CN101750548A - Phase hunting detection method for permanent magnet planar motor adopting switch Hall array - Google Patents
Phase hunting detection method for permanent magnet planar motor adopting switch Hall array Download PDFInfo
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- CN101750548A CN101750548A CN200910241912A CN200910241912A CN101750548A CN 101750548 A CN101750548 A CN 101750548A CN 200910241912 A CN200910241912 A CN 200910241912A CN 200910241912 A CN200910241912 A CN 200910241912A CN 101750548 A CN101750548 A CN 101750548A
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Abstract
The invention relates to a phase hunting detection method for a permanent magnet planar motor adopting a switch Hall array. The method is characterized in that: a Hall array consists of M (M is an odd number and more than or equal to 3) switch Hall sensors, wherein the Hall array is vertical to the horizontal force direction of a driving unit where the coil is positioned; the switch Hall sensors in the Hall array are arranged at equal intervals which is an even number times the pole pitch, are parallel to a permanent magnet array and used for measuring the component of the magnetic flux density in the direction vertical to the movement direction of the planar motor. All the switch Hall sensor signals in the Hall array are added up and then an judgment is made to determine whether the sum is greater than M/2 so as to acquire an output signal 0 or 1; the output signal is kept unchanged when the Hall array moves in the direction vertical to the horizontal thrust direction of the corresponding coil; the output signals 0 and 1 are alternated when the Hall array moves in the horizontal thrust direction of the corresponding coil; and the current zero-crossing point (phase shifting point) in the driving coil is determined. The method changes the phase hunting detection of the permanent magnet planar motor in two dimension into superposition of two one-dimensional phase hunting detections to realize the planar phase hunting detection.
Description
Technical field
The present invention relates to a kind of permanent-magnet planar motor and seek phase method, particularly a kind of measuring method of utilizing switch Hall array to determine the coil current commutation point of permanent-magnet planar motor.
Background technology
Fast development along with advanced manufacturing industry, the hi-Fix platform technology has obtained deep research and development, have broad application prospects in fields such as semiconductor industry, little stereolithography, nanometer worktable, high precision plotting apparatuss, wherein most important applications is the high precision photoetching locating platform in the semiconductor industry.The demand that modern precision, ultraprecise process unit have ripple to cut to height response, high-speed, high-precision plane drive unit.Initial plane drive unit is realized that by two direct driving linear motor adopt stacked drives structure, this structure has increased the complicacy of kinematic train, from not breaking away from the pattern that the stack of low-dimensional motion forms the higher-dimension motion in essence.For the linear electric motors of bottom, carry the gross mass of upper strata linear electric motors and associated mechanical components thereof, thereby have a strong impact on location and control accuracy.And directly utilize electromagnetic force to produce the planar motor of plane motion, have the characteristics of the high and low hear rate of force density, high-speed and high reliability, because of having saved the intermediate conversion device that is linearly moved to plane motion, can be controlling object with being made of one of motor structure, have that reaction is fast, highly sensitive, servo-actuated reaches advantages of simple structure and simple well.
Along with the technical development of advanced manufacturing industry, some accurate opertaing devices such as litho machine need carry out precise motion control in the spatial dimension of an almost plane.Therefore, planar motor particularly has broad application prospects in modern semiconductors microfabrication equipment and other ultraprecise process equipment at two dimensional surface location processing unit (plant).
It is a kind of by preestablishing the direct driving of direction and electromagnetic force to form the two dimensional motion in the plane that the permanent-magnet planar motor electromagnetic force directly drives.A driver element becomes with upper set of coils by two, and the electric current that feeds specific size under the situation of the relative position of determining coil and permanent magnet array is the size and Orientation of may command electromagnetic force, makes the permanent-magnet planar motor mover produce the motion of respective direction.The relative position measurement of driver element and permanent magnet array generally is to utilize increment type position transducers such as grating chi, can't determine the commutation point (position of the coil of current zero-crossing point correspondence and permanent magnet array in the coil) of driver element coil like this, promptly can't determine the phase relation of the initial position of coil and permanent magnet array.The present invention is the method that the commutation point of drive coil in permanent magnet array of permanent-magnet planar motor measured.Adopt the switch Hall sensor to determine the commutation point, adopt linear hall sensor relatively, processing of circuit is simple, and the digital signal antijamming capability is strong, the noiseless accumulation.
