CN205313662U - Coating film device that solar energy heat absorption membrane was used - Google Patents
Coating film device that solar energy heat absorption membrane was used Download PDFInfo
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- CN205313662U CN205313662U CN201520973229.3U CN201520973229U CN205313662U CN 205313662 U CN205313662 U CN 205313662U CN 201520973229 U CN201520973229 U CN 201520973229U CN 205313662 U CN205313662 U CN 205313662U
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Abstract
The utility model discloses a coating film device that solar energy heat absorption membrane was used, including a plurality of real empty room who connects gradually, a plurality of real empty room include feed space, ion process chamber, coating film room and ejection of compact room, and two arbitrary adjacent real empty room's junction is equipped with gaseous partition space and sets up gaseous isolation mechanism, gaseous isolation mechanism includes roof, driving roller, compression roller and spring, and the compression roller below is located to the driving roller, and the banding substrate passed through from meeting of driving roller and compression roller, and the roof bottom surface is equipped with the locating piece, and the compression roller top is through spring and positioning block connection. This coating film device saves the gas barrier room in traditional coating film device to simplifying equipment structure, reducing equipment manufacturing cost, also avoid appearing the bleed air phenomenon, its ion process chamber uses multi sphere scratch start target, have more more than 10 times than the utilization ratio of traditional single -point arc target, and the indoor all gas boards that sets up of its coating film can change airflow direction, improves the ionic reaction's that reactant gas and target sputter out chance, effectively improves the effect of coating film.
Description
Technical field
The utility model relates to coiled material coating technique field, in particular to the film coating apparatus of a kind of solar energy decalescence films.
Background technology
In the traditional processing technology of solar energy decalescence films, each chamber linearly formula structure of film coating apparatus, its film coating method is as shown in Figure 1, base material put roll up and after carrying out ion processing, first send into and carry out vacuumizing process every air chamber 1, send into coating chamber 2 again and carry out plated film, if also needing to carry out secondary film coating, then before each plated film, base material all needs first to send into and carries out vacuumizing process every air chamber, namely, in film coating apparatus, each coating chamber front end must configure one every air chamber, otherwise the coating effects of solar energy decalescence films will be affected. The film coating apparatus structure of which is huge, and cost is higher, equipment cost height.
In addition, in traditional film coating apparatus, base material generally adopting single-point arc target carry out ion processing, but in practice, the ionization level of single-point arc target is quite low, substrate surface is difficult to be cleaned preferably, and therefore its coating effects is also poor.
And in coating chamber, owing to the reactant gas in coating chamber flows along same direction, its probability of collision is lower, therefore also few with the ionic reaction chance of magnetic controlling target sputtering place, its plated film efficiency is lower. Simultaneously, current magnetic controlling target adopts 3 road magnet, forming 1 annular sputtering runway, the magnetic controlling target sputtering yield of this structure is low, and the ion sputtered is very limited, therefore the coatings formed on workpiece also easily occurs that thickness does not reach the phenomenon of standard, it is generally required to through plated film repeatedly at least more repeatedly, this just needs to adopt multiple continuous print coating chamber so that device structure bulky complex, the tooling cost height of product, is unfavorable for improving the competitiveness of product in market.
Practical novel content
The purpose of this utility model is to overcome the deficiencies in the prior art, it is provided that a kind of coating effects better, compact construction is set, the film coating apparatus of solar energy decalescence films that cost is lower.
The technical solution of the utility model is: the film coating apparatus of a kind of solar energy decalescence films, comprise the multiple vacuum chambers connected successively, multiple vacuum chamber comprises feed chamber, ion processing room, coating chamber and discharge chamber, the junction of any two adjacent vacuum rooms is provided with gas barrier space, arranges gas barrier mechanism in gas barrier space; Gas barrier mechanism comprises top board, live roll, pressure roller and spring, and live roll is located at below pressure roller, and banded base material passes through from the joint of live roll and pressure roller, and top board bottom surface is provided with preset pieces, is connected with preset pieces by spring above pressure roller. Gas barrier mechanism both sides, each vacuum chamber forms independent seal cavity, can save tradition film coating apparatus in every air chamber, thus simplified apparatus structure, reduce its manufacturing cost, especially when base material needs to carry out not congruent rete plated film, can effectively prevent the not congruent gas between two coating chambers from mutually disturbing, avoid occurring oozing gas phenomenon. In gas barrier mechanism, the setting of spring makes to be formed between pressure roller and live roll Elastic Contact, and banded base material can be passed through from the joint of pressure roller and live roll smooth and easyly.
