CN102698935A - Spin coating device and spin coating method of blue-ray disc covering layer - Google Patents

Spin coating device and spin coating method of blue-ray disc covering layer Download PDF

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CN102698935A
CN102698935A CN 201210011087 CN201210011087A CN102698935A CN 102698935 A CN102698935 A CN 102698935A CN 201210011087 CN201210011087 CN 201210011087 CN 201210011087 A CN201210011087 A CN 201210011087A CN 102698935 A CN102698935 A CN 102698935A
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mechanism
coating
spin
layer
covering
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CN 201210011087
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Chinese (zh)
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刘惠森
杨明生
杨顺先
范继良
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东莞宏威数码机械有限公司
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Abstract

The invention discloses a spin coating device of a blue-ray disc covering layer. The spin coating device comprises a driving mechanism, a spin coating mechanism, a detecting mechanism and a control mechanism, wherein the spin coating mechanism is connected with an output shaft of the driving mechanism; the detecting mechanism is arranged on a blue-ray disc production line; the control mechanism is connected with both the detecting mechanism and the driving mechanism electrically; the driving mechanism drives the spin coating mechanism to carry out spin coating on the disc so as to form a covering layer; the actual thickness of the covering layer is detected through the detecting mechanism in real time; the control mechanism carries out compassion calculation according to the actual thickness of the covering layer detected by the detecting mechanism and a preset thickness, so as to obtain a control parameter and control the driving mechanism to repair the rotation speed, the rotation time, the acceleration and the like in the spin coating process in real time, consequently closed loop control of the spin coating process is formed, the thickness of the covering layer is smaller in change amplitude and change rate, the pass percent of the disc is improved, and the raw material is saved. In addition, the invention also discloses a spin coating method of the blue-ray disc covering layer.

Description

蓝光光盘覆盖层旋涂装置及旋涂方法 Cover layer blu-ray disc spin-coating apparatus and a spin coating method

技术领域 FIELD

[0001] 本发明涉及一种蓝光光盘覆盖层的旋涂装置及旋涂方法,尤其涉及一种可对覆盖层的厚度进行实时地检测及调整的旋涂装置及旋涂方法。 [0001] cover layer blu-ray disc, to a spin coating apparatus and method of the present invention, spin coating, particularly, to a cover layer thickness of the spin coating apparatus for real-time testing and adjustment and a spin coating method.

背景技术 Background technique

[0002] 蓝光光盘(Blu-ray Disc,缩写为BD)是一种超大容量的光盘存储技术,蓝光光盘利用波长为450nm的蓝色激光读取和写入数据而传统的DVD利用波长为650nm的红色激光,通常来说波长越短的激光,能够在单位面积上记录或读取的信息更多,因此蓝光技术极大的提高了光盘的存储容量,蓝光光盘拥有5倍于现有DVD光盘规格的存储能力,不但可应用于录制、擦写或播放高清影像,同时也可用于存储容量更巨大的数字内容,因此蓝光存储技术是下一代光存储技术的主流技术之一。 [0002] Blu-ray Disc (Blu-ray Disc, abbreviated as BD) is a large-capacity optical disk storage technology, the Blu-ray disc using a blue laser having a wavelength of 450nm read and write data using a conventional DVD wavelength of 650nm information red laser, generally speaking the shorter wavelength of the laser can be recorded or read on more per unit area, thus greatly improves the Blu-ray optical disk storage capacity, Blu-ray disc has five times the conventional DVD-ROM specification the storage capacity, not only can be used to record, erase, or playing high-definition video, but also can be used for more great digital content storage capacity, Blu-ray storage technology is one of the next generation of optical storage technology mainstream technology.