Summary of the invention
The objective of the invention is to provide a kind of phase hunting detection method of coil for permanent-magnet planar motor, promptly the commutation point of drive coil in permanent magnet array of permanent-magnet planar motor measured, the signal that Hall array is produced when mobile on perpendicular to corresponding coil horizontal thrust direction is constant substantially, 0 and 1 alternate during motion on corresponding coil horizontal thrust direction; And then the position relation of coil and permanent magnet array during current zero-crossing point (commutation point) in definite drive coil.
In order to achieve the above object, the technical solution used in the present invention is:
A kind of phase hunting detection method for permanent magnet planar motor that adopts switch Hall array, described permanent-magnet planar motor contains permanent magnet array and coil array, described coil array is made up of two above driver elements, each driver element becomes with upper set of coils by two, it is characterized in that this method comprises the steps:
A. corresponding Hall array of each coil, and Hall array goes out with the level of this coil place driver element, and force direction is vertical to be placed, described Hall array is made up of M (M 〉=3 and be odd number) switch Hall sensor, and the switch Hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of switch Hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion; The magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0;
C. judge whether greater than M/2 after each switch Hall signal of sensor of Hall array being gathered addition with microprocessor, if after the addition greater than M/2 Hall array output signal 1, if less than M/2 Hall array output signal 0, and then obtain the output signal 0 or 1 of Hall array after the addition;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby the current zero-crossing point (commutation point) of realizing permanent-magnet planar motor detects.
The another kind of phase hunting detection method for permanent magnet planar motor that adopts switch Hall array provided by the invention, described permanent-magnet planar motor contains permanent magnet array and coil array, described coil array is made up of two above driver elements, each driver element becomes with upper set of coils by two, and on identical horizontal thrust direction, have two driver elements at least, it is characterized in that this method comprises the steps:
A. the horizontal thrust direction is identical and differ the coil of 2N pole span p on the horizontal thrust direction, corresponding Hall array, and wherein, N equals zero or greater than zero integer; Described Hall array is made up of M (M 〉=3 and be odd number) switch Hall sensor, and the switch Hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of switch Hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion; The magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0;
C. judge whether greater than M/2 after each switch Hall signal of sensor of Hall array being gathered addition with microprocessor, if after the addition greater than M/2, then the Hall array output signal 1, if after the addition less than M/2, then the Hall array output signal 0, and then obtains the output signal 0 or 1 of Hall array;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby the current zero-crossing point (commutation point) of realizing permanent-magnet planar motor detects.
In the technique scheme, described permanent-magnet planar motor is motive loop permanent magnetic planar motor or moving-iron type permanent-magnet planar motor, described coil ribbon core or ribbon core not.
The present invention has the following advantages and the high-lighting effect: the present invention is the method that the commutation point of drive coil in permanent magnet array of permanent-magnet planar motor measured for permanent-magnet planar motor provides a kind of phase method of seeking of coil; The signal that Hall array is produced when mobile on perpendicular to corresponding coil horizontal thrust direction is constant substantially, output signal 0 and 1 alternate during motion on corresponding coil horizontal thrust direction; And then the position relation of coil and permanent magnet array during current zero-crossing point (commutation point) in definite drive coil, permanent-magnet planar motor seeking in two dimension detecting mutually become two one dimensions and sought the stack that detects mutually, detection is achieved to make the plane seek mutually; Thereby efficiently solve the commutation point (position of the coil of current zero-crossing point correspondence and permanent magnet array in the coil) that increment type position transducers such as utilizing the grating chi in the prior art can't be determined the driver element coil, promptly can't determine the technical matters of the initial position phase relation of coil and permanent magnet array.Adopt the switch Hall sensor to determine the commutation point, adopt linear hall sensor relatively, processing of circuit is simple, and the digital signal antijamming capability is strong, the noiseless accumulation.
