CN201830472U - Coating and heating device for crucible - Google Patents
Coating and heating device for crucible Download PDFInfo
- Publication number
- CN201830472U CN201830472U CN2010205750995U CN201020575099U CN201830472U CN 201830472 U CN201830472 U CN 201830472U CN 2010205750995 U CN2010205750995 U CN 2010205750995U CN 201020575099 U CN201020575099 U CN 201020575099U CN 201830472 U CN201830472 U CN 201830472U
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- slurcam
- electric hot
- hot plate
- substrate
- crucible
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Abstract
The utility model provides a coating and heating device for a crucible, which can lead an electric heating plate to adjust the contacting state with the machined object automatically and further lead the machined object to obtain good heating effect. A carrier platform of the coating and heating device for crucible, used for placing the machined object, is provided with at least one pushing plate with the position being adjustable; and the surfaces of each pushing plate are provided with at least one first electric heating plate that can move relative to the pushing plate and a plurality of elastic components that are lined between each first electric heating plate and the pushing plate. When the pushing plate presses the machined object closely, each first electric heating plate can automatically adjust the position so as to keep the best contacting state with the machined object, thus leading the machined object to obtain the best heating effect.
Description
Technical field
The relevant a kind of heater of the utility model refers to a kind of contact condition that can make electric hot plate adjust itself and processing object automatically especially, and then makes processing object obtain the preferable heater that is subjected to thermal effect.
Background technology
Press, in the wafer growth process in order to the crucible of splendid attire molten silicon raw material, belong to fused silica or quartzy silica crucible more, similarly silica crucible is when the silicon raw material of splendid attire molten condition, the silicon raw material of its fusion forms silicon monoxide and oxygen because of directly contacting with the silica raw material of crucible to react, the back formation carborundum and the carbon monoxide of the reaction of graphite composition in wherein volatile silicon monoxide and the stove, carbon monoxide and with the melted silicon raw material reaction, form other volatility carbon monoxide and carbon.
For avoiding the silicon raw material to be subjected to the pollution of above-mentioned oxygen and carbon product; or with the reaction of various impurity (metals such as molybdenum, iron, copper, nickel) in silica crucible; how can be coated with a protective layer in the internal layer of crucible; directly contact with the crucible body with isolated silicon raw material, and provide a kind of to the impurity that the crucible body surface is evicted from and block.
The present temperature that must improve crucible itself before crucible coating protective layer earlier, so that carry out the operation of follow-up coating protective layer, and the method for raising crucible temperature is utilized the heating lamp heating, utilizes the baking box baking or is utilized heating plate directly to heat.
Wherein, utilize heating plate directly as shown in Figure 1 to the device of crucible body heating, the main microscope carrier that can be driven in rotation 12 that is provided with on a pedestal 11 is for placing crucible 20, be provided with a plurality of slurcams 13 in microscope carrier 12, all slurcam 13 configurations are one and surround shape, and can be distinctly towards crucible 20 relative displacements of microscope carrier 12 centers, and be provided with the electric hot plate 14 that at least one confession contacts with crucible 20 bodies at the interior plate face of each slurcam 13.
When crucible 20 be fixed in really microscope carrier 12 centers after, can distinctly adjust the position of crucible 20 slurcams 13, the electric hot plate 14 that is enclosed in relatively around the crucible 20 all can be contacted with crucible 20 bodies, in the hope of when all electric hot plates 14 operate, can reach the effect that makes crucible 20 thermally equivalents; And, cooperate to drive microscope carrier 12 rotations to increase the convenience of coating protective layer.
Yet, on take off in the middle of the heater shown in Figure 1 all electric hot plates 14 directly locking on affiliated slurcam 13, therefore be very easy to be subjected to slurcam 13 angular deflection own, or crucible 20 is placed the influence of angle and can't allow the electric hot plate 14 of same slurcam 13 inboards all contact with crucible 20 bodies, so that can't allow crucible 20 obtain the thermally equivalent effect of expection originally.Moreover the mode that the rotation of its microscope carrier 12 adopts manpower to rotate is operated, and is easier to become operating personnel's burden when practical operation relatively.
The utility model content
The technical problem that the utility model solved is promptly providing a kind of contact condition that can make automatic adjustment of electric hot plate and processing object, and then makes processing object obtain the preferable heater that is subjected to thermal effect.
The technical solution of the utility model is: a kind of heater, be provided with at least one slurcam of adjusting relative position one in order to the microscope carrier of placing processing object, and be provided with at least one first electric hot plate in the plate face of each slurcam; Each first electric hot plate can with affiliated slurcam relative displacement, and between each first electric hot plate and the slurcam under it, be lined with a plurality of elastic partss.
A kind of heater is provided with at least one slurcam of adjusting relative position one in order to the microscope carrier of placing processing object, is provided with at least one first electric hot plate in the plate face of each slurcam; This microscope carrier sees through a rotating shaft and is installed on the pedestal, is provided with a motor in this pedestal in addition, and is provided with one in order to constitute the transmission mechanism that motor and rotating shaft transmission connect.
