CN212388102U - Mechanical gear transmission structure of electron beam evaporation table - Google Patents
Mechanical gear transmission structure of electron beam evaporation table Download PDFInfo
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- CN212388102U CN212388102U CN202021011528.6U CN202021011528U CN212388102U CN 212388102 U CN212388102 U CN 212388102U CN 202021011528 U CN202021011528 U CN 202021011528U CN 212388102 U CN212388102 U CN 212388102U
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Abstract
The utility model belongs to the technical field of electron beam evaporation stations, in particular to a mechanical gear transmission structure of an electron beam evaporation station, the following scheme is provided, which comprises an electron beam evaporation station, wherein the electron beam evaporation station is provided with a driving shaft for connecting an external power structure, one side of the electron beam evaporation station is fixedly provided with a protective seat in an isolated way, a protective cavity is arranged on the protective seat, one end of the driving shaft extends into the protective cavity, and a driving gear is fixedly sleeved in the driving shaft; the utility model discloses a transmission structure design of electron beam evaporation platform is simple ingenious, through starting the rotating electrical machines, can realize carrying out longitudinal movement to first speed governing gear and second speed governing gear, and when first speed governing gear or second speed governing gear and the different drive disk assembly of drive gear engaged with, can reach and drive gear pivoted speed also inequality, and then can realize that electron beam evaporation platform carries out the purpose of speed governing according to the user demand.
Description
Technical Field
The utility model relates to an electron beam evaporation table technical field especially relates to an electron beam evaporation table mechanical gear drive structure.
Background
The electron beam evaporation method is a method of vacuum evaporation coating, in which an evaporation material is directly heated by an electron beam under a vacuum condition to be vaporized and transported to a substrate, and condensed on the substrate to form a thin film. In the electron beam heating device, the heated substance is placed in a water-cooled crucible, so that the influence on the quality of the film caused by the reaction of the evaporation material and the crucible wall can be avoided, therefore, the electron beam evaporation deposition method can prepare high-purity films, and simultaneously, a plurality of crucibles can be arranged in the same evaporation deposition device to realize simultaneous or separate evaporation and deposit various different substances. By electron beam evaporation, any material can be evaporated, and different materials require different types of depletion to achieve the desired evaporation rate.
In the driving process of the existing electron beam evaporation table machine, an external power machine is required to drive the electron beam evaporation table machine, the output power rotating speed of the power machine cannot be adjusted, and further the problem that partial power is excessive in the mechanical power output process is directly caused.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a mechanical gear transmission structure of an electron beam evaporation table.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a mechanical gear transmission structure of an electron beam evaporation table comprises the electron beam evaporation table, a driving shaft used for being connected with an external power structure is arranged on the electron beam evaporation table, a protection seat is fixedly installed on one side of the electron beam evaporation table in an isolated mode, a protection cavity is formed in the protection seat, one end of the driving shaft extends into the protection cavity, a driving gear is fixedly sleeved in the protection cavity, an adjusting plate is connected to the inner wall of one side of the protection cavity in a longitudinal sliding mode, a first L-shaped plate and a second L-shaped plate are fixedly installed at the top and the bottom of the adjusting plate respectively, a first speed regulating gear is rotatably connected to one side of the second L-shaped plate, a second speed regulating gear is rotatably connected to one side of the first L-shaped plate, a driving motor is fixedly installed on one side of the adjusting plate, a driving wheel is fixedly installed on an output shaft of the driving motor, a driven wheel is fixedly installed on the circle center position, the utility model discloses a safety belt, including the action wheel, the outer side of action wheel and the outer side cover of following driving wheel are equipped with same hold-in range, one side fixed mounting of regulating plate has the connecting plate, one side fixed mounting of connecting plate has two fixed plates that the symmetry set up, the fixed nut that inlays is equipped with on the fixed plate, fixed mounting has the rotating electrical machines on the bottom inner wall in protection chamber, fixed mounting has the screw rod on the output shaft of rotating electrical machines, and the top of screw rod run through the inner circle of two nuts and with the inner circle fixed connection.
