CN201807577U - On-line plasma cleaning machine - Google Patents
On-line plasma cleaning machine Download PDFInfo
- Publication number
- CN201807577U CN201807577U CN 201020258624 CN201020258624U CN201807577U CN 201807577 U CN201807577 U CN 201807577U CN 201020258624 CN201020258624 CN 201020258624 CN 201020258624 U CN201020258624 U CN 201020258624U CN 201807577 U CN201807577 U CN 201807577U
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- CN
- China
- Prior art keywords
- reaction warehouse
- connecting plate
- guide rail
- reaction
- loam cake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides an on-line plasma cleaning machine, which solves the problems that the existing equipment has low automation degree and can easily cause secondary pollution. The on-line plasma cleaning machine comprises a clamping and fixing device (16) of a lead frame carrier, a visual positioning system (17), an industrial control unit (18), a transmission system (20) and a vacuum lifting system (21) which are arranged in a machine frame (22) of the cleaning mechanism, wherein a door-shaped vertical plate support frame (1) and a guide rail (5) are arranged in the vacuum lifting system (21), a connecting plate is movably arranged on the guide rail (5) and is connected with a piston rod of the lifting air cylinder (4), a pair of L-shaped cantilevers (8) are fixedly arranged on a front panel of the connecting plate, a reaction cabin upper cover (3) is suspended on the end part of the L-shaped cantilevers (8), an air inlet valve (15) of plasma cleaning gas is arranged on the side wall of a reaction cabin, and a plasma radio frequency source is arranged in the reaction cabin. The secondary pollution in the cleaning process is avoided, and the finished product rate is improved.
Description
Technical field
The present invention relates to a kind of online plasma cleaner, particularly a kind of online plasma cleaner that adopts the dry method cleaning technique to clean the LED lead frame.
Background technology
LED (light emitting diode)) pollutants such as microparticle, organic matter and oxide on surface of lead frame surface can't adopt traditional cleaning method to remove, now adopt the radio frequency plasma cleaning technique, plasma cleaner is cleaning LED (light emitting diode)) be generally in batches during lead frame and carry out, there is the low secondary pollution problem that causes easily of automaticity in existing equipment.
Summary of the invention
The invention provides a kind of online plasma cleaner has solved existing equipment and has had the low secondary pollution problem that causes easily of automaticity.
The present invention overcomes the above problems by following scheme:
Online plasma cleaner, be included in the clamping and the fixture of the lead frame carrier that is provided with in the cleaning machine frame, vision positioning system, Industrial Control Computer, transmission system, the vacuum lifting system, it is characterized in that, in described vacuum lifting system, be provided with the riser support of a font, this riser support is provided with the guide rail of direction vertically, on guide rail, be movably set with connecting plate, the piston rod of the lifting cylinder on this connecting plate and the back side of riser support that is fixedly installed on a font links together, on the front panel of connecting plate, be set with the pair of L-shaped cantilever, be hung with the reaction warehouse loam cake in the end of L shaped cantilever, the reaction warehouse loam cake snaps together by sealing ring and reaction warehouse lower cover, reaction warehouse loam cake and reaction warehouse lower cover snapping anabolic reaction storehouse, the reaction warehouse loam cake is provided with Pneumatic corner valve, in reaction warehouse, be provided with the positive source plate, the positive source leading-in end that is provided with on the sidewall of positive source plate and reaction warehouse is fixed together, the sidewall of reaction warehouse is provided with the intake valve of plasma purge gas, between the madial wall of positive source plate and reaction warehouse, be provided with the insulation strip of separate power supplies both positive and negative polarity, reaction warehouse is provided with vacuum measuring gauge, is provided with the plasma radiofrequency source in the reaction warehouse.
The piston rod of described lifting cylinder is provided with buffer, and the connecting plate below the reaction warehouse is provided with safety pin.
