the cleaning machine of continuing to use TFT production line, and cleaning is also to continue to use the cleaning of TFT production line. Thin film solar electricityPond in process of production, at least needs to carry out four times and cleans, and is respectively: clear to the transparent TCO base plate glass after edging chamferingWash, transparent TCO base plate glass carry out the clear limit of P4 laser ablation the 4th time before the cleaning after laser ablation for the first time, laminationCleaning to the back-panel glass after edging chamfering before the cleaning of transparent TCO base plate glass afterwards and lamination, traditional method is profitUse a cleaning machine to complete four cleanings by cleaning on TFT production line. And in thin-film solar cells production processAfter middle different operation, glass surface can residual different impurity and residue, the inevitable respectively phase not of the technique of its cleaning and methodWith. Obviously the basic like this demand that can not meet cleannes, can not shoot the arrow at the target according to the difference of impurity and residue. UtilizeCleaning machine on TFT production line can not be applicable to the individual character requirement for cleaning to the back-panel glass after edging chamfering, TFT production lineOn cleaning machine technique more complicated, long flow path, cost is high, investment is large, makes like this system of amorphous silicon thin-film solar cellCause this greatly to increase.
Summary of the invention
The present invention can not meet carrying out the clear of edging chamfering back-panel glass afterwards in order to solve traditional cleaningWash the technical problem of demand, designed the cleaning to back-panel glass in a kind of thin-film solar cells production, utilize this clearWash the impurity such as particulate that technique can remove the backboard safety glass remained on surface after edging chamfering, organic matter, grease, chip,Can effectively improve follow-up lamination process quality, play vital effect to improving cell power generation efficiency.
The technical solution used in the present invention is: the cleaning to back-panel glass in a kind of thin-film solar cells production,Key is: this technique is to scrub matching purge by the pre-spray wash chamber, the round brush that set gradually on glass transfer rollerChamber, again spray wash chamber, rinsing chamber and dry that chamber realizes, described processing step comprises:
A, pre-spray clean: will spray in advance wash chamber and be controlled under normal temperature state, and using deionized water as cleaning fluid, willThe one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place sprays in advance as cleaning means, wherein, everyGroup nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1L/min;
B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber and is controlled at 45 DEG C ± 2 DEG C temperature, will go fromSub-water is as spray liquid, using the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place as cleaning meansSpray, meanwhile, what use was 300 ~ 600rpm at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place rollsScrub, wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and each nozzle is at 0.12-0.16Mpa pressureUnder flow be 1-1.1L/min;
C, spray cleaning again: will again spray wash chamber and be controlled under normal temperature state, using deionized water as cleaningAgent, sprays the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place again as cleaning meansClean, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, the flow of each nozzle under 0.3-0.4Mpa pressureFor 1-1.15L/min;
D, rinsing: in rinsing chamber, upper and lower back-panel glass surface is rinsed;
E, oven dry: drying in chamber, by upper and lower back-panel glass skin drying, complete whole cleaning process.
The described quantity that again sprays wash chamber is 2, be set in turn in round brush scrub matching purge chamber after,Before rinsing chamber.
The quantity of described rinsing chamber is 2, be set in turn in again spray wash chamber after, dry chamber itBefore, rinsing chamber is controlled under normal temperature, using deionized water as purificant, by glass transfer roller upper and lower 90-110mm placeThe one group of nozzle assembly arranging respectively carries out rinsing as cleaning means, and wherein, every group of nozzle assembly comprises that 15-20 is individual fan-shapedNozzle, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15L/min.
