CN201666783U - White light interferometer with a quick zero-setting system - Google Patents
White light interferometer with a quick zero-setting system Download PDFInfo
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- CN201666783U CN201666783U CN2010201684602U CN201020168460U CN201666783U CN 201666783 U CN201666783 U CN 201666783U CN 2010201684602 U CN2010201684602 U CN 2010201684602U CN 201020168460 U CN201020168460 U CN 201020168460U CN 201666783 U CN201666783 U CN 201666783U
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Abstract
The utility model discloses a white light interferometer with a quick zero-setting system. The laser light from a tunable laser is extended by an extending lens and then passes through a third spectroscope and a first spectroscope behind a collimation system and merges into the optical path of the white light interferometer. A diachronic mirror for perfect reflection of the long wave is arranged between a convergent lens and a camera and one end of a detector receives the reflected light of the diachronic mirror and another end is connected with a computer by an AD/DA card. The zero path difference adjustment of the white light interferometer is realized by the wavelength scanning interference length-measurement and the inclination angle of the surface to be measured is obtained by analyzing the interval of the white light interference fringes and automatic adjustment is furthermore realized. Because the above method has no need of large data amount calculation, the adjustment time of the while light interferometer is reduced to about 20 seconds and the detection efficiency of the white light interferometer is greatly improved. The white light interferometer is especially suitable for large area surface or the circle surface in need for respectively measuring each position and splicing.
Description
Technical field
The utility model relates to a kind of interferometer, especially relates to a kind of white light interferometer with fast zero-setting system.
Background technology
Current, ultraprecise components and parts such as MEMS device, waveguide material, semiconductor wafer, thin film technique and material are in Rapid development stage, and only the output value of MEMS device promptly reached 5,000,000,000 dollars in 2005, and soaring at a high speed with annual 20% speed.Meanwhile, quick high accuracy detection to these device surfaces also seems more and more important with the quality conformance that guarantees product, longitudinal scanning white light interferometer (VerticalScanning White Light Interferometer is designated hereinafter simply as white light interferometer) is exactly wherein most important detection means.Existing white light interferometer has had the vertical Measurement Resolution up to 0.01nm, and Measuring Time also can be soon to the several seconds, as the CCI6000 of Taylor Hobson company, the NewView7000 series of Zygo company and the Wyko NT3300 of Veeco company etc.But the major defect of existing instrument is that the adjustment time before measuring is oversize, and every replacing primary measured sample or camera lens all will be readjusted.According to user's skilled operation degree, each adjustment process between 5 minutes to 20 minutes, is tens times more than of Measuring Time generally, becomes the restriction white light interferometer main bottleneck of detection time.The long adjustment time has greatly influenced the detection efficiency in the large-scale production, observes for a long time to monitor that screen also can cause operator's eye fatigue.Large enterprise often purchases tens instruments that involve great expense and works simultaneously and could satisfy the detection demand, and the human and material resources cost is considerable.
Regulate the white light interferometer nulling, be meant that the two arm optical path differences of adjusting interferometer are zero, just can observe clear strong interference fringe this moment, and the angle of inclination of adjusting measured surface again is parallel with reference mirror so that interference fringe is the most sparse as far as possible.But the coherent length of white light has only the 1-2 micron, and unless you give your whole attention to it or regulate and will miss the zero path difference position too soon, this is to cause white light interferometer to be difficult to the principal element of nulling.In order to reduce the adjusting difficulty, tending to insert an optical filter in the light source back increases coherent length, but the effect of this method also is very limited, can't obviously shorten the adjustment time of interferometer.
A desirable solution is exactly the optical path difference that calculates interferometer by certain mode, and one of them brachium that uses accurate transfer table directly to change interferometer subsequently is zero position to optical path difference.This just needs a kind of absolute distance measurement technology of micron order precision.Obviously, laser interferometer can't realize absolute distance measurement because its 2 π phase place uncertain problem can't be differentiated the distance of the integral multiple that differs half-wavelength.Though the composite wave method of using two or the above monochromatic light of two wavelength to do light source can suitably increase the uncertain length of phase place, still can't tackle the problem at its root.
