CN102054499B - System and method for manufacturing mother disc of blu-ray disc - Google Patents
System and method for manufacturing mother disc of blu-ray disc Download PDFInfo
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- CN102054499B CN102054499B CN2010106145538A CN201010614553A CN102054499B CN 102054499 B CN102054499 B CN 102054499B CN 2010106145538 A CN2010106145538 A CN 2010106145538A CN 201010614553 A CN201010614553 A CN 201010614553A CN 102054499 B CN102054499 B CN 102054499B
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Abstract
The invention discloses a system for manufacturing a mother disc of a blu-ray disc, which comprises a cleaning device, a spin coating device, a hard baking device, a cooling device, a soft baking device, a laser burning device, a developing device, an electroplating device, a horizontal linear transmission device, a mechanical arm and two linear guide rails horizontally arranged in parallel, wherein the horizontal linear transmission device is connected with the two guide rails in a sliding mode; the electroplating device, the developing device, the cleaning device and the spin coating device are sequentially arranged at one side of the linear guide rails along the linear guide rails; the hard baking device, the soft baking device and the cooling device are sequentially arranged at the other side of the linear guide rails along the linear guide rails; the laser burning device is arranged at one end of the linear guide rails away from the hard baking device; the mechanical arm is used for grasping a mother disc; and the horizontal linear transmission device drives the mechanical arm to transfer the mother disc to the corresponding device along the linear guide rails. The system for manufacturing a mother disc of a blu-ray disc has reasonable layout, and can improve quality of finished products and optimize production line. The invention also discloses a method for manufacturing a mother disc of a blu-ray disc.
Description
Technical field
The present invention relates to a kind of light disk producing system, relate in particular to a kind of manufacturing system and method that is used to make the stamper of CD.
Background technology
Along with the continuous expansion of optical storage medium information capacity, its production technology of producing optical storage medium is also flourish, Blu-ray Disc (Blue-ray Disc; Be abbreviated as BD) be a kind of CD storage technique of vast capacity; Along with constantly bringing forth new ideas of optical disc, high density compact disc is constantly gushed out, a kind of Blu-ray Disc that has proposed; The recording capacity that it has the about 25GB of single-surface single-layer (Gbytes) perhaps has the recording capacity of the about 50GB of single-surface double-layer.In this Blu-ray Disc, the spot diameter for the light beam that reduces to be used to write down and reset can be made as the 405nm blue light with optical source wavelength, and the numerical aperture NA of object lens is made as 0.85 big numerical value.In Blu-ray Disc, spot areas can be reduced to DVD spot areas about 1/5.In addition, because angular error (being called tilt margins, 90 ° of angle permissible angle of heel degree that promptly between optical disc surface and beam optical axis, form) reduces along with the increase of numerical aperture of objective NA, therefore, the overlayer that is coated with Information Level is as thin as 0.1mm.For read-only optical disc, Information Level is formed with the reflection horizon or the translucent reflective layer of pit above being.For CD-R, Information Level is formed with groove above being and can writes down the layer of phase change etc.
Figure 1A has shown the structure of single-layer blue ray disc, and the substrate 1 that is used to make CD is processed by polycarbonate, and it has the thickness of 1.1mm.The pit of stamper (master disc) is transferred on the surface of substrate 1 through the injection mo(u)lding operation.Substrate 1 is coated with reflectance coating 2.As light-transmitting layer and thickness is that the overlayer 3 of 0.1mm is set on the reflectance coating 2.Figure 1B shows the structure of double-layer blue ray disc.With with single layer structure method similarly; Figure 1B illustrates the CD with two information layers; This two information layers all has a kind of like this structure for every layer: on the thick substrate 1 of 1.1mm, form the reflectance coating 2 as total reflection film; Being called the formation semitransparent reflecting film 8 on the light-transmitting layer 7 on the reflectance coating 2 that is formed in middle layer, again overlayer 3 is set on this semitransparent reflecting film 8.When from the incident direction (hard coat 6 one sides) of laser beam when seeing, reflectance coating 2 is formed on the degree of depth place of 100 μ m, and semitransparent reflecting film 8 is formed on the degree of depth place of 75 μ m.For the single-surface double-layer blue ray disc shown in Figure 1B; When the incident direction of laser beam is seen; The reflectance coating 2 that is positioned at the degree of depth place of 100 μ m is used as reference layer (the 0th layer of recording layer is called the L0 layer), and the recording layer that adds at the degree of depth place that is positioned at 75 μ m is used as first recording layer (being called the L1 layer).