Wherein, each first electric hot plate locks respectively on a substrate, and other has a plurality of guide pillars to be connected between each substrate and the slurcam; One end of each guide pillar is fixed on the substrate, and the end in addition of each guide pillar is arranged on the slurcam.
Should lock respectively on a substrate by each first electric hot plate, other has a plurality of guide pillars to be connected between each substrate and the slurcam; One end of each guide pillar utilizes screw to wear locking and fixes on the substrate, and the end in addition of each guide pillar sees through a bolt respectively and is arranged on the slurcam.
The table top of this microscope carrier is provided with at least one second electric hot plate for accepting the processing object.
Each first electric hot plate locks respectively on a substrate, and other has a plurality of guide pillars to be connected between each substrate and the slurcam; One end of each guide pillar is fixed on the substrate, and the end in addition of each guide pillar is arranged on the slurcam; The table top of microscope carrier is provided with at least one second electric hot plate for accepting the processing object.
This transmission mechanism is by the belt pulley that is fixedly arranged on respectively on rotating shaft and the motor force-output shaft, and the belt that is connected between the belt pulley is formed.
The beneficial effects of the utility model are: heater of the present utility model is provided with at least one slurcam of adjusting relative position one in order to the microscope carrier of placing processing object, in the plate face of each slurcam be provided with at least one can with first electric hot plate of slurcam relative displacement, and between each first electric hot plate and slurcam, be lined with a plurality of elastic partss.
And, can see through the contraction and the elastic force effect of elastic parts when pushing away plate when processing object overlays, each first electric hot plate is adjusted to automatically with processing object keeps best contact condition, and then can make processing object obtain the best thermal effect that is subjected to.
Moreover, the table top of this microscope carrier be provided with at least one can with second electric hot plate of microscope carrier relative displacement for accepting processing object, produce and be subjected to thermal effect in order to seeing through the bottom of second electric hot plate by processing object.
Above-mentioned microscope carrier can see through a rotating shaft and be installed on the pedestal, is provided with a motor in pedestal in addition, and is provided with a transmission mechanism in order to constitute the transmission connection of motor and rotating shaft; Make when revolution, transmission mechanism be can see through and rotating shaft and the rotation at any angle of microscope carrier do driven, the anglec of rotation can reach 0 ° ~ 360 ° and also can arbitrarily locate, for example can be just/contrary direction rotates to 45 ° or 90 ° even 180 ° or 270 ° of location, to adjust angle as the best, making things convenient for the processing object on the microscope carrier to carry out other procedure, and alleviate associative operation personnel's burden.
Description of drawings
Fig. 1 is an appearance assumption diagram of commonly using heater.
Fig. 2 is the Facad structure stereoscopic figure of the utility model one preferred embodiment.
Fig. 3 is the Facad structure figure of the utility model one preferred embodiment.
Fig. 4 is the assembling exploded view of the utility model first electric hot plate and slurcam.
Fig. 5 is the package assembly cutaway view of first electric hot plate and slurcam in the utility model.
Fig. 6 is the relative position schematic diagram of processing object and slurcam in the utility model.
Fig. 7 is the action schematic diagram of guide pillar in the utility model.
Fig. 8 is the structure stereoscopic figure of the utility model one preferred embodiment.
[figure number explanation]
11 pedestals; 12 microscope carriers; 13 slurcams; 14 electric hot plates; 20 crucibles; 30 processing objects; 40 microscope carriers; 41 rotating shafts; 50 slurcams; 51 substrates; 52 guide pillars; 53 screws; 54 bolts; 61 first electric hot plates; 62 second electric hot plates; 70 elastic partss; 80 pedestals; 91 motors; 92 transmission mechanisms; 921 belt pulleys; 922 belts.
Embodiment
As the Facad structure stereoscopic figure of Fig. 2 the utility model one preferred embodiment, shown in Figure 3, shown in the Facad structure figure of the utility model one preferred embodiment, heater of the present utility model is provided with at least one slurcam 50 of adjusting relative position one in order to the microscope carrier 40 of placing processing object 30, is provided with at least one first electric hot plate 61 in the plate face of each slurcam 50; It is characterized in that: each first electric hot plate 61 can with affiliated slurcam 50 relative displacements, and between each first electric hot plate 61 and the slurcam under it 50, be lined with a plurality of elastic partss 70.
Please cooperate simultaneously with reference to Fig. 4 and shown in Figure 5, above-mentioned each first electric hot plate 61 locks respectively on a substrate 51, and other has a plurality of guide pillars 52 to be connected between each substrate 51 and the slurcam 50; One end of each guide pillar 52 can utilize screw 53 directly to wear locking and fix on the substrate 51, the end in addition of each guide pillar 52 can see through a bolt 54 respectively and be arranged on the slurcam 50, to constitute being connected of substrate 51 and slurcam 50, but and make substrate 51 together be fixed on the substrate 51 first electric hot plate 61 can with slurcam 50 relative displacements (that is first electric hot plate, 61 tools float effect), can be constituted by the compression spring that is sheathed on the guide pillar 52 as for each elastic parts 70.