Described live roll center is provided with transmission shaft, pressure roller center is provided with pressure roller shaft, live roll and pressure roller shaft two ends all arrange bearing, above bearing in pressure roller shaft, spring is set, the outer end that transmission shaft and pressure roller shaft are positioned at the same side is connected by driving gear set, pressure roller shaft is by external first driving mechanism of synchronous belt wheel, and transmission shaft and pressure roller shaft are synchronized with the movement. The driving mechanism that first driving mechanism adopts existing market general.
Described ion processing indoor are provided with multi sphere scratch start target device, and multi sphere scratch start target device is with two rotatingfields. In two rotatingfields, each magnetic field can produce corresponding arc spot, the spot of arc spot is greater than 2, therefore the ionization level of multi sphere scratch start target is more much bigger than the ionization level of single-point arc target, the energy of ion is higher, dirt stronger to organism on base material and other adsorptive power can be sputtered out, be conducive to improving the sticking power of coatings, also the effective rate of utilization of high target can effectively be put forward, extend the duration of service of target material, target face is long-pending also relatively big in addition, and therefore multi sphere scratch start target is than many more than 10 times of the utilization ratio of tradition single-point arc target.
Described multi sphere scratch start target device comprises the first magnet, magnet rotates support plate, rotating machine, target seat, target cover, target material, striking cylinder, striking sealing socket and arc electrode, the output terminal of rotating machine rotates support plate with magnet and is connected, magnet rotates support plate two ends and arranges the first magnet respectively, first magnet and magnet rotate support plate and are located in target seat, target cover is set below target seat, target material is located in target cover, striking cylinder is connected with striking sealing socket and is located at outside target seat, the end of striking cylinder arranges arc electrode, and arc electrode is located at below target material. The first magnet place that magnet rotates support plate two ends forms rotatingfield respectively.
Described target seat periphery is provided with target flange, and striking cylinder is fixed on target flange by striking sealing socket;
The junction of target seat and target flange is provided with insulation covering;
Being provided with motor fixing plate below rotating machine, rotating machine is fixedly connected with target seat by motor fixing plate.
It is provided with intermediate frequency magnetic controlling target in described coating chamber, above intermediate frequency magnetic controlling target, it is provided with gas averaging board. The setting of gas averaging board can change the air flow line of reactant gas on magnetic controlling target, adds the probability that reactant gas in coating chamber collides mutually, thus improves reactant gas and the chance of ionic reaction that target sputters out, effectively improves the effect of plated film.
Described gas averaging board is the thin-slab construction of arch, and gas averaging board is surrounded on the upper half portion of intermediate frequency magnetic controlling target periphery. Substantially, the setting of gas averaging board, combines together aspirating chamber (namely in legacy equipment every air chamber) and coating chamber, the structure of equipment is greatly simplified, substantially reduces the length of equipment, reduce the cost of equipment.
In described vacuum chamber, intermediate frequency magnetic controlling target in same coating chamber has two groups, each intermediate frequency magnetic controlling target comprises target pipe, target core and the 2nd driving mechanism, target core one end is connected with the 2nd driving mechanism, it is inner that target pipe is located at by target core, target core is provided with five tunnels the 2nd magnet, and five tunnels the 2nd magnet is that sector is distributed in target core periphery, forms two annular sputtering runways in the space of five tunnels the 2nd magnet between target pipe and target core. The setting of five tunnels the 2nd magnet makes to be formed in the space between target pipe and target core two annular sputtering runways, aluminum ions quantity on magnetic controlling target is made to be tradition more than 2 times of magnetic controlling target, therefore the utilization ratio carrying high target can be reached, simultaneously, when the same thickness of needs, the coating chamber of half can be reduced, device structure is simplified, reduce equipment cost and Product processing cost, be conducive to improving the competitiveness of product in market. Wherein, the 2nd driving mechanism adopts and the tradition mutually isostructural driving mechanism of magnetic controlling target.