The tunable laser (tunable laser) that the use wavelength can continuously change has obtained paying close attention to comparatively widely as the length scanning interferometer of light source recently, different with white light interferometer is, the interferometer of this form is under the state that need not to carry out light path scanning, the variation that only need note interference signal when changing output wavelength just can calculate two arm absolute phase differences of interferometer, thereby obtain optical path difference, do not have above-mentioned phase place uncertain problem.And need not mechanical scanning, adjust and find interference signal easily, for example, people such as Coe PA just adopt this method to monitor semiconductor surface distortion situation in the high radiation environment.But the measuring accuracy of this interferometer can only reach submicron order, also has a certain distance apart from vertical Measurement Resolution of white light interferometer 0.01nm.
Summary of the invention
The purpose of this utility model is to provide a kind of white light interferometer with fast zero-setting system, proposes the length scanning interfere measurement technique is used for the nulling of white light interferometer first, merges the advantage of the two, and solves the key issue that fusion process is brought.Use the length scanning interferometer to calculate optical path difference fast earlier, regulate interferometer automatically to the zero path difference position by step device.In addition, utilize the sparse more characteristics of the more little interference fringe of degree of tilt of measured surface, calculate the degree of tilt of measured surface and adjust this inclination angle automatically so that interferometer is in optimum Working by image processing techniques.
The technical solution adopted in the utility model is:
The directional light of the white light of white light source behind removable narrow band pass filter, aperture diaphragm, field stop and colimated light system collimation, enter micro objective through the reflection of first spectroscope, be divided into two bundles by second spectroscope, a branch of beating on reference mirror, another bundle is beaten on measured surface, two-beam enters the CCD camera through convergent lens after interfering on second spectroscope, be connected with computing machine through image pick-up card; The piezoelectric ceramics that is installed on the microcobjective is connected with computing machine through the AD/DA card respectively with accurate translation stage.The laser that is sent by tunable laser expands the bundle back through beam expanding lens and incorporates light path into first spectroscope after by the 3rd spectroscope after being contained in colimated light system; The dichroic mirror that long wave is reflected fully is set between convergent lens and camera, and a termination of detector is received the reflected light of dichroic mirror, and the other end is connected with computing machine through the AD/DA card.
What described tunable laser adopted is the distributed feedback laser diode that Nanoplus company produces, and centre wavelength is at 760nm.
The beneficial effect that the utlity model has is:
1) length scanning interference length-measuring technology and white light interferometer are merged dexterously, draw the length scanning interferometer and be easy to the advantage finding interference signal and need not mechanical scanning, the nulling that is used for white light interferometer is to remedy the shortcoming that white light interferometer is difficult to find interference fringe.
2) on using, semi-automatic or the full-automatic nulling method of white light interferometer is proposed, by adopting the length scanning interference length-measuring to realize the zero path difference adjustment of white light interferometer, obtain the inclination angle of measured surface by the interval of analyzing white-light fringe, and then realize regulating automatically.Because above-mentioned link need not the big data quantity computing, the adjustment time of white light interferometer can be reduced to about 20 seconds, greatly improves the detection efficiency of white light interferometer.The utility model is particularly useful for those need measure each position and wide area surface of splicing or periphery respectively.
Description of drawings
Accompanying drawing is a structural principle synoptic diagram of the present utility model.
Among the figure: 1, computing machine, 2, the AD/DA card, 3, the wavelength control signal of the tunable laser sent by computing machine, 4, CCD camera, 5, detector, 6, dichroic mirror, 7, first spectroscope, 8, accurate translation stage, 9, piezoelectric ceramics, 10, microcobjective, 11, measured surface, 12, second spectroscope, 13, two dimension angular regulates platform, 14, reference mirror, 15, field stop, 16, aperture diaphragm, 17, removable narrow band pass filter, 18, white light source, 19, the 3rd spectroscope, 20, beam expanding lens, 21, tunable laser, 22, image pick-up card.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
As shown in drawings, the directional light of the white light of white light source behind removable narrow band pass filter 17, aperture diaphragm 16, field stop 15 and colimated light system collimation, enter micro objective 10 through 7 reflections of first spectroscope, be divided into two bundles by second spectroscope 12, a branch of beating on reference mirror 14, another bundle is beaten on measured surface 11, and two-beam is after interfering on second spectroscope 12, enter CCD camera 4 through convergent lens, be connected with computing machine 1 through image pick-up card 22; The piezoelectric ceramics 9 that is installed on the microcobjective is connected with computing machine 1 through AD/DA card 2 respectively with accurate translation stage 8.After expanding bundle, beam expanding lens 20 incorporates light path into by the laser that tunable laser 21 is sent by the 3rd spectroscope 19 after being contained in colimated light system; The dichroic mirror 6 that long wave is reflected fully is set between convergent lens and camera, and a termination of detector 5 is received the reflected light of dichroic mirror 6, and the other end is connected with computing machine 1 through AD/DA card 2.