Transmission system, comprise deck plate, the material toggling sheet transmission assembly that fixedly installs at the left end of deck plate, the first reaction warehouse transmission assembly that fixedly installs at the right-hand member of deck plate, the first reaction warehouse transmission assembly is provided with on first cylinder and pushes away assembly, described material toggling sheet transmission assembly comprises material toggling sheet transmission assembly support, on material toggling sheet transmission assembly support, be set with the horizontal longitudinal rail of fore-and-aft direction, horizontal longitudinal rail is provided with first slide block, front end at horizontal longitudinal rail is provided with the preamble belt wheel and first drive motors, be provided with the back synchronous pulley in the rear end of horizontal longitudinal rail, the preamble belt wheel is connected with first slide block with the synchronous band of back between the synchronous pulley and drives its front and back slip on horizontal longitudinal rail, the right flank of first slide block is fixedly connected with L bracket, on L bracket, be set with the horizontal cross guide rail of left and right directions, left end at the horizontal cross guide rail is set with the left synchronous pulley and second drive motors, right-hand member at the horizontal cross guide rail is set with right synchronous pulley, the synchronous band that is provided with between left synchronous pulley and right synchronous pulley links together with second slide block that is provided with on the horizontal cross guide rail, on second slide block, be set with L shaped suspension bracket, be provided with the gas pawl in the bottom of L shaped suspension bracket; The described first reaction warehouse transmission assembly comprises reaction warehouse transmission assembly support, reaction warehouse transmission assembly support is provided with the transmission guide rail of fore-and-aft direction, synchronous pulley behind reaction warehouse preamble belt wheel that is provided with respectively at the two ends of transmission guide rail and the reaction warehouse, synchronous pulley and the 3rd drive motors link together behind the reaction warehouse, transmission guide rail is provided with the 3rd movable slide block, on a side of the 3rd slide block, be fixed with connecting plate, on connecting plate, be set with the lifting cylinder of above-below direction, on the output shaft of lifting cylinder, be set with the reaction warehouse raising board, on connecting plate, also be provided with reaction warehouse guide rail and slide block.
The clamping of lead frame carrier and fixture, comprise frame, the loading and unloading platform assembly that on frame, is provided with, before and after on the frame in the left side of loading and unloading platform assembly, be provided with navigation system and transit bridge accordingly, described navigation system is by the X-axis module, Y-axis module and Z axle module are formed, on described frame, be set with the support of X-axis module, support is provided with the X-axis horizontal guide rail of left and right directions, above the X-axis horizontal guide rail, be provided with first leading screw that drives by the first leading screw drive motors, first leading screw links together with the base plate of the L shaped X-axis slide block that can slide on the X-axis horizontal guide rail, on the riser of L shaped X-axis slide block, be fixedly connected with the Z axle vertical guide rail of above-below direction, Z axle vertical guide rail is provided with second leading screw that is driven by the second leading screw drive motors, second leading screw links together with the Z axle slide block that can slide on Z axle vertical guide rail, the back side at Z axle vertical guide rail is provided with down L bracket, falling the Y-axis horizontal guide rail that is provided with fore-and-aft direction between L bracket and the Z axle slide block, the Y-axis horizontal guide rail is provided with the 3rd leading screw that is driven by the 3rd leading screw drive motors, the 3rd leading screw links together with the Y-axis slide block that can slide on the Y-axis horizontal guide rail, the Y-axis slide block be connected with clamping device by the side, clamping device is by supporting plate, cylinder and T shape fixed mount are formed, the base of cylinder is fixed on the supporting plate, one end of the output shaft of cylinder and T shape fixed mount links together, the other end of T shape fixed mount is provided with hinge axis, and an end that clamps articulation block is hinged by the other end of hinge axis and T shape fixed mount.
The present invention has satisfied the cleaning to the LED lead frame surface, has overcome the secondary pollution in the cleaning process, has improved yield rate.
