CN205241783U - Automatic coating film production line of multi -functional magnetron sputtering - Google Patents
Automatic coating film production line of multi -functional magnetron sputtering Download PDFInfo
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- CN205241783U CN205241783U CN201520915429.3U CN201520915429U CN205241783U CN 205241783 U CN205241783 U CN 205241783U CN 201520915429 U CN201520915429 U CN 201520915429U CN 205241783 U CN205241783 U CN 205241783U
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 239000011248 coating agent Substances 0.000 title claims abstract description 19
- 238000001755 magnetron sputter deposition Methods 0.000 title abstract 2
- 230000007704 transition Effects 0.000 claims abstract description 99
- 239000003973 paint Substances 0.000 claims abstract description 52
- 238000005086 pumping Methods 0.000 claims abstract description 24
- 230000037452 priming Effects 0.000 claims abstract description 18
- 238000004140 cleaning Methods 0.000 claims abstract description 16
- 238000006243 chemical reaction Methods 0.000 claims description 36
- 239000007888 film coating Substances 0.000 claims description 26
- 238000009501 film coating Methods 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 20
- 238000004544 sputter deposition Methods 0.000 claims description 17
- 230000003139 buffering effect Effects 0.000 claims description 15
- 238000002386 leaching Methods 0.000 claims description 14
- 239000004922 lacquer Substances 0.000 abstract description 4
- 239000011521 glass Substances 0.000 description 44
- 238000007747 plating Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 6
- 230000000740 bleeding effect Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010009 beating Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000032696 parturition Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
The utility model discloses an automatic coating film production line of multi -functional magnetron sputtering, it is by last rack, preceding cleaning machine, advance piece transition frame, advance the piece and slightly take out the room, advance the piece and take out the room in advance, enter piece transition room, advance the piece surge chamber, the coating film room, go out the piece surge chamber, go out piece transition room, it takes out the room in advance to go out the piece, it slightly takes out the room to go out the piece, go out the rack, the translation frame, priming paint drenches the lacquer room, priming paint flood oven, the finish paint drenches the lacquer room, the finish paint toasts the case, the finish paint hurricane drier, the after -clearing machine, the frame of rectifying constitutes with lower rack, it all is equipped with the coating film target to advance the piece surge chamber and go out the piece surge chamber, advance the piece and be equipped with first transform vacuum pumping unit in the room of taking out in advance, go out the piece and be equipped with second transform vacuum pumping unit in the room of taking out in advance, enter piece transition room and advance to be equipped with into piece exhaust subassembly between the piece surge chamber, go out the piece surge chamber and go out to be equipped with out piece exhaust subassembly between the piece transition room. The utility model discloses in can multiple coating process concentrating same equipment on, reduce production input, improved economic benefits.
Description
Technical field
The utility model relates to vacuum coating technology, is specifically related to a kind of multifunctional magnetic control sputtering automatic film coatingProduction line.
Background technology
Along with the rise of plate glass industry, flat aluminum mirror, solar control film and LOW-E film plate glassDemand increasing, the competition in market is also more and more fierce, to magnetic control film coating production line indicesThe requirement of performance is also more and more higher. The glass output of China is positioned at first of the whole world, and therefore enterprise can be simultaneouslyHave multiple high-quality plate glass product and just have more competitiveness.
At present, the technical process of plane aluminium mirror magnetic control film coating production line is generally: upper horse → front clearWash machine → enter sheet transition frame → enter sheet slightly take out chamber → enter sheet pre-vacuum chamber → enter sheet transition chamber → enter sheet surge chamber →Coating chamber → slice buffering plating → slice transition chamber → slice pre-vacuum chamber → slice is slightly taken out chamber → slice transition frame→ pan carriage → priming paint leaching paint section → priming paint baking box → finish paint leaching paint section → finish paint baking box → finish paint is air-drySection → rear cleaning machine → correction frame → lower horse. The plating of solar control film and LOW-E (low-radiation film) magnetic controlThe technical process of film production line is generally: upper horse → front cleaning machine → enter sheet transition frame → enter sheet is thickTake out chamber → enter sheet pre-vacuum chamber → enter sheet surge chamber → front coating chamber → coating chamber → rear coating chamber → slice bufferingChamber → slice pre-vacuum chamber → slice is slightly taken out chamber → slice transition frame → correction frame → lower horse. Therefore current to glassWhen plating different films, glass workpiece need to use different production lines to carry out. If need to giving birth to, enterprise is coated with different filmsGlass time, need to be equipped with many coating film production lines, therefore the infusion of financial resources of enterprise is just very huge, produceCost is just very high, under now fierce market competition environment, will face passive situation.