Preferably, the maintenance hole has been seted up to one side in protection chamber, and the downthehole guard plate that is equipped with that inlays of maintenance, the top and the equal fixed mounting in bottom of guard plate have the fixed block, threaded connection has two fixing bolt that the symmetry set up on the fixed block, and fixing bolt's one end extend to in the electron beam evaporation platform and with electron beam evaporation platform threaded connection, be convenient for open protection chamber through setting up the guard plate to when the mechanical component of protection intracavity goes wrong, can open protection chamber and maintain inside mechanical part.
Preferably, two limiting blocks which are symmetrically arranged are fixedly mounted on the inner wall of one side of the protection cavity and are respectively located above and below the connecting plate, and then the distance of the upper longitudinal movement and the lower longitudinal movement of the connecting plate can be limited by the aid of the two limiting blocks.
Preferably, the equal fixed mounting in one side of first L shaped plate and second L shaped plate has the slider, the one side inner wall fixed mounting in protection chamber has the slide rail, and two sliders all with slide rail sliding connection, utilize slider and slide rail can make first L shaped plate and second L shaped plate longitudinal movement keep firm, and can not take place the skew.
Preferably, a bearing is fixed on the inner wall of one side of the protection cavity, the driving shaft penetrates through an inner ring of the bearing and is fixedly connected with the inner ring of the bearing, and the bearing can be used for providing rotary support for the driving shaft.
In the utility model, when the driving shaft is required to be driven to rotate to provide driving force for the electron beam evaporation table, at the moment, the driving motor is started, the driving motor can respectively drive the first speed regulating gear and the second speed regulating gear to rotate under the transmission of the driving wheel and the driven wheel, when the rotating speed for driving the driving gear to rotate is adjusted according to actual use requirements, the rotating motor is started, the rotating motor can drive the screw rod to rotate, the screw rod is in threaded connection with the nut, so the connecting plate can be driven to move longitudinally, and the first speed regulating gear and the second speed regulating gear can be driven to rotate simultaneously when the connecting plate moves longitudinally, when the first speed regulating gear or the second speed regulating gear is respectively meshed with the driving gear, the rotating speeds of the driving gear are different, and the rotating speed of the driving shaft on the electron beam evaporation table can be adjusted according to the use requirement.
The utility model discloses a transmission structure design of electron beam evaporation platform is simple ingenious, through starting the rotating electrical machines, can realize carrying out longitudinal movement to first speed governing gear and second speed governing gear, and when first speed governing gear or second speed governing gear and the different drive disk assembly of drive gear engaged with, can reach and drive gear pivoted speed also inequality, and then can realize that electron beam evaporation platform carries out the purpose of speed governing according to the user demand.
Drawings
Fig. 1 is a schematic view of the overall structure of a mechanical gear transmission structure of an electron beam evaporation stage according to the present invention;
fig. 2 is a schematic partial structural view of a mechanical gear transmission structure of an electron beam evaporation stage according to the present invention in fig. 1;
fig. 3 is a schematic cross-sectional structural view of the mechanical gear transmission structure of the electron beam evaporation stage according to the present invention in fig. 2;
fig. 4 is a schematic diagram of the three-dimensional structure of the bolt in fig. 3 of the mechanical gear transmission structure of the electron beam evaporation stage according to the present invention.