As a kind of preferred version, described vacuum chamber also comprises transition chamber, and coating chamber has four, is respectively the first coating chamber, the 2nd coating chamber, the 3rd coating chamber and the 4th coating chamber; Film coating apparatus is linear type structure, comprise connect successively feed chamber, ion processing room, the first coating chamber, the 2nd coating chamber, transition chamber, the 3rd coating chamber, the 4th coating chamber and discharge chamber.
Described ion processing room, the first coating chamber, the 2nd coating chamber, the 3rd coating chamber and the 4th coating chamber are respectively equipped with molecular pump, and vacuumize unit by molecular pump external first; Feed chamber the external 2nd vacuumizes unit, and discharge chamber the external 3rd vacuumizes unit. First vacuumize that unit, the 2nd vacuumizes that unit and the 3rd vacuumizes that unit all adopts market general vacuumize unit, comprise the lobe pump and mechanical pump that are connected, and valve be set on each pipeline of lobe pump input end.
When the film coating apparatus of above-mentioned solar energy decalescence films uses, its principle is: banded base material, after feed chamber puts volume, is first sent into ion processing room and carried out Ion Cleaning process, then sends into coating chamber and carry out coating film treatment, after completing plated film, carries out rolling by discharge chamber. Wherein, due to the setting of gas barrier mechanism, make each vacuum chamber independently form a seal cavity, can save in legacy equipment every air chamber, make film coating apparatus compact construction; The quantity of coating chamber can be arranged according to the actual needs of technique, when coating chamber is more, can set up surge chamber, avoid base material to continue through too much coating chamber and produce to influence each other between the coating chamber of centre, ensures the coating quality of product further.
The utility model, relative to prior art, has following useful effect:
The film coating apparatus of this solar energy decalescence films by arranging gas barrier mechanism between the two of arbitrary neighborhood vacuum chambers, the each vacuum chamber being positioned at its both sides is made to form independent seal cavity, can save tradition film coating apparatus in every air chamber, thus simplified apparatus structure, reduce device fabrication cost, especially when base material needs to carry out not congruent rete plated film, can effectively prevent the not congruent gas between two coating chambers from mutually disturbing, avoid occurring oozing gas phenomenon.
The film coating apparatus of this solar energy decalescence films by being provided with the multi sphere scratch start target device of rotatingfield in ion processing indoor, owing to each magnetic field can produce corresponding arc spot, the spot of arc spot is greater than 2, therefore the ionization level of multi sphere scratch start target is more much bigger than the ionization level of single-point arc target, the energy of ion is higher, dirt stronger to organism on base material and other adsorptive power can be sputtered out, be conducive to improving the sticking power of coatings, also the effective rate of utilization of high target can effectively be put forward, extend the duration of service of target material, target face is long-pending also bigger in addition, therefore multi sphere scratch start target is than many more than 10 times of the utilization ratio of tradition single-point arc target.
The film coating apparatus of this solar energy decalescence films is by arranging gas averaging board above the intermediate frequency magnetic controlling target in coating chamber, thus change the air flow line of reactant gas on magnetic controlling target, add the probability that reactant gas in coating chamber collides mutually, and then improve the chance of the ionic reaction that reactant gas and target sputter out, the effectively effect of raising plated film. Meanwhile, the setting of gas averaging board, combines together aspirating chamber (namely in legacy equipment every air chamber) and coating chamber, the structure of equipment is greatly simplified, substantially reduces the length of equipment, reduce the cost of equipment. In addition, intermediate frequency magnetic controlling target arranges five road magnet, make to be formed in the space between its target pipe and target core two annular sputtering runways so that on magnetic controlling target, aluminum ions quantity is more than 2 times of tradition magnetic controlling target, therefore can reach the utilization ratio carrying high target, simultaneously, when the same thickness of needs, the coating chamber of half can be reduced, device structure is simplified further, reduce equipment cost and Product processing cost, be conducive to improving the competitiveness of product in market.
Accompanying drawing explanation
Fig. 1 is the structural representation of traditional film coating apparatus of solar energy decalescence films.
Fig. 2 is the structural representation of the film coating apparatus of this solar energy decalescence films.
Fig. 3 is the structural representation of single coating chamber both sides gas barrier mechanism.
Fig. 4 is the structural representation of single gas barrier mechanism on A direction in Fig. 3.
Fig. 5 is the structural representation of multi sphere scratch start target.