Utility model content
The purpose of this utility model is the deficiency existing in order to overcome above prior art, provides one to fallThe low multifunctional magnetic control sputtering automatic film coating production line that generates this and can plate multiple film.
The purpose of this utility model realizes by following technical scheme: this multifunctional magnetic control sputtering plates automaticallyFilm production line, comprise successively the upper horse, the front cleaning machine that connect, enter sheet transition frame, vacuum coater,Go out horse, pan carriage, priming paint leaching paint chamber, priming paint flood baking box, finish paint leaching paint chamber, finish paint baking box, facePaint hurricane drier, rear cleaning machine, correction frame and lower horse, described vacuum coater comprises and connecting successivelyEnter that sheet is slightly taken out chamber, enters sheet pre-vacuum chamber, enters sheet transition chamber, entered sheet surge chamber, coating chamber, slice surge chamber,Slice transition chamber, slice pre-vacuum chamber and slice are slightly taken out chamber; Described enter sheet surge chamber and slice surge chamber all establishThere is coated target; Described enter sheet pre-vacuum chamber be provided with the first conversion and vacuumize unit, described slice pre-vacuum chamber is provided withThe second conversion vacuumizes unit; Described enter sheet transition chamber and enter between sheet surge chamber to be provided with into sheet gas deflation assembly,Between described slice surge chamber and slice transition chamber, be provided with slice gas deflation assembly.
Preferably, described the first conversion vacuumize unit comprise the first high vacuum pneumatic operated valve, the first diffusion pump,Pneumatic vacuum valve, the first lobe pump and the first slide valve pump in first, described in enter sheet pre-vacuum chamber and be provided with the first heightVacuum pumping opening in vacuum pumping opening and first, described the first diffusion pump by the first high vacuum pneumatic operated valve withThe first fine pumping mouth connects, and described the first lobe pump passes through in first true in Pneumatic vacuum valve and firstEmpty bleeding point connects, and described the first slide valve pump, the first lobe pump and the first diffusion pump are connected successively.
Preferably, described the second conversion vacuumize unit comprise the second high vacuum pneumatic operated valve, the second diffusion pump,Pneumatic vacuum valve, the second lobe pump and the second slide valve pump in second, described in enter sheet pre-vacuum chamber and be provided with the second heightVacuum pumping opening in vacuum pumping opening and second, described the second diffusion pump by the second high vacuum pneumatic operated valve withThe second fine pumping mouth connects, and described the second lobe pump passes through in second true in Pneumatic vacuum valve and secondEmpty bleeding point connects, and described the second slide valve pump, the second lobe pump and the second diffusion pump are connected successively.
Preferably, described in, enter sheet gas deflation assembly and comprise that first enters sheet blast pipe, second and enter sheet blast pipe and enterSheet conversion pneumatic operated valve, described first one end of entering sheet blast pipe stretch into into after sheet transition chamber by entering sheet conversionPneumatic operated valve is connected with second one end of entering sheet blast pipe; Described first enters sheet blast pipe and enters sheet transition chamberVavuum pump air inlet pipe connects, described second other end that enters sheet blast pipe stretch into into after sheet buffering transition chamber withThe vavuum pump air inlet pipe of entering sheet buffering transition chamber connects.
Preferably, described slice gas deflation assembly comprises the first slice blast pipe, the second slice blast pipe and goes outSheet conversion pneumatic operated valve, change by slice after stretching into slice transition chamber one end of described the first slice blast pipePneumatic operated valve is connected with one end of the second slice blast pipe; Described the first slice blast pipe and slice transition chamberVavuum pump escape pipe connects, the other end of described the second slice blast pipe stretch into after slice buffering transition chamber withThe vavuum pump air inlet pipe of slice buffering transition chamber connects.
Preferably, described in, enter sheet transition frame and enter sheet and slightly take out between chamber, enter sheet and slightly take out chamber and enter sheet pre-vacuum chamberBetween, enter sheet pre-vacuum chamber and enter between sheet transition chamber, enter sheet transition chamber and enter between sheet surge chamber, sliceBetween surge chamber and slice transition chamber, between slice transition chamber and slice pre-vacuum chamber, slice pre-vacuum chamber and going outSheet is slightly taken out between chamber and slice is slightly taken out chamber and gone out and between horse, is equipped with vacuum gas lock, described vacuum gas lock bagDraw together cylinder, tooth bar, gear, rotating shaft, pivoted arm and jam plate, the expansion link of described cylinder is connected with tooth bar,The engagement of described wheel and rack, and described gear is connected with pivoted arm by rotating shaft, described pivoted arm and jam plate companyConnect.
Preferably, the sealed end of described jam plate is provided with rubber seal.