The zeroing of white light interferometer can be divided into following a few step:
1, the pre-adjustment of interferometer:
How the pre-adjustment of interferometer just finds the interference signal of length scanning interferometer.Because this system has used microcobjective, when measured surface leaves object focal point when longer, disperse rapidly after focus converges from the light that light source sends, it is very faint that the light that reflects back will become, near the signal that is reflected back when having only measured surface is in object focal point or opal position (being the center of curvature that focus is in tested curved surface) is just the strongest, and interference signal is just obvious.In addition, because microcobjective generally all has bigger numerical aperture, light collecting light ability is very strong, and measured surface 20 degree generally can not cause with interior inclination catoptrically seriously to be lost.Utilize These characteristics, when pre-adjustment, drive microcobjective 10 from as far as closely near measured surface 11, monitor the highest light intensity of detector 5 outputs among Fig. 1 simultaneously, after this light intensity arrives certain threshold value, stop mobile object lens, finish pre-adjustment.
2, realize the preliminary nulling of interferometer by tunable laser:
The concrete course of work of this step is: the laser that is sent by tunable laser 21 enters micro objective by the 3rd spectroscope 19 and first spectroscope 7 after beam expanding lens 20 expands bundle, be divided into two bundles through second spectroscope 12 again, a branch of beating on reference mirror 14, a branch of beating at measured surface 11, two bundle reflected light interfere at second spectroscope, 12 places, beat then on dichroic mirror 6,6 pairs of long waves of dichroic mirror reflect fully, to then transmission fully of shortwave, because that native system adopts is distributed feedback laser diode (the distributed feedback laser diode that Nanoplus company produces, abbreviate the DFB laser diode as), centre wavelength is at 760nm, so can't pass through dichroic mirror 6, but can be reflected on the detector 5, be converted into digital signal through AD/DA card 2 and enter computing machine 1, the wavelength control signal 3 of the tunable laser of being sent by computing machine feeds back to tunable laser 21.
, in several millimeters,, send the instruction control tunable laser by computing machine and continuously change output light wavelength through the interferometer two arm optical path differences after the pre-adjustment, write down the interference signal that detector 5 obtains simultaneously in order to obtain the exact value of this optical path difference.This interference signal can be expressed as:
I in the formula
1, I
2Be the intensity of the two-beam of interference, n
aBe the aerial refractive index of the light of this wavelength, because the wavelength shift scope is very little, can be made as constant, λ is a wavelength, and Δ l is the poor of interferometer two brachiums.
In the cosine term bracket in the following formula be interference signal phase place promptly:
K is a wave number in the formula.As can be seen, in brachium one timing of interferometer, the phase place of interference signal is directly proportional with wave number from following formula, and proportionality constant is relevant with the difference of the brachium of interferometer, then has:
Can find out that from following formula during from a wavelength continuous sweep to the another one wavelength, the wave number of known interferometer (inverse of wavelength) changes at interferometer,, then can calculate two arms poor of interferometer if can obtain the changing value of phase place.
Because the proportional relation that is varied to of the variation of phase place and wave number, the interference signal when wave number scans under the ideal state is a sinusoidal signal.Δ l is long more, and the cycle of this signal is short more, on the contrary then the cycle long more, extreme case is Δ l when being zero, the phase place of this signal remains zero always in the scanning process.
In formula (3), the variation of wave number can demarcate in advance by spectrometer, the output intensity of tunable laser also can change thereupon lentamente during wavelength shift, but owing to can produce some noises in the measuring process, historical facts or anecdotes border signal can depart from the ideal sinusoidal signal.Native system has adopted " scanning wavelength phase-shift method " to ask phase place, promptly respectively with the uniformly-spaced mobile object lens of piezoelectric ceramics to change two arm optical path differences, at each position scanning wavelength and write down interference signal, adopt the multistep processes of similar phase shifting interferometer can obtain phase place on each wavelength of interferometer.What adopt here is 4 footworks (Carr é methods), and it need not to predict phaseshift step size, is applicable to this project (phaseshift step size at different wave length place is different) just.