[0003] 蓝光光盘在结构上彻底脱离了DVD光盘“0.6mm+0.6mm”设计,采用了全新的“I. Imm基板+0. Imm保护层”结构,借助一层经特殊设计的超薄型可透光的O. Imm保护层结构,克服了DVD光盘在数据读取时因双折射而无法读取数据的问题,同时,还大幅度降低激光照射角度偏离90°正常状态下的相差问题,进而有效解决DVD在使用O. 6mm厚透光基板时一直困扰的数据再生错误问题;而在制造BD时,要求先注塑出I. Imm厚的基板,然后在基板上依次形成记录层、覆盖层及硬保护层,得到完整的BD光盘;由于蓝光光盘采用了更短的波长(450nm)和更大的数值孔径,因此其对平直度的要求很高,激光读取平面的垂直方向精度要求控制在±2um的范围内,所以蓝光光盘对于覆盖层及硬保护层的均匀性和厚度精度的要求相当严格,为了满足这个厚度公差,需要实现更强的光盘制造精确性 [0003] Blu-ray Disc structurally completely detached from the DVD disc "0.6mm + 0.6mm" design, with a new "I. Imm substrate +0. Imm protective layer" structure, by means of ultra-thin layer of specially designed may be O. Imm transparent protective layer structures, overcomes the problems due to the birefringence of DVD disc data can not be read in data reading, while also significantly reduce the laser irradiation angle from the 90 ° phase difference problem normal state, so as to effectively solve the error problem when using DVD O. 6mm thick transparent substrate has been plagued by reproducing data; in the BD manufacturing, by injection molding, the required thickness of the substrate I. Imm, and a recording layer are sequentially formed on the substrate, the cover layer and a hard protective layer, to obtain a complete BD disc; as Blu-ray disc uses a shorter wavelength (of 450 nm) and larger numerical aperture, therefore it requires a high degree of flatness, the vertical plane of the laser reading accuracy control within ± 2um, so that a uniform coating layer for the Blu-ray disc and thickness precision, and the hard protective layer is rather strict requirements, in order to satisfy this thickness tolerance, the need to achieve greater accuracy of the optical disc manufacturing

[0004] 在覆盖层的形成过程中,影响覆盖层厚度的因素比较多,主要有:一、工艺参数的合理性;二、环境温度的波动;三、胶水的粘度(特性);在上述三项中,可以把第二、三项归结为外部因素的变化,是生产产设备需要适应的,可通过增加空调设备、指定专用的生产原材料等保证其有最佳的稳定性,但这无疑增加了生产成本,对相应的操作人员的技能和工作量也有了更高的要求;为使生产设备尽可能稳定以保证生产光盘的质量,须使生产设备内部进行调节以适应外部的变化,以最终保证生产光盘质量;但在传统工艺中,生产设备未采用闭环控制,覆盖层厚度变化的幅度和变化率较大,最终影响光盘的合格率,造成不必要的原材料消耗和浪费。 [0004] In the process of forming the cover layer, the factors affecting the coating thickness is more, there are: a rationality of process parameters; two, fluctuating ambient temperature; (3) the viscosity of the glue (characteristic); in the three items, can be a second, three attributed to changes in external factors, the production apparatus need to adapt the production, by increasing the air-conditioning equipment, earmarked for producing raw materials ensure optimal stability, but this will increase production costs, also has a corresponding work skills and higher demands on the operator; is as stable as possible so that the production equipment to ensure the quality of the optical disc production, the internal equipment shall be adjusted to adapt to external changes to the final ensure production quality optical disk; however, in the conventional process, the plant is not a closed-loop control, and variations of amplitude cover layer thickness change rate is high, and ultimately affect the yield of the optical disc, resulting in unnecessary consumption of raw materials and waste.

[0005] 因此,有必提供一种可实时地检测及修复覆盖层生产工艺参数的装置及生产方法以解决现有技术的不足。 [0005] Accordingly, it is necessary to provide an apparatus and a method for producing real-time detection and repair the covering layer production process parameters to solve the problem of the prior art.

发明内容 SUMMARY

[0006] 本发明的目的在于提供一种可实时地检测及修复覆盖层生产工艺参数的装置。 [0006] The object of the present invention is to provide a device may be real-time detection and repair parameters of the production process of the cover layer.

[0007] 本发明的另一目的在于提供一种可实时地检测及修复覆盖层生产工艺参数的方法。 [0007] Another object of the present invention is to provide a method for detecting in real time and can fix the covering layer production process parameters.

[0008] 为实现上述目的,本发明的技术方案为:提供一种蓝光光盘覆盖层旋涂装置,其包括驱动机构、旋涂机构、检测机构及控制机构,所述旋涂机构与所述驱动机构的输出轴连接,所述检测机构设置于所述蓝光光盘生产线上,所述控制机构与所述检测机构、所述驱动机构均电连接,所述驱动机构驱动所述旋涂机构对蓝光光盘进行旋涂以形成覆盖层,所述检测机构用于实时地检测覆盖层的实际厚度,所述控制机构根据所述检测机构检测到的覆盖层的实际厚度,实时地调整并控制所述驱动机构修复旋涂工艺参数。 [0008] To achieve the above object, the technical solution of the present invention is: to provide a cover layer blu-ray disc spin coating apparatus, which includes a drive mechanism, spin coating means, detecting means and control means, the drive mechanism and the spin-coating means connected to the output shaft, said detecting means provided in the Blu-ray disc production line, said control means and said detecting means are electrically connected to the drive mechanism, the drive mechanism driving means for spin-coating the Blu-ray disc spin coating to form a coating layer, the detection means for detecting in real time the actual thickness of the cover layer, the thickness of the cover layer is the actual control mechanism detected by the detecting means to the real time and controls the drive mechanism to adjust repair spin-coating process parameters.