Preferably, described in enter sheet surge chamber and comprise into sheet chamber body and enter sheet conveying assembly, described in enter sheet and carryAssembly is installed into Ti Nei bottom, sheet chamber, is positioned at into the coated target of sheet surge chamber and is installed on into sheet chamber bodyTop;
Described slice surge chamber comprises slice chamber body and slice conveying assembly, and described slice conveying assembly is installedTi Nei bottom, slice chamber, the coated target that is positioned at slice surge chamber is installed on Ti Nei top, slice chamber.
A film plating process that adopts above-mentioned multifunctional magnetic control sputtering automatic film coating production line, comprises following stepRapid: glass pieces successively through upper horse, front cleaning machine, enter sheet transition frame, enter sheet and slightly take out chamber, enter sheetPre-vacuum chamber, enter sheet transition chamber, enter sheet surge chamber, coating chamber, the plating of slice buffering plated film, slice transition chamber,Slice pre-vacuum chamber, slice slightly take out chamber, slice transition frame, pan carriage, priming paint leaching paint section, priming paint baking box,Finish paint leaching paint section, finish paint baking box, air-dry section of finish paint, rear cleaning machine, correction frame and lower horse carry out phaseThe operation of answering;
In the time carrying out glass pieces to plate different films, first conversion vacuumize unit start corresponding valve andPump, makes into sheet pre-vacuum chamber and reaches corresponding vacuum; And the second conversion vacuumizes unit and starts corresponding valveAnd pump, make slice pre-vacuum chamber reach corresponding vacuum; Meanwhile, enter sheet surge chamber and slice surge chamber rootPlate different films and start coated target according to glass pieces.
Preferably, the each mistake when operation of carrying out for glass pieces, the first conversion vacuumizes unit, secondConversion vacuumizes the switching of unit and each vacuum gas lock and all controls by PLC.
The utility model has advantages of as follows with respect to prior art: of the present utility model multifunctional magnetic controlledSputter automatic film coating production line improves by the buffering coating chamber to entering sheet surge chamber and slice, andEntering the prefabricated chamber of sheet pre-vacuum chamber and slice increases respectively by the first conversion and vacuumizes bleed unit and the second conversion and take out trueThe sky unit of bleeding, and set up sheet gas deflation assembly and slice gas deflation assembly, thus make multifunctional magnetic controlledSputter automatic film coating production line can be coated with multiple film, thereby enterprise need to not buy difference for every kind of filmProduction line, therefore greatly reduce the capital invested of enterprise, make enterprise realize maximizing the benefits. This realitySimple in structure, easy for installation with novel multifunctional magnetic control sputtering automatic film coating production line. This practicality is newType can concentrate on various coating process in one equipment and carry out, therefore improved the productivity effect of enterprise.
Brief description of the drawings
Fig. 1 is the structural representation of multifunctional magnetic control sputtering automatic film coating production line of the present utility model.
Fig. 2 is the structural representation of the first vacuum suction unit of the present utility model.
Fig. 3 be of the present utility model enter the cutaway view of sheet surge chamber.
Fig. 4 be of the present utility model enter the structural representation of sheet gas deflation assembly.
Fig. 5 is the front view of vacuum gas lock of the present utility model.
Fig. 6 is the side view of vacuum gas lock of the present utility model.
Fig. 7 is the cutaway view of vacuum gas lock of the present utility model.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is described in further detail.
As shown in Figures 1 to 4, multifunctional magnetic control sputtering automatic film coating production line, comprises successively connectingUpper horse 1, front cleaning machine 2, enter sheet transition frame 3, vacuum coater, go out horse 13, pan carriage 14,Priming paint leaching paint chamber 15, priming paint flood baking box 16, finish paint leaching paint chamber 17, finish paint baking box 18, finish paint are air-dryChamber 19, rear cleaning machine 20, correction frame 21 and lower horse 22, described vacuum coater comprises successively and connectingSheet is slightly taken out chamber 4, enters sheet pre-vacuum chamber 5, enters sheet transition chamber 6, is entered sheet surge chamber 7 for entering of connecing, coating chamber 8,Slice surge chamber 9, slice transition chamber 10, slice pre-vacuum chamber 11 and slice are slightly taken out chamber 12; Described enter sheet slowRush chamber 7 and slice surge chamber 9 is equipped with coated target 43; Described enter sheet pre-vacuum chamber 5 be provided with the first conversion and take outVacuum unit 23, described slice pre-vacuum chamber 11 is provided with the second conversion and vacuumizes unit; Described enter sheet transition chamber6 and enter between sheet surge chamber 7 to be provided with into sheet gas deflation assembly 24 described slice surge chamber 9 and slice transitionBetween chamber 10, be provided with slice gas deflation assembly.