After the variation of having determined interferometer wave number and phase place, just can obtain the arm length difference Δ l of interferometer two arms by (3) formula, utilize piezoelectric ceramics to move the distance of micro objective Δ l this moment, finishes the preliminary zeroing of interferometer.
3, the degree of tilt analysis of calculating of the space periodic of white-light fringe and measured surface.
More than two the step adjustment finish after, close tunable laser 21, open white light source 17, this moment, white light was by aperture diaphragm 16, become directional light behind the colimated light system collimation that field stop 15 and some lens are formed, enter micro objective through 7 reflections of first spectroscope, be divided into two bundles by second spectroscope 12, a branch of beating on reference mirror 14, another bundle is beaten on measured surface 11, two-beam enters CCD camera 4 after interfering on second spectroscope 12, enter computing machine through image pick-up card 22.
Should be able to demonstrate white-light fringe this moment on computers, surpassing 1 μ m for fear of the error of calculation of Δ l causes the interference signal contrast not high enough or do not have an interference signal, can insert a removable narrow band pass filter 17 in the white light back, is the narrow band pass filter of 10nm as centre wavelength for the 630nm spectrum width, and the ruddiness coherent length that it leaches is 40 μ m.To produce equal thick interference fringe if measured surface has certain angle of inclination with respect to reference mirror this moment on CCD.Usually in order to obtain higher measuring accuracy, need the inclination angle of adjustment measured surface as far as possible little.Inclination angle and the interference fringe pass at interval of easily knowing measured surface are:
In the formula, λ
fBe the centre wavelength of optical filter, n is the aerial refractive index of this wavelength, and Δ x is the interval of interference fringe.After taking an interference pattern, can extract the interval and the direction of interference fringe by binary conversion treatment.Through type (4) can calculate the inclination angle of measured surface again, calculates two dimension angular according to the telegoniometer of interference fringe and regulates the angle that each needs of platform rotate, and sends the instruction control two dimension angular by computing machine and regulates the angular setting that platform is finished measured surface.
Said method relatively be applicable to for rise and fall not quite, even curface comparatively.May lose efficacy for complicated face type, can increase the link of human intervention, after system finishes automatic angular setting, give last affirmation, be called semi-automatic adjustment here by the operator for this surface.In addition, the adjustment of angle can cause the variation of optical path difference, if necessary, can repeat the process in 2 steps an of order once more optical path difference is finely tuned.
Here according to the stepping rate of computational data amount and general accurate translation stage to carrying out estimation roughly nulling T.T.:
1) the pre-adjustment time: because the output and the detection of detector are real-time, the pre-adjustment time depends primarily on the traveling time of accurate transfer table, the accurate transfer table of SMC100 (translational speed 2.5mm/s) with Newport company is an example, if the pre-adjustment stroke is 10mm, this link needs 4s.
2) the length scanning interferometer is surveyed long-time: surveying phase method with the scanning wavelength phase shift of data volume maximum is example, length scanning and writing time 1s, if the data that obtain are 4 length is 10000 one-dimension array, according to existing Computer Processing speed (the central processing unit frequency is 2.0GHz) this process is simulated, can be finished computing in the 0.1s.Then this process needs about 1.1s time consuming time.
3) the follow-up adjustment time of light path: establishing the arm length difference that the length scanning interferometer measures is 5mm, then needs 2s from this position adjustments approximately to the zero path difference position.
4) the measured surface measurement of dip angle time: in the processing time of white-light fringe, comprise that binaryzation extracts that striped trunk, fringe spacing calculate, calculate at the angle of inclination, two dimension angular regulates each angular distribution of platform and calculate.If the interference pattern of obtaining is one 800 * 600 a two-dimensional array, according to existing Computer Processing speed this process is simulated, need about 2s consuming time.
5) the measured surface degree of tilt is adjusted the time: generally the degree of tilt of measured surface is very little, and this adjustment time estimation is no more than 5s.