[0009] 较佳地,所述控制机构包括膜厚设定单元、运算单元及通信单元,所述通信单元与所述检测机构、所述驱动机构均电连接,所述膜厚设定单元用于预设覆盖层的厚度,所述通信单元用于将检测机构检测到的覆盖层的实际厚度传输到所述运算单元,所述运算单元用于将覆盖层的实际厚度与预设厚度进行对比运算,以得出实时地控制参数;所述通信单元再将所述运算单元运算得出的控制参数传输到所述驱动机构。 [0009] Preferably, the control means comprises a film thickness setting unit, the operation unit and a communication unit, the communication unit and the detecting means are electrically connected to the drive mechanism, the film thickness is set by means to a preset thickness of the cover layer, the communication unit for transmitting the actual thickness detection means for detecting the cover layer to the arithmetic unit, the arithmetic unit for the actual thickness of the cover layer thickness compared with a preset operation, to derive the control parameters in real time; then the communication unit of the arithmetic calculation control unit parameter derived transmitted to the drive mechanism.

[0010] 较佳地,所述驱动机构为响应电机。 [0010] Preferably, the drive mechanism is a motor response.

[0011] 较佳地,所述检测机构为在线扫描仪。 [0011] Preferably, the detecting means is a line scanner. [0012] 较佳地,所述旋涂机构包括旋涂碗及下料手,所述旋涂碗与所述驱动机构的输出轴连接,所述驱动机构驱动所述旋涂碗旋转。 [0012] Preferably, the mechanism includes a spin-coating and spin-coating cutting bowl hand, the output shaft of the spin-coating of the bowl is connected to a drive mechanism, the drive mechanism driving the rotating bowl spin coating.

[0013] 相应地,本发明所提供的蓝光光盘覆盖层旋涂方法,其包括如下步骤:(I)检测所述覆盖层的实际厚度;(2)将所述覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数;(3)根据所述控制参数自动修复旋涂工艺参数;(4)重复上述步骤(I)〜(3)直至完成覆盖层的旋涂。 [0013] Accordingly, the cover layer blu-ray disc spin-coating method according to the present invention is provided, comprising the steps of: (I) detecting the actual thickness of the cover layer; (2) the actual thickness of the covering layer with a preset the thickness comparison operation, the control parameters obtained; (3) according to the control parameters automatically fix a spin coating process parameters; (4) repeating the above steps (I) ~ (3) until the completion of the spin-on coating layer.

[0014] 较佳地,所述步骤(I)之前还包括:预设覆盖层厚度的步骤。 [0014] Preferably, before the step (I) further comprising: a step of covering the layer of predetermined thickness.

[0015] 较佳地,所述步骤(2)包括如下步骤:(21)接收检测到的覆盖层的实际厚度;(22) 将所述覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数;(23)将运算得出的控制参数输出。 [0015] Preferably, the step (2) comprises the steps of: (21) receiving an actual thickness of the cover layer is detected; (22) the actual thickness of the covering layer with a predetermined thickness comparison operation to give a control parameter; (23) outputs the control parameter calculation obtained.

[0016] 与现有技术相比,由于本发明蓝光光盘覆盖层旋涂装置,其包括驱动机构、旋涂机构、检测机构及控制机构,所述旋涂机构与所述驱动机构的输出轴连接,所述检测机构设置于所述蓝光光盘生产线上,所述控制机构与所述检测机构、所述驱动机构均电连接,所述驱动机构驱动所述旋涂机构对光盘进行旋涂以形成覆盖层;因此,可利用所述检测机构实时地检测覆盖层的实际厚度,所述控制机构根据所述检测机构检测到的覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数,并实时地控制所述驱动机构修复旋涂工艺中的旋转速度、旋转时间及加速度等参数,形成旋涂工艺的闭环控制,从而使覆盖层厚度变化的幅度和变化率较小,使光盘的合格率升高,并能节约原材料。 [0016] Compared with the prior art, since the present invention cover layer blu-ray disc spin coating apparatus, which includes a drive mechanism output shaft, a spin coating means, detecting means and control means, the spin-coating means is connected to the drive mechanism the detection means provided in the Blu-ray disc production line, said control means and said detecting means are electrically connected to the drive mechanism, the drive mechanism drives the optical disc spin-coating means for spin coating to form a cover layer; thus, the detection mechanism may be utilized in real time detects the actual thickness of the cover layer, the preset control the actual thickness of the cover layer thickness is detected by the means of the comparison operation detecting means, obtaining the control parameters, and real time parameters controlling the drive mechanism fixes the rotational speed of the spin coating process, and the rotational acceleration time, a closed loop control of the spin coating process, so that the magnitude and rate of change of the cover layer thickness variation is small, so that the yield of the optical disc increased raw material and energy savings.