As shown in Figure 2, described the first conversion vacuumizes unit 23 and comprises the first high vacuum pneumatic operated valve 38, thePneumatic vacuum valve 40, the first lobe pump 41 and the first slide valve pump 42 in one diffusion pump 39, first, described inEnter sheet pre-vacuum chamber 5 and be provided with vacuum pumping opening in the first fine pumping mouth and first, described the first diffusion pump39 are connected with the first fine pumping mouth by the first high vacuum pneumatic operated valve 38, described the first lobe pump 41Be connected described the first slide valve pump 42, with vacuum pumping opening in first by Pneumatic vacuum valve 40 in firstOne lobe pump 41 is connected successively with the first diffusion pump 39.
In the time that magnetic control film coating production line will be realized the fast beating function of plating simple substance film, while plating simple substance film, openOpen Pneumatic vacuum valve 40 in first, enter the first lobe pump 41 after making air by vacuum pumping opening in first,And be discharged in atmosphere by the first slide valve pump 42; When magnetic control film coating production line will be realized the slow beat that plates composite membraneTime, while plating solar control film or LOW-E magnetic control film coating, open the first fine pumping mouth, make airBy entering the first diffusion pump 39 after the first fine pumping mouth, successively by the first lobe pump 41 and firstAfter slide valve pump 42, be discharged in atmosphere. Working method and the first conversion that the second conversion vacuumizes unit vacuumizeThe working method of unit 23 is identical.
Described the second conversion vacuumizes unit and comprises in the second high vacuum pneumatic operated valve, the second diffusion pump, secondPneumatic vacuum valve, the second lobe pump and the second slide valve pump, described in enter sheet pre-vacuum chamber and be provided with the second high vacuum and take outVacuum pumping opening in gas port and second, described the second diffusion pump is by the second high vacuum pneumatic operated valve and the second heightVacuum pumping opening connects, and described the second lobe pump is by vacuum suction in Pneumatic vacuum valve and second in secondMouth connects, and described the second slide valve pump, the second lobe pump and the second diffusion pump are according to being connected. The second conversion is taken out trueThe structure of empty unit is identical with the structure that the first conversion vacuumizes unit, and the position that just both are installed on is notWith, i.e. the first conversion vacuumizes unit and is installed on into sheet pre-vacuum chamber, and the second conversion vacuumizes unit installationIn slice pre-vacuum chamber.
Described enter sheet gas deflation assembly 24 comprise that first enters sheet blast pipe 25, second and enter sheet blast pipe 26 and enterSheet conversion pneumatic operated valve 27, described first one end of entering sheet blast pipe 25 stretch into into after sheet transition chamber 6 by enteringSheet conversion pneumatic operated valve 27 is connected with second one end of entering sheet blast pipe 26; Described first enters sheet blast pipe 25Be connected with the vavuum pump air inlet pipe of entering sheet transition chamber 6, described second other end that enters sheet blast pipe 26 stretches intoAfter entering sheet buffering transition chamber 7, be connected with the vavuum pump air inlet pipe of entering sheet buffering transition chamber 7.
First enters sheet blast pipe 25 and second enters sheet blast pipe 26 use and enters sheet conversion pneumatic operated valve 27 and separate, whenWhen magnetic control film coating production line will be realized the fast beating function of plating simple substance film, while plating simple substance film, adopt firstEnter 25 exhausts of sheet blast pipe, in the time that magnetic control film coating production line will be realized the slow beat of plating composite membrane, i.e. plating sunWhen light control film or LOW-E magnetic control film coating, adopt second to enter 26 exhausts of sheet blast pipe. Slice exhaust banksThe working method of part is identical with the working method of entering sheet gas deflation assembly.
Described slice gas deflation assembly comprises the first slice blast pipe, the second slice blast pipe and slice conversion gasMoving valve, one end of described the first slice blast pipe stretch into after slice transition chamber by slice change pneumatic operated valve andOne end of the second slice blast pipe connects; The vacuum of described the first slice blast pipe and slice transition chamber pumpsTracheae connects, and the other end of described the second slice blast pipe cushions with slice after stretching into slice buffering transition chamberThe vavuum pump air inlet pipe of transition chamber connects. The structure of slice gas deflation assembly and the structure phase of entering sheet gas deflation assemblyWith, just both installation site differences. Entering sheet gas deflation assembly is installed on into sheet transition chamber and enters sheet and delayRush between chamber, and slice gas deflation assembly is installed between slice surge chamber and slice transition chamber.
