Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is base station, the electromagnet of tester substrate device, the structural representation of prober frame track;
Fig. 2 is the structural representation of existing prober frame;
Fig. 3 is the principle schematic that the middle rod of existing prober frame deforms;
Fig. 4 is the structural representation of the prober frame of the utility model embodiment one;
Fig. 5 is the housing of the prober frame of the utility model embodiment one, middle rod, the partial structurtes synoptic diagram when keel separate;
Fig. 6 be the utility model embodiment one prober frame in the middle of the part section structural representation of rod and the junction of housing;
Fig. 7 be another embodiment of the present utility model prober frame in the middle of the part section structural representation of rod and the junction of housing;
Fig. 8 is the structural representation of the prober frame of the utility model embodiment two;
Fig. 9 be the utility model embodiment two prober frame in the middle of the partial structurtes synoptic diagram of end of rod;
Figure 10 be the utility model embodiment two prober frame in the middle of the part section structural representation of rod and the junction of housing;
Wherein Reference numeral is: 1, base station; 2, electromagnet; 3, prober frame track; 4, housing; 5, middle rod; 6, first adjusting screw; 61, nut; 7, first fixed screw; 71, ring texture; 8, keel; 81, first plane; 9, second adjusting screw; 10, second fixed screw; 11, protuberance; 12, groove.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme of the utility model embodiment is clearly and completely described, obviously, described embodiment only is a part of embodiment of the present utility model, rather than whole embodiment.Based on the embodiment in the utility model, all other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work belong to the scope that the utility model is protected.
The utility model embodiment provides a kind of prober frame, comprising:
Be used for the housing that contacts with the prober frame track;
The middle rod that is used for linking probe;
The both ends of rod are connected with described housing by height adjustable structure in the middle of described, described height adjustable structure is used for adjusting along the short transverse of described prober frame the relative position of described middle rod and housing, the Surface Vertical of the short transverse of described prober frame and described substrate when substrate is tested.
Because rod is connected with housing by height adjustable structure in the middle of the prober frame of embodiment of the present utility model, so its height-adjustable with respect to prober frame, thereby the distance between probe and substrate is scalable also, so it can make probe and substrate form excellent contact.
Embodiment one
The utility model embodiment provides a kind of prober frame, and as Fig. 4, shown in Figure 5, it comprises rectangle housing 4, and two opposed side edges of housing 4 are used for contacting with the prober frame track.The both ends of middle rod 5 are connected the downside of these two sides respectively by height adjustable structure, the lower surface of this centre rod 5 is used to connect many probes.This height adjustable structure is used for adjusting along the short transverse of prober frame the relative position (excellent 5 height with respect to prober frame in the middle of promptly adjusting) of middle rod 5 and housing 4.Wherein the short transverse of prober frame is meant the vertical direction in plane with housing 4 whole places; That is to say, when liquid crystal display substrate is tested when being placed on the prober frame track (be about to prober frame) this short transverse should with the Surface Vertical of substrate (this sentences liquid crystal display substrate is example); Therefore, actual can the playing of height adjustable structure adjusted the effect of probe to the distance of liquid crystal display substrate, thereby guarantees to form excellent contact between probe energy and liquid crystal display substrate.
Preferably, height adjustable structure comprises first adjusting screw 6 that is used for adjusting along short transverse middle rod 5 and housing 4 relative positions.More preferably, height adjustable structure comprises also and being used for centre excellent 5 and housing 4 relatively-stationary fixed mechanisms that this fixed mechanism is preferably first fixed screw 7 (certainly, should have the hole of passing for these screws 6,7 in centre rod 5 and the housing 4).And stressed even in order to guarantee, the height adjustable structure of each end of middle rod 5 preferably all should comprise a plurality of equally distributed first adjusting screw 6 and first fixed screw 7.
Particularly, this first adjusting screw 6 can be many different forms with first fixed screw 7, regulates and fixing purpose thereby reach respectively.