The quantity of described oven dry chamber is 2, after being set in turn in rinsing chamber, on this basis, described bakingDry process comprises:
E1, one-level air knife purge dries: in the first oven dry chamber, carry out, utilize transfer roller upper and lower 0-8mm place respectivelyThe one-level air knife arranging is dried, and wherein, the angle of one-level air knife and glass direct of travel is 60 °-80 °, the wind-warm syndrome blowing outDegree is 25 ~ 50 DEG C, and air quantity is 200 ~ 700m3/h;
E2, secondary air knife purge dries: in the second oven dry chamber, carry out, utilize transfer roller upper and lower 0-8mm place respectivelyThe secondary air knife arranging is dried, and wherein, the angle of secondary air knife and glass direct of travel is 60 °-80 °, the wind-warm syndrome blowing outDegree is 25 ~ 80 DEG C, and air quantity is 200 ~ 700m3/h。
The invention has the beneficial effects as follows: 1, by main four steps required in manufacture of solar cells process are cleaned to demandResearch, designed technical solution of the present invention, the cleaning in this programme is applicable to back-panel glass after edging chamferingClean, broken tradition to the unified way that adopts a kind of cleaning process flow of four step cleaning demands, make glass surface dirtThe cleaning of stain is more pointed, and cleaning performance is more remarkable, and has effectively saved cost; 2, utilize this technique to the back of the bodyThe cleaning of glass sheet, particulate, fingerprint, cutting oil, plastics, rubber and the glass that can effectively remove back-panel glass surface separateThe impurity such as material (lucite, a small amount of remaining chip); 3, clean front every square metre of glass that granule number is greater than 2000Substrate clearance rate>=95%; Before cleaning, granule number is less than 2000, every square metre of granule number<100 after cleaning, particle size>25 micro-Rice, is equal to the requirement of 10000 grade clean rooms; 4, under spotlight, detect by an unaided eye, glass surface is without particle and cut; 5,Organic matter: ensure contact angle≤15 degree of glass after cleaning; 6, former cleaning processing equipment overall length 16000mm, adopts new clearWash process equipment overall length 4260mm, reduced cost of investment.
Brief description of the drawings
The structural representation of each chamber in the present invention.
In accompanying drawing, the 1st, spray in advance wash chamber, the 2nd, round brush is scrubbed matching purge chamber, and the 3rd, again spray wash chamber,The 4th, rinsing chamber, the 5th, dry chamber, 4-1 is the first rinsing chamber, and 4-2 is the second rinsing chamber, and 5-1 is the first drying cavityChamber, 5-2 is the second oven dry chamber, the 6th, secondary air knife, 6-1 is secondary air blast, and 6-2 is heater, and 6-3 is secondary air mistakeFilter, the 7th, one-level air knife, 6-1 is one-level air blast, 6-2 is main air filter, the 8th, round brush, the 9th, transfer roller, arrow tableShow back-panel glass direction of transfer.
Detailed description of the invention
Thin-film solar cells produce in a cleaning to back-panel glass, this technique is by glass transfer rollerPre-spray wash chamber 1, the round brush setting gradually on 9 scrubbed matching purge chamber 2, again sprayed wash chamber 3, rinsing chamber4 and dry chamber 5 and realize, described processing step comprises:
A, pre-spray clean: will spray in advance wash chamber 1 and be controlled under normal temperature state, and using deionized water as cleaning fluid,The one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place is sprayed in advance as cleaning means, wherein,Every group of nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1L/min;
B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber 2 and be controlled at 45 DEG C ± 2 DEG C temperature, will goIonized water is as spray liquid, using the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place as scavengerTool sprays, and meanwhile, use is 300 ~ 600rpm at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm placeRound brush 8 is scrubbed, and wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and each nozzle is pressed at 0.12-0.16MpaFlow under power is 1-1.1L/min;
C, spray cleaning again: will again spray wash chamber 3 and be controlled under normal temperature state, using deionized water as cleaningAgent, sprays the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place again as cleaning meansClean, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, the flow of each nozzle under 0.3-0.4Mpa pressureFor 1-1.15L/min;
D, rinsing: in rinsing chamber 4, upper and lower back-panel glass surface is rinsed;
E, oven dry: drying in chamber 5, by upper and lower back-panel glass skin drying, complete whole cleaning process.
In order thoroughly the impurity of the base plate glass remained on surface after round brush and cleaning agent matching purge to be removed, more describedThe quantity of inferior spray wash chamber 3 is 2, be set in turn in round brush scrub matching purge chamber 2 after, before rinsing chamber 4.