附图说明 BRIEF DESCRIPTION

[0017] 图I是本发明蓝光光盘覆盖层旋涂装置的原理框图。 [0017] FIG. I is a schematic block diagram of the present invention, the cover layer blu-ray disc spin-coating apparatus.

[0018] 图2是本发明蓝光光盘生产系统的结构不意图。 [0018] FIG. 2 is a Blu-ray disc production system according to the present invention is not intended.

[0019] 图3是图2中旋涂机构的放大示意图。 [0019] FIG. 3 is an enlarged schematic view of a spin coating mechanism 2 FIG.

[0020] 图4是本发明蓝光光盘覆盖层旋涂方法的流程图。 [0020] FIG. 4 is a flowchart of the cover layer blu-ray disc spin-coating method of the present invention.

[0021] 图5是图4中步骤步骤(S02)的子流程图。 [0021] Step 5 is a step in FIG. 4 (S02) sub-flowchart.

具体实施方式[0022] 现在参考附图描述本发明的实施例,附图中类似的元件标号代表类似的元件。 DETAILED DESCRIPTION [0022] Now embodiments of the present invention is described with reference to the accompanying drawings in which like numerals represent like element elements throughout.

[0023] 如图I-图3所示,本发明所述蓝光光盘的生产系统100,其包括依次连接于生产线上的第一溅镀站101、染料涂布机构102、扫描仪103、烘烤箱104、第二溅镀站105、清边机构106、软保护层旋涂机构107、覆盖层旋涂机构108、硬保护层旋涂机构109、翻碟机构110、检测机构111及第防水层溅镀站112 ;生产蓝光光盘时,基片经注塑机传输至第一溅镀站101内溅镀金属反射层,然后传输至染料涂布机构102,在染料涂布机构102内形成染料层,再传输至扫描仪103内对基片行扫描检测,检测完成后的基片分级存放,合格的基片传送到烘烤箱104内将染料层烘干,烘干染料层后的基片传输至第二溅镀站105内溅镀缓冲层,完成后将基片传输至清边机构106内,清除基片溅镀范围之外的区域上的材料,清洗完成后的基片传输至软保护层旋涂机构107,旋涂形成软保护层并对软保护层进行固 [0023] As shown in FIG. 3 I-, the Blu-ray disc production system 100 of the present invention, which includes sequentially connected to the first line of the sputtering station 101, a dye coating mechanism 102, the scanner 103, baking box 104, second sputtering station 105, edge deletion mechanism 106, the soft protective layer of spin mechanism 107, the cover layer of spin mechanism 108, the hard protective layer of spin mechanism 109, 110, 111 and the second water-repellent layer detecting means turning mechanism Singles sputtering station 112; production blu-ray disc substrate by the injection molding machine is transmitted to the first station 101 by sputtering the reflective metal layer is sputtered, and then transferred to the dye coating mechanism 102, is formed in the dye layer of dye application mechanism 102, then transmitted to the scan line detection substrate the scanner 103, after detecting the completion of storage of the substrate classification, qualified substrate conveyed into the dye layer 104 ovens drying, drying the substrate after the dye transfer layer to the sputtering a second sputtering station 105 of the buffer layer, the substrate after the completion of the transmission mechanism 106 to the inner edge deletion, scavenging materials on the substrate outside the range of sputter coating regions of the substrate after the completion of the transmission to the soft protective layer was washed spin coating mechanism 107, the protective layer is formed by spin coating and a soft flexible solid protective layer 后,之后再次对基片进行清洗处理,然后,再将清洗后的基片传输至覆盖层旋涂机构108,在覆盖层旋涂机构108内旋涂形成覆盖层并对覆盖层进行固化处理,然后将基片传输至硬保护层旋涂机构109,旋涂形成硬保护层并固化,固化完成后的基片经翻碟机构110的翻碟手对其进行翻转,翻转后的基片再传送到检测机构111进行检测,检测完后检测后将合格基片和不合格基片分开放置;经检测合格后的基片还可传送到防水层溅镀站112溅镀形成一防水层,溅镀完防水层后放置到收碟转盘。 After the substrate again after the cleaning process, and then, after the substrate and then transmitted to the covering layer of spin cleaning mechanism 108, a cover layer and coating layer to be cured in the spin-coated layer of spin mechanism cover 108, the substrate is then transferred to the hard protective layer of spin mechanism 109, spin coating and cured to form a hard protective layer, the substrate after the curing is completed by turning its hand Singles Singles turn mechanism 110 is inverted, flipped and then the transfer substrate the detecting means 111 detects, after testing detects defective after bonding the substrate sheet and the lattice separately placed; detected after passing through the substrate may also be transferred to a sputtering station 112 waterproof layer is formed by sputtering a waterproof layer, sputtering after the water-repellent layer disposed close disc turntable.

