CN201981123U - Vacuum air exhausting system - Google Patents
Vacuum air exhausting system Download PDFInfo
- Publication number
- CN201981123U CN201981123U CN2011200168396U CN201120016839U CN201981123U CN 201981123 U CN201981123 U CN 201981123U CN 2011200168396 U CN2011200168396 U CN 2011200168396U CN 201120016839 U CN201120016839 U CN 201120016839U CN 201981123 U CN201981123 U CN 201981123U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- air exhausting
- vacuum air
- cavity body
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a vacuum air exhausting system. According to the system, the front surface of a cavity body of a vacuum air exhausting pump is evenly provided with vacuum air exhausting passages. Specifically, the front surface of the cavity body of the vacuum air exhausting pump is evenly provided with the vacuum air exhausting passages with the same standard. When the vacuum air exhausting system begins to operate, the vacuum air exhausting passages begin to exhaust air at the same time, and gas molecules in the cavity body are exhausted out of the cavity body. Since the evenly-distributed vacuum air exhausting passages begin to exhaust air at the same time, the evenness of the vacuum degree in the cavity body is guaranteed. When a glass sheet passes through a sputtering target, the stability of a film coating process can be improved, glass is guaranteed not to produce any color difference after glass being coated with a film, the film layer is even, flat and smooth, and the energy-saving effect is better.
Description
Technical field
The utility model relates to a kind of vacuum-pumping system, particularly a kind ofly is used for the vacuum-pumping system that the glass coating machine is bled.
Background technology
The vacuum-pumping system that is useful at present the glass coating machine in the world all adopts the mode of bleeding at vacuum suction pump housing two ends, promptly at two ends, the vacuum suction pump housing left and right sides suction port (as shown in Figure 1) is set.The shortcoming of this air suction mode is: because the intravital air in machine chamber is at first extracted out from two ends, the interior intermediary air of cavity also will flow to two ends earlier and just can be drawn out of; Draft owing to the cavity two ends simultaneously is bigger, and middle draft is less, draft imbalance in the cavity; So just caused the intravital vacuum tightness in chamber inhomogeneous, some local vacuum tightness is not very big.And balance is not only wanted evenly but also wanted to vacuum tightness in the glass coating processing requirement machine.Otherwise will influence the production technique of glass coating.Therefore, the vacuum air pump that adopts in the existing coating process also exists technical shortcoming.In addition, owing to now all the LOW-E vacuum air pump is designed in the two ends of plated film cavity in the world, not only profile is exquisite inadequately careful, and the area that takes up room is bigger.
Summary of the invention
All in the world vacuum-pumping systems all adopt the mode of bleeding at the vacuum pump two ends at present, promptly at two ends, vacuum pump cavity left and right sides design vacuum suction passage.The utility model provides a kind of vacuum-pumping system that the vacuum suction passage evenly is set in vacuum suction pump housing front.
Particularly, the vacuum suction passage of several same standards is set evenly in vacuum suction pump housing front exactly, when the vacuum air-bleed system came into operation, several vacuum suction passages began to bleed simultaneously, and gas molecule in the cavity is extracted out cavity.
Because the vacuum suction passage of evenly arranging begins to bleed simultaneously, so just guaranteed the even of the interior vacuum tightness of cavity.When original sheet glass when the sputtering target material, can strengthen the stability of coating process, guaranteed not produce any aberration behind the glass coating even film layer, smooth, smooth and energy-saving effect is better.
In addition, through the change that the vacuum suction passage is provided with, the time of bleeding is shorter.The vacuum tightness of coated glass manufacturing technique requirent coating chamber reaches and begins about 1.2 * 10-3pa to produce, and could guarantee the quality product of producing.The method that the present vacuum pump that adopts vacuumizes needs 16-20 hour when being extracted into 1.2 * 10-3pa behind the logical in short-term atmosphere of coating chamber; And after adopting this utility model, when the coating chamber atmosphere is extracted into 1.2 * 103pa, only need 8-12 hour.And the air-bleed system volume that the utility model provides is little, and profile is more attractive in appearance.
Description of drawings
Fig. 1 is for being used for the structural representation of the vacuum-pumping system of glass coating machine at present.
Fig. 2 is the structural representation of vacuum-pumping system described in the utility model.Wherein 1 is the vacuum suction pipeline, and 2 is molecular pump.
Embodiment
As shown in Figure 2, at the vacuum suction passage 1 of 4 same standards of the positive homogeneous design of vacuum suction pump housing, when the vacuum air-bleed system came into operation, 4 vacuum suction passages began to bleed simultaneously, and gas molecule in the cavity is extracted out cavity.
Claims (2)
1. a vacuum-pumping system is characterized in that this vacuum suction pump housing front evenly is provided with the vacuum suction passage of several same standards.
2. the vacuum-pumping system described in the claim 1, wherein said vacuum suction passage is 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200168396U CN201981123U (en) | 2011-01-20 | 2011-01-20 | Vacuum air exhausting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200168396U CN201981123U (en) | 2011-01-20 | 2011-01-20 | Vacuum air exhausting system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201981123U true CN201981123U (en) | 2011-09-21 |
Family
ID=44608587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200168396U Expired - Fee Related CN201981123U (en) | 2011-01-20 | 2011-01-20 | Vacuum air exhausting system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201981123U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115323342A (en) * | 2022-09-20 | 2022-11-11 | 中核四0四有限公司 | Control system and method for pipeline coating based on magnetron sputtering |
-
2011
- 2011-01-20 CN CN2011200168396U patent/CN201981123U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115323342A (en) * | 2022-09-20 | 2022-11-11 | 中核四0四有限公司 | Control system and method for pipeline coating based on magnetron sputtering |
| CN115323342B (en) * | 2022-09-20 | 2023-09-29 | 中核四0四有限公司 | Control system and method for pipeline coating based on magnetron sputtering |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110921 Termination date: 20170120 |