CN201698768U - Positioning device based on magnetic-levitation planer motor - Google Patents
Positioning device based on magnetic-levitation planer motor Download PDFInfo
- Publication number
- CN201698768U CN201698768U CN2010201798209U CN201020179820U CN201698768U CN 201698768 U CN201698768 U CN 201698768U CN 2010201798209 U CN2010201798209 U CN 2010201798209U CN 201020179820 U CN201020179820 U CN 201020179820U CN 201698768 U CN201698768 U CN 201698768U
- Authority
- CN
- China
- Prior art keywords
- mover
- ungulate
- cover plate
- device based
- bloom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Linear Motors (AREA)
Abstract
The utility model discloses positioning device based on a magnetic-levitation planer motor, which comprises a stator part. The stator part comprises a stator cover plate and a plurality of horseshoe-shaped coils arranged on the stator cover plate; a plurality of horizontal sensors arranged under the cover plate; a working table hole is arranged at the middle of the horseshoe-shaped coil, and a plurality of vertical sensors are evenly distributed around the hole. A steel block is arranged on a balance block; a permanent-magnet array is embedded on the upper surface of the steel block, and a pushing device is fixedly connected with the balance seat corresponding to two long sides of the steel block; an active cell part freely moving along the horizontal directions (X, Y) and the vertical direction (Z) is arranged between the permanent-magnet array and the stator part and comprises an active cell bracket; a plurality of armatures are arranged on the upper surface of the active cell bracket and respectively correspond to the horseshoe-shaped coils; a work table is buldged from the center of the upper surface of the active cell bracket and passes through the work table hole; and a plurality of driving coils of which the number is equal to that of the armatures are arranged in the active cell bracket.
Description
Technical field
The utility model relates to a kind of locating device based on maglev planar motor.
Background technology
The location that all needs large range nanometer grade in fields such as IC (integrated circuit) manufacturing, ultraprecise processing and nanometer technologies, and the support technology that high performance ultraprecise positioning table is these fields, the height of its bearing accuracy becomes the key factor of these current front line science development of restriction.
Along with the IC integrated level is more and more higher, require groove more and more thinner, the positioning table of IC equipment litho machine just needs rapid movement and pinpoint requirement; Except IC, fields such as inertial navigation system, armament systems and optical aspherical surface part processing all need big stroke ultraprecise processing, often require its bearing accuracy to reach nanoscale.
The traditional mechanical locating device adopts spindle arrangement to realize the location usually, and its existing problem is that precision is low, can not satisfy the demand of ultraprecise location.
Summary of the invention
The purpose of this utility model is to provide a kind of accurately positioning means for positioning that is suitable at a high speed, this device is based on that the principle of maglev planar motor makes, can overcome the low shortcoming of traditional leading screw bearing accuracy, it is little also can to overcome the Piezoelectric Driving range of movement, is not suitable for the deficiency of big stroke occasion.
For reaching above purpose, the utility model takes following technical scheme to be achieved: a kind of locating device based on maglev planar motor, it is characterized in that, comprise by the stationary part of upright supports on the balance seat, stationary part comprises the stator cover plate, is provided with a plurality of ungulate coils above it, is provided with a plurality of horizon sensors that are enclosed in around the mover part below the cover plate, have the worktable hole in the ungulate coil centre position of cover plate in addition, be evenly equipped with a plurality of vertical sensors around the hole; Described balance seat is provided with the limited bloom of horizontal direction, and this is inlaid with the permanent magnet array above bloom, is fixedly connected with the distance that propulsion plant is used to regulate the bloom vertical moving on the balance seat of bloom two long limit correspondence positions; Between permanent magnet array and stationary part, be provided with horizontal X, Y direction, the free-moving mover part of vertical Z direction, mover partly comprises the mover support, it is relative with described a plurality of ungulate coils respectively that the mover rack upper surface is provided with a plurality of armature, mover rack upper surface central protuberance one worktable passes the worktable hole of cover plate, the a plurality of drive coils that equate with ungulate coil quantity are installed in the mover support, and the initial position of mover part is limited by the fixture block that is arranged on the bloom.
In the such scheme, described a plurality of ungulate coils are four, form rectangle aspiration-type suspension structure, and the suspending power of mover part is provided, and four armature of mover rack upper surface relative set are relative with four ungulate coils respectively; A plurality of drive coils in the mover support also are four.These four drive coils are pressed orthogonal in twos arrangement mode and are arranged.Described ungulate coil end has narrow groove, is inserted in the narrow groove by clamp it is stuck on the stator cover plate.Per two ungulate coil outsides can be provided with a protective cover.
A plurality of horizon sensors that described cover plate is provided with below can be six current vortex sensors, the horizontal shift that is used to measure mover; A plurality of vertical sensors can be three current vortex sensors around being distributed on the worktable hole, are used to measure the suspension attitude of mover.