Described enter sheet transition frame 3 and enter sheet and slightly take out between chamber 4, enter sheet and slightly take out chamber 4 and enter sheet pre-vacuum chamber 5Between, enter sheet pre-vacuum chamber 5 and enter between sheet transition chamber 6, enter sheet transition chamber 6 and enter sheet surge chamber 7 itBetween, between slice surge chamber 9 and slice transition chamber 10, slice transition chamber 10 and slice pre-vacuum chamber 11 itBetween, slice pre-vacuum chamber 11 and slice is slightly taken out between chamber 12 and slice is slightly taken out chamber 12 and goes out between horse 13Be equipped with vacuum gas lock 28, described vacuum gas lock comprise cylinder 29, tooth bar 30, gear 31, rotating shaft 32,Pivoted arm 33 and jam plate 34, the expansion link of described cylinder 29 is connected with tooth bar 30, described gear 31 and toothBar 30 engages, and described gear 31 is connected with pivoted arm 33 by rotating shaft 32, described pivoted arm 33 and jam plate34 connect. Vacuum gas lock of the present utility model simple in structure, and good airproof performance, reliability is high.
For further improving the sealing effectiveness of jam plate, the sealed end of described jam plate 34 is provided with rubber seal 35.
Described enter sheet surge chamber 7 comprise into sheet chamber body 36 and enter sheet conveying assembly 37, described in enter sheet delivery groupsPart is installed into Ti Nei bottom, sheet chamber, is positioned at into the coated target 43 of sheet surge chamber and is installed on into sheet chamber bodyTop; Described slice surge chamber 9 comprises slice chamber body and slice conveying assembly, described slice delivery groupsPart is installed Ti Nei bottom, slice chamber, and the coated target that is positioned at slice surge chamber is installed on slice chamber bodyTop. Concrete, enter sheet conveying assembly and slice conveying assembly has all been adopted prior art, mainly by cylinderForm.
A film plating process that adopts above-mentioned multifunctional magnetic control sputtering automatic film coating production line, comprises following stepRapid: glass pieces successively through upper horse, front cleaning machine, enter sheet transition frame, enter sheet and slightly take out chamber, enter sheetPre-vacuum chamber, enter sheet transition chamber, enter sheet surge chamber, coating chamber, the plating of slice buffering plated film, slice transition chamber,Slice pre-vacuum chamber, slice slightly take out chamber, slice transition frame, pan carriage, priming paint leaching paint section, priming paint baking box,Finish paint leaching paint section, finish paint baking box, air-dry section of finish paint, rear cleaning machine, correction frame and lower horse carry out phaseThe operation of answering;
In the time carrying out glass pieces to plate different films, first conversion vacuumize unit start corresponding valve andPump, makes into sheet pre-vacuum chamber and reaches corresponding vacuum; And the second conversion vacuumizes unit and starts corresponding valveAnd pump, make slice pre-vacuum chamber reach corresponding vacuum; Meanwhile, enter sheet surge chamber and slice surge chamber rootPlate different films and start coated target according to glass pieces.
Concrete, in the time of glass pieces plating simple substance film, its step is as described below:
1) glass pieces enters front cleaning machine by upper horse, and then glass pieces is cleaned by front cleaning machineAfter enter into sheet transition frame;
2) enter sheet transition frame and enter sheet and slightly take out the vacuum gas lock unlatching between chamber, glass pieces is from entering sheet mistakeCrossing frame enters into sheet and slightly takes out chamber; Slightly take out the vacuum unit starting of chamber when entering sheet, make slightly take out into sheet indoor trueReciprocal of duty cycle reaches 800 handkerchiefs, enters sheet and slightly takes out chamber and enter the vacuum gas lock unlatching between sheet pre-vacuum chamber, glass piecesEntering sheet slightly enters into sheet pre-vacuum chamber the chamber of taking out;
4) glass pieces enters after sheet pre-vacuum chamber, enters sheet and slightly takes out chamber and enter the vacuum gas between sheet pre-vacuum chamberAfter lock cuts out, first converts the middle vacuum extraction valve vacuumizing in unit opens, and lobe pump is taken out in advance to entering sheetChamber continues to vacuumize, and makes into the vacuum in sheet pre-vacuum chamber and arrives 3 handkerchiefs, enters sheet pre-vacuum chamber and enters sheet transitionRoad vacuum gas lock between chamber is opened, and glass pieces just enters into sheet transition chamber;
5) glass pieces enters after sheet transition chamber, enters sheet pre-vacuum chamber and enters the vacuum gas between sheet transition chamberLock cuts out, and enters vacuum unit starting in sheet transition chamber, makes into the vacuum in sheet transition chamber and arrives 2X10-1Handkerchief, enters sheet transition chamber and enters the vacuum gas lock unlatching between sheet surge chamber, and glass pieces enters into sheet and cushionsChamber;
6) glass pieces enters after sheet surge chamber, enters sheet transition chamber and enters the vacuum gas between sheet surge chamberLock cuts out, and enters the vacuum unit starting of sheet surge chamber, and glass pieces moves with the plated film speed of travel of settingEnter coating chamber and carry out plated film;
7) glass pieces enters slice surge chamber after coating chamber completes plated film again, now, and slice transition chamberInterior vacuum unit starting, makes the vacuum in slice transition chamber reach 2X10-1Handkerchief, slice surge chamberWith vacuum lock between slice transition chamber starts, and glass pieces enters slice transition chamber;