[0024] 为保证覆盖层厚度变化的幅度、变化率较小,需对覆盖层的厚度进行实时地检测, 并依检测的实际厚度来调整及控制覆盖层旋涂工艺中的旋转速度、旋涂时间及加速度等工艺参数,以保证蓝光光盘的良品率。 [0024] To ensure that the amplitude of the thickness variation of the cover layer, the rate of change is small, the thickness of the coating layer need be detected in real time, and to adjust and control the rotational speed of the clad layer by spin coating process the detected actual thickness, a spin coating time and acceleration and other parameters to ensure that the yield Blu-ray disc. [0025] 为此,本发明所提供的蓝光光盘覆盖层旋涂装置,采用闭环控制系统,其除具有覆盖层旋涂机构108外,还包括驱动机构200、控制机构300及检测机构400,所述检测机构400设置于所述蓝光光盘的生产线上,所述控制机构300与所述检测机构400、所述驱动机构200均电连接,所述驱动机构200驱动所述覆盖层旋涂机构108对光盘进行旋涂以形成覆盖层,所述检测机构400用于实时地检测覆盖层的实际厚度,所述控制机构300根据所述检测机构400检测到的覆盖层的实际厚度,与覆盖层的预设厚度进行对比运算,得出两者之间的差值以形成控制参数,并实时地控制所述驱动机构200修复旋涂工艺中的旋转速度、旋涂时间及加速度等参数;具体地,所述控制机构300包括膜厚设定单元301、运算单元302及通信单元303,所述通信单元303与所述检测机构400、所述驱动机构200均电连 [0025] To this end, the cover layer blu-ray disc spin-coating apparatus of the present invention is provided, a closed-loop control system, which in addition to having a cover layer of spin mechanism 108, also includes a drive mechanism 200, the control means 300 and detecting means 400, the said detecting means is provided on line 400 of the Blu-ray disc, the control means 300 and the detecting means 400, the drive mechanism 200 are electrically connected to the driving mechanism 200 drives the cover layer of spin mechanism 108 pairs optical disc spin coating to form a coating layer, the detecting means 400 to detect in real time the actual thickness of the cover layer, the control means 300 according to the actual thickness of the cover layer 400 of the detecting means to detect, with a pre-coating layer the thickness comparison operation is provided, so as to obtain a difference therebetween form a control parameter in real time and controls the drive mechanism 200 fixes the rotational speed of the spin coating process, a spin coating time and acceleration parameters; in particular, the said control means 300 includes a film thickness setting unit 301, arithmetic unit 302 and a communication unit 303, the communication unit 303 of the detection mechanism 400, the drive mechanism 200 is electrically connected 接, 所述膜厚设定单元301用于预设覆盖层的厚度,所述通信单元303用于将检测机构400检测到的覆盖层的实际厚度传输到所述运算单元302,所述运算单元302用于将覆盖层的实际厚度与预设厚度进行对比运算,以得出实时地控制参数;所述通信单元303再将所述运算单元302运算得出的控制参数传输到所述驱动机构200 ;而所述覆盖层旋涂机构108则还包括旋涂碗108a及下料手108b,所述旋涂碗108a与所述驱动机构200的输出轴连接,下料手108b对基片下胶完成后,所述驱动机构200驱动所述旋涂碗108a旋转以形成覆盖层。 Then, the film thickness of the setting unit 301 for a preset thickness of the cover layer, the communication unit 303 to the actual thickness of the cover layer to the detecting means 400 detects the transmission of the operation unit 302 to the arithmetic unit the actual thickness of the cover layer with a predetermined thickness for the comparison operation 302, to derive the control parameters in real time; the communication unit 303 then controls the operational parameters of the operation unit 302 to transmit the resulting driving mechanism 200 ; and said covering layer of spin mechanism 108 further comprises a spin coating bowl 108a and 108b at hand feeding, the spin coating bowl 108a with the drive mechanism 200 is connected to the output shaft, the hand cutting of the substrate 108b completion gum after the drive mechanism 200 drives the rotation of spin coating to form a bowl cover layer 108a.

