CN201736219U - Accurate-positioning sputtering manipulator - Google Patents
Accurate-positioning sputtering manipulator Download PDFInfo
- Publication number
- CN201736219U CN201736219U CN2010201250482U CN201020125048U CN201736219U CN 201736219 U CN201736219 U CN 201736219U CN 2010201250482 U CN2010201250482 U CN 2010201250482U CN 201020125048 U CN201020125048 U CN 201020125048U CN 201736219 U CN201736219 U CN 201736219U
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- cover plate
- motor
- sputtering
- cylinder
- positioning
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Abstract
The utility model discloses an accurate-positioning sputtering manipulator which comprises a motor and a motor sleeve arm connected with the motor; the motor drives the motor sleeve arm to rotate, cylinder blocks are distributed along the periphery of the motor sleeve arm with equal interval, a cylinder is mounted on each cylinder block, the piston rod of each cylinder is arranged vertically, a cover plate with a vacuum suction nozzle for taking and placing a compact disc is detachably mounted on each piston rod, the piston rod has vertical lifting movement under the cylinder effect, the manipulator also comprises a positioning fixture for positioning the mounting position of each cover plate, the positioning fixture comprises a base and a mounting hole machined in the center of the base, a casing of the motor is accommodated in the mounting hole of the positioning fixture, station holes in one-to-one correspondence with the cover plates are machined on the base, the station holes are distributed in equal aperture and interval manner, the aperture of each station hole is more than the diameter of each cover plate, the mounting positions of the cover plates are adjusted to make the cover plates be accommodated in the station holes in one-to-one correspondence, so as to position the mounting positions of the cover plates. The accurate-positioning sputtering manipulator greatly improves the productivity of a compact disc product line, also ensures the quality and has low production cost.
Description
Technical field
The utility model relates to a kind of precise positioning and sputtering-coating mechanical arm, relates in particular to the sputtering-coating mechanical arm arm asymmetry problem that a kind of positioning fixture improves sputter unit in the compact disc production line.
Background technology
Optical storage medium is from CD to DVD, develop into the BD Blu-ray Disc now, in order to increase the canned data capacity, will constantly reduce the size of information record symbol, this just requires the employed wavelength that reads and write down light wave to shorten gradually, and numerical aperture (NA) value that reads object lens continues to increase, so the 650nm of the wavelength that optical storage medium (CD) uses from the 780nm of CD to DVD, developing into the BD Blu-ray Disc, then to have adopted wavelength be the blue laser of 405nm, and the numerical aperture NA value of object lens from CD 0.45 to DVD 0.6, then reached 0.85 NA value to BD Blu-ray Disc object lens.
We can see the continuous expansion along with the optical storage medium information capacity from above-mentioned optical storage medium, its production technology of producing optical storage medium is also flourish, is that example describes with the CD video disc production system of production BD50 and the CD video disc production system of DVD9 down.
Introduce a kind of production BD50 video disc system: inject the thick substrate of 1.1mm after the cooling of cooling belt by injection machine, carry out the total reflection layer sputter, then the glue layer of spin coating 23um; UV solidifies, and the glue duplicating layer of spin coating 2um enters die arrangement then; the Copy Info layer carries out the semi-reflective layer sputter, then the cover layer of spin coating 75um then; UV solidifies; the protective layer of spin coating 2um then, UV solidifies, anti-dish; sputter SiN watertight composition, online detection and classification store.And the another kind of typical DVD9 video disc system that produces comprises: by the L0 substrate of an injection machine manufacturing DVD9, another injection machine is made the L1 substrate of DVD9, in two sputter stations, L0 is the sputter semi-reflective layer in a sputter station, L1 is the sputter total reflection layer in another sputter station, the applied layer of adhesive of LI video disc in the adhesive coating station, be sent to bonder subsequently, L0 and L1 video disc are bonded together, this bonder comprises the bonded assemblies that has the eccentric function of automatic adjustment and apply high voltage electrostatic device, dries glue then, and UV solidifies, be bonded as complete DVD video disc, store by online detection and finished product classification at last.