8) glass pieces enters after slice transition chamber, and the vacuum unit starting of slice pre-vacuum chamber, makes slice pre-Take out indoor vacuum and arrive 3 handkerchiefs, the road vacuum gas lock between slice transition chamber and slice pre-vacuum chamber is opened,Glass pieces just enters in slice pre-vacuum chamber by setting the speed of travel;
9) glass pieces enters after slice pre-vacuum chamber, and slice is slightly taken out the vacuum unit starting of chamber, makes slice thickTake out indoor vacuum and arrive 800 handkerchiefs, the vacuum gas lock that slice pre-vacuum chamber and slice are slightly taken out between chamber is openedAfter, glass pieces just enters into slice by the setting speed of travel and slightly takes out indoor;
10) glass pieces enters slice and slightly takes out behind chamber, and slice pre-vacuum chamber and slice are slightly taken out the vacuum between chamberAfter gas lock is closed, be slightly filled with atmosphere in the chamber of taking out to slice, reach after the inflationtime of setting, slice is slightly taken out chamberAnd going out the vacuum gas lock unlatching between horse, glass pieces just enters into out horse by setting the speed of travel;
11) last, come off duty workpiece from go out horse out after successively by pan carriage, drench priming paint section, priming paintDrying section, lacquer painting leaching paint section, finish paint drying section, air-dry section, correction section and upper horse are to complete simple substance filmPlated film.
And in the time of plating solar control film or LOW-E magnetic control film coating, its step is as described below:
1) glass pieces enters front cleaning machine by upper horse, and then glass pieces is cleaned by front cleaning machineAfter enter into sheet transition frame;
2) enter sheet transition frame and enter sheet and slightly take out the vacuum gas lock unlatching between chamber, glass pieces is from entering sheet mistakeCrossing frame enters into sheet and slightly takes out chamber; Slightly take out the vacuum unit starting of chamber when entering sheet, make slightly take out into sheet indoor trueReciprocal of duty cycle reaches 800 handkerchiefs, enters sheet and slightly takes out chamber and enter the vacuum gas lock unlatching between sheet pre-vacuum chamber, glass piecesEntering sheet slightly enters into sheet pre-vacuum chamber the chamber of taking out;
4) glass pieces enters after sheet pre-vacuum chamber, enters sheet and slightly takes out chamber and enter the vacuum gas between sheet pre-vacuum chamberAfter lock cuts out, first converts the middle vacuum extraction valve vacuumizing in unit opens, and lobe pump is taken out in advance to entering sheetChamber continues to vacuumize, and makes into the vacuum in sheet pre-vacuum chamber and arrives 3 handkerchiefs, then the first conversion evacuatorThe first fine pumping valve in group is opened, and diffusion couple enters sheet pre-vacuum chamber to be continued to vacuumize, and makes into sheet and taking out in advanceIndoor vacuum 2X10-1Handkerchief, vacuum gas lock is opened, and glass pieces just enters into sheet transition chamber; .
5) glass pieces enters after sheet transition chamber, enters sheet pre-vacuum chamber and enters the vacuum gas between sheet transition chamberLock cuts out, and enters vacuum unit starting in sheet transition chamber, enters sheet transition chamber and enters the vacuum between sheet surge chamberGas lock stays open state, make into sheet transition chamber with enter sheet buffering plated film and be connected, glass pieces is to establishDetermine the speed of travel and enter into sheet surge chamber, now, the coated target entering in sheet surge chamber carries out plated film to workpiece;
6) glass pieces with set the speed of travel successively by entering sheet surge chamber, coating chamber and slice surge chamber,Thereby carry out continuous coating;
7) glass pieces out enters slice transition chamber, the vacuum machine of slice pre-vacuum chamber afterwards from slice surge chamberGroup starts, and makes the vacuum in slice pre-vacuum chamber arrive 2X10-1Handkerchief, slice transition chamber and slice pre-vacuum chamberBetween road vacuum gas lock open, glass pieces just enters in slice pre-vacuum chamber by the setting speed of travel;
8) glass pieces enters after slice pre-vacuum chamber, and slice is slightly taken out the vacuum unit starting of chamber, makes slice thickTake out indoor vacuum and arrive 800 handkerchiefs, the vacuum gas lock that slice pre-vacuum chamber and slice are slightly taken out between chamber is openedAfter, glass pieces just enters into slice by the setting speed of travel and slightly takes out indoor;
9) glass pieces enters slice and slightly takes out behind chamber, and slice pre-vacuum chamber and slice are slightly taken out the vacuum between chamberAfter gas lock is closed, be slightly filled with atmosphere in the chamber of taking out to slice, reach after the inflationtime of setting, slice is slightly taken out chamberAnd going out the vacuum gas lock unlatching between horse, glass pieces just enters into out horse by setting the speed of travel;
10) last, come off duty workpiece from go out horse out after successively by pan carriage, drench priming paint section, priming paintDrying section, lacquer painting leaching paint section, finish paint drying section, air-dry section, correction section and upper horse are to complete glazierThe plated film of part plating solar control film.