In order to strengthen wash effect to make the cleaning of glass meet cleannes demand, the quantity of described rinsing chamber 4Be 2, be set in turn in again spray wash chamber 3 after, dry before chamber 5, rinsing chamber 4 is controlled at normal temperatures,Using deionized water as purificant, one group of nozzle assembly that transfer roller upper and lower 90-110mm place is arranged is respectively as cleaningInstrument carries out rinsing, and wherein, every group of nozzle assembly comprises 15-20 fan nozzle, and each nozzle is pressed at 0.12-0.16MpaFlow under power is 1-1.15L/min.
In order to strengthen drying effect, the quantity of described oven dry chamber 5 is 2, after being set in turn in rinsing chamber 4,On this basis, described baking operation step comprises:
E1, one-level air knife purge dries: in the first oven dry chamber 5-1, carry out, utilize transfer roller upper and lower 0-8mm placeThe one-level air knife 7 arranging is respectively dried, and wherein, one-level air knife 7 is 60 °-80 ° with the angle of glass direct of travel, blows outAir temperature be 25 ~ 50 DEG C, air quantity is 200 ~ 700m3/h;
E2, secondary air knife purge dries: in the second oven dry chamber 5-2, carry out, utilize transfer roller upper and lower 0-8mm placeThe secondary air knife 6 arranging is respectively dried, and wherein, secondary air knife 6 is 60 °-80 ° with the angle of glass direct of travel, blows outAir temperature be 25 ~ 80 DEG C, air quantity is 200 ~ 700m3/h。
For the fingerprint of glass surface, cutting wet goods residue are removed, described alkalescent cleaning agent be concentration be 2% ~5% NaOH or KOH or TMAH cleaning agent.
In order to meet the cleaning pressure demand in this technical process, described nozzle is that material is that SUS303, bore are 1/8Very little, spray angle is the fan nozzle of 90 °.
The material of described round brush 8 is that nylon 612, diameter are ¢ 0.1 ~ ¢ 0.063. Use this material and diameterRound brush, can, when protective substrate glass surface is not by scratching, reach good cleaning effect.
The air feed system structure of described one-level air knife 7 comprises one-level air blast 7-1 and defeated with one-level air blast wind-forceGo out the main air filter 7-2 that end connects, the output of main air filter 7-2 and the wind-force input of one-level air knife 7Connect.
The air feed system structure of described secondary air knife 6 comprises secondary air blast 6-1, exports with secondary air blast wind-forceThe heater 6-2 that end connects and the secondary air filter 6-3 being connected with heater output, secondary air filter 6-3'sOutput is connected with the wind-force input of secondary air knife 6.
Described one-level air knife 7, secondary air knife 6 is that material is the cylinder structure of SUS304.
In the specific implementation, referring to the structural representation of the purging system based on this cleaning shown in accompanying drawing 1. At the back of the bodyOn glass sheet transfer roller 9, according to production line order set gradually pre-spray wash chamber 1, round brush is scrubbed matching purge chamber2,2 of chambers spray wash chamber, 2 rinsing chambers and 2 oven dry chambers again, and back-panel glass to be cleaned is passed through upper successivelyState each chamber, utilize this cover cleaning can remove the particulate of the back-panel glass remained on surface after edging chamfering, organic matter,The impurity such as grease, chip, can effectively improve the lamination quality of production line subsequent technique.
In pre-spray wash chamber 1, arrange respectively at back-panel glass transfer roller 9 upper and lower 90-110mm places one groupNozzle assembly. In cleaning process, this chamber temp is controlled to normal temperature, sprays in advance by deionized water, wherein, nozzle is materialMatter is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °, and every group of nozzle assembly comprises 21 fan-shaped spraysMouth, the flow of each nozzle under 0.15Mpa pressure is 1.06L/min.