Development along with the CD industry, factors such as the production efficiency of compact disc production line, apparatus for production line input cost become the matter of utmost importance that each optical disc production merchant is concerned about, fast production efficiency is except needs solve the technology of above-mentioned each key link, the high speed of CD video disc, stable, accurately transfer system is also most important, becomes a very important technology modules.The transmission of CD video disc has been applied in the whole compact disc production line and has affected the layout of compact disc production line and performance etc., further influences performance, quality and production efficiency of CD or the like.A kind of transfer robot that is used for transmitting the CD video disc is used compact disc production line widely.
The manipulator that transmits the CD video disc with being used in the sputter unit is described further.For the ease of understanding, hereinafter this manipulator is referred to as sputtering-coating mechanical arm.Sputtering-coating mechanical arm 1 ' is made up of motor 11 ', motor cover arm 12 ', cylinder block 13 ', cylinder 14 ', cover plate 15 ' etc., concrete its annexation can be referring to accompanying drawing 1, sputtering-coating mechanical arm 1 ' is being born the effect of transmitting the CD video disc, and the center vacuum suction nozzle of the cover plate 15 ' that concrete is by sputtering-coating mechanical arm 1 ' is finished the taking and placing of video disc.Therefore, whether sputtering-coating mechanical arm 1 ' upper cover plate 15 ' position suitable can directly have influence on the quality of production technology.
Common, cover plate 15 ', cylinder 14 ', cylinder block 13 ' overlap between the arm 12 ' with motor and almost are connected (arm that cover plate, cylinder, cylinder block have been formed sputtering-coating mechanical arm) by screw.After sputtering-coating mechanical arm 1 ' assembling finishes, tending to occur with motor 11 ' is the center, cover plate 15 ' the asymmetric situation of two taking and placing video discs, like this, the deviation that can cause sputtering-coating mechanical arm 1 ' taking and placing video discs, also the dish phenomenon can occur falling when serious, and then influence the effect of the follow-up sputter of CD, also influence the quality, production efficiency of CD etc.
At present, the adjustment instrument of sputtering-coating mechanical arm arm upper cover plate position mainly is by range estimation, waits with height gauge and common video disc and adjusts.Though and the simple technical merit that still relies on the operator fully of existing visual inspection techniques is difficult to the effect that guarantees that cover plate is regulated.In the debug process of sputtering-coating mechanical arm, utilizing height gauge is that the level that can finish cover plate is regulated basically, but can't guarantee the symmetry of cover plate.
Therefore, be badly in need of a kind of precise positioning and sputtering-coating mechanical arm, this device is the position of improving the cover plate of the sputtering-coating mechanical arm in the compact disc production line by a kind of positioning fixture, is in the suitable position of expection to ensure cover plate; This device is when improving the production efficiency of compact disc production line and guarantee that the quality of production and cost are low.
The utility model content
When the purpose of this utility model is to provide a kind of production efficiency that can improve compact disc production line and guarantee the quality of production and the low precise positioning and sputtering-coating mechanical arm of cost.
For achieving the above object, the technical solution of the utility model is: a kind of precise positioning and sputtering-coating mechanical arm is provided, the motor cover arm that comprises motor and be connected with motor, the rotation of the described motor cover of described motor-driven arm, overlap the arm isometrical equally spaced cylinder block that is distributed with all around along described motor, on each described cylinder block cylinder is installed all, the piston rod of described cylinder vertically is provided with, the cover plate that is used for the taking and placing CD with vacuum slot removably is installed on the described piston rod, piston rod is done the vertical lifting motion under the effect of cylinder, also comprise the positioning fixture that cover plate is carried out the location, installation site, described positioning fixture comprises base, the centre of described base offers installing hole, the shell of described motor is located in the installing hole of described positioning fixture, offer on the described base and described cover plate station hole one to one, described station hole is the isometrical distribution equally spacedly in center with described installing hole, the aperture in described station hole is greater than the diameter of described cover plate, the installation site of regulating described cover plate is contained in the described station hole described cover plate one to one, realizes the location to the cover plate installation site.
Preferably, also comprise screw, offer the installation aperture that passes for screw on the described base, described installation aperture is the isometrical distribution in center with described installing hole, and described positioning fixture is fixed by the shell of described screw and described motor.Except that macropore adopt to be installed, also motor to be fixed with the installation aperture, firm whole sputtering-coating mechanical arm makes going on that production can be steady, safe.