Above-mentioned each the mistake when operation of carrying out for glass pieces, the first conversion vacuumizes unit, the second conversionThe switching that vacuumizes unit and each vacuum gas lock is all controlled by PLC.
Above-mentioned detailed description of the invention is preferred embodiment of the present utility model, can not enter the utility modelRow limits, other any change that does not deviate from the technical solution of the utility model and make or other equivalenceSubstitute mode, within being included in protection domain of the present utility model.
Claims (8)
1. a multifunctional magnetic control sputtering automatic film coating production line, comprises successively the upper horse that connects, front clearWash machine, enter sheet transition frame, vacuum coater, go out horse, pan carriage, priming paint leaching paint chamber, priming paint floodBaking box, finish paint leaching paint chamber, finish paint baking box, finish paint hurricane drier, rear cleaning machine, correction frame and lower horse,It is characterized in that: described vacuum coater comprise successively connect enter sheet slightly take out chamber, enter sheet pre-vacuum chamber,Enter sheet transition chamber, enter sheet surge chamber, coating chamber, slice surge chamber, slice transition chamber, slice pre-vacuum chamberSlightly take out chamber with slice; Described enter sheet surge chamber and slice surge chamber be equipped with coated target; Described enter sheet take out in advanceChamber is provided with the first conversion and vacuumizes unit, and described slice pre-vacuum chamber is provided with the second conversion and vacuumizes unit; InstituteState into sheet transition chamber and enter between sheet surge chamber to be provided with into sheet gas deflation assembly described slice surge chamber and sliceBetween transition chamber, be provided with slice gas deflation assembly.
2. multifunctional magnetic control sputtering automatic film coating production line according to claim 1, is characterized in that:Described the first conversion vacuumizes unit and comprises vacuum in the first high vacuum pneumatic operated valve, the first diffusion pump, firstPneumatic operated valve, the first lobe pump and the first slide valve pump, described in enter sheet pre-vacuum chamber and be provided with the first fine pumping mouthWith first in vacuum pumping opening, described the first diffusion pump is by the first high vacuum pneumatic operated valve and the first high vacuumBleeding point connects, and described the first lobe pump is by vacuum pumping opening company in Pneumatic vacuum valve and first in firstConnect, described the first slide valve pump, the first lobe pump and the first diffusion pump are connected successively.
3. multifunctional magnetic control sputtering automatic film coating production line according to claim 1, is characterized in that:Described the second conversion vacuumizes unit and comprises vacuum in the second high vacuum pneumatic operated valve, the second diffusion pump, secondPneumatic operated valve, the second lobe pump and the second slide valve pump, described in enter sheet pre-vacuum chamber and be provided with the second fine pumping mouthWith second in vacuum pumping opening, described the second diffusion pump is by the second high vacuum pneumatic operated valve and the second high vacuumBleeding point connects, and described the second lobe pump is by vacuum pumping opening company in Pneumatic vacuum valve and second in secondConnect, described the second slide valve pump, the second lobe pump and the second diffusion pump are connected successively.
4. multifunctional magnetic control sputtering automatic film coating production line according to claim 1, is characterized in that:Described enter sheet gas deflation assembly comprise that first enters sheet blast pipe, second and enter sheet blast pipe and enter sheet conversion pneumatic operated valve,Described first one end of entering sheet blast pipe is stretched into after sheet transition chamber to enter by entering sheet conversion pneumatic operated valve and secondOne end of sheet blast pipe connects; Described first enters sheet blast pipe connects with the vavuum pump air inlet pipe of entering sheet transition chamberConnect, described second other end that enters sheet blast pipe stretches into after sheet buffering transition chamber and enters sheet buffering transition chamberVavuum pump air inlet pipe connect.