In the production of above-mentioned Blu-ray Disc; At first need make stamper, apply resist at glass substrate surface, through laser beam exposure pit or channel patterns; Have corresponding to the pit of pit on the resist or groove and the dish type stamper of bossing through the formation of developing; Utilize this dish type stamper to form metal stamper, utilize this stamper to adopt injection mo(u)lding operation to form compact disc substrate, and on compact disc substrate, form the thin film recording layer through plating or sputter.Particularly, Fig. 1 C has showed the production stage of existing stamper.At first, on the surface of glass substrate 10, utilize spin coating method etc. to apply extremely thin resist 11, and need corresponding baking and cooling step, afterwards when these glass substrate 10 rotations, 12 pairs of these stampers of laser beam through Writing device make public.Has shape through exposure formation on resist 11 corresponding to the pattern of pit or groove.Then, through on the surface that developer 13 is splashed into the resist 11 that is positioned on the rotary glass substrate 10 and carry out developing process, on substrate 10, form resist pattern corresponding to the pit/convexity of the groove of CD or pit.Then, for example the metal 14 of nickel etc. is deposited on the substrate 10 through operations such as plating or sputter or chemistry coating and through peeling off and repair, thus acquisition stamper 15.Through stamper 15 is attached on the die of injection mo(u)lding operation device, and for example the resin of PC etc. is injected in the cavity, thereby forms the compact disc substrate that transfer printing has the pit/bossing of stamper.At this moment, the resin of compact disc substrate plastifies through heating, so that can be filled in the mould fast.When the compact disc substrate through injection molding be cooled to 30 ℃ or lower after, approach metallic film and form reflectance coating through forming one by sputter equipment in the pit surface side.Then, will drip on the compact disc substrate that has been formed with thin film reflective layer above that, and on this compact disc substrate, evenly apply this resin through spin coating method as UV (ultraviolet ray) hardening resin of bonding agent.After this, the coated film and the PC film that are formed by the UV hardening resin on this compact disc substrate are maintained at relative position, and bonding subsequently.The bonding process of PC film is carried out in a vacuum., this must prevent on the gluing of surfaces of compact disc substrate and PC film, to form the situation of wrinkle or gap generation error in reading thereby being.Then, to the CD irradiation ultraviolet radiation that is bonded with the PC film and this UV hardening resin that hardens, thereby make this compact disc substrate and PC film bonding.In addition; UV constrictive type hard coating material is dripped to and coils on the bonding PC film, evenly is coated with this hard coating material on the PC film, and passes through once more this hard coating material of irradiation ultraviolet radiation sclerosis; Thereby produce a hard coat, accomplish the preparation of CD thus.
Therefore, stamper is the key of making CD, is related to the quality of the recording layer of the CD that transfer printing forms, and is the strictest to the requirement that stamper is made.The manufacturing of stamper relates to processing technologys such as spin coating, hard baking, soft baking and laser imprinting; Existing laser recording device is common and the roasting plant installation site is closer; And the layout of equipment can directly have influence on the so easy performance that influences laser equipment of the performance of equipment, produces problems such as the laser recording device is aging, the imprinting effect is bad.And the stamper of Blu-ray Disc makes that the station relate to is many, and the stroke of Handling device such as mechanical arm horizontal translation is 2500mm nearly, and requirement will very accurately be sent to corresponding station to substrate and makes.Can there be certain deviation in existing equipment when being sent to corresponding station to substrate.How the rational deployment stamper is made each technique unit on the line, and the optimization production line improves end product quality, needs to be resolved hurrily.
Therefore, be badly in need of a kind of rationally distributed, the Blu-ray Disc stamper manufacturing system and method that can improve end product quality, optimization production line.
Summary of the invention
One object of the present invention is to provide a kind of rationally distributed, Blu-ray Disc stamper manufacturing system that can improve end product quality, optimization production line.
Another object of the present invention is to provide a kind of Blu-ray Disc stamper manufacturing approach that can effectively improve the stamper end product quality.
For realizing above-mentioned purpose; Technical scheme of the present invention is: a kind of Blu-ray Disc stamper manufacturing system is provided; Said stamper is used to make CD; It comprises cleaning device, spin coating device, hard apparatus for baking, cooling device, soft apparatus for baking, laser Writing device, developing apparatus and electroplanting device; Wherein, said Blu-ray Disc stamper manufacturing system comprises that also horizontal linear transmitting device, mechanical arm and two are parallel to each other and horizontally disposed line slideway, and said horizontal linear transmitting device and two said line slideways are slidingly connected; Said mechanical arm is fixedly mounted on the said horizontal linear transmitting device; Said electroplanting device, developing apparatus, cleaning device and spin coating device are arranged in order a side that is arranged on said line slideway along said line slideway direction, and said hard apparatus for baking, soft apparatus for baking and cooling device set gradually the opposite side that is arranged in said line slideway along said line slideway direction, and said laser Writing device is arranged and is arranged at the end of said line slideway away from said hard apparatus for baking; Said mechanical arm grasps stamper, and said horizontal linear transmitting device drives said mechanical arm and transmits stamper to related device along line slideway.
Preferably, comprise also being the pedestal that level is put that said line slideway is fixed on the said pedestal.Said pedestal protrudes out vertically upward and is formed with the two guide rail reference fields that are parallel to each other, and two said line slideways are close to two said guide rail reference fields respectively.Said guide rail reference field plays the role of positioning to said line slideway, thereby has guaranteed the depth of parallelism of two line slideways well, improves the straight-line transmitting transmission quality.