[0026] 另外,根据闭关控制的算法公式: [0026] Further, according to retreat control algorithm formula:

[0027] E (t) = SP (t) -PV ⑴ [0027] E (t) = SP (t) -PV ⑴

[0028] 在上式中,E(t)为设定值与实际值的差值,SP (t)为设定值,在此为时间的函数; PV(t)为实际值,在此也为时间的函数。 [0028] In the above formula, E (t) is the difference between the set value and the actual value, SP (t) is a set value, in this case a function of time; PV (t) is the actual value, here also as a function of time.

[0029] 通过上式可知,最为关键的是要得到覆盖层厚度的实际值,即PV(t),而实际值的测量需考虑:一、检测的结果和生产线的最终产品的该指标无差异,能真实反正最终品质的实际情况;二、检测的数据要统一,不需要额外的效验环节;因此,在本发明的一个优选实施例中,所述检测机构200采用在线扫描仪,使得覆盖层实际厚度的检测准确、简便;另外、 所述驱动机构采用高速、搞动态响应电机,以方便实现软件编程控制。 [0029] By the above equation, the most critical to obtain the actual value of the cover layer thickness, i.e., PV (t), measured actual values ​​to be considered: First, the indicator no difference in the final product of the result of the detection and the production line can be the final quality of the real situation anyway; two, to unify the detected data, no additional efficacy link; Thus, in one preferred embodiment of the present invention, the detection mechanism using online scanner 200, such that the cover layer detecting the actual thickness of accurate, simple; Further, the high-speed drive mechanism, the dynamic response of the motor to engage, in order to facilitate the realization of software programming control.

[0030] 如图4、图5所示,本发明所提供的蓝光光盘覆盖层旋涂方法,其包括如下步骤: [0030] FIG. 4, FIG. 5, the cover layer blu-ray disc spin-coating method according to the present invention is provided, comprising the steps of:

[0031] (SOl)检测所述覆盖层的实际厚度; [0031] (SOl) detecting the actual thickness of the cover layer;

[0032] (S02)将所述覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数; [0032] (S02) the actual thickness of the covering layer with a predetermined thickness comparison operation is performed, the control parameters obtained;

[0033] (S03)根据所述控制参数自动修复旋涂工艺参数; [0034] (S04)重复上述步骤(SOl)〜(S03)直至完成覆盖层的旋涂。 [0033] (S03) according to the control parameters automatically fix a spin coating process parameters; [0034] (S04) repeating the above steps (SOl) ~ (S03) until the completion of the spin-on coating layer.

[0035] 其中,所述步骤(S02)包括如下步骤: [0035] wherein said step (S02 is) comprising the steps of:

[0036] (S21)接收检测到的覆盖层的实际厚度; [0036] (S21) receiving an actual thickness of the cover layer is detected;

[0037] (S22)将所述覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数; [0037] (S22) the actual thickness of the covering layer with a predetermined thickness comparison operation is performed, the control parameters obtained;

[0038] (S23)将运算得出的控制参数输出。 [0038] (S23) The control parameter calculation resulting output.

[0039] 优选地,所述步骤(SOl)之前还包括:预设覆盖层厚度的步骤。 [0039] Preferably, said step (SOl) before further comprising: a step of covering a predetermined layer thickness.

[0040] 下面结合图I-图5所示,对本发明蓝光光盘覆盖层的形成及控制进行说明。 [0040] I- below with reference to FIG. 5, the formation and control of the cover layer blu-ray disc according to the present invention will be described.