Description of drawings
Fig. 1 is a kind of floor map that adopts the phase hunting detection method for permanent magnet planar motor embodiment of switch Hall array provided by the invention.
Fig. 2 is the location diagram of switch Hall array among the present invention and permanent magnet array.
Fig. 3 is the A-A sectional view of Fig. 2.
Fig. 4 is a kind of coil arrangement mode of two driver elements on identical thrust direction.
Fig. 5 is another kind of permanent-magnet planar motor mover platform structure.
Among the figure: the 1-permanent magnet array; The 2-coil array; The 3-driver element; The 4-coil; The 5-Hall array; The 6-horizontal thrust is the Hall array of the coil correspondence of directions X; The 7-horizontal thrust is the Hall array of the coil correspondence of Y direction; First driver element of 11-Y direction; Second driver element of 12-Y direction; First driver element of 15-X direction; Second driver element of 16-X direction; The coil of first driver element of 15a-X direction; The coil of first driver element of 15b-X direction; The coil of first driver element of 15c-X direction; The coil of second driver element of 16a-X direction; The coil of second driver element of 16b-X direction; The coil of second driver element of 16c-X direction.
Embodiment
A kind of phase hunting detection method for permanent magnet planar motor that adopts switch Hall array provided by the invention, described permanent-magnet planar motor contains permanent magnet array and coil array, described coil array is made up of two above driver elements, each driver element becomes with upper set of coils by two, it is characterized in that this method comprises the steps:
A. corresponding Hall array of each coil, and Hall array goes out with the level of this coil place driver element, and force direction is vertical to be placed, described Hall array is made up of M (M 〉=3 and be odd number) switch Hall sensor, and the switch Hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of switch Hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion; The magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0;
C. judge whether greater than M/2 after each switch Hall signal of sensor of Hall array being gathered addition with microprocessor, if after the addition greater than M/2, then the Hall array output signal 1, if after the addition less than M/2, then the Hall array output signal 0, and then obtains the output signal 0 or 1 of Hall array;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby the current zero-crossing point (commutation point) of realizing permanent-magnet planar motor detects.
The another kind of phase hunting detection method for permanent magnet planar motor that adopts switch Hall array provided by the invention, described permanent-magnet planar motor contains permanent magnet array and coil array, described coil array is made up of two above driver elements, each driver element becomes with upper set of coils by two, and on identical horizontal thrust direction, have two driver elements at least, it is characterized in that this method comprises the steps:
A. the horizontal thrust direction is identical and differ the coil of 2N pole span p on the horizontal thrust direction, corresponding Hall array, and wherein, N equals zero or greater than zero integer; Described Hall array is made up of M (M 〉=3 and be odd number) switch Hall sensor, and the switch Hall sensor is spacedly distributed in the even-multiple pole span;
B. the parallel permanent magnet array of switch Hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion; The magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0;
C. judge whether greater than M/2 after each switch Hall signal of sensor of Hall array being gathered addition with microprocessor, if after the addition greater than M/2 Hall array output signal 1, if less than M/2 Hall array output signal 0, and then obtain the output signal 0 or 1 of Hall array after the addition;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby the current zero-crossing point (commutation point) of realizing permanent-magnet planar motor detects.
Below in conjunction with accompanying drawing the present invention is described in further detail.
Fig. 1 is a kind of embodiment floor map that adopts the phase hunting detection method for permanent magnet planar motor of switch Hall array provided by the invention, described permanent-magnet planar motor contains permanent magnet array 1 and coil array 2, coil arrangement direction and permanent magnet array orientation angle at 45 (or along X-direction or along Y direction) are arranged, each adjacent driven cell orientation is arranged mutually at an angle of 90, the corresponding Hall array of each coil, and Hall array goes out with the level of this coil place driver element, and force direction is vertical to be placed, described Hall array is made up of nine switch Hall sensors, the switch Hall sensor is spacedly distributed in the even-multiple pole span, referring to figs. 2 and 3, in this example, the Hall array 5 of coil 4 correspondences is made up of nine equidistant in two times of pole span 2p switch Hall sensors, and the distance between the switch Hall sensor is 2p/9.