Fig. 6 is the distribution plan of intermediate frequency magnetic controlling target and gas averaging board in single coating chamber.
Fig. 7 is the cross section structure schematic diagram of intermediate frequency magnetic controlling target in embodiment 2.
Fig. 8 is the interior principle schematic forming 2 annular sputtering runways of intermediate frequency magnetic controlling target of Fig. 7.
Embodiment
Below in conjunction with embodiment, the utility model is described in further detail, but enforcement mode of the present utility model is not limited to this.
Embodiment 1
The film coating apparatus of a kind of solar energy decalescence films of the present embodiment, comprise the multiple vacuum chambers connected successively, multiple vacuum chamber comprises feed chamber, ion processing room, coating chamber and discharge chamber, as shown in Figure 2, vacuum chamber also comprises transition chamber, coating chamber has four, is respectively the first coating chamber, the 2nd coating chamber, the 3rd coating chamber and the 4th coating chamber; Film coating apparatus is linear type structure, comprises the feed chamber 3, ion processing room 4, first coating chamber 5, the 2nd coating chamber 6, transition chamber 7, the 3rd coating chamber 8, the 4th coating chamber 9 and the discharge chamber 10 that connect successively. The junction of any two adjacent vacuum rooms is provided with gas barrier space, arranges gas barrier mechanism 11 in gas barrier space. As shown in Figure 3 or Figure 4, gas barrier mechanism comprises top board 11-1, live roll 11-2, pressure roller 11-3 and spring 11-4, and live roll is located at below pressure roller, and banded base material 12 passes through from the joint of live roll and pressure roller, top board bottom surface is provided with preset pieces, is connected with preset pieces by spring above pressure roller. Live roll center is provided with transmission shaft, pressure roller center is provided with pressure roller shaft, live roll and pressure roller shaft two ends all arrange bearing 11-5, above bearing in pressure roller shaft, spring is set, the outer end that transmission shaft and pressure roller shaft are positioned at the same side is connected by driving gear set 11-6, pressure roller shaft is by external first driving mechanism of synchronous belt wheel 11-7, and transmission shaft and pressure roller shaft are synchronized with the movement. The driving mechanism that first driving mechanism adopts existing market general. Gas barrier mechanism both sides, each vacuum chamber forms independent seal cavity, can save tradition film coating apparatus in every air chamber, thus simplified apparatus structure, reduce its manufacturing cost, especially when base material needs to carry out not congruent rete plated film, can effectively prevent the not congruent gas between two coating chambers from mutually disturbing, avoid occurring oozing gas phenomenon.In gas barrier mechanism, the setting of spring makes to be formed between pressure roller and live roll Elastic Contact, and banded base material can be passed through from the joint of pressure roller and live roll smooth and easyly.
Ion processing indoor are provided with multi sphere scratch start target device, and multi sphere scratch start target device is with two rotatingfields. in two rotatingfields, each magnetic field can produce corresponding arc spot, the spot of arc spot is greater than 2, therefore the ionization level of multi sphere scratch start target is more much bigger than the ionization level of single-point arc target, the energy of ion is higher, dirt stronger to organism on base material and other adsorptive power can be sputtered out, be conducive to improving the sticking power of coatings, also the effective rate of utilization of high target can effectively be put forward, extend the duration of service of target material, target face is long-pending also relatively big in addition, and therefore multi sphere scratch start target is than many more than 10 times of the utilization ratio of tradition single-point arc target. as shown in Figure 5, multi sphere scratch start target device comprises the first magnet 13, magnet rotates support plate 14, rotating machine 15, target seat 16, target cover 17, target material 18, striking cylinder 19, striking sealing socket 20 and arc electrode 21, the output terminal of rotating machine rotates support plate with magnet and is connected, magnet rotates support plate two ends and arranges the first magnet respectively, first magnet and magnet rotate support plate and are located in target seat, target cover is set below target seat, target material is located in target cover, striking cylinder is connected with striking sealing socket and is located at outside target seat, the end of striking cylinder arranges arc electrode, arc electrode is located at below target material. the first magnet place that magnet rotates support plate two ends forms rotatingfield respectively. target seat periphery is also provided with target flange 22, and striking cylinder is fixed on target flange by striking sealing socket, the junction of target seat and target flange is provided with insulation covering 23, being provided with motor fixing plate 24 below rotating machine, rotating machine is fixedly connected with target seat by motor fixing plate.