In the described permanent magnet array, the permanent magnetic iron block length and width equate, are 5mm, highly are 20mm, along X to Y to equidistant distribution, spacing 0.1mm, and each permanent magnetic iron block polar orientation unanimity are with the generation uniform magnetic field.
The described propulsion plant that connects firmly on the balance seat is four, each propulsion plant comprises two fixed dams that are fixed on the balance seat, be provided with nut between the fixed dam and be connected the bolt thread connection that advances baffle plate with one, advance the baffle plate front end to be provided with the forward block on inclined-plane, drive bolt by the rotation nut and forward block is advanced or retreat, thereby regulate the perpendicular displacement of bloom.
Locating device of the present utility model is based on the principle design of maglev planar motor, mover is a core, freely is placed on below the stator, and mover is based on the mover support, the ungulate coil of respective numbers that is connected above the support on polylith armature and the stator is relative, and the two finishes the action that suspends jointly.The drive coil of corresponding armature quantity is installed in the mover support, and two adjacent lines circles are vertically placed, and become staggered symmetry arrangement.Place the permanent magnet array that is embedded in the bloom below the mover,, around permanent magnet array, propulsion plant is set with leveling for guaranteeing the level of permanent magnet array.
Locating device of the present utility model can make the mover stable suspersion and finish the motion of X in the surface level, Y both direction and around the rotation of vertical direction Z, because zerofriction force in the motion process, so kinematic accuracy improves greatly than mechanical type.
Description of drawings
Fig. 1 is the locating device one-piece construction figure of the utility model based on maglev planar motor.
Fig. 2 is the stationary part structural representation among Fig. 1.
Fig. 3 is the mover part-structure synoptic diagram among Fig. 1.
Fig. 4 is the permanent magnet array arrangement structural drawing among Fig. 1.
Fig. 5 is the structural drawing of the propulsion plant among Fig. 1.
Among Fig. 1 to Fig. 5: 1, stator cover plate; 2, ungulate coil; 3, worktable; 4, vertical sensor; 5, protective cover; 6, mover support; 7, sensor support base; 8, poly (methyl methacrylate) plate; 9, column; 10, balance seat; 11, propulsion plant; 12, bloom; 13, permanent magnet array; 14, fixture block; 15, drive coil; 16, limited block; 17, glass plate fixture block; 18, horizon sensor; 19, armature; 20, forward block; 21, advance baffle plate; 22, bolt; 23-24, fixed dam; 25, nut; 26, inclined-plane.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
Referring to figs. 1 through Fig. 3, the utility model comprises by four root posts 9 based on the locating device of maglev planar motor and is supported on stationary part on the balance seat 10, and poly (methyl methacrylate) plate 8 is installed between the column 9, and poly (methyl methacrylate) plate is fixed between the column 9 by fixture block 17.Stationary part comprises stator cover plate 1, be provided with four ungulate coils 2 above it, be provided with below the cover plate and be enclosed in mover part six horizon sensors 18 all around, in the middle of the ungulate coil of cover plate, have the worktable hole in addition, be evenly equipped with three vertical sensors 4 around the hole; The balance seat is provided with the bloom 12 of limited 16 restriction of horizontal direction, and this is inlaid with permanent magnet array 13 above bloom, is fixedly connected with the distance that four propulsion plants 11 are used to regulate the bloom vertical moving on the balance seat of bloom two long limit correspondence positions; Between permanent magnet array 13 and stationary part, be provided with horizontal X, Y direction, the free-moving mover part of vertical Z direction, mover partly comprises mover support 6, it is relative with four ungulate coils 2 respectively that the mover rack upper surface is provided with four armature 19, mover rack upper surface central protuberance one worktable 3 passes the worktable hole of cover plate, four drive coils 15 are installed in the mover support, and the initial position of mover part is limited by the fixture block 14 that is arranged on the bloom 12.
More than Zhuan Zhi principle of work is as follows: at first, computing machine is to ungulate coil 2 power supplies, and the position feedback through vertical sensor 4 suspends stator, and is in steady state (SS); Then, the drive coil in the mover 15 is powered, and pass through the feedback of horizon sensor 18, make mover move to the specified level position.
Function according to locating device, the utility model is divided into suspend part and horizontal driving section on the whole: the suspension part: the utility model device adopts the aspiration-type suspension structure, the suspension action of mover is finished by ungulate coil 2 and armature 19, ungulate coil maintains static above being installed in stator cover plate 1, it is relative with ungulate coil that armature 19 is connected in mover support 6 upper surfaces, coil 2 energising backs produce electromagnetic force, attract armature, mover moves upward, three vertical sensors 4 return the position feedback of mover to controller, controller is regulated the input voltage of ungulate coil according to feedback signal, finally makes the stator stable suspersion.