Heater of the present utility model promptly is fixed on processing object 30 on the microscope carrier 40 when using as shown in Figure 6, and cooperate will push away to plate 50 be adjusted to first electric hot plate 61 that makes on its plate face can with processing object 40 position contacting.And in the time will pushing away the relative positions that plate 50 is continued to move towards processing object 40 directions and adjust, as shown in Figure 7, can see through the contraction and the elastic force effect of elastic parts 70, each first electric hot plate 61 is adjusted to automatically with processing object 40 keeps best contact condition, and then can make processing object 40 obtain the best thermal effect that is subjected to.
Moreover as shown in Figure 3, heater of the present utility model can be further be provided with at least one second electric hot plate 62 for accepting processing object 30 in the table top of this microscope carrier 40, allows the bottom of processing object 40 produce to be subjected to thermal effect in order to seeing through second electric hot plate 62.
Please cooperate simultaneously with reference to Fig. 2 and shown in Figure 8, the microscope carrier 40 in the utility model can see through a rotating shaft 41 and be installed on the pedestal 80, is provided with a motor 91 in this pedestal 80 in addition, and is provided with a transmission mechanism 92 in order to constitute the transmission connection of motor 91 and rotating shaft 41.
Above-mentioned transmission mechanism 92 can be by the belt pulley 921 that is fixedly arranged on respectively on rotating shaft 41 and motor 91 force-output shafts, and the belt that is connected between the belt pulley 921 is formed; Make when motor 91 rotates, can see through transmission mechanism 92 and drive rotating shaft 41 and 360 ° of rotations of microscope carrier 40 dos, carry out other procedure to make things convenient for the processing object 30 on the microscope carrier 40, and alleviate associative operation personnel's burden.
Design by said structure; can obtain a kind of contact condition that can make automatic adjustment of electric hot plate and processing object; and then make processing object obtain the preferable heater that is subjected to thermal effect; outstanding when being fit to carry out protective layer coating operation as crucible; in order to improve the application of crucible temperature; not only can allow crucible body thermally equivalent really, more can alleviate operating personnel's burden relatively.
Claims (7)
1. crucible coating heater is provided with at least one slurcam of adjusting relative position one in order to the microscope carrier of placing processing object, is provided with at least one first electric hot plate in the plate face of each slurcam; It is characterized in that:
Each first electric hot plate can with affiliated slurcam relative displacement, and between each first electric hot plate and the slurcam under it, be lined with a plurality of elastic partss.
2. crucible coating heater is provided with at least one slurcam of adjusting relative position one in order to the microscope carrier of placing processing object, is provided with at least one first electric hot plate in the plate face of each slurcam; It is characterized in that:
This microscope carrier sees through a rotating shaft and is installed on the pedestal, is provided with a motor in this pedestal in addition, and is provided with one in order to constitute the transmission mechanism that motor and rotating shaft transmission connect.
3. crucible coating heater as claimed in claim 1 or 2 is characterized in that each first electric hot plate locks respectively on a substrate, and other has a plurality of guide pillars to be connected between each substrate and the slurcam; One end of each guide pillar is fixed on the substrate, and the end in addition of each guide pillar is arranged on the slurcam.
4. crucible coating heater as claimed in claim 1 or 2 is characterized in that should lock respectively on a substrate by each first electric hot plate, other has a plurality of guide pillars to be connected between each substrate and the slurcam; One end of each guide pillar utilizes screw to wear locking and fixes on the substrate, and the end in addition of each guide pillar sees through a bolt respectively and is arranged on the slurcam.
5. crucible coating heater as claimed in claim 1 or 2 is characterized in that the table top of this microscope carrier is provided with at least one second electric hot plate for accepting the processing object.
6. crucible coating heater as claimed in claim 1 or 2 is characterized in that each first electric hot plate locks respectively on a substrate, and other has a plurality of guide pillars to be connected between each substrate and the slurcam; One end of each guide pillar is fixed on the substrate, and the end in addition of each guide pillar is arranged on the slurcam; The table top of microscope carrier is provided with at least one second electric hot plate for accepting the processing object.
7. crucible coating heater as claimed in claim 2 is characterized in that this transmission mechanism is by the belt pulley that is fixedly arranged on respectively on rotating shaft and the motor force-output shaft, and the belt that is connected between the belt pulley is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205750995U CN201830472U (en) | 2010-10-25 | 2010-10-25 | Coating and heating device for crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205750995U CN201830472U (en) | 2010-10-25 | 2010-10-25 | Coating and heating device for crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201830472U true CN201830472U (en) | 2011-05-11 |
Family
ID=43968982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205750995U Expired - Fee Related CN201830472U (en) | 2010-10-25 | 2010-10-25 | Coating and heating device for crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201830472U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102310036A (en) * | 2011-07-04 | 2012-01-11 | 常州天合光能有限公司 | Silicone pad heating plate of crucible spraying and heating rotary table |
-
2010
- 2010-10-25 CN CN2010205750995U patent/CN201830472U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102310036A (en) * | 2011-07-04 | 2012-01-11 | 常州天合光能有限公司 | Silicone pad heating plate of crucible spraying and heating rotary table |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110511 Termination date: 20121025 |