As shown in Fig. 3 or Fig. 6, in coating chamber, it is provided with intermediate frequency magnetic controlling target 25, above intermediate frequency magnetic controlling target, it is provided with gas averaging board 26. The setting of gas averaging board can change the air flow line of reactant gas (from tracheae 27) on magnetic controlling target, add the probability that reactant gas in coating chamber collides mutually, thus improve reactant gas and the chance of ionic reaction that target sputters out, effectively improve the effect of plated film. Gas averaging board is the thin-slab construction of arch, and gas averaging board is surrounded on the upper half portion of intermediate frequency magnetic controlling target periphery. Substantially, the setting of gas averaging board, combines together aspirating chamber (namely in legacy equipment every air chamber) and coating chamber, the structure of equipment is greatly simplified, substantially reduces the length of equipment, reduce the cost of equipment. Wherein, intermediate frequency magnetic controlling target adopts general intermediate frequency magnetic controlling target at present.
In said apparatus structure, as shown in Figure 1, ion processing room, the first coating chamber, the 2nd coating chamber, the 3rd coating chamber and the 4th coating chamber are respectively equipped with molecular pump 28, and vacuumize unit by molecular pump external first; Feed chamber the external 2nd vacuumizes unit, and discharge chamber the external 3rd vacuumizes unit. First vacuumize that unit, the 2nd vacuumizes that unit and the 3rd vacuumizes that unit all adopts market general vacuumize unit, comprise the lobe pump 29 and mechanical pump 30 that are connected, and valve 31 be set on each pipeline of lobe pump input end. Described.
When the film coating apparatus of above-mentioned solar energy decalescence films uses, its principle is: banded base material, after feed chamber puts volume, is first sent into ion processing room and carried out Ion Cleaning process, then sends into coating chamber and carry out coating film treatment, after completing plated film, carries out rolling by discharge chamber. Wherein, due to the setting of gas barrier mechanism, make each vacuum chamber independently form a seal cavity, can save in legacy equipment every air chamber, make film coating apparatus compact construction; The quantity of coating chamber can be arranged according to the actual needs of technique, when coating chamber is more, can set up surge chamber, avoid base material to continue through too much coating chamber and produce to influence each other between the coating chamber of centre, ensures the coating quality of product further.
Embodiment 2
The film coating apparatus of a kind of solar energy decalescence films of the present embodiment, compared with embodiment 1, its difference is: in each vacuum chamber, intermediate frequency magnetic controlling target in same coating chamber has two groups, as is seen in fig. 6 or fig. 7, each intermediate frequency magnetic controlling target comprises target pipe 25-1, target core 25-2 and the 2nd driving mechanism 25-3, target core one end is connected with the 2nd driving mechanism, it is inner that target pipe is located at by target core, target core is provided with five tunnels the 2nd magnet 25-4, five tunnels the 2nd magnet is that sector is distributed in target core periphery, two annular sputtering runways are formed in the space of five tunnels the 2nd magnet between target pipe and target core.The setting of five tunnels the 2nd magnet makes to be formed in the space between target pipe and target core two annular sputtering runways (as shown in Figure 8), aluminum ions quantity on magnetic controlling target is made to be tradition more than 2 times of magnetic controlling target, therefore the utilization ratio carrying high target can be reached, simultaneously, when the same thickness of needs, the coating chamber of half can be reduced, device structure is simplified, reduce equipment cost and Product processing cost, be conducive to improving the competitiveness of product in market. Wherein, the 2nd driving mechanism adopts and the tradition mutually isostructural driving mechanism of magnetic controlling target.
As mentioned above, it is necessary, just can realize the utility model preferably, above-described embodiment is only better embodiment of the present utility model, not is used for limiting practical range of the present utility model; Namely all impartial changes done according to the utility model content are with modifying, and all contained by the scope that the utility model claim is claimed.
Claims (10)
1. the film coating apparatus of solar energy decalescence films, it is characterized in that, comprise the multiple vacuum chambers connected successively, multiple vacuum chamber comprises feed chamber, ion processing room, coating chamber and discharge chamber, the junction of any two adjacent vacuum rooms is provided with gas barrier space, arranges gas barrier mechanism in gas barrier space; Gas barrier mechanism comprises top board, live roll, pressure roller and spring, and live roll is located at below pressure roller, and banded base material passes through from the joint of live roll and pressure roller, and top board bottom surface is provided with preset pieces, is connected with preset pieces by spring above pressure roller.