5. multifunctional magnetic control sputtering automatic film coating production line according to claim 1, is characterized in that:Described slice gas deflation assembly comprises the first slice blast pipe, the second slice blast pipe and slice conversion pneumatic operated valve,One end of described the first slice blast pipe is stretched into and is changed pneumatic operated valve and second by slice after slice transition chamber and go outOne end of sheet blast pipe connects; The vavuum pump escape pipe of described the first slice blast pipe and slice transition chamber connectsConnect, the other end of described the second slice blast pipe cushions transition chamber with slice after stretching into slice buffering transition chamberVavuum pump air inlet pipe connect.
6. multifunctional magnetic control sputtering automatic film coating production line according to claim 1, is characterized in that:Described enter sheet transition frame and enter sheet slightly take out between chamber, enter sheet slightly take out chamber and enter between sheet pre-vacuum chamber, to enter sheet pre-Take out chamber and enter between sheet transition chamber, enter sheet transition chamber and enter between sheet surge chamber, slice surge chamber and sliceBetween transition chamber, between slice transition chamber and slice pre-vacuum chamber, slice pre-vacuum chamber and slice slightly take out between chamberAnd slice slightly takes out chamber and goes out and be equipped with vacuum gas lock between horse, described vacuum gas lock comprise cylinder, tooth bar,Gear, rotating shaft, pivoted arm and jam plate, the expansion link of described cylinder is connected with tooth bar, described wheel and rackEngagement, and described gear is connected with pivoted arm by rotating shaft, and described pivoted arm is connected with jam plate.
7. multifunctional magnetic control sputtering automatic film coating production line according to claim 6, is characterized in that:The sealed end of described jam plate is provided with rubber seal.
8. multifunctional magnetic control sputtering automatic film coating production line according to claim 1, is characterized in that:Described enter sheet surge chamber comprise into sheet chamber body and enter sheet conveying assembly, described in enter sheet conveying assembly and be installed into sheetTi Nei bottom, chamber, is positioned at into the coated target of sheet surge chamber and is installed on into Ti Nei top, sheet chamber;
Described slice surge chamber comprises slice chamber body and slice conveying assembly, and described slice conveying assembly is installedTi Nei bottom, slice chamber, the coated target that is positioned at slice surge chamber is installed on Ti Nei top, slice chamber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520915429.3U CN205241783U (en) | 2015-11-16 | 2015-11-16 | Automatic coating film production line of multi -functional magnetron sputtering |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520915429.3U CN205241783U (en) | 2015-11-16 | 2015-11-16 | Automatic coating film production line of multi -functional magnetron sputtering |
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| CN205241783U true CN205241783U (en) | 2016-05-18 |
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| CN201520915429.3U Expired - Fee Related CN205241783U (en) | 2015-11-16 | 2015-11-16 | Automatic coating film production line of multi -functional magnetron sputtering |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105316635A (en) * | 2015-11-16 | 2016-02-10 | 肇庆市大力真空设备有限公司 | Multifunctional magnetron-sputtering automatic coating production line and coating method thereof |
| CN105970174A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Fast vacuum magnetic-control sputter coating equipment and machining method thereof |
| CN105970173A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Vacuum magnetic-control sputter coating equipment |
| CN105970172A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Simple horizontal magnetic-control coating equipment and coating method thereof |
| CN107365973A (en) * | 2017-08-29 | 2017-11-21 | 肇庆市前沿真空设备有限公司 | A kind of vacuum coating production line and film plating process |
| CN112410747A (en) * | 2020-10-15 | 2021-02-26 | 中国建材国际工程集团有限公司 | Coated glass production line with sectional type high-vacuum system and working method |
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- 2015-11-16 CN CN201520915429.3U patent/CN205241783U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105316635A (en) * | 2015-11-16 | 2016-02-10 | 肇庆市大力真空设备有限公司 | Multifunctional magnetron-sputtering automatic coating production line and coating method thereof |
| CN105316635B (en) * | 2015-11-16 | 2018-01-30 | 肇庆市大力真空设备有限公司 | A kind of multifunctional magnetic control sputtering automatic film coating production line and its film plating process |
| CN105970174A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Fast vacuum magnetic-control sputter coating equipment and machining method thereof |
| CN105970173A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Vacuum magnetic-control sputter coating equipment |
| CN105970172A (en) * | 2016-06-14 | 2016-09-28 | 肇庆市大力真空设备有限公司 | Simple horizontal magnetic-control coating equipment and coating method thereof |
| CN107365973A (en) * | 2017-08-29 | 2017-11-21 | 肇庆市前沿真空设备有限公司 | A kind of vacuum coating production line and film plating process |
| CN107365973B (en) * | 2017-08-29 | 2024-02-02 | 肇庆市德信真空设备有限公司 | Vacuum coating production line and coating method |
| CN112410747A (en) * | 2020-10-15 | 2021-02-26 | 中国建材国际工程集团有限公司 | Coated glass production line with sectional type high-vacuum system and working method |
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