For example, can be as shown in Figure 6, be used for the Kong Zhongwu screw thread that confession first adjusting screw 6 is passed in the housing 4, have the internal thread that mates with first adjusting screw 6 in the hole of passing for first adjusting screw 6 in the centre rod 5, thereby can adjust housing 4 and middle excellent 5 distance by rotating first adjusting screw 6; And all have the internal thread that matches in the hole of passing for first fixed screw 7 in housing 4 and the middle rod 5, thereby when first fixed screw 7 penetrates housing 4 and middle excellent 5 time simultaneously, they can be with housing 4 and middle excellent 5 relative fixed, and do not penetrate housing 4 and middle excellent 5 time simultaneously when first fixed screw 7, then can allow housing 4 and middle excellent 5 relative motions.
For another example, also can be as shown in Figure 7, the Kong Zhongjun that passes for first adjusting screw 6 in housing 4 and the middle rod 5 does not have screw thread, and below middle rod 5, have a nut 61 with first adjusting screw, 6 couplings, can adjust housing 4 and middle excellent 5 distance by setting nut 61, promptly limit the ultimate range of 5 of housing 4 and middle rods; And have internal thread with its coupling in the hole of passing for first fixed screw 7 in the housing 4, and also have on first fixed screw 7 and be positioned at housing 4 and middle excellent 5 ring texture 71, thereby when this ring texture 71 drops to middle excellent 5 upper surface position contacting, it can limit housing 4 and middle excellent 5 minor increment, thereby with housing 4 and middle excellent 5 relative fixed (rod 5 is limited between nut 61 and the ring texture 71 in the middle of being about to).
Obviously, externally threaded situation (as distributing position, direction, pitch etc.) on type (as bolt, screw rod, screw, nut etc.) by selecting screw, the screw, the situation (as distributing position, direction, pitch etc.) of internal thread etc. in the hole of housing 4 and middle rod 5, also can obtain first adjusting screw 6 and first fixed screw 7 of many different concrete forms, enumerate no longer one by one at this.
Preferably, as Fig. 4, shown in Figure 5, also have the distortion suppress structure that are used to restrain middle rod 5 distortion at the middle part of middle rod 5, this distortion suppress structure preferably includes the keel 8 (so-called rigidity is meant that the ability of these keel 8 resistances to deformation should be higher than the ability of middle excellent 5 resistances to deformation) of rigidity, the upper surface of these keel 8 is first plane 81, and this first plane 81 is used for contacting with middle rod 5.More preferably, keel 8 are restrained the adjustment structure by distortion and are connected with the middle part of middle rod 5, this distortion is restrained the adjustment structure and be can be used for along the middle rod 5 of short transverse adjustment of prober frame and the relative position of keel 8, it preferably has and the similar structure of height adjustable structure, promptly is made up of second adjusting screw 9 and second fixed screw 10.Owing to the distance of being out of shape 8 of supression adjustment Adjustable structure whole middle excellent 5 and keel, so when distortion is arched upward at middle excellent 5 middle parts, the adjustment structure is restrained in distortion can be with first plane 81 of middle rod 5 " pulling to " keel 8, it is attached on first plane 81 as far as possible, thereby middle rod 5 is played " aligning " effect, rod 5 deformation extent in the middle of reducing, rod 5 is more straight in the middle of making, in the middle of guaranteeing on the rod 5 probe at diverse location place can be simultaneously and liquid crystal display substrate form excellent contact.
In the time will testing, prober frame can be placed on the prober frame track, and open electromagnet, unclamp first fixed screw 7 afterwards, with first adjusting screw 6 middle rod 5 is adjusted to suitable position (as than housing 4 low about 2 millimeters positions), lock first fixed screw 7 again; Unclamp second fixed screw 10 on the keel 8 afterwards, adjust second adjusting screw 9 probe is contacted with pigtail splice on the liquid crystal display substrate, lock second fixed screw 10 again; To electromagnet outage, observe prober frame whether ANOMALOUS VARIATIONS takes place, as not then to the electromagnet energising and carry out resistance test, then continue to repeat above-mentioned adjustment process as resistance value is undesired, normally then can begin official testing as resistance value.