Scrub in matching purge chamber 2 the one group of spray arranging respectively at transfer roller 9 upper and lower 90-110mm places at round brushNozzle assembly, is controlled at the temperature in this chamber at 45 DEG C ± 2 DEG C, with deionized water spray, and apart from transfer roller upper and lower 0-The rotating speed that 8mm place arranges is respectively that the round brush of 300 ~ 600rpm is scrubbed, wherein, every group of nozzle assembly comprise 32 fan-shapedNozzle, the flow of each nozzle under 0.15Mpa pressure is 1.06L/min;
Again spray in wash chamber 3 the one group of nozzle arranging respectively at transfer roller upper and lower 90-110mm place eachAssembly, will again spray wash chamber and be controlled under normal temperature state, sprays with deionized water, wherein, every group of nozzle assemblyComprise 21 fan nozzles, nozzle uses flow under 0.3Mpa pressure for 1L/min or adopts at 0.4Mpa pressureUnder the flow nozzle that is 1.15L/min;
The quantity of described rinsing chamber 4 is 2, be set in turn in again spray wash chamber 3 after, dry chamber 5, rinsing chamber 4 is controlled at normal temperatures, using deionized water as purificant, by through again spraying the backboard after operation beforeOne group of nozzle assembly that glass transfer roller upper and lower 90-110mm place arranges respectively carries out rinsing as cleaning means, wherein, everyGroup nozzle assembly comprises 15-20 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15L/Min, while specifically use, the nozzle quantity of the transfer roller upper and lower in can the first rinsing chamber 4-1 is set to 21,0.3Flow under Mpa pressure is that the flow under 1L/min or 0.4Mpa pressure is 1.15L/min, will be in the second rinsing chamber 4-2The nozzle quantity of transfer roller upper and lower be set to 17, the flow under 0.15Mpa pressure is 1.06L/min.
In order to strengthen drying effect, the quantity of described oven dry chamber 5 is 2, first dries chamber 5-1 and the second bakingDry chamber 5-2 after two chambers are set in turn in rinsing chamber 4, carries out in the first oven dry chamber 5-1, utilizes transfer rollerThe one-level air knife 7 that upper and lower 0-8mm place arranges is respectively dried, wherein, and one-level air knife 7 and back-panel glass direct of travelAngle is 60 °-80 °, with the angle of the perpendicular direction of back-panel glass direct of travel be 15 ° ~ 20 °, the air temperature blowing out is 25 ~ 50DEG C, air quantity is 200 ~ 700m3/ h, the air feed power source of one-level air knife is one-level air blast 7-1, one-level air blast 7-1 blows outAir flows to one-level air knife 7 through main air filter 7-2; In the second oven dry chamber 5-2, utilize transfer roller upper and lowerThe secondary air knife 6 that 0-8mm place of side arranges is respectively dried, and wherein, secondary air knife 6 with the angle of back-panel glass direct of travel is60 °-80 °, and the angle of the perpendicular direction of glass direct of travel: 15 ° ~ 20 °, the air temperature blowing out is 25 ~ 80 DEG C, and air quantity is200~700m3/h。

Claims (9)

  1. Thin-film solar cells produce in a cleaning to back-panel glass, it is characterized in that: this technique be byPre-spray wash chamber (1), the round brush setting gradually on glass transfer roller (9) scrubbed matching purge chamber (2), spray is clear againWash chamber (3), rinsing chamber (4) and dry that chamber (5) realizes, processing step comprises:
    A, pre-spray clean: will spray in advance wash chamber (1) and be controlled under normal temperature state, and using deionized water as cleaning fluid, willThe one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place sprays in advance as cleaning means, wherein, everyGroup nozzle assembly comprises 18-25 fan nozzle, and the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.1L/min;
    B, round brush are scrubbed matching purge: round brush is scrubbed to matching purge chamber (2) and is controlled at 45 DEG C ± 2 DEG C temperature, will go fromSub-water is as spray liquid, using the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place as cleaning meansSpray, meanwhile, what use was 300 ~ 600rpm at the rotating speed arranging respectively apart from transfer roller upper and lower 0-8mm place rollsBrush (8) is scrubbed, and wherein, every group of nozzle assembly comprises 30-35 fan nozzle, and each nozzle is pressed at 0.12-0.16MpaFlow under power is 1-1.1L/min;
    C, spray cleaning again: will again spray wash chamber (3) and be controlled under normal temperature state, using deionized water as cleaningAgent, sprays the one group of nozzle assembly arranging respectively at transfer roller upper and lower 90-110mm place again as cleaning meansClean, wherein, every group of nozzle assembly comprises 18-25 fan nozzle, the flow of each nozzle under 0.3-0.4Mpa pressureFor 1-1.15L/min;
    D, rinsing: in rinsing chamber (4), upper and lower back-panel glass surface is rinsed;
    E, oven dry: drying in chamber (5), by upper and lower back-panel glass skin drying, complete whole cleaning process.