The parallel permanent magnet array of switch Hall sensor is placed, be used for the magnetic flux density component of measuring vertical in planar motor direction of motion, the magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0.
Judge whether greater than 4.5 after each switch Hall signal of sensor of Hall array gathered addition with microprocessor, if after the addition greater than 4.5 Hall array output signals 1, if less than 4.5 Hall array output signals 0, and then obtain the output signal 0 or 1 of Hall array after the addition.
The output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, signal as the electric current commutation, horizontal thrust is that the Hall array 7 of the coil correspondence of Y direction moves or horizontal thrust is that Hall array 6 output signal when the Y direction moves of coil correspondence of directions X is all constant substantially along directions X, horizontal thrust is that the Hall array 7 of the coil correspondence of Y direction moves or horizontal thrust is Hall array 6 output signal 0 and 1 alternate when directions X moves of the coil correspondence of directions X along the Y direction, thereby the current zero-crossing point (commutation point) of realizing permanent-magnet planar motor detects.
Because the periodicity in permanent magnet array magnetic field, the horizontal thrust direction is identical and differ the coil of 2N pole span p on the horizontal thrust direction, can a shared Hall array, and wherein, N equals zero or greater than zero integer.With reference to shown in Figure 4, directions X first driver element 15 is identical with directions X second driver element 16 horizontal thrust directions, be directions X, wherein the coil 16a of second driver element of the coil 15a of first driver element of directions X and directions X on directions X at a distance of four pole span p, therefore the coil 16a of second driver element of the coil 15a of first driver element of directions X and directions X can a shared Hall array, in like manner the coil 16b of second driver element of the coil 15b of first driver element of directions X and directions X can a shared Hall array, and the coil 16c of the coil 15c of first driver element of directions X and second driver element of directions X can a shared Hall array; Similar with the directions X driver element, the coil that first driver element 11 of Y direction is corresponding with second driver element of Y direction also can shared Hall array.
A driver element among Fig. 1 and Fig. 4 is three-phase coil, and the distance in the corresponding Hall array of a phase coil in the driver element, Hall array distance each other and driver element between the coil equates; Shown in Fig. 5, driver element is five phase coils, then needs five groups to seek mutually with the equidistant Hall array of coil and to measure.The phase hunting detection method for permanent magnet planar motor of employing switch Hall array can be realized the situation to any coil arrangement.
Claims (3)
1. phase hunting detection method for permanent magnet planar motor that adopts switch Hall array, described permanent-magnet planar motor contains permanent magnet array and coil array, described coil array is made up of two above driver elements, each driver element becomes with upper set of coils by two, it is characterized in that this method comprises the steps:
A. corresponding Hall array of each coil, and Hall array goes out with the level of this coil place driver element that force direction is vertical to be placed, and described Hall array is made up of M switch Hall sensor, and the switch Hall sensor is spacedly distributed in the even-multiple pole span; Described M is equal to or greater than 3 odd number;
B. the parallel permanent magnet array of switch Hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion; The magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0;
C. judge whether greater than M/2 after each switch Hall signal of sensor of Hall array being gathered addition with microprocessor, if after the addition greater than M/2, then the Hall array output signal 1, if after the addition less than M/2, Hall array output signal 0, and then obtain the output signal 0 or 1 of Hall array;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the commutation point detection of permanent-magnet planar motor.
