CN206570391U - A kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment - Google Patents
A kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment Download PDFInfo
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- CN206570391U CN206570391U CN201720241669.9U CN201720241669U CN206570391U CN 206570391 U CN206570391 U CN 206570391U CN 201720241669 U CN201720241669 U CN 201720241669U CN 206570391 U CN206570391 U CN 206570391U
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Abstract
The utility model discloses a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment, including body, lobe pump is installed on the body, molecular pump is installed below the vacuum chamber, and molecular pump is fixedly connected by bellows with pump-line, the vacuum chamber is connected by compression set with magnetron sputtering storehouse, the magnetron sputtering silo roof portion is respectively arranged with heating component and bombardment component, intermediate frequency target is installed on the bombardment component, the magnetron sputtering storehouse has been respectively arranged below inflatable component and gate brake, coating chamber is provided with the body, and slide valve pump is installed below coating chamber.The utility model integrates evaporation coating and magnetron sputtering plating, is adapted to multiclass plastics（ABS、PS、PP、PC、PVC）, nylon, resin, the workpiece surface PROCESS FOR TREATMENT such as glass, existing efficiently fast beat evaporation plating high reflection aluminium film also can magnetically controlled DC sputtering plating stainless steel membrane, titanium film or medium frequency magnetron sputtering aluminizer.
Description
Technical field
The utility model is related to filming equipment technical field, specially a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band
Evaporating and coating equipment.
Background technology
Vacuum evaporation coating membrane technology is PVD（Physical vapour deposition (PVD)）Develop earliest, application field very wide plated film in technology
Technology.Its operation principle is the evaporation source that membrane material is placed in vacuum coating equipment（For heating the dress that membrane material is allowed to steam raising
Put）In, evaporation is allowed to by evaporation source heating membrane material in high vacuum conditions and forms steam, steam reaches plated substrate surface
Afterwards because base material temperature is relatively low, steam just condenses in substrate surface formation film.What is be widely used at present is box evaporation coating
Machine, this box evaporation coating owner will use resistance heating evaporation source and electron beam heating evaporation source（By electron gun and crucible
Composition）Two kinds of evaporation sources.This coating machine mainly include vacuum chamber, extract system, evaporation source, membrane thickness measuring system, ion gun,
Heater etc..Traditional vacuum magnetic-control sputtering band evaporating and coating equipment is complicated, and function is single, it is impossible to adapt to a variety of background colors
The surface coating processing of plastic products, can not meet consumer demand.
The content of the invention
The purpose of this utility model is to provide a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering with evaporating and coating equipment,
To solve the problems mentioned in the above background technology.
To achieve the above object, the utility model provides following technical scheme：A kind of semi-automatic vertical simple gate vacuum magnetic control
Lobe pump is installed on sputtering band evaporating and coating equipment, including body, the body, and internal body is provided with vacuum chamber, institute
State and molecular pump is installed below vacuum chamber, and molecular pump is fixedly connected by bellows with pump-line, the vacuum chamber passes through
Compression set is connected with magnetron sputtering storehouse, and the magnetron sputtering silo roof portion is respectively arranged with heating component and bombardment component, and
Heating component is located on the left of bombardment component, is provided with the bombardment component on the right side of intermediate frequency target, and intermediate frequency target and is provided with center target,
The magnetron sputtering storehouse has been respectively arranged below in inflatable component and gate brake, the body and has been provided with coating chamber, and plated film
Slide valve pump is installed below room.
It is preferred that, the pump-line is communicated with vacuum chamber, and bearing is provided with below pump-line.
It is preferred that, bolt firmware is provided with the compression set, and compression set is connected by wire with power supply.
It is preferred that, the gate brake lower section is provided with base.
It is preferred that, it is provided with below the slide valve pump on the right side of sliding vane rotary pump, and slide valve pump and is provided with evaporating chamber.
It is preferred that, having heaters is set on the left of the evaporating chamber.