Preferably; Said horizontal linear transmitting device comprises mount pad, linear electric motors and two slides; Offer the chute that is complementary with said line slideway on the said slide; Two said slides are fixed on the two ends, bottom of said mount pad and are slidingly connected respectively with said line slideway, and said mechanical arm is fixed on the said mount pad, and the output terminal of said linear electric motors is fixedly connected and drives said mount pad with said mount pad and drives mechanical arm along said line slideway slip.Said horizontal linear transmitting device also comprises some limited blocks, and said limited block is between two line slideways and be distributed in the two ends of said line slideway, and said limited block stops said mount pad.Through said limited block, prevent that the horizontal linear transmitting device breaks away from line slideway, improves the reliability of system.
Preferably; Said horizontal linear transmitting device also comprises displacement transducer, and said displacement transducer comprises read head and grating chi, and said read head is fixed on the mount pad; Said grating chi is laid on the pedestal along said line slideway level, and said read head is over against said grating chi.When mechanical arm moved horizontally, read head moved horizontally with mount pad, and through with the grating chi between cooperate and produce displacement signal, through this displacement signal, can the accurate position that must draw mechanical arm, improve the precision of the mobile extracting stamper of mechanical arm.
Preferably, also comprise two vertical transfer devices, two said vertical transfer devices are separately positioned in said hard apparatus for baking and the said soft apparatus for baking.Said vertical transfer device comprises holder, guide rod supports seat, motor, screw mandrel, push rod supporting seat, two guide rods and two push rods; Said hard apparatus for baking and said soft apparatus for baking have insulation cavity and heating plate respectively; Said heating plate is positioned at said insulation cavity; A two said push rods end respectively are fixedly connected with said push rod supporting seat, and the other end passes the bottom of said insulation cavity with articulating and stretches in the said insulation cavity, and the end that said push rod is positioned at the insulation cavity is provided with the top that is used to carry stamper; Said holder is fixed on said insulation cavity bottom; A two said guide rods end respectively are fixedly connected with said holder, and the other end passes said push rod supporting seat with articulating and is fixedly connected with said guide rod supports seat, and said motor is fixed on the said guide rod supports seat; Said screw mandrel one end is fixedly connected with the output terminal of said motor; The other end is fixedly connected with said push rod supporting seat, and the said screw mandrel of said motor-driven upwards promotes the push rod supporting seat, and said push rod supporting seat drives said push rod along said guide rod and in said insulation cavity, does vertical displacement movement.In the process of making stamper; According to the principle of expanding with heat and contract with cold, when just having arrived hard baking or soft baking station under the transmission of stamper at mechanical arm, substrate cannot be directly with the very high heating plate contact of temperature; But after staying for some time from the distant position of heating plate; In time prolongation again, stamper slowly descends, up to the hot plate contact.Said vertical transfer device adopts high-precision screw mandrel under the driving of motor, under the auxiliary guiding of guide rod, realizes moving up and down of stamper.
Preferably, said motor is servomotor and planetary reduction gear is installed.Servomotor does that fast response is fast, overload capacity is big, speed-regulating range width; Control accuracy height and long service life; Reliable and stable driving power can be provided, and said planetary reduction gear can effectively be controlled the velocity of rotation of servomotor output, improves the precision of position adjustments.
Correspondingly; The present invention provides a kind of simultaneously and has utilized aforesaid Blu-ray Disc stamper manufacturing system to make the method for Blu-ray Disc stamper, and may further comprise the steps: (1) is sent to glass substrate the surface clean of carrying out glass substrate in the cleaning device through the horizontal linear transmitting device along line slideway; (2) along line slideway glass substrate is sent in the spin coating device the certain thickness carbonization reflection of the glass substrate surface spin coating after cleaning up anti-reflection layer through the horizontal linear transmitting device; (3) glass substrate is sent in the hard apparatus for baking along line slideway through the horizontal linear transmitting device, the glass substrate after the spin coating carbonization reflection anti-reflection layer is toasted firmly; (4) glass substrate is sent in the cooling device along line slideway through the horizontal linear transmitting device and cools off; (5) along line slideway glass substrate is sent to the certain thickness photoresist of spin coating in the spin coating device through the horizontal linear transmitting device; (6) along line slideway the glass substrate that glass substrate is sent in the soft apparatus for baking revolving after the photoresist is carried out soft baking through the horizontal linear transmitting device; (7) glass substrate is sent in the cooling device along line slideway through the horizontal linear transmitting device and cools off; (8) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out the laser imprinting in the laser Writing device; (9) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out development treatment in the developing apparatus; (10) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out metal coating in the electroplanting device.