Obviously, the prober frame of present embodiment also can be carried out many variations.For example: middle rod 5 also can be connected the housing upside; Excellent 5 upsides in the middle of keel 8 also can be connected; The position of each adjusting screw 6,9 and fixed screw 7,10, quantity, size, concrete form etc. all can change; Adjusting screw 6,9 and fixed screw 7,10 also can be conditioned fixed screw and replace, the secured adjusted screw can comprise two sections external threads that pitch is different, be respectively applied for the internal thread coupling in the hole with middle rod 5 and housing 4 (or middle rod 5 and keel 8), thereby the distance in the middle of when fixed screw is regulated in rotation, can adjusting between rod 5 and housing 4 (or middle rod 5 and keel 8), and can be with middle rod 5 and housing 4 (or middle rod 5 and keel 8) relative fixed when this secured adjusted screw is motionless.
Embodiment two
The utility model embodiment provides a kind of prober frame, and it has and the similar structure of the prober frame of embodiment one, and difference is:
The first, the height adjustable structure of this prober frame is different with the height adjustable structure of embodiment one.As Fig. 8, Fig. 9, shown in Figure 10, the height adjustable structure of this prober frame does not have screw, but comprise the protuberance 11 that is located on the two side, middle excellent 5 end, and be located at being used on the housing 4 and hold a plurality of grooves 12 of protuberance 11, these grooves 12 are distributed on the diverse location along the short transverse of prober frame, thereby can adjust the relative position of middle rod 5 and housing 4 when the protuberance 11 of centre rod 5 inserts different grooves 12 on short transverse.
The second, have only keel 8 in the distortion suppress structure of this prober frame and be out of shape supression adjustment structure, these keel 8 and middle rod 5 are directly fixedlyed connected (as welding).Certainly, the keel structure of present embodiment also can be used in the prober frame of embodiment one.
Obviously, the prober frame of present embodiment also can be carried out many variations.For example: the position of protuberance 11 and groove 12 is interchangeable, and promptly protuberance 11 is located on the housing 4, and groove 12 is located on the two side of middle excellent 5 ends; In the middle of protuberance 11 can be positioned on the end face of rod 5 end (respective change is also wanted in the position of groove 12); The concrete shape of protuberance 11 and groove 12, quantity etc. all can change.
Obviously, the height adjustable structure in the prober frame of the various embodiments described above also can be other any form; But, promptly belong to protection domain of the present utility model as long as the middle rod of prober frame links to each other with housing by height adjustable structure.
The utility model embodiment provides a kind of tester substrate device, and it comprises above-mentioned prober frame.
Because the tester substrate device of embodiment of the present utility model comprises above-mentioned prober frame, so it can make probe and substrate form excellent contact.
Embodiment three
The utility model embodiment provides a kind of tester substrate device (as the liquid crystal display substrate proving installation), it comprises the base station that is used to place liquid crystal display substrate, an electromagnet is respectively arranged respectively outside the dual-side of base station, in the two electromagnet outside prober frame track is arranged respectively respectively, on the prober frame track, be placed with described prober frame as above-mentioned any one embodiment.
Obviously, the tester substrate device of the utility model embodiment also can carry out many variations.For example: middle rod can be connected with probe stationary, also can be to removably connect; In the middle rod lead can be arranged, also can not have; The tester substrate device also can comprise and is used to drive prober frame along driving mechanism of prober frame orbital motion etc.
The tester substrate device of present embodiment can be used for the thin film transistor array circuit on the array base palte is tested, be particularly useful for that (this moment, the quantity of the display panels that an array base palte will form was more to making the array base palte that the small size display panels uses, so required number of probes is also many, is easier to take place the probe loose contact) test.Certainly, the tester substrate device of present embodiment also can be used for the substrate of other type is tested.
The above; it only is embodiment of the present utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.