2. the film coating apparatus of solar energy decalescence films according to claim 1, it is characterized in that, described live roll center is provided with transmission shaft, pressure roller center is provided with pressure roller shaft, live roll and pressure roller shaft two ends all arrange bearing, arrange spring above the bearing in pressure roller shaft, and the outer end that transmission shaft and pressure roller shaft are positioned at the same side is connected by driving gear set, pressure roller shaft is by external first driving mechanism of synchronous belt wheel, and transmission shaft and pressure roller shaft are synchronized with the movement.
3. the film coating apparatus of solar energy decalescence films according to claim 1, it is characterised in that, described ion processing indoor are provided with multi sphere scratch start target device, and multi sphere scratch start target device is with two rotatingfields.
4. the film coating apparatus of solar energy decalescence films according to claim 3, it is characterized in that, described multi sphere scratch start target device comprises the first magnet, magnet rotates support plate, rotating machine, target seat, target cover, target material, striking cylinder, striking sealing socket and arc electrode, the output terminal of rotating machine rotates support plate with magnet and is connected, magnet rotates support plate two ends and arranges the first magnet respectively, first magnet and magnet rotate support plate and are located in target seat, target cover is set below target seat, target material is located in target cover, striking cylinder is connected with striking sealing socket and is located at outside target seat, the end of striking cylinder arranges arc electrode, arc electrode is located at below target material.
5. the film coating apparatus of solar energy decalescence films according to claim 4, it is characterised in that, described target seat periphery is provided with target flange, and striking cylinder is fixed on target flange by striking sealing socket;
The junction of target seat and target flange is provided with insulation covering;
Being provided with motor fixing plate below rotating machine, rotating machine is fixedly connected with target seat by motor fixing plate.
6. the film coating apparatus of solar energy decalescence films according to claim 1, it is characterised in that, it is provided with intermediate frequency magnetic controlling target in described coating chamber, above intermediate frequency magnetic controlling target, it is provided with gas averaging board.
7. the film coating apparatus of solar energy decalescence films according to claim 6, it is characterised in that, described gas averaging board is the thin-slab construction of arch, and gas averaging board is surrounded on the upper half portion of intermediate frequency magnetic controlling target periphery.
8. the film coating apparatus of solar energy decalescence films according to claim 6, it is characterized in that, in described vacuum chamber, intermediate frequency magnetic controlling target in same coating chamber has two groups, each intermediate frequency magnetic controlling target comprises target pipe, target core and the 2nd driving mechanism, target core one end is connected with the 2nd driving mechanism, it is inner that target pipe is located at by target core, target core is provided with five tunnels the 2nd magnet, five tunnels the 2nd magnet is that sector is distributed in target core periphery, forms two annular sputtering runways in the space of five tunnels the 2nd magnet between target pipe and target core.
9. the film coating apparatus of solar energy decalescence films according to claim 1, it is characterised in that, described vacuum chamber also comprises transition chamber, and coating chamber has four, is respectively the first coating chamber, the 2nd coating chamber, the 3rd coating chamber and the 4th coating chamber; Film coating apparatus is linear type structure, comprise connect successively feed chamber, ion processing room, the first coating chamber, the 2nd coating chamber, transition chamber, the 3rd coating chamber, the 4th coating chamber and discharge chamber.
10. the film coating apparatus of solar energy decalescence films according to claim 9, it is characterized in that, described ion processing room, the first coating chamber, the 2nd coating chamber, the 3rd coating chamber and the 4th coating chamber are respectively equipped with molecular pump, and vacuumize unit by molecular pump external first; Feed chamber the external 2nd vacuumizes unit, and discharge chamber the external 3rd vacuumizes unit.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105296953A (en) * | 2015-12-01 | 2016-02-03 | 肇庆市科润真空设备有限公司 | Film coating device for solar heat absorption films |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105296953A (en) * | 2015-12-01 | 2016-02-03 | 肇庆市科润真空设备有限公司 | Film coating device for solar heat absorption films |
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