Compared with prior art, because Blu-ray Disc stamper manufacturing system of the present invention is arranged in order a side that is arranged on line slideway with electroplanting device, developing apparatus, cleaning device and spin coating device along the line slideway direction; Hard apparatus for baking, soft apparatus for baking and cooling device are set gradually the opposite side that is arranged in line slideway along the line slideway direction, and said laser Writing device arranges and to be arranged at the end of line slideway away from said hard apparatus for baking, avoided the laser Writing device to receive the influence of hard apparatus for baking and soft apparatus for baking high-temperature; The serviceable life of protection laser Writing device; Improve processing characteristics,, utilize the horizontal linear transmitting device to drive and drive mechanical arm between different device, to move horizontally along line slideway simultaneously through arranging line slideway; Mechanical arm taking and placing accurately transmit stamper; Thereby the transmission of accomplishing between each processing unit (plant) is connected, and Blu-ray Disc stamper manufacturing system of the present invention is rationally distributed, the serviceable life of not only having improved processing unit (plant); Guarantee that the processing characteristics of processing unit (plant) can bring into play more fully; And optimized the stamper production line, improved the stamper end product quality, thereby sound assurance is provided for making the high-quality CD of high precision.Correspondingly, Blu-ray Disc stamper manufacturing approach of the present invention can effectively improve the end product quality of Blu-ray Disc stamper.
Description of drawings
Figure 1A is the structural representation of existing single-layer blue ray disc.
Figure 1B is the structural representation of existing double-layer blue ray disc.
Fig. 1 C is the existing schematic flow sheet of making the Blu-ray Disc stamper.
Fig. 2 is the floor map of Blu-ray Disc stamper manufacturing system of the present invention.
Fig. 3 is the structural representation of horizontal linear transmitting device and pedestal among Fig. 1.
Fig. 4 is the structural representation of vertical transfer device of the present invention.
Fig. 5 is the process flow diagram of Blu-ray Disc stamper manufacturing approach of the present invention.
Embodiment
With reference now to accompanying drawing, describe embodiments of the invention, the similar elements label is represented similar elements in the accompanying drawing.As stated; Blu-ray Disc stamper manufacturing system of the present invention is according to the characteristics of stamper manufacturing process; Each technique unit of rational deployment; But make full use of the space and be provided with can straight-line horizontal linear transmitting device and the vertical transfer device of vertical movement accomplish the transportation of stamper on all stations, rationally distributed, can improve end product quality, optimize the stamper production line.
With reference to figure 2; The Blu-ray Disc stamper manufacturing system of the embodiment of the invention; It comprises cleaning device 11, spin coating device 12, hard apparatus for baking 13, cooling device, soft apparatus for baking 16, laser Writing device 17, developing apparatus 17 and electroplanting device 19; Said cooling device comprises first cooling device 14 and second cooling device 15, and said first cooling device 14 is used for cooling off after the hard baking of stamper, and second cooling device 15 is used for cooling off after the soft baking of stamper.But the said apparatus centralized arrangement is on the workbench 10 of level storing one; Wherein, Said Blu-ray Disc stamper manufacturing system comprises that also horizontal linear transmitting device 20, mechanical arm 21 and two are parallel to each other and horizontally disposed line slideway 22; Said horizontal linear transmitting device 20 and two said line slideways 22 are slidingly connected; Said mechanical arm 21 is fixedly mounted on the said horizontal linear transmitting device 20; Said electroplanting device 19, developing apparatus 17, cleaning device 11 and spin coating device 12 are arranged in order a side that is arranged on said line slideway 22 along said line slideway 22 directions; Said hard apparatus for baking 13, soft apparatus for baking 16, first cooling device 14 and second cooling device 15 set gradually the opposite side that is arranged in said line slideway 22 along said line slideway 22 directions, and said laser Writing device 17 is arranged and is arranged at the end of said line slideway 22 away from said hard apparatus for baking 13, and the said apparatus correspondence is provided with the loading tray that loads stamper; Said mechanical arm 21 grasps stamper, and said horizontal linear transmitting device 20 drives said mechanical arm 21 and handles along carrying out different process in the loading tray in line slideway 22 transmission stamper to the related devices.Between said second cooling device 15 and laser Writing device 17; Also be provided with buffer storage 23, chip-loading apparatus 24 and finished product discharge mechanism 25; When making stamper, the stamper substrate is placed into waits for crawled processing in the buffer storage 23, and transfers to as required in the chip-loading apparatus 24 through other auxiliary manipulator; Mechanical arm 21 grasps the stamper substrate from chip-loading apparatus 24; And the stamper correspondence is sent in the different device processes, the stamper after the processing is placed in the finished product discharge mechanism 25, waits for next step detection or transfer.Further, the present invention can comprise pick-up unit, for example in order to detect the physical dimension of stamper pit, and owing to the existence of horizontal linear transmitting device 20, can be according to the position of practical layout cloth detection device.