  2. 2. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 1, its featureBe: the quantity of the described wash chamber of spray again (3) is 2, be set in turn in round brush scrub matching purge chamber (2) itAfterwards, rinsing chamber (4) before.
  3. 3. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 1, its featureBe: the quantity of described rinsing chamber (4) is 2, be set in turn in again spray wash chamber (3) afterwards, dry chamber(5) before, rinsing chamber (4) is controlled at normal temperatures, using deionized water as purificant, by transfer roller upper and lower 90-One group of nozzle assembly that 110mm place arranges respectively carries out rinsing as cleaning means, and wherein, every group of nozzle assembly comprises 15-20 fan nozzles, the flow of each nozzle under 0.12-0.16Mpa pressure is 1-1.15L/min.
  4. 4. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 1, its featureBe: the quantity of described oven dry chamber (5) is 2, is set in turn in rinsing chamber (4) afterwards, on this basis, describedBaking operation step comprises:
    E1, one-level air knife purge dries: in the first oven dry chamber (5-1), carry out, utilize transfer roller upper and lower 0-8mm punishmentNot She Zhi one-level air knife (7) dry, wherein, the angle of one-level air knife (7) and glass direct of travel is 60 °-80 °, blowsThe air temperature going out is 25 ~ 50 DEG C, and air quantity is 200 ~ 700m3/h;
    E2, secondary air knife purge dries: in the second oven dry chamber (5-2), carry out, utilize transfer roller upper and lower 0-8mm punishmentNot She Zhi secondary air knife (6) dry, wherein, the angle of secondary air knife (6) and glass direct of travel is 60 °-80 °, blowsThe air temperature going out is 25 ~ 80 DEG C, and air quantity is 200 ~ 700m3/h。
  5. 5. the cleaning to back-panel glass in producing according to a kind of thin-film solar cells described in claim 1 or 3, its spyLevy and be: described fan nozzle is that material is that SUS303, bore are that 1/8 cun, spray angle are the fan nozzle of 90 °.
  6. 6. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 4, its featureBe: the air feed system structure of described one-level air knife (7) comprise one-level air blast (7-1) and with one-level air blast wind-forceThe main air filter (7-2) that output connects, the wind of the output of main air filter (7-2) and one-level air knife (7)Power input connects.
  7. 7. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 4, its featureBe: the air feed system structure of described secondary air knife (6) comprises secondary air blast (6-1), defeated with secondary air blast wind-forceGo out the heater (6-2) of end connection and the secondary air filter (6-3) being connected with heater output, secondary air filtersThe output of device (6-3) is connected with the wind-force input of secondary air knife (6).
  8. 8. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 4, its featureBe: described one-level air knife (7) is that material is the cylinder structure of SUS304.
  9. 9. the cleaning to back-panel glass in a kind of thin-film solar cells production according to claim 4, its featureBe: described secondary air knife (6) is that material is the cylinder structure of SUS304.
CN201310345690.XA 2013-08-09 2013-08-09 Cleaning to back-panel glass in a kind of thin-film solar cells production Active CN104162527B (en)

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CN101977699A (en) * 2008-03-19 2011-02-16 浦瑞玛柯Feg有限责任公司 Conveyor warewasher and method for operating a conveyor warewasher
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Address after: No. 1518, Section 2, Muhua Road, xihanggang Economic Development Zone, Shuangliu County, Chengdu, Sichuan 610200

Patentee after: CHENGDU ZHONGPU TECHNOLOGY Co.,Ltd.

Address before: No. 1518, Section 2, Muhua Road, xihanggang Economic Development Zone, Shuangliu County, Chengdu, Sichuan 610200

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Denomination of invention: A cleaning process for back plate glass in thin film solar cell production

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