Compared with prior art, the beneficial effects of the utility model are：The utility model collection evaporation coating and magnetron sputtering
Plated film is adapted to multiclass plastics in one（ABS、PS、PP、PC、PVC）, nylon, resin, the workpiece surface PROCESS FOR TREATMENT such as glass, both
There is efficiently fast beat evaporation plating high reflection aluminium film, also can magnetically controlled DC sputtering plating stainless steel membrane, titanium film or medium frequency magnetron sputtering plating
Aluminium film, coating process may be selected to open high-pressure ion bombardment auxiliary cleaning, increase film layer firmness；The equipment is mainly widely applied
The multiple color such as gold, silver, red, purple, blue, grey, black, seven coloured silks is processed into the surface coating of the plastic products of any background color, is increased
Surface metal texture, raising product specification, outward appearance are more aobvious luxurious, favored by consumers, are easy to be promoted and made on a large scale
With.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the attachment structure schematic diagram of the utility model coating chamber；
Fig. 3 is the partial enlarged drawing at the utility model A.
In figure：1- bodies；2- lobe pumps；3- vacuum chambers；4- compression sets；5- heating components；6- bombards component；7- intermediate frequencies
Target；8- centers target；9- coating chambers；10- pump-lines；11- molecular pumps；12- bellowss；13- bases；14- inflatable components；15-
Brake at gate；16- magnetron sputterings storehouse；17- slide valve pumps；18- heaters；19- sliding vane rotary pumps；20- evaporating chambers.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Refer to Fig. 1-3, a kind of embodiment that the utility model is provided：A kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering
Lobe pump 2 is installed on band evaporating and coating equipment, including body 1, body 1, and body 1 is internally provided with vacuum chamber 3, vacuum chamber
3 lower sections are provided with molecular pump 11, and molecular pump 11 is fixedly connected by bellows 12 with pump-line 10, and vacuum chamber 3 passes through pressure
Compression apparatus 4 is connected with magnetron sputtering storehouse 16, and the top of magnetron sputtering storehouse 16 is respectively arranged with heating component 5 and bombardment component 6, and
Heating component 5, which is located on the left side of bombardment component 6, bombardment component 6, is provided with intermediate frequency target 7, and the right side of intermediate frequency target 7 is provided with center target
8, magnetron sputtering storehouse 16, which has been respectively arranged below in inflatable component 14 and gate brake 15, body 1, is provided with coating chamber 9, and plating
The lower section of film room 9 is provided with slide valve pump 17, and pump-line 10 is communicated with vacuum chamber 3, and the lower section of pump-line 10 is provided with bearing, compression
Bolt firmware is provided with device 4, and compression set 4 is connected by wire with power supply, the lower section of gate brake 15 is provided with base
13, the lower section of slide valve pump 17 is provided with sliding vane rotary pump 19, and the right side of slide valve pump 17 is provided with evaporating chamber 20, and the left side of evaporating chamber 20, which is provided with, to be added
Hot device 18.
The utility model when in use, is provided with lobe pump 2 on body 1, due to the continuous rotation of the rotor of lobe pump 2, quilt
Pumping body is discharged out of, air inlet is drawn between rotor and pump case space, then through exhaust outlet, and body 1 is internally provided with vacuum
Room 3, the lower section of vacuum chamber 3 is provided with molecular pump 11, and molecular pump 11 gives gas molecule using the rotor of high speed rotation MOMENTUM TRANSMISSION,
It is allowed to obtain directed velocity, so as to be compressed, be driven to after exhaust outlet and take away for prime, molecular pump 11 is by bellows 12 with taking out
Feed channel 10 is fixedly connected, and vacuum chamber 3 is connected by compression set 4 with magnetron sputtering storehouse 16, the top of magnetron sputtering storehouse 16
It is not provided with heating component 5 and bombardment component 6, body 1 and is provided with coating chamber 9, the lower section of coating chamber 9 is provided with slide valve pump 17,
Pump-line 10 is communicated with vacuum chamber 3, and valve is provided with pump-line 10, the air in vacuum chamber 3 is taken out by opening valve
Go out, it is ensured that operating environment is in perfect vacuum, coating chamber 9 can efficiently fast beat evaporation plating high reflection aluminium film, magnetron sputtering
Storehouse 16 also can magnetically controlled DC sputtering plating stainless steel membrane, titanium film or medium frequency magnetron sputtering aluminizer, the optional unlatching height of coating process
Press Ions Bombardment component 6 to carry out auxiliary cleaning, increase film layer firmness.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of without departing substantially from spirit or essential attributes of the present utility model, can realize that this practicality is new in other specific forms
Type.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and is nonrestrictive, this practicality is new
The scope of type limits by appended claims rather than described above, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are included in the utility model.Any reference in claim should not be considered as limitation
Involved claim.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It may be appreciated other embodiment.