Cooperation is with reference to figure 3, and Blu-ray Disc stamper manufacturing system of the present invention also comprises the pedestal 26 that is the level storing, and said line slideway 22 is fixed on the said pedestal 26.Said pedestal 26 protrudes out vertically upward and is formed with two guide rail reference field 262, the two said line slideways 22 that are parallel to each other and is close to two said guide rail reference fields 262 respectively.262 pairs of said line slideways 22 of said guide rail reference field play the role of positioning, thereby have guaranteed the depth of parallelism of two line slideways 22 well, improve the straight-line transmitting transmission quality, guarantee that mechanical arm 21 accurately is delivered to each station to stamper stably and makes processing.Said horizontal linear transmitting device 20 comprises mount pad 210, linear electric motors 220 and two slides 230, offers the chute 232 that is complementary with said line slideway 22 on the said slide 230, and said chute 232 engages with said line slideway 22 and is slidingly connected.Two said slides 230 are fixed on the two ends, bottom of said mount pad 210 and are slidingly connected respectively with said line slideway 22; Said mechanical arm 21 is fixed on the said mount pad 210, and the output terminal of said linear electric motors 220 is fixedly connected and drives said mount pad 210 with said mount pad 210 and drives mechanical arm 21 along said line slideway 22 slips.Said horizontal linear transmitting device 20 also comprises some limited blocks 240, and said limited block 240 is between two line slideways 22 and be distributed in the two ends of said line slideway 22, and said limited block 240 stops said mount pad 210.Be appreciated that ground; Said limited block 240 also can be arranged at said slide 230 and stop; Play restriction equally, through said limited block 240, the horizontal slip stroke of controlling level straight-line transmitting conveying device 20; Prevent that horizontal linear transmitting device 20 breaks away from line slideway 22, improves the reliability of system.
Preferably; Said horizontal linear transmitting device 20 also comprises displacement transducer; Said displacement transducer comprises read head 252 and grating chi 254; Said read head 252 is fixed on through installing plate 251 on the outer wall of a side of mount pad 210, and said grating chi 254 is laid on the pedestal 26 along said line slideway 22 levels, and said read head 252 is over against said grating chi 254.When mechanical arm 21 moves horizontally; Read head 252 moves horizontally with mount pad 210, and through with grating chi 254 between cooperate and produce displacement signal, through this displacement signal; Can the accurate position that must draw mechanical arm 21, improve the precision of the mobile extracting stamper of mechanical arm 21.During the design; Pedestal 26 processing to line slideway 22 is installed also propose higher requirement; Require the flatness of pedestal 26 will reach 0.1mm; The flatness of pedestal 26 had both guaranteed the parallel of two line slideway 22 upper and lower surfaces, and the read head 252 and the distance error between the grating chi 254 that have guaranteed displacement transducer again are in the margin tolerance that both allow.Equipment is in operational process, no matter the speed of mechanical arm 21 translations is fast and slow, all very smooth and easy, the phenomenon that sends out a warning and report to the police does not appear in read head 252 in the 2500mm stroke.
With reference to figure 4, Blu-ray Disc stamper manufacturing system of the present invention comprises that also two vertical transfer devices, 27, two said vertical transfer devices 27 are separately positioned in said hard apparatus for baking 13 and the said soft apparatus for baking 16.Said vertical transfer device 27 comprises holder 270, guide rod supports seat 271, motor, screw mandrel 273, push rod supporting seat 274, two guide rods 275 and two push rods 276; Said hard apparatus for baking 13 and said soft apparatus for baking 16 have insulation cavity 167 and heating plate 176 respectively; Said insulation cavity 167 closes lid by two parts up and down and cooperates and form; Said heating plate 176 is positioned at said insulation cavity 167; Two said push rods 276 end respectively are fixedly connected with said push rod supporting seat 274, and the other end passes the bottom of said insulation cavity 167 with articulating and stretches in the said insulation cavity 167, and said push rod 276 is provided with guide pin bushing with the position that said insulation cavity 167 articulates.The end that said push rod 276 is positioned at insulation cavity 167 is provided with the top 2762 that is used to carry stamper 100; Carry carriage 120 on the said top 2762; Said carriage is used to carry stamper 100, and said carriage 120 bottoms convex with locating piece 122, and correspondence offers locating slot 177 on the said heating plate 176; Said locating piece 122 be positioned at said locating slot 177 directly over; Realize precisely location through locating piece 122 and locating slot 177, guarantee that stamper 100 falls on the effective heating region on the heating plate 176, improve heats.The bottom correspondence of said insulation cavity 167 offers through hole; Said insulation cavity 167 is provided with collet 277 at the position with said push rod 276 pivot joints; Said collet 277 is set in the said through hole; Said push rod 276 passes said collet 277, through the setting of collet 277, can prevent the loss of heat.Said holder 270 is fixed on said insulation cavity 167 bottoms; Two said guide rods 275 end respectively are fixedly connected with said holder 270; The other end passes said push rod supporting seat 274 with articulating and is fixedly connected with said guide rod supports seat 271; Said push rod supporting seat 274 is equipped with linear bearing 2742 with the position that said guide rod 275 articulates, and said guide rod 275 can be stablized swimmingly articulate with push rod supporting seat 274, guarantees the reliability of guide effect.Said motor is fixed on the said guide rod supports seat 271; Said screw mandrel 273 1 ends are fixedly connected with the output terminal of said motor; The other end is fixedly connected with said push rod supporting seat 274, and preferably, said motor is servomotor 272 and planetary reduction gear 278 is installed.Servomotor 272 does that fast response is fast, overload capacity is big, speed-regulating range width; Control accuracy height and long service life; Reliable and stable driving power can be provided, and said planetary reduction gear 278 can effectively be controlled the velocity of rotation of servomotor 272 outputs, improves the precision of position adjustments.Also be provided with shaft coupling 279 between said planetary reduction gear 278 and the said screw mandrel 273, realize the output of servomotor 272 is sent on the screw mandrel 273 through shaft coupling 279.The said screw mandrel 273 of said motor-driven upwards promotes push rod 276 supporting seats 274, and said push rod 276 supporting seats 274 drive said push rod 276 along said guide rod 275 and in said insulation cavity 167, do vertical displacement movement.In the process of making stamper; According to the principle of expanding with heat and contract with cold, when stamper 100 had just arrived hard baking or soft baking station under the transmission of mechanical arm 21, substrate cannot be directly with very high heating plate 176 contacts of temperature; But after staying for some time from heating plate 176 distant positions; In time prolongation again, stamper 100 slowly descends, up to the hot plate contact.Said vertical transfer device 27 adopts high-precision screw mandrel 273 under the driving of motor, under the auxiliary guiding of guide rod 275, realizes moving up and down of stamper 100.