Description of drawings
Fig. 1 is a general structure schematic diagram of the present invention
Fig. 2 is the structural representation of vacuum lifting assembly of the present invention
Fig. 3 is the structural representation of the upper cover body of vacuum lifting assembly of the present invention
The specific embodiment
The present invention will be described below in conjunction with accompanying drawing:
Online plasma cleaner, be included in the clamping and the fixture 16 of the lead frame carrier that is provided with in the cleaning machine frame 22, vision positioning system 17, Industrial Control Computer 18, transmission system 20, vacuum lifting system 21, in described vacuum lifting system 21, be provided with the riser support 1 of a font, this riser support 1 is provided with the guide rail 5 of direction vertically, on guide rail 5, be movably set with connecting plate, the piston rod of the lifting cylinder 4 on this connecting plate and the back side of riser support 1 that is fixedly installed on a font links together, on the front panel of connecting plate, be set with pair of L-shaped cantilever 8, be hung with reaction warehouse loam cake 3 in the end of L shaped cantilever 8, reaction warehouse loam cake 3 snaps together by sealing ring 7 and reaction warehouse lower cover 2, reaction warehouse loam cake 3 and reaction warehouse lower cover 2 snapping anabolic reaction storehouses, reaction warehouse loam cake 3 is provided with Pneumatic corner valve 13, in reaction warehouse, be provided with positive source plate 12, the positive source leading-in end 14 that is provided with on the sidewall of positive source plate 12 and reaction warehouse is fixed together, the sidewall of reaction warehouse is provided with the intake valve 15 of plasma purge gas, between the madial wall of positive source plate 12 and reaction warehouse, be provided with the insulation strip 11 of separate power supplies both positive and negative polarity, reaction warehouse is provided with vacuum measuring gauge 10, is provided with the plasma radiofrequency source in the reaction warehouse.
The piston rod of described lifting cylinder 4 is provided with buffer 6, and the connecting plate below the reaction warehouse is provided with safety pin 9.
Claims (2)
1. online plasma cleaner, be included in the clamping and the fixture (16) of the lead frame carrier that is provided with in the cleaning machine frame (22), vision positioning system (17), Industrial Control Computer (18), transmission system (20), vacuum lifting system (21), it is characterized in that, in described vacuum lifting system (21), be provided with the riser support (1) of a font, this riser support (1) is provided with the guide rail of direction (5) vertically, on guide rail (5), be movably set with connecting plate, the piston rod of the lifting cylinder (4) on this connecting plate and the back side of riser support (1) that is fixedly installed on a font links together, on the front panel of connecting plate, be set with pair of L-shaped cantilever (8), be hung with reaction warehouse loam cake (3) in the end of L shaped cantilever (8), reaction warehouse loam cake (3) snaps together by sealing ring (7) and reaction warehouse lower cover (2), reaction warehouse loam cake (3) and reaction warehouse lower cover (2) snapping anabolic reaction storehouse, reaction warehouse loam cake (3) is provided with Pneumatic corner valve (13), in reaction warehouse, be provided with positive source plate (12), the positive source leading-in end (14) that is provided with on the sidewall of positive source plate (12) and reaction warehouse is fixed together, the sidewall of reaction warehouse is provided with the intake valve (15) of plasma purge gas, between the madial wall of positive source plate (12) and reaction warehouse, be provided with the insulation strip (11) of separate power supplies both positive and negative polarity, reaction warehouse is provided with vacuum measuring gauge (10), is provided with the plasma radiofrequency source in the reaction warehouse.
2. a kind of online plasma cleaner according to claim 1 is characterized in that the piston rod of described lifting cylinder (4) is provided with buffer (6), and the connecting plate below the reaction warehouse is provided with safety pin (9).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201020258624 CN201807577U (en) | 2010-07-12 | 2010-07-12 | On-line plasma cleaning machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201020258624 CN201807577U (en) | 2010-07-12 | 2010-07-12 | On-line plasma cleaning machine |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201807577U true CN201807577U (en) | 2011-04-27 |
Family
ID=43890526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201020258624 Expired - Lifetime CN201807577U (en) | 2010-07-12 | 2010-07-12 | On-line plasma cleaning machine |
Country Status (1)
Country | Link |
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CN (1) | CN201807577U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101890414A (en) * | 2010-07-12 | 2010-11-24 | 中国电子科技集团公司第二研究所 | Online plasma cleaner |
-
2010
- 2010-07-12 CN CN 201020258624 patent/CN201807577U/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101890414A (en) * | 2010-07-12 | 2010-11-24 | 中国电子科技集团公司第二研究所 | Online plasma cleaner |
CN101890414B (en) * | 2010-07-12 | 2012-01-11 | 中国电子科技集团公司第二研究所 | Online plasma cleaner |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20110427 Effective date of abandoning: 20120111 |