In the figure: the electron beam evaporation device comprises an electron beam evaporation table 1, a protective seat 2, a protective plate 3, a fixed block 4, a fixed bolt 5, a protective cavity 6, an adjusting plate 7, a first L-shaped plate 8, a second L-shaped plate 9, a first speed regulating gear 10, a second speed regulating gear 11, a driving shaft 12, a driving gear 13, a driving motor 14, a driving wheel 15, a driven wheel 16, a synchronous belt 17, a connecting plate 18, a fixed plate 19, a screw rod 20, a rotating motor 21 and a nut 22.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Example one
Referring to fig. 1-4, an electron beam evaporation table mechanical gear transmission structure comprises an electron beam evaporation table 1, a driving shaft 12 for connecting an external power structure is arranged on the electron beam evaporation table 1, a protection seat 2 is fixedly installed on one side of the electron beam evaporation table 1 in an isolated manner, a protection cavity 6 is formed in the protection seat 2, one end of the driving shaft 12 extends into the protection cavity 6 and is fixedly sleeved with a driving gear 13, an adjusting plate 7 is longitudinally and slidably connected to the inner wall of one side of the protection cavity 6, a first L-shaped plate 8 and a second L-shaped plate 9 are respectively and fixedly installed at the top and the bottom of the adjusting plate 7, a first speed adjusting gear 10 is rotatably connected to one side of the second L-shaped plate 9, a second speed adjusting gear 11 is rotatably connected to one side of the first L-shaped plate 8, a driving motor 14 is fixedly installed at one side of the adjusting plate 7, and, the outer side of the driving wheel 15 and the outer side of the driven wheel 16 are sleeved with the same synchronous belt 17, one side of the adjusting plate 7 is fixedly provided with a connecting plate 18, one side of the connecting plate 18 is fixedly provided with two fixing plates 19 which are symmetrically arranged, the fixing plates 19 are fixedly embedded with nuts 22, the inner wall of the bottom of the protective cavity 6 is fixedly provided with a rotating motor 21, an output shaft of the rotating motor 21 is fixedly provided with a screw rod 20, and the top of the screw rod 20 penetrates through the inner rings of the two nuts 22 and is fixedly connected with the inner rings of the nuts 22.
Example two
The improvement is further based on the first embodiment: one side of the protection cavity 6 is provided with a maintenance hole, a protection plate 3 is embedded in the maintenance hole, fixed blocks 4 are fixedly arranged at the top and the bottom of the protection plate 3, two symmetrically arranged fixed bolts 5 are connected to the fixed blocks 4 in a threaded manner, one ends of the fixed bolts 5 extend into the electron beam evaporation table 1 and are in threaded connection with the electron beam evaporation table 1, the protection cavity 6 is convenient to open by arranging the protection plate 3, so that when a mechanical component in the protection cavity 6 has a problem, the protection cavity 6 can be opened to maintain the internal mechanical component, two symmetrically arranged limit blocks are fixedly arranged on the inner wall of one side of the protection cavity 6 and are respectively positioned above and below the connecting plate 18, the distance of the vertical movement of the connecting plate 18 can be limited by utilizing the two limit blocks, a slide block is fixedly arranged at one side of the first L-shaped plate 8 and the second L-shaped plate 9, the slide rail is fixedly installed on the inner wall of one side of the protection cavity 6, the two slide blocks are connected with the slide rail in a sliding mode, the first L-shaped plate 8 and the second L-shaped plate 9 can move longitudinally and stably through the slide blocks and the slide rail, the deviation cannot occur, a bearing is fixed on the inner wall of one side of the protection cavity 6, the driving shaft 12 penetrates through the inner ring of the bearing and is fixedly connected with the inner ring of the bearing, and the bearing can be used for providing rotating support for the driving shaft 12.
In this embodiment, when the driving shaft 12 needs to be driven to rotate to provide the driving force for the electron beam evaporation stage 1, the driving motor 14 is started, the driving motor 14 can respectively drive the first speed regulating gear 10 and the second speed regulating gear 11 to rotate under the transmission of the driving wheel 15 and the driven wheel 16, and when the rotating speed for driving the driving gear 13 to rotate is adjusted according to the actual use requirement, the rotating motor 21 is started, the rotating motor 21 can drive the screw rod 20 to rotate, and the screw rod 20 and the nut 22 are in threaded connection, so that the connecting plate 18 can be driven to longitudinally move, and the connecting plate 18 can simultaneously drive the first speed regulating gear 10 and the second speed regulating gear 11 to rotate when longitudinally moving, and when the first speed regulating gear 10 or the second speed regulating gear 11 is respectively meshed with the driving gear 13, the rotating speeds of the driving gear 13 are different, thereby achieving the purpose of adjusting the rotating speed of the driving shaft 12 on the electron beam evaporation table 1 according to the use requirement.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (5)