[0041] 蓝光光盘生产前,先通过控制机构300的膜厚设定单元301预设覆盖层的厚度, 开始生产蓝光光盘后,在旋涂机构108旋涂形成覆盖层的过程中,安装于生产线上的检测机构400实时地检测覆盖层的实际厚度,并将检测到的覆盖层的实际厚度传输至控制机构300,控制机构300的运算单元302将接收到的覆盖层的实际厚度与预设厚度进行对比运算,得出覆盖层的实际厚度与预设厚度之间的差值,即的得出控制参数,并通过通信单元303将所述控制参数输出至驱动机构200,以实时地控制驱动机构200修复旋涂工艺中的旋转速度、旋转时间及加速度等参数,形成旋涂工艺的闭环控制,以保证覆盖层的高精度。 After the process of [0041] production before the Blu-ray Disc, the film thickness of the first setting means 300 by the control unit 301 of a predetermined thickness of the cover layer blu-ray disc production start, spin coating mechanism 108 is formed by spin coating in the coating layer, the production line is attached to the detecting means 400 detected in real time on the actual thickness of the cover layer, and the detected actual transmitted to the control means a thickness of the cover layer 300, the control means 300 of the arithmetic unit 302 with a predetermined thickness to the actual thickness of the cover layer is received comparison operation to find the difference between the actual thickness of the cover layer with a preset thickness, i.e., the control parameters obtained, through the communication unit 303 outputs the control parameters to the drive mechanism 200, controls the drive mechanism in real-time 200 fixes the rotational speed of the spin coating process parameters, the acceleration and the rotation time, a closed loop control of the spin coating process, to ensure high accuracy of the cover layer.

[0042] 由于本发明蓝光光盘覆盖层旋涂装置,其包括覆盖层旋涂机构108、驱动机构200、控制机构300及检测机构400,所述覆盖层旋涂机构108与所述驱动机构200的输出轴连接,所述检测机构400设置于所述蓝光光盘生产线上,所述控制机构300与所述检测机构400、所述驱动机构200均电连接,所述驱动机构200驱动所述覆盖层旋涂机构108对光盘进行旋涂以形成覆盖层;因此,可利用所述检测机构400实时地检测覆盖层的实际厚度,所述控制机构300根据所述检测机构400检测到的覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数,并实时地控制所述驱动机构200修复旋涂工艺中的旋转速度、旋转时间及加速度等参数,形成旋涂工艺的闭环控制,从而使覆盖层厚度变化的幅度和变化率较小, 使蓝光光盘的合格率升高,并能节约原材料。 [0042] Since the present invention cover layer blu-ray disc spin coating apparatus, which comprises a cover layer of spin mechanism 108, a drive mechanism 200, the control means 300 and detecting means 400, the cover layer of spin mechanism 108 and the drive mechanism 200 an output shaft connected to the detecting means 400 provided in the Blu-ray disc production line, the control means 300 and the detecting means 400, the drive mechanism 200 are electrically connected to the drive mechanism 200 drives rotation of the cover layer coating mechanism 108 for optical disc spin-coating to form a coating layer; Thus, 400 may be detected in real time the actual thickness of the cover layer by the detecting means, the control means 300 according to the actual thickness of the cover layer 400 is detected by the detection means comparing the thickness with a preset operation, obtaining the control parameters in real time and controls the drive mechanism 200 fixes the rotational speed of the spin coating process parameters in the rotation time of the acceleration and the like, a closed loop control of the spin coating process, so that the cover layer thickness variations and the amplitude variation rate is small, so that increased yield of Blu-ray disc, and can save materials.

[0043] 以上所揭露的仅为本发明的优选实施例而已,当然不能以此来限定本发明之权利范围,因此依本发明申请专利范围所作的等同变化,仍属本发明所涵盖的范围。 [0043] While the invention disclosed above are preferred embodiments only, but not intended to limit the scope of the present invention, the equivalent changes made according to the invention patent application made by the range, still covered by the scope of the present invention.

Claims (8)