Preferably, the difference of the diameter of the aperture in described station hole and described cover plate is less than 0.05 millimeter.Avoid the station hole excessive and pass when causing cover plate to descend, guaranteed the accurate cooperation in cover plate and station hole again, can adjust the symmetry of the sputtering-coating mechanical arm mechanical arm of having good positioning rapidly and accurately.
Compared with prior art, because the motor cover arm that the utility model comprises motor and is connected with motor, the rotation of the described motor cover of described motor-driven arm, overlap the arm isometrical equally spaced cylinder block that is distributed with all around along described motor, on each described cylinder block cylinder is installed all, the piston rod of described cylinder vertically is provided with, the cover plate that is used for the taking and placing CD with vacuum slot removably is installed on the described piston rod, piston rod is done the vertical lifting motion under the effect of cylinder, also comprise the positioning fixture that cover plate is carried out the location, installation site, described positioning fixture comprises base, the centre of described base offers installing hole, the shell of described motor is located in the installing hole of described positioning fixture, offer on the described base and described cover plate station hole one to one, described station hole is the isometrical distribution equally spacedly in center with described installing hole, the aperture in described station hole is greater than the diameter of described cover plate, the installation site of regulating described cover plate is contained in the described station hole described cover plate one to one, realizes the location to the cover plate installation site; The utility model precise positioning and sputtering-coating mechanical arm, it is the position of adopting a kind of positioning fixture to improve the cover plate of the sputtering-coating mechanical arm in the compact disc production line, this positioning fixture can ensure that cover plate is in the suitable position of expection, guaranteed the accurate cooperation in cover plate and station hole, can adjust the symmetry of the cover plate of the sputtering-coating mechanical arm of having good positioning rapidly and accurately, overcome the deviation of sputtering-coating mechanical arm taking and placing video discs and fallen the dish phenomenon, thereby influence the effect of the follow-up sputter of CD, also influence quality, production efficiency of CD etc.In addition because the utility model precise positioning and sputtering-coating mechanical arm when can improve the production efficiency of compact disc production line and guarantee that the quality of production and cost are low.
Description of drawings
Fig. 1 is the structural representation of existing sputtering-coating mechanical arm.
Fig. 2 is the structural representation of the embodiment of existing sputtering-coating mechanical arm.
Fig. 3 is the front view of positioning fixture in the utility model precise positioning and sputtering-coating mechanical arm.
Fig. 4 is the cutaway view of the utility model precise positioning and sputtering-coating mechanical arm along A-A line among Fig. 3.
Fig. 5 is the structural representation of the utility model precise positioning and sputtering-coating mechanical arm.
Fig. 6 is the structural representation of the embodiment of the utility model precise positioning and sputtering-coating mechanical arm.
The specific embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.
As shown in Figure 5, the utility model precise positioning and sputtering-coating mechanical arm 1, the motor cover arm 12 that comprises motor 11 and be connected with motor 11, described motor 11 drives 12 rotations of described motor cover arm, overlap the arm 12 isometrical equally spaced cylinder block 13 that is distributed with all around along described motor, on each described cylinder block 13 cylinder 14 is installed all, the piston rod 15 of described cylinder 14 vertically is provided with, the cover plate that is used for taking and placing CD 100 16 with vacuum slot 150 removably is installed on the described piston rod 15, piston rod 15 is done the vertical lifting motion under the effect of cylinder 14, also comprise the positioning fixture 20 that cover plate 16 is carried out the location, installation site, described positioning fixture 20 comprises base 21, the centre of described base 21 offers installing hole 23, the shell of described motor 11 is located in the installing hole 23 of described positioning fixture 20, offer on the described base 21 and described cover plate 16 station hole 22 one to one, described station hole 22 is the isometrical distribution equally spacedly in center with described installing hole 23, the aperture in described station hole 22 is greater than the diameter of described cover plate 16, the installation site of regulating described cover plate 16 is contained in the described station hole 22 described cover plate 16 one to one, realizes the location to cover plate 16 installation sites.
In conjunction with Fig. 3 and shown in Figure 4, also comprise screw, offer the installation aperture 231 that passes for screw on the described base 21, described installation aperture 231 is the isometrical distribution in center with described installing hole 23, and described positioning fixture 20 is fixed by the shell of described screw and described motor 11.Except that macropore 232 adopt to be installed, also to fix with 231 pairs of motors 11 of installation aperture, firm whole sputtering-coating mechanical arm makes going on that production can be steady, safe.