Horizontal driving section: the driving of mover produces by the interaction of the drive coil in permanent magnet array 13 and the mover.After mover is suspending stabilized, power supply makes it produce magnetic field to drive coil 15, produces the power effect with the magnetic field of permanent magnet array and moves, and horizon sensor 18 returns the position feedback of mover to controller, controller is regulated output voltage according to feedback information, makes mover move to preposition.
With reference to Fig. 2: the sensor 4,18 that the utility model adopted is eddy current displacement sensor.Three sensors 4 around the cover plate worktable hole are to measure the displacement of mover at vertical direction, and 120 degree of being separated by between adjacent two sensors can detect the collimation of mover and surface level, on top of the suspension attitude of mover.Consider that the current vortex sensor range is less, and mover displacement in the horizontal direction is bigger,, measures mover displacement in the horizontal direction so, form sensor relay form with six horizon sensor 18 symmetry arrangement.
With reference to Fig. 3: four drive coils 15 in the mover are staggered symmetry arrangement on mover support 6, every adjacent two coils are vertically placed, two coils are respectively arranged on X, Y direction, such arrangement form, both can produce horizontal actuator force and make the mover tangential movement, can produce moment again, make mover turn over certain angle around vertical direction.
With reference to Fig. 4: the magnet block length and width that are embedded in the permanent magnet array 13 in the bloom 12 equate, are 5mm, highly are 20mm, closely arrange interval 0.1mm along X and Y direction.And the pole orientation of each magnet block is in full accord.Cross the coil intersection for fear of magnetic field and produce field fluctuation, adopt the little winding construction of big magnetic battle array, promptly the area of permanent magnet array is greater than the range of movement of drive coil 15.
With reference to Fig. 5: each propulsion plant 11 comprises two fixed dams 23,24 that are fixed on the balance seat 10, being provided with nut 25 between the fixed dam is connected with one and advances the bolt 22 of baffle plate 21 to be threaded, advance baffle plate 21 front ends to be provided with the forward block 20 on inclined-plane 26, drive bolt by the rotation nut and forward block is advanced or retreat, thereby regulate the perpendicular displacement of bloom and the level of control permanent magnet array.
Claims (8)
1. locating device based on maglev planar motor, it is characterized in that, comprise by the stationary part of upright supports on the balance seat, stationary part comprises the stator cover plate, be provided with a plurality of ungulate coils above it, be provided with below the cover plate and be enclosed in mover part a plurality of horizon sensors all around, have the worktable hole in the ungulate coil centre position of cover plate in addition, be evenly equipped with a plurality of vertical sensors around the hole; Described balance seat is provided with the limited bloom of horizontal direction, and this is inlaid with the permanent magnet array above bloom, is fixedly connected with the distance that propulsion plant is used to regulate the bloom vertical moving on the balance seat of bloom two long limit correspondence positions; Between permanent magnet array and stationary part, be provided with horizontal X, Y direction, the free-moving mover part of vertical Z direction, mover partly comprises the mover support, it is relative with described a plurality of ungulate coils respectively that the mover rack upper surface is provided with a plurality of armature, mover rack upper surface central protuberance one worktable passes the worktable hole of cover plate, the a plurality of drive coils that equate with ungulate coil quantity are installed in the mover support, and the initial position of mover part is limited by the fixture block that is arranged on the bloom.
2. the locating device based on maglev planar motor as claimed in claim 1, it is characterized in that, described a plurality of ungulate coil is four, form rectangle aspiration-type suspension structure, the suspending power of mover part is provided, and four armature of mover rack upper surface relative set are relative with four ungulate coils respectively; A plurality of drive coils in the mover support also are four.
3. the locating device based on maglev planar motor as claimed in claim 2 is characterized in that, described ungulate coil end has narrow groove, is inserted in the narrow groove by clamp it is stuck on the stator cover plate.
4. as claim 2 or 3 described locating devices, it is characterized in that per two ungulate coil outsides are provided with a protective cover based on maglev planar motor.
5. the locating device based on maglev planar motor as claimed in claim 1 is characterized in that, a plurality of horizon sensors that described cover plate is provided with below are six current vortex sensors, the horizontal shift that is used to measure mover; Be distributed on that a plurality of vertical sensors are three current vortex sensors around the worktable hole, be used to measure the suspension attitude of mover.
6. the locating device based on maglev planar motor as claimed in claim 2 is characterized in that,
Four drive coils in the described mover support are pressed orthogonal in twos arrangement mode and are arranged.