Claims (6)
1. a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment, including body（1）, it is characterised in that：Institute
State body（1）On lobe pump is installed（2）, and body（1）It is internally provided with vacuum chamber（3）, the vacuum chamber（3）Install lower section
There is molecular pump（11）, and molecular pump（11）Pass through bellows（12）With pump-line（10）It is fixedly connected, the vacuum chamber（3）It is logical
Over-pressed compression apparatus（4）With magnetron sputtering storehouse（16）It is connected, the magnetron sputtering storehouse（16）Top is respectively arranged with heating component
（5）With bombardment component（6）, and heating component（5）It is located at bombardment component（6）Left side, the bombardment component（6）On intermediate frequency is installed
Target（7）, and intermediate frequency target（7）Right side is provided with center target（8）, the magnetron sputtering storehouse（16）It has been respectively arranged below inflatable component
（14）With gate brake（15）, the body（1）Inside it is provided with coating chamber（9）, and coating chamber（9）Lower section is provided with slide valve pump
（17）.
2. a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment according to claim 1, its feature
It is：The pump-line（10）With vacuum chamber（3）Communicate, and pump-line（10）Lower section is provided with bearing.
3. a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment according to claim 1, its feature
It is：The compression set（4）On be provided with bolt firmware, and compression set（4）It is connected by wire with power supply.
4. a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment according to claim 1, its feature
It is：The gate brake（15）Lower section is provided with base（13）.
5. a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment according to claim 1, its feature
It is：The slide valve pump（17）Lower section is provided with sliding vane rotary pump（19）, and slide valve pump（17）Right side is provided with evaporating chamber（20）.
6. a kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment according to claim 5, its feature
It is：The evaporating chamber（20）Left side sets having heaters（18）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720241669.9U CN206570391U (en) | 2017-03-11 | 2017-03-11 | A kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720241669.9U CN206570391U (en) | 2017-03-11 | 2017-03-11 | A kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206570391U true CN206570391U (en) | 2017-10-20 |
Family
ID=60054096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720241669.9U Expired - Fee Related CN206570391U (en) | 2017-03-11 | 2017-03-11 | A kind of semi-automatic vertical simple gate vacuum magnetic-control sputtering band evaporating and coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206570391U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109554680A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of devices of coiled vacuum coating machine |
| CN112501580A (en) * | 2020-11-09 | 2021-03-16 | 凯盛光伏材料有限公司 | Measurement carrier of vertical evaporation sputtering integration equipment |
-
2017
- 2017-03-11 CN CN201720241669.9U patent/CN206570391U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109554680A (en) * | 2019-02-12 | 2019-04-02 | 浙江德佑新材料科技有限公司 | A kind of devices of coiled vacuum coating machine |
| CN109554680B (en) * | 2019-02-12 | 2024-02-09 | 浙江德佑新材料科技有限公司 | Winding type vacuum coating machine |
| CN112501580A (en) * | 2020-11-09 | 2021-03-16 | 凯盛光伏材料有限公司 | Measurement carrier of vertical evaporation sputtering integration equipment |
| CN112501580B (en) * | 2020-11-09 | 2023-06-02 | 凯盛光伏材料有限公司 | Measuring carrier of vertical evaporation and sputtering integrated equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171020 Termination date: 20200311 |