The preferably, the difference of the aperture in described station hole 22 and the diameter of described cover plate 16 is less than 0.05 millimeter.Avoid station hole 22 excessive and pass when causing cover plate 16 to descend, guaranteed the accurate cooperation in cover plate 16 and station hole 22 again, can adjust the symmetry of the sputtering-coating mechanical arm mechanical arm of having good positioning rapidly and accurately.
The localization method of precise positioning and sputtering-coating mechanical arm described in the utility model comprises the steps:
(S001) described positioning fixture is installed on described motor;
(S002) installation site of the described cover plate of adjusting is contained in the station hole of described positioning fixture described cover plate one to one;
(S003) rotating described motor cover arm arbitrarily turns an angle;
(S004) allow described cover plate be contained in one to one in the described station hole once more;
(S005) described positioning fixture of dismounting and fixing described cover plate;
Preferably, described step (S004) further comprises the steps:
Whether (S401) detect described cover plate is contained in the described station hole once more one to one;
If then continue execution in step (S005);
If not, execution in step (S002) to the step (S003) that then circulates is contained in the described station hole once more one to one until described cover plate;
Particularly, in conjunction with Fig. 3-Fig. 6,12 rotations of motor 11 drive motors cover arm, motor cover arm 12 drives cylinder block 13, the drive cylinder 14 that cylinder block 13 is synchronous, cylinder 14 drive piston rods 15 and coupled cover plate 16 rotations and drop in the station hole 22, and electric rotating machine cover arm 12 turns an angle arbitrarily, allow cover plate 16 descend once more and also be contained in one to one in the station hole 22, with balance and the symmetry of guaranteeing cover plate 16; Compact disc substrate 100 by the injection machine injection mo(u)lding (can cool off in transport process) after transmission disk apparatus 200 sends, and vacuum slot 150 absorption on the cover plate 16 transmit the compact disc substrate on the disk apparatus 200; Rotate this cover plate 180 degree, and compact disc substrate 100 is sent on the sputter rotating disk, the rotation of sputter rotating disk is also sent into compact disc substrate 100 and is carried out sputter in the sputter machine 300; In sputter machine 300, detect, dry and clear up after sputter is shaped and to it; The sputter rotating disk rotates and CD 100 is sent outside the sputter machine 300, CD 100 on the vacuum slot 150 absorption sputter rotating disks at cover plate 16 centers, motor 11 drive motors cover arm 12 rise drive then that cylinder 14 rises and the Rotate 180 degree to transmitting disk apparatus 200 places.
The utility model precise positioning and sputtering-coating mechanical arm 1, the motor cover arm 12 that comprises motor 11 and be connected with motor 11, described motor 11 drives 12 rotations of described motor cover arm, overlap the arm 12 isometrical equally spaced cylinder block 13 that is distributed with all around along described motor, on each described cylinder block 13 cylinder 14 is installed all, the piston rod 15 of described cylinder 14 vertically is provided with, the cover plate that is used for taking and placing CD 100 16 with vacuum slot 150 removably is installed on the described piston rod 15, piston rod 15 is done the vertical lifting motion under the effect of cylinder 14, also comprise the positioning fixture 20 that cover plate 16 is carried out the location, installation site, described positioning fixture 20 comprises base 21, the centre of described base 21 offers installing hole 23, the shell of described motor 11 is located in the installing hole 23 of described positioning fixture 20, offer on the described base 21 and described cover plate 16 station hole 22 one to one, described station hole 22 is the isometrical distribution equally spacedly in center with described installing hole 23, the aperture in described station hole 22 is greater than the diameter of described cover plate 16, the installation site of regulating described cover plate 16 is contained in the described station hole 22 described cover plate 16 one to one, realizes the location to cover plate 16 installation sites; The utility model precise positioning and sputtering-coating mechanical arm 1, it is the position of adopting a kind of positioning fixture 20 to improve the cover plate 16 of the sputtering-coating mechanical arm in the compact disc production line, this positioning fixture 20 can ensure that cover plate 16 is in the suitable position of expection, guaranteed the accurate cooperation in cover plate 16 and station hole 22, can adjust the symmetry of the cover plate 16 of the sputtering-coating mechanical arm of having good positioning rapidly and accurately, overcome the deviation of sputtering-coating mechanical arm taking and placing video discs and fallen the dish phenomenon, thereby influence the effect of the follow-up sputter of CD 100, also influence quality, production efficiency of CD 100 etc.In addition because the utility model precise positioning and sputtering-coating mechanical arm 1 when can improve the production efficiency of compact disc production line and guarantee that the quality of production and cost are low.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (3)
