CN201933147U - Experiment line of coated glass - Google Patents
Experiment line of coated glass Download PDFInfo
- Publication number
- CN201933147U CN201933147U CN2011200116387U CN201120011638U CN201933147U CN 201933147 U CN201933147 U CN 201933147U CN 2011200116387 U CN2011200116387 U CN 2011200116387U CN 201120011638 U CN201120011638 U CN 201120011638U CN 201933147 U CN201933147 U CN 201933147U
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- China
- Prior art keywords
- coated glass
- substrate frame
- rotary substrate
- coating chamber
- experiment line
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Abstract
The embodiment of the utility model relates to an experiment line of coated glass. A sputtering device of the experiment line adopts a rotary substrate frame and at least two pairs of twin targets, wherein the rotary substrate frame rotates under the drive of a power source, and the twin targets are used for coating sputtering. Therefore, when the rotary substrate frame rotates, the at least two pairs of twin targets are adopted to conduct coating sputtering, so that multiple pieces can be manufactured at the same time, or multiple layers of film samples can be manufactured at the same time, which greatly improves the production efficiency, shortens the preparation cycle and saves the cost.
Description
Technical field
The utility model relates to the glass industry field, relates in particular to a kind of coated glass experiment line.
Background technology
In the glass industry field, coated glass experiment line mainly is the method research and development small area that utilizes vacuum magnetic-control sputtering, the coated glass product of little output, its main application mode is according to the product processing requirement on glass, be coated with different metallic membranes or oxide film etc., to improve its optical property, coated glass is used for products such as indicating meter, opticglass.At present, coated glass experiment line mainly adopts the monomer magnetron sputtering coater to carry out coating operation, and it can realize the depositions on glass substrate such as AR film, semi-permeable mirror film and ito thin film.
The contriver finds that there is following technical problem at least in prior art in implementing the utility model process:
Because the monomer magnetron sputtering coater can only carry out plated film one time to sample, so sample needs at first to be transformed in the atmosphere behind a plated film, in the monomer magnetron sputtering coater that is equipped with good plated film condition next time, carry out the plated film under the vacuum environment next time again, therefore, the conversion of sample between vacuum and atmospheric condition is frequent, switching time, long and inefficiency prolonged the research and development product innovation cycle, had caused the increase of enterprise cost.
The utility model content
The utility model embodiment technical problem to be solved is, provides a kind of and can finish the various coated glass experiment line of making or carry out simultaneously the multilayer film sample making simultaneously, to enhance productivity, shortens preparation cycle, saves cost.
For solving the problems of the technologies described above, a kind of coated glass experiment line is provided, the vacuum extractor that comprises coating chamber, is arranged at the sputter equipment in the described coating chamber and links to each other with described coating chamber, described sputter equipment comprises the rotary substrate frame of placing sample, the propulsion source that drives described rotary substrate frame rotation, and at least two pairs are arranged at the twin target of described rotary substrate frame correspondence position.
Further, described rotary substrate frame is tubular and is arranged at described coating chamber middle part, and described twin target is positioned over the described rotary substrate frame outside.
Further, described vacuum extractor comprises sliding vane rotary pump, lobe pump and the molecular pump of cascade successively, and described molecular pump links to each other with described coating chamber.
Further, described twin target is connected with intermediate frequency power supply and powers.
Further, described propulsion source is a servomotor.
Technique scheme has following beneficial effect at least:
By a kind of coated glass experiment line is provided, its sputter equipment has adopted by the rotary substrate frame of drive power source rotation and the two secondary twin targets that are used for the plated film sputter at least, therefore, in the rotation of rotary substrate frame, adopt at least two secondary twin targets to carry out the plated film sputter, can finish various making simultaneously, perhaps carry out the multilayer film sample making simultaneously, improve production efficiency greatly, and shortened preparation cycle, saved cost; In addition, the triplex that adopts sliding vane rotary pump, lobe pump and molecular pump to form can significantly improve the vacuum tightness in the coating chamber; Adopt intermediate frequency power supply that twin target is powered, stable power can be provided, realize the stable sputter of target.
Description of drawings
Fig. 1 is the structural representation of the coated glass experiment line of the utility model embodiment.
Embodiment
With reference to Fig. 1 and Fig. 2, the utility model embodiment provides a kind of coated glass experiment line, the vacuum extractor that it mainly comprises coating chamber 1, is arranged at the sputter equipment in the coating chamber 1 and links to each other with coating chamber 1, wherein, sputter equipment comprises the rotary substrate frame 2 of placing sample, the propulsion source 3 that drives 2 rotations of rotary substrate frame, and at least two pairs are arranged at the twin target 4 of rotary substrate frame 2 correspondence positions.
In order further to improve the vacuum tightness of coating chamber, above-mentioned vacuum extractor can be made up of sliding vane rotary pump 5, lobe pump 6 and the molecular pump 7 of cascade successively, molecular pump 7 links to each other with coating chamber 1, generally adopts this vacuum extractor, can realize that vacuum tightness reaches 10E-4Pa in the coating chamber 1.
In order to realize the stable sputter of target, twin target 4 can be connected with intermediate frequency power supply and power.
As a kind of embodiment, above-mentioned propulsion source 3 can be servomotor or electric motor or hydraulic activator etc.
The above is an embodiment of the present utility model; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; can also make some improvements and modifications, these improvements and modifications also are considered as protection domain of the present utility model.
Claims (5)
1. a coated glass is tested line, the vacuum extractor that comprises coating chamber, is arranged at the sputter equipment in the described coating chamber and links to each other with described coating chamber, it is characterized in that, described sputter equipment comprises the rotary substrate frame of placing sample, the propulsion source that drives described rotary substrate frame rotation, and at least two pairs are arranged at the twin target of described rotary substrate frame correspondence position.
2. coated glass experiment line as claimed in claim 1 is characterized in that, described rotary substrate frame is tubular and is arranged at described coating chamber middle part, and described twin target is positioned over the described rotary substrate frame outside.
3. coated glass experiment line as claimed in claim 1 is characterized in that described vacuum extractor comprises sliding vane rotary pump, lobe pump and the molecular pump of cascade successively, and described molecular pump links to each other with described coating chamber.
4. coated glass experiment line as claimed in claim 1 is characterized in that described twin target is connected with intermediate frequency power supply and powers.
5. as each described coated glass experiment line in the claim 1 to 4, it is characterized in that described propulsion source is a servomotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200116387U CN201933147U (en) | 2011-01-15 | 2011-01-15 | Experiment line of coated glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200116387U CN201933147U (en) | 2011-01-15 | 2011-01-15 | Experiment line of coated glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201933147U true CN201933147U (en) | 2011-08-17 |
Family
ID=44444680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200116387U Expired - Lifetime CN201933147U (en) | 2011-01-15 | 2011-01-15 | Experiment line of coated glass |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201933147U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103374699A (en) * | 2012-04-26 | 2013-10-30 | 北京物华天宝镀膜科技有限公司 | Glass coating equipment |
-
2011
- 2011-01-15 CN CN2011200116387U patent/CN201933147U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103374699A (en) * | 2012-04-26 | 2013-10-30 | 北京物华天宝镀膜科技有限公司 | Glass coating equipment |
| CN103374699B (en) * | 2012-04-26 | 2015-12-02 | 北京物华天宝镀膜科技有限公司 | A kind of glass coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110817 |
|
| CX01 | Expiry of patent term |