2. phase hunting detection method for permanent magnet planar motor that adopts switch Hall array, described permanent-magnet planar motor contains permanent magnet array and coil array, described coil array is made up of two above driver elements, each driver element becomes with upper set of coils by two, and on identical horizontal thrust direction, have two driver elements at least, it is characterized in that this method comprises the steps:
A. the horizontal thrust direction is identical and differ the coil of 2N pole span p on the horizontal thrust direction, corresponding Hall array, and wherein, N equals zero or greater than zero integer; Described Hall array is made up of M switch Hall sensor, and the switch Hall sensor is spacedly distributed in the even-multiple pole span, and described M is equal to or greater than 3 odd number;
B. the parallel permanent magnet array of switch Hall sensor is placed, and is used for the magnetic flux density component of measuring vertical in planar motor direction of motion; The magnetic flux density of switch Hall sensor measurement is greater than zero output 1, and the magnetic flux density of switch Hall sensor measurement is less than zero output 0;
C. judge whether greater than M/2 after each switch Hall signal of sensor of Hall array being gathered addition with microprocessor, if after the addition greater than M/2, then the Hall array output signal 1, if after the addition less than M/2, then the Hall array output signal 0, and then obtains the output signal 0 or 1 of Hall array;
D. the output signal of each Hall array with the electric current reversal point of corresponding coil have one-to-one relationship, as the signal of electric current commutation, thereby realize the commutation point detection of permanent-magnet planar motor.
3. a kind of phase hunting detection method for permanent magnet planar motor that adopts switch Hall array according to claim 1 and 2 is characterized in that: described permanent-magnet planar motor is motive loop permanent magnetic planar motor or moving-iron type permanent-magnet planar motor; Described coil ribbon core or ribbon core not.
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| CN102800368A (en) * | 2012-07-12 | 2012-11-28 | 清华大学 | Positioning method of initial zero position of air floatation planar motor |
| CN102800369A (en) * | 2012-07-12 | 2012-11-28 | 清华大学 | Positioning method of initial zero position of air floatation planar motor |
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| CN103256882A (en) * | 2012-02-17 | 2013-08-21 | 上海微电子装备有限公司 | Magnetic levitation plane motor initialization position detection method using Hall array |
| CN103256882B (en) * | 2012-02-17 | 2016-01-20 | 上海微电子装备有限公司 | A kind of levitation planar motor initialized location detection method adopting Hall array |
| CN102800368A (en) * | 2012-07-12 | 2012-11-28 | 清华大学 | Positioning method of initial zero position of air floatation planar motor |
| CN102800369A (en) * | 2012-07-12 | 2012-11-28 | 清华大学 | Positioning method of initial zero position of air floatation planar motor |
| CN102800368B (en) * | 2012-07-12 | 2014-08-13 | 清华大学 | Positioning method of initial zero position of air floatation planar motor |
| CN102800369B (en) * | 2012-07-12 | 2014-08-13 | 清华大学 | Positioning method of initial zero position of air floatation planar motor |
| CN104330631A (en) * | 2014-10-31 | 2015-02-04 | 华中科技大学 | Magnetic suspension planar motor rotor initial phase positioning method |
| CN104330631B (en) * | 2014-10-31 | 2017-04-26 | 华中科技大学 | Magnetic suspension planar motor rotor initial phase positioning method |
| CN106533082A (en) * | 2015-12-28 | 2017-03-22 | 清华大学 | Device for preventing polarity errors of permanent magnets in splicing of planar motor permanent magnet array |
| CN106533082B (en) * | 2015-12-28 | 2023-08-25 | 清华大学 | Device for preventing polarity error of permanent magnet in splicing of permanent magnet array of planar motor |
| CN115752195A (en) * | 2022-11-09 | 2023-03-07 | 哈尔滨工业大学 | Hall sensor magnetic field position information detection method based on three-phase balance condition |
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Address after: 100084 Beijing box office,,, Tsinghua University Patentee after: TSINGHUA University Patentee after: BEIJING U-PRECISION TECH Co.,Ltd. Address before: 100084 Beijing box office,,, Tsinghua University Patentee before: Tsinghua University Patentee before: U-PRECISION TECH Co.,Ltd. |
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