7. the locating device based on maglev planar motor as claimed in claim 2, it is characterized in that, in the described permanent magnet array, the permanent magnetic iron block length and width equate, are 5mm, highly are 20mm, along X to Y to equidistant distribution, spacing 0.1mm, and each permanent magnetic iron block polar orientation unanimity are to produce uniform magnetic field.
8. the locating device based on maglev planar motor as claimed in claim 1, it is characterized in that, the described propulsion plant that connects firmly on the balance seat is four, each propulsion plant comprises two fixed dams that are fixed on the balance seat, be provided with nut between the fixed dam and be connected the bolt thread connection that advances baffle plate with one, advance the baffle plate front end to be provided with the forward block on inclined-plane, drive bolt by the rotation nut and forward block is advanced or retreat, thereby regulate the perpendicular displacement of bloom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201798209U CN201698768U (en) | 2010-05-05 | 2010-05-05 | Positioning device based on magnetic-levitation planer motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201798209U CN201698768U (en) | 2010-05-05 | 2010-05-05 | Positioning device based on magnetic-levitation planer motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201698768U true CN201698768U (en) | 2011-01-05 |
Family
ID=43400014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201798209U Expired - Fee Related CN201698768U (en) | 2010-05-05 | 2010-05-05 | Positioning device based on magnetic-levitation planer motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201698768U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102841505A (en) * | 2011-06-22 | 2012-12-26 | 上海微电子装备有限公司 | Substrate-precise-positioning workpiece stage |
| CN103206912A (en) * | 2013-04-24 | 2013-07-17 | 四川大学 | Magnetostrictive displacement sensor detection device |
| CN109398401A (en) * | 2018-06-12 | 2019-03-01 | 大连奇想科技有限公司 | Automatic centering suspension |
-
2010
- 2010-05-05 CN CN2010201798209U patent/CN201698768U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102841505A (en) * | 2011-06-22 | 2012-12-26 | 上海微电子装备有限公司 | Substrate-precise-positioning workpiece stage |
| CN102841505B (en) * | 2011-06-22 | 2015-06-17 | 上海微电子装备有限公司 | Substrate-precise-positioning workpiece stage |
| CN103206912A (en) * | 2013-04-24 | 2013-07-17 | 四川大学 | Magnetostrictive displacement sensor detection device |
| CN109398401A (en) * | 2018-06-12 | 2019-03-01 | 大连奇想科技有限公司 | Automatic centering suspension |
| CN109398401B (en) * | 2018-06-12 | 2024-03-19 | 大连奇想科技有限公司 | Automatic centering suspension |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101834550B (en) | Positioning device based on maglev planar motor | |
| CN101610054B (en) | Planar motor adopting three-dimensional permanent magnet array | |
| CN102681364B (en) | Six-degree-of-freedom magnetic suspension micro-positioner | |
| CN100553107C (en) | Permanent magnet suspending plane electromotor | |
| CN103277409B (en) | Five-freedom degree magnetic levitation guide rail with electromagnet distribution | |
| CN102097982B (en) | Permanent-magnet synchronous magnetic suspension planar motor | |
| CN101214617A (en) | Moving-coil type large range mobile magnetic floating six-freedom worktable | |
| CN102412763A (en) | Permanent magnet bearing-free auto-suspension three-degree-of-freedom spherical motor and control method thereof | |
| CN201224044Y (en) | Repulsion force type magnetic floating linear feed system for numerical control machine tool | |
| CN102681349A (en) | Work-piece platform | |
| CN102501224B (en) | A kind of planar maglev linear-motion platform | |
| CN201698768U (en) | Positioning device based on magnetic-levitation planer motor | |
| CN104009674B (en) | Six degree of freedom short stroke magnetic levitation worktable | |
| CN103226295A (en) | Lithography machine silicon wafer bench micro-motion workbench | |
| CN101769981B (en) | Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array | |
| CN110429868B (en) | Low-rigidity magnetic suspension gravity compensator, driving device and six-degree-of-freedom micro-motion platform | |
| CN105387310B (en) | A kind of maglev type precisely locating platform | |
| CN101610022B (en) | Planar motor adopting groove-type coil | |
| CN101710779A (en) | Long stroke synchronous planar motor with integrated winding structure | |
| CN102497083A (en) | Concentric permanent magnet synchronous planar motor with winding structure | |
| CN103426345A (en) | Experimental device of compact magnetic levitation worktable | |
| CN101286368A (en) | Multi-magnetic feet drive type great scope magnetic-floating plane workstation | |
| US20220052585A1 (en) | Displacement device based on hall-effect sensors and planar motors | |
| CN103909427B (en) | A kind of composite excitation magnetic suspension feeding platform | |
| CN101750548A (en) | Phase hunting detection method for permanent magnet planar motor adopting switch Hall array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110105 Termination date: 20120505 |