The principle of work of Blu-ray Disc stamper manufacturing system of the present invention is described below: when making stamper; The stamper substrate is stored in the buffer storage 23; Transfer to as required in the chip-loading apparatus 24 through other auxiliary manipulator 21; Mechanical arm 21 grasps the stamper substrate from chip-loading apparatus 24; The linear electric motors 220 drive installation seats 210 of horizontal linear transmitting device 20 move horizontally along line slideway 22; Thereby drive the position that mechanical arm 21 moves to cleaning device 11 correspondences, mechanical arm 21 is sent into stamper in the cleaning device 11 and is cleaned, likewise; Be sent to successively in spin coating device 12, hard apparatus for baking 13, first cooling device 14, spin coating device 12, soft apparatus for baking 16, second cooling device 15, laser Writing device 17, developing apparatus 17 and the electroplanting device 19 and carry out corresponding processed, and the stamper after will machining at last is sent in the finished product discharge mechanism 25.Because it is many that stamper is made the station that relates to; The stroke of mechanical arm 21 horizontal translations is 2500mm nearly; This is crossed range request and will very accurately be sent to corresponding device thereof to stamper and carry out processing and fabricating; The present invention adopts the higher linear electric motors of present precision 220 as driving power, adopts high-precision line slideway 22, has improved the displacement control accuracy greatly.And at hard baking and these two stations of soft baking, according to the requirement of manufacture craft, stamper changes along with change of time with the distance between the heating plate 176, has adopted high precision screw mandrel 273 with servomotor 272 structures.
With reference to figure 5, Blu-ray Disc stamper manufacturing approach of the present invention may further comprise the steps:
(S001) glass substrate is sent to the surface clean of carrying out glass substrate in the cleaning device through the horizontal linear transmitting device along line slideway;
(S002) along line slideway glass substrate is sent in the spin coating device the certain thickness carbonization reflection of the glass substrate surface spin coating after cleaning up anti-reflection layer through the horizontal linear transmitting device;
(S003) glass substrate is sent in the hard apparatus for baking along line slideway through the horizontal linear transmitting device, the glass substrate after the spin coating carbonization reflection anti-reflection layer is toasted firmly;
(S004) glass substrate is sent in the cooling device along line slideway through the horizontal linear transmitting device and cools off;
(S005) along line slideway glass substrate is sent to the certain thickness photoresist of spin coating in the spin coating device through the horizontal linear transmitting device;
(S006) along line slideway the glass substrate that glass substrate is sent in the soft apparatus for baking revolving after the photoresist is carried out soft baking through the horizontal linear transmitting device;
(S007) glass substrate is sent in the cooling device along line slideway through the horizontal linear transmitting device and cools off;
(S008) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out the laser imprinting in the laser Writing device;
(S009) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out development treatment in the developing apparatus;
(S010) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out metal coating in the electroplanting device.