1. precise positioning and sputtering-coating mechanical arm, the motor cover arm that comprises motor and be connected with motor, the rotation of the described motor cover of described motor-driven arm, overlap the arm isometrical equally spaced cylinder block that is distributed with all around along described motor, on each described cylinder block cylinder is installed all, the piston rod of described cylinder vertically is provided with, the cover plate that is used for the taking and placing CD with vacuum slot removably is installed on the described piston rod, piston rod is done the vertical lifting motion under the effect of cylinder, it is characterized in that: also comprise the positioning fixture that cover plate is carried out the location, installation site, described positioning fixture comprises base, the centre of described base offers installing hole, the shell of described motor is located in the installing hole of described positioning fixture, offer on the described base and described cover plate station hole one to one, described station hole is the isometrical distribution equally spacedly in center with described installing hole, the aperture in described station hole is greater than the diameter of described cover plate, the installation site of regulating described cover plate is contained in the described station hole described cover plate one to one, realizes the location to the cover plate installation site.
2. precise positioning and sputtering-coating mechanical arm as claimed in claim 1, it is characterized in that: also comprise screw, offer the installation aperture that passes for screw on the described base, described installation aperture is the isometrical distribution in center with described installing hole, and described positioning fixture is fixed by the shell of described screw and described motor.
3. precise positioning and sputtering-coating mechanical arm as claimed in claim 1 is characterized in that: the difference of the aperture in described station hole and the diameter of described cover plate is less than 0.05 millimeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201250482U CN201736219U (en) | 2010-03-01 | 2010-03-01 | Accurate-positioning sputtering manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201250482U CN201736219U (en) | 2010-03-01 | 2010-03-01 | Accurate-positioning sputtering manipulator |
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| Publication Number | Publication Date |
|---|---|
| CN201736219U true CN201736219U (en) | 2011-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201250482U Expired - Lifetime CN201736219U (en) | 2010-03-01 | 2010-03-01 | Accurate-positioning sputtering manipulator |
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| CN (1) | CN201736219U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101920495A (en) * | 2010-03-01 | 2010-12-22 | 东莞宏威数码机械有限公司 | Precise positioning and sputtering-coating mechanical arm and localization method thereof |
| CN103241556A (en) * | 2013-05-28 | 2013-08-14 | 资阳市力达工业自动化设备有限公司 | Tower rotating multi-arm full-automatic setting machine |
| CN105689274A (en) * | 2016-03-23 | 2016-06-22 | 东北大学 | Automatic detecting device for casing of notebook computer |
-
2010
- 2010-03-01 CN CN2010201250482U patent/CN201736219U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101920495A (en) * | 2010-03-01 | 2010-12-22 | 东莞宏威数码机械有限公司 | Precise positioning and sputtering-coating mechanical arm and localization method thereof |
| CN101920495B (en) * | 2010-03-01 | 2012-02-01 | 东莞宏威数码机械有限公司 | Precise positioning and sputtering-coating mechanical arm and positioning method thereof |
| CN103241556A (en) * | 2013-05-28 | 2013-08-14 | 资阳市力达工业自动化设备有限公司 | Tower rotating multi-arm full-automatic setting machine |
| CN103241556B (en) * | 2013-05-28 | 2015-09-30 | 资阳市力达工业自动化设备有限公司 | The rotating multi-arm full-automatic setting machine of tower |
| CN105689274A (en) * | 2016-03-23 | 2016-06-22 | 东北大学 | Automatic detecting device for casing of notebook computer |
| CN105689274B (en) * | 2016-03-23 | 2018-07-10 | 东北大学 | A kind of notebook computer casing automatic detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110209 Effective date of abandoning: 20120201 |