According to top analysis, the automatic nulling method of the white light interferometer that the utility model proposes is finished once to adjust needs 14s approximately, consider the slight change that might cause the zero path difference position after the angular setting, add the fine setting time of 2s, total nulling time also about 16s, is significantly less than existing white light interferometer 10-30 minute manual nulling time.
Claims (2)
1. white light interferometer with fast zero-setting system, the directional light of the white light of white light source behind removable narrow band pass filter (17), aperture diaphragm (16), field stop (15) and colimated light system collimation, enter micro objective (10) through first spectroscope (7) reflection, be divided into two bundles by second spectroscope (12), a branch of beating on reference mirror (14), another bundle is beaten on measured surface (11), two-beam is after interfering on second spectroscope (12), enter CCD camera (4) through convergent lens, be connected with computing machine (1) through image pick-up card (22); The piezoelectric ceramics (9) that is installed on the microcobjective is connected with computing machine (1) through AD/DA card (2) respectively with accurate translation stage (8); It is characterized in that: after beam expanding lens (20) expands bundle, incorporate light path into by the 3rd spectroscope (19) after being contained in colimated light system by the laser that tunable laser (21) is sent; The dichroic mirror (6) that long wave is reflected fully is set between convergent lens and camera, and a termination of detector (5) is received the reflected light of dichroic mirror (6), and the other end is connected with computing machine (1) through AD/DA card (2).
2. a kind of white light interferometer with fast zero-setting system according to claim 1 is characterized in that: what described tunable laser (21) adopted is the distributed feedback laser diode that Nanoplus company produces, and centre wavelength is at 760nm.
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| CN101819069A (en) * | 2010-04-23 | 2010-09-01 | 浙江大学 | White light interferometer with fast zero-setting system |
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| CN104515482A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Interference fringe widening method for white-light interferometer |
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| CN101819069B (en) * | 2010-04-23 | 2012-05-23 | 浙江大学 | White light interferometer with fast zero-setting system |
| CN101819069A (en) * | 2010-04-23 | 2010-09-01 | 浙江大学 | White light interferometer with fast zero-setting system |
| CN105164518A (en) * | 2013-03-29 | 2015-12-16 | Snu精密股份有限公司 | TSV measuring apparatus and TSV measuring method |
| TWI490542B (en) * | 2013-05-07 | 2015-07-01 | Univ Nat Taiwan | A scanning lens and an interference measuring device using the scanning lens |
| CN103791853A (en) * | 2014-01-20 | 2014-05-14 | 天津大学 | Microstructure measuring device and measuring method based on color strip information processing |
| CN104515482B (en) * | 2014-12-17 | 2017-06-09 | 中国科学院长春光学精密机械与物理研究所 | White light interferometer interference fringe method for widening |
| CN104515482A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Interference fringe widening method for white-light interferometer |
| CN105116705A (en) * | 2015-09-29 | 2015-12-02 | 北京工业大学 | Multi-wavelength self-adaptive digital holographic imaging system and method |
| CN105116705B (en) * | 2015-09-29 | 2017-09-15 | 北京工业大学 | Multi-wave length adaptive digital holographic imaging systems and method |
| CN106500589A (en) * | 2016-12-05 | 2017-03-15 | 苏州大学 | A kind of measuring method of multi-wavelength tunable micro-interference and its device |
| CN107421470A (en) * | 2017-05-25 | 2017-12-01 | 哈尔滨工业大学 | A kind of two-way autocollimator |
| CN107421470B (en) * | 2017-05-25 | 2019-05-14 | 哈尔滨工业大学 | A kind of two-way autocollimator |
| CN110869696A (en) * | 2018-06-25 | 2020-03-06 | 科美仪器公司 | Vibration-resistant white light interference microscope and vibration influence removing method thereof |
| CN110869696B (en) * | 2018-06-25 | 2021-12-28 | 恒邦解决方案有限公司 | Vibration-resistant white light interference microscope and vibration influence removing method thereof |
| CN110514110A (en) * | 2019-08-30 | 2019-11-29 | 广东工业大学 | A kind of platform leveling control method |
| CN110514110B (en) * | 2019-08-30 | 2021-08-13 | 广东工业大学 | Platform leveling control method |
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Granted publication date: 20101208 Termination date: 20120423 |