Particularly; At first will load the glass substrate surface that operation sends here through hairbrush, pure water, chemical reagent etc. cleans up; The certain thickness CAL of glass substrate surface spin coating after cleaning up (carbonization reflection anti-reflection layer); Fundamental purpose prevents the laser-bounce in the follow-up laser imprinting, improves the effect of laser imprinting; Glass substrate to after the spin coating CAL toasts firmly; Hard baking hot plate temperature requires to reach about 250 degree, and the control certain hour makes the residue evaporation among the CAL, this operation simultaneously; Also make to be difficult among the CAL producing bubble etc., make it form stable material more easily; Cooling device is used for cooling from baking substrate that (baking comprises hard baking and soft baking), operation was come out, mainly in order to reduce the risk that glass substrate and/or CAL and/or photoresist break, improves glass substrate and goes up the stability of rete; The certain thickness photoresist of CAL surface spin coating on the glass substrate after cooling, and get into soft roasting procedure; Soft baking hot plate temperature requires to reach 80～100 degree, and the control certain hour makes the residue evaporation in the photoresist, and this operation also makes to be difficult in the photoresist producing bubble etc. simultaneously, makes it form stable material more easily, gets into refrigerating work procedure afterwards once more; The photoresist that comes out after cooling is once more carried out the laser imprinting, through signal coder with the source of parents signal loading to laser and record on the photoresist of glass substrate; Then the exposure region after the laser imprinting is developed, utilize developer solution to form data pits, metallize afterwards; In metallization (like plating, sputter) operation,, make metal stamping and pressing and just can be placed on massive duplication on the injection machine because the pressing mold that glass substrate can not be used for duplicating at last must arrive information copy on the glass substrate on the pressing mold of metal (nickel) through metallized method.The preferential sputtering process that passes through metallizes; Carry out the unloading of finished product stamper after the completion.The present invention enters into matting through the glass substrate that loads operation and will be used for processing stamper, after sputter nickel step is accomplished, can the stamper finished product be placed into again in the finished product unloading operation.Wherein, when equipment broke down, the present invention can be placed into substrate in the buffer memory operation.
Compared with prior art; Because Blu-ray Disc stamper manufacturing system of the present invention, electroplanting device 19, developing apparatus 17, cleaning device 11 and spin coating device 12 are arranged in order a side that is arranged on line slideway 22 along line slideway 22 directions, hard apparatus for baking 13, soft apparatus for baking 16 and cooling device are set gradually the opposite side that is arranged in line slideway 22 along line slideway 22 directions; And said laser Writing device 17 arrangements are arranged at the end of line slideway 22 away from said hard apparatus for baking 13; Avoid laser Writing device 17 to receive the influence of hard apparatus for baking 13 and soft apparatus for baking 16 high-temperatures, in the serviceable life of protection laser Writing device 17, improved processing characteristics; Simultaneously through arranging line slideway 22; Utilize horizontal linear transmitting device 20 to drive and drive mechanical arm 21 and move horizontally between different device along line slideway 22, mechanical arm 21 taking and placing accurately transmit stamper, thereby the transmission of accomplishing between each processing unit (plant) is connected; Blu-ray Disc stamper manufacturing system of the present invention is rationally distributed; Not only improved the serviceable life of processing unit (plant), guaranteed that the processing characteristics of processing unit (plant) can be brought into play more fully, and optimized the stamper production line; Improve the stamper end product quality, thereby sound assurance is provided for making the high-quality CD of high precision.
The concrete structure of process principles such as cleaning device 11 involved in the present invention, spin coating device 12, cooling device, laser Writing device 17, developing apparatus 17 and electroplanting device 19 and mechanical arm 21 is well known to those of ordinary skill in the art, no longer does detailed explanation at this.
The above disclosed the preferred embodiments of the present invention that are merely can not limit the present invention's interest field with this, and the equivalent variations according to claim of the present invention is done still belongs to the scope that the present invention is contained.
Claims (10)
1. Blu-ray Disc stamper manufacturing system; Comprise cleaning device, spin coating device, hard apparatus for baking, cooling device, soft apparatus for baking, laser Writing device, developing apparatus and electroplanting device; It is characterized in that: comprise that also horizontal linear transmitting device, mechanical arm and two are parallel to each other and horizontally disposed line slideway; Said horizontal linear transmitting device and two said line slideways are slidingly connected; Said mechanical arm is fixedly mounted on the said horizontal linear transmitting device; Said electroplanting device, developing apparatus, cleaning device and spin coating device are arranged in order a side that is arranged on said line slideway along said line slideway direction; Said hard apparatus for baking, soft apparatus for baking and cooling device set gradually the opposite side that is arranged in said line slideway along said line slideway direction; Said laser Writing device is arranged and is arranged at the end of said line slideway away from said hard apparatus for baking, and said mechanical arm grasps stamper, and said horizontal linear transmitting device drives said mechanical arm and transmits stamper to related device along line slideway.
2. Blu-ray Disc stamper manufacturing system as claimed in claim 1 is characterized in that: also comprise being the pedestal that level is put, said line slideway is fixed on the said pedestal.
3. Blu-ray Disc stamper manufacturing system as claimed in claim 2 is characterized in that: said pedestal protrudes out vertically upward and is formed with the two guide rail reference fields that are parallel to each other, and two said line slideways are close to two said guide rail reference fields respectively.
4. Blu-ray Disc stamper manufacturing system as claimed in claim 2; It is characterized in that: said horizontal linear transmitting device comprises mount pad, linear electric motors and two slides; Offer the chute that is complementary with said line slideway on the said slide; Two said slides are fixed on the two ends, bottom of said mount pad and are slidingly connected respectively with said line slideway; Said mechanical arm is fixed on the said mount pad, and the output terminal of said linear electric motors is fixedly connected and drives said mount pad with said mount pad and drives mechanical arm along said line slideway slip.