1. The utility model provides an electron beam evaporation table mechanical gear drive structure, includes electron beam evaporation table (1), its characterized in that, be provided with drive shaft (12) that is used for connecting outside power structure on electron beam evaporation table (1), the isolated fixed mounting in one side of electron beam evaporation table (1) has protection seat (2), and has seted up protection chamber (6) on protection seat (2), the one end of drive shaft (12) extends to in protection chamber (6) and the fixed cover is equipped with drive gear (13), vertical sliding connection has regulating plate (7) on the inner wall of one side of protection chamber (6), the top and the bottom of regulating plate (7) are fixed mounting respectively has first L shaped plate (8) and second L shaped plate (9), one side of second L shaped plate (9) is rotated and is connected with first speed governing gear (10), one side of first L shaped plate (8) is rotated and is connected with second speed governing gear (11), one side fixed mounting of regulating plate (7) has driving motor (14), fixed mounting has action wheel (15) on the output shaft of driving motor (14), equal fixed mounting has from driving wheel (16) on the one side centre of a circle position of first speed governing gear (10) and on the one side centre of a circle position of second speed governing gear (11), the outside of action wheel (15) and the outside cover from driving wheel (16) are equipped with same hold-in range (17), one side fixed mounting of regulating plate (7) has connecting plate (18), one side fixed mounting of connecting plate (18) has two fixed plates (19) that the symmetry set up, fixed the inlaying is equipped with nut (22) on fixed plate (19), fixed mounting has rotating electrical machines (21) on the bottom inner wall of protection chamber (6), fixed mounting has screw rod (20) on the output shaft of rotating electrical machines (21), and the top of the screw rod (20) penetrates through the inner rings of the two nuts (22) and is fixedly connected with the inner rings of the nuts (22).
2. The mechanical gear transmission structure of the electron beam evaporation table according to claim 1, wherein a maintenance hole is formed in one side of the protection cavity (6), a protection plate (3) is embedded in the maintenance hole, fixed blocks (4) are fixedly mounted at the top and the bottom of the protection plate (3), two symmetrically arranged fixing bolts (5) are connected to the fixed blocks (4) in a threaded manner, and one end of each fixing bolt (5) extends into the electron beam evaporation table (1) and is connected with the electron beam evaporation table (1) in a threaded manner.
3. The mechanical gear transmission structure of the electron beam evaporation stage according to claim 1, wherein two limiting blocks are symmetrically arranged and fixedly mounted on the inner wall of one side of the protection cavity (6), and the two limiting blocks are respectively located above and below the connecting plate (18).
4. The mechanical gear transmission structure of the electron beam evaporation table of claim 1, wherein a sliding block is fixedly installed on one side of each of the first L-shaped plate (8) and the second L-shaped plate (9), a sliding rail is fixedly installed on the inner wall of one side of the protection cavity (6), and both sliding blocks are slidably connected with the sliding rail.
5. The mechanical gear transmission structure of the electron beam evaporation table as claimed in claim 1, wherein a bearing is fixed on one side inner wall of the protection cavity (6), and the driving shaft (12) penetrates through and is fixedly connected with an inner ring of the bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021011528.6U CN212388102U (en) | 2020-06-04 | 2020-06-04 | Mechanical gear transmission structure of electron beam evaporation table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021011528.6U CN212388102U (en) | 2020-06-04 | 2020-06-04 | Mechanical gear transmission structure of electron beam evaporation table |
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| Publication Number | Publication Date |
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| CN212388102U true CN212388102U (en) | 2021-01-22 |
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| CN202021011528.6U Active CN212388102U (en) | 2020-06-04 | 2020-06-04 | Mechanical gear transmission structure of electron beam evaporation table |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114941125A (en) * | 2022-05-23 | 2022-08-26 | 无锡芯谱半导体科技有限公司 | Special planet carrier for electron beam evaporation table |
-
2020
- 2020-06-04 CN CN202021011528.6U patent/CN212388102U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114941125A (en) * | 2022-05-23 | 2022-08-26 | 无锡芯谱半导体科技有限公司 | Special planet carrier for electron beam evaporation table |
| CN114941125B (en) * | 2022-05-23 | 2024-04-02 | 无锡芯谱半导体科技有限公司 | Planet carrier special for electron beam evaporation table |
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