  1. 1. 一种蓝光光盘覆盖层旋涂装置,其特征在于,包括: 驱动机构; 旋涂机构,所述旋涂机构与所述驱动机构的输出轴连接,所述驱动机构驱动所述旋涂机构对蓝光光盘进行旋涂以形成覆盖层; 检测机构,所述检测机构设置于所述蓝光光盘生产线上,用于实时地检测覆盖层的实际厚度'及控制机构,所述控制机构与所述检测机构、所述驱动机构均电连接,所述控制机构根据所述检测机构检测到的覆盖层的实际厚度,实时地调整并控制所述驱动机构修复旋涂工艺参数。 A cover layer blu-ray disc spin-coating apparatus comprising: a drive mechanism; spin coating mechanism output shaft, the spin-coating means connected with the drive mechanism, the drive mechanism drives the spin-coating means Blu-ray disc spin coating to form a coating layer; detecting means, said detecting means provided in the Blu-ray disc production line, for real-time detection of the actual thickness of the cover layer 'and a control means, said control means and said detection mechanism, the drive mechanism is electrically connected to said control means the actual thickness of the cover layer is detected by said detecting means, and adjust in real time controls the drive mechanism to repair a spin coating process parameters.
  2. 2.如权利要求I所述的蓝光光盘覆盖层旋涂装置,其特征在于,所述控制机构包括: 膜厚设定单元,所述膜厚设定单元用于预设覆盖层的厚度; 运算单元,所述运算单元用于将覆盖层的实际厚度与预设厚度进行对比运算,以得出实时地控制参数'及通信单元,所述通信单元与所述检测机构、所述驱动机构均电连接,所述通信单元用于将检测机构检测到的覆盖层的实际厚度传输到所述运算单元,并将所述运算单元运算得出的控制参数传输到所述驱动机构。 2. The cover layer blu-ray disc spin coating apparatus according to claim I, wherein said control means comprises: a thickness setting section, means for setting the thickness of the cover layer of a predetermined thickness; computing unit, the arithmetic unit for the actual thickness of the cover layer thickness compared with a preset operation, to derive the control parameters in real time ', and a communication unit, the communication unit and the detecting means, the drive mechanism is electrically connection, the communication unit for the actual thickness of the cover layer to the detecting means for detecting transmitted to the operation unit, the control parameter calculation means and the calculation results transmitted to the drive mechanism.
  3. 3.如权利要求I所述的蓝光光盘覆盖层旋涂装置,其特征在于:所述驱动机构为响应电机。 I 3. Claim cover layer blu-ray disc to spin coating apparatus, wherein: said driving means is a motor response.
  4. 4.如权利要求I所述的蓝光光盘覆盖层旋涂装置,其特征在于:所述检测机构为在线扫描仪。 I 4. Claim cover layer blu-ray disc to spin coating apparatus, wherein: said detecting means is a line scanner.
  5. 5.如权利要求I所述的蓝光光盘覆盖层旋涂装置,其特征在于:所述旋涂机构包括旋涂碗及下料手,所述旋涂碗与所述驱动机构的输出轴连接,所述驱动机构驱动所述旋涂碗旋转。 I 5. The claims cover layer blu-ray disc spin-coating apparatus, wherein: said means comprises a spin-coating and spin-coating cutting bowl hand, spin-coating the bowl with the drive mechanism is connected to the output shaft, the drive mechanism rotating the bowl spin coating.
  6. 6. 一种蓝光光盘覆盖层旋涂方法,其特征在于,包括如下步骤: (1)检测所述覆盖层的实际厚度; (2)将所述覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数; (3)根据所述控制参数自动修复旋涂工艺参数; (4)重复上述步骤(I)〜(3)直至完成覆盖层的旋涂。 A cover layer blu-ray disc spin-coating method, characterized by comprising the steps of: (1) detecting the actual thickness of the cover layer; (2) the actual thickness of the covering layer with a predetermined thickness comparison operation is performed , derived control parameters; (3) according to the control parameters automatically fix a spin coating process parameters; coating (4) repeating the above steps (I) ~ (3) until the completion of the spin-coating layer.
  7. 7.如权利要求6所述的蓝光光盘覆盖层旋涂方法,其特征在于,所述步骤(I)之前还包括:预设覆盖层厚度的步骤。 7. The Blu-ray disc as claimed in claim 6, the cover layer spin-coating method, wherein, before the step (I) further comprising: a step of covering a predetermined layer thickness.
  8. 8.如权利要求6所述的蓝光光盘覆盖层旋涂方法,其特征在于,所述步骤(2)包括如下步骤: (21)接收检测到的覆盖层的实际厚度; (22)将所述覆盖层的实际厚度与预设厚度进行对比运算,得出控制参数; (23)将运算得出的控制参数输出。 Cover layer blu-ray disc as the spin coating method according to claim 6, wherein said step (2) comprises the steps of: (21) receiving an actual thickness of the cover layer is detected; (22) the the actual thickness of the cover layer with a predetermined thickness comparison operation, the control parameters obtained; (23) outputs the control parameter calculation obtained.
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CN104651797A (en) * 2015-03-16 2015-05-27 京东方科技集团股份有限公司 Film forming apparatus and film forming method
CN105521889A (en) * 2016-01-20 2016-04-27 山东工业陶瓷研究设计院有限公司 Spray-coating device capable of automatically controlling thickness and flatness of coating layer

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