5. Blu-ray Disc stamper manufacturing system as claimed in claim 4; It is characterized in that: said horizontal linear transmitting device also comprises some limited blocks; Said limited block is between two line slideways and be distributed in the two ends of said line slideway, and said limited block stops said mount pad.
6. Blu-ray Disc stamper manufacturing system as claimed in claim 4; It is characterized in that: said horizontal linear transmitting device also comprises displacement transducer; Said displacement transducer comprises read head and grating chi; Said read head is fixed on the mount pad, and said grating chi is laid on the pedestal along said line slideway level, and said read head is over against said grating chi.
7. Blu-ray Disc stamper manufacturing system as claimed in claim 1 is characterized in that: also comprise two vertical transfer devices, two said vertical transfer devices are separately positioned in said hard apparatus for baking and the said soft apparatus for baking.
8. Blu-ray Disc stamper manufacturing system as claimed in claim 7; It is characterized in that: said vertical transfer device comprises holder, guide rod supports seat, motor, screw mandrel, push rod supporting seat, two guide rods and two push rods; Said hard apparatus for baking and said soft apparatus for baking have insulation cavity and heating plate respectively, and said heating plate is positioned at said insulation cavity, and two a said push rods end respectively are fixedly connected with said push rod supporting seat; The other end passes the bottom of said insulation cavity with articulating and stretches in the said insulation cavity; The end that said push rod is positioned at the insulation cavity is provided with the top that is used to carry stamper, and said holder is fixed on said insulation cavity bottom, and two a said guide rods end respectively are fixedly connected with said holder; The other end passes said push rod supporting seat with articulating and is fixedly connected with said guide rod supports seat; Said motor is fixed on the said guide rod supports seat, and said screw mandrel one end is fixedly connected with the output terminal of said motor, and the other end is fixedly connected with said push rod supporting seat; The said screw mandrel of said motor-driven upwards promotes the push rod supporting seat, and said push rod supporting seat drives said push rod along said guide rod and in said insulation cavity, does vertical displacement movement.
9. Blu-ray Disc stamper manufacturing system as claimed in claim 8 is characterized in that: said motor is servomotor and planetary reduction gear is installed.
10. a use such as each described Blu-ray Disc stamper manufacturing system of claim 1-9 are made the method for Blu-ray Disc stamper, it is characterized in that: may further comprise the steps:
(1) glass substrate is sent to the surface clean of carrying out glass substrate in the cleaning device through the horizontal linear transmitting device along line slideway;
(2) along line slideway glass substrate is sent in the spin coating device the certain thickness carbonization reflection of the glass substrate surface spin coating after cleaning up anti-reflection layer through the horizontal linear transmitting device;
(3) glass substrate is sent in the hard apparatus for baking along line slideway through the horizontal linear transmitting device, the glass substrate after the spin coating carbonization reflection anti-reflection layer is toasted firmly;
(4) glass substrate is sent in the cooling device along line slideway through the horizontal linear transmitting device and cools off;
(5) along line slideway glass substrate is sent to the certain thickness photoresist of spin coating in the spin coating device through the horizontal linear transmitting device;
(6) along line slideway the glass substrate that glass substrate is sent in the soft apparatus for baking revolving after the photoresist is carried out soft baking through the horizontal linear transmitting device;
(7) glass substrate is sent in the cooling device along line slideway through the horizontal linear transmitting device and cools off;
(8) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out the laser imprinting in the laser Writing device;
(9) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out development treatment in the developing apparatus;
(10) glass substrate is sent to along line slideway through the horizontal linear transmitting device and carries out metal coating in the electroplanting device.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106145538A CN102054499B (en) | 2010-12-30 | 2010-12-30 | System and method for manufacturing mother disc of blu-ray disc |
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| CN2010106145538A CN102054499B (en) | 2010-12-30 | 2010-12-30 | System and method for manufacturing mother disc of blu-ray disc |
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| CN102054499B true CN102054499B (en) | 2012-06-20 |
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| CN102270472B (en) * | 2011-04-02 | 2013-11-27 | 河南凯瑞数码股份有限公司 | Motherboard for blueray optical disc and manufacturing method for motherboard |
| CN112397098B (en) * | 2020-11-30 | 2021-11-02 | 北京中科开迪软件有限公司 | Heating equipment for mother disc of blue-ray disc |
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| US20080038455A1 (en) * | 2004-07-07 | 2008-02-14 | Nne, Inc. | Multilayer Optical Disc and Method and Apparatus For Making Same |
| CN201638560U (en) * | 2009-12-01 | 2010-11-17 | 东莞宏威数码机械有限公司 | Production system for manufacturing blue-ray recording compact disk |
| CN201629148U (en) * | 2010-01-27 | 2010-11-10 | 东莞宏威数码机械有限公司 | Production system for manufacturing single-sided and double-layered blue-ray disc |
| CN201965910U (en) * | 2010-12-30 | 2011-09-07 | 东莞宏威数码机械有限公司 | Blu-ray disc stamper manufacturing system |
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