CN201490919U - Rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor - Google Patents
Rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor Download PDFInfo
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- CN201490919U CN201490919U CN2009201855177U CN200920185517U CN201490919U CN 201490919 U CN201490919 U CN 201490919U CN 2009201855177 U CN2009201855177 U CN 2009201855177U CN 200920185517 U CN200920185517 U CN 200920185517U CN 201490919 U CN201490919 U CN 201490919U
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- freedom
- rectangular slab
- driving gear
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Abstract
The utility model provides a rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor, which is characterized in that: a stator component is connected with a support component and is matched with a mover component through a driving tooth; and the mover component and the support component form a higher pair connection. A body of the stator is the rectangular plate provided with the driving tooth. The motor selects B0, 5, B0 and 8 in an X direction of the rectangular plate and B5, 0 and B8, 0 in a Y direction as working modes. The modes are excited to drive material points on the driving tooth performing elliptical motion along the X direction and the Y direction respectively. The rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor has the advantages that: 1, direct drive of freedom of two linear degrees is realized simultaneously by a single flat-plate stator so as to avoid a motion transmission error of a traditional XY moving device and to enable the motor to achieve rapid and precise positioning property; 2, a thin-plate stator is used so as to thin the motor and reduce the weight of the motor; and 3, the rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor has flexible motion, dual function, high thrust force and more stable performance.
Description
Technical field
The utility model relates to a kind of ultrasonic motor with two linear degrees of freedom that utilizes a plurality of flexural vibration modes of rectangular slab to drive, and relates in particular to a kind of based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab.
Background technology
Ultrasound electric machine is divided into single-degree-of-freedom formula and many (containing two) degree of freedom formula two big classes.So far, single-degree-of-freedom ultrasound electric machine technology has obtained rapid progress, wherein some application of having produced in batches and having succeeded.But in some occasion, as application scenarios such as accurate XY worktable driving, comprehensive bionic machine person joint drivings, people need provide above degrees of freedom motion of two and two and power, and at this moment, it is powerless that the single-degree-of-freedom motor just seems.Under this background, the nineties in last century, the multiple freedom degrees ultrasound motor did not arise at the historic moment and the person's that progresses into the ultrasonic investigation sight line.In 2007, domestic ultrasound electric machine technology chief scientist Zhao Chun gave birth to the academician's state of the art and development to the multiple freedom degrees ultrasound motor in " the ultrasound electric machine technology and the application " of its classics and has carried out network analysis and summary.Do as can be seen from this, the multiple freedom degrees ultrasound motor of having released few in number nearly all belongs to many rotary freedoms formula both at home and abroad, and multi straight degree of freedom ultrasound electric machine achievement in research is close to blank.After just entering 2008, professor Li Zhirong of Suzhou Vocational University released a kind of ultrasonic motor with two linear degrees of freedom that utilizes the rod-type stator to drive.Be not difficult to find out that from the paper of Prof Lee this motor properties is still undesirable at present.Although the ultrasonic motor with two linear degrees of freedom progress is slow at present, but this class motor is because of doing plane motion, fast, the precision positioning of response, and in technical fields such as integrated semiconductor manufacturing, Precision Machining, special important application prospects is arranged, in high-technology fields such as precision driving, robot, can give play to other motors and be difficult to substitute important effect.Just because of this, the utility model proposes a kind of ultrasonic motor with two linear degrees of freedom of making plane motion of a plurality of bending vibration modes pushing motor movers of elastic rectangular thin plate.So far, yet there are no and the utlity model has other ultrasound electric machines of similar principles and structure at home and abroad.
Summary of the invention
The purpose of this utility model has been to provide a kind of ultrasonic motor with two linear degrees of freedom that drives based on the BENDING OF RECTANGULAR PLATE mode of oscillation.This motor have motion flexibly, advantage such as kinematic accuracy is high, response is fast and power density is big, the clear superiority that exists in precision positioning, SERVO CONTROL etc. are used, this motor have submicron order (even higher) position resolution, Millisecond response speed, big speed and energy are arranged
Generation is than high thrust, applied range.
The utility model is achieved in that it comprises stator module, mover assembly, mounting assembly and pretension pressure-applying unit, it is characterized in that the pretension pressure-applying unit connects mounting assembly, connects stator module on the mounting assembly, and stator module and mover assembly are connected.Stator module is fixed on the mounting assembly by flexible hinged-support, and mover assembly constitutes higher pair by ball and mounting assembly and is connected, and the pretension pressure-applying unit is pressed on the stator module.
Described stator module is made up of to driving gear to driving gear, Y rectangular slab, piezoelectric ceramic, X, the positive and negative two sides that it is characterized in that rectangular slab is connected with two-layer piezoelectric ceramic respectively, on the piezoelectric ceramic respectively symmetry be connected with four X to driving gear and four Y to driving gear, X applies respectively to the end face of driving gear to driving gear and four Y and increases the antifriction material that rubs.
Described mover assembly is made up of slide plate, rolling element, cover plate, it is characterized in that the fixedly connected slide plate of cover plate, has several shoulder holes on the slide plate, and rolling element is arranged in the shoulder hole.
Described mounting assembly is made up of last mounting cover, following mount pad, flexible support, it is characterized in that mounting cover connects mount pad down, and following mount pad is connected with several flexible supports, is drilled with several installing holes on the following mount pad.
Described pretension pressure-applying unit is made up of disk spring and pressurization adjustment screw, it is characterized in that adjusting screw and connects the adjusting disk spring.
Described piezoelectric ceramic is characterized in that piezoelectric ceramic is made up of a plurality of piezoelectric chips, between each piezoelectric chip the X of rectangular slab to Y to all leaving the gap, the polarised direction of each piezoelectric chip in the two-layer piezoelectric ceramic on the rectangular slab front and back is identical.
Technique effect of the present utility model is: 1, adopt single dull and stereotyped stator to realize that simultaneously the motion of both direction linear degrees of freedom directly drives, the transmission error of having avoided the conversion motion in the traditional X-ray Y mobile device to be brought, make motor have fast precise (submicron order even more high accuracy) polarization, also simplified electric machine structure simultaneously, reduced motor size; 2, motion is flexible, difunctional, can produce than high thrust, and service behaviour is more stable, and the resistance of motion is little.3, adopt the board-like stator structure of flat thin, help sawyer principle linear motor slimming and lightweight;
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is for being the structural representation of the utility model stator module.
Fig. 3 is the structural representation of the utility model mover assembly.
Fig. 4 is the structural representation of the utility model mounting assembly.
Fig. 5 for the utility model drive configuration schematic diagram.
Fig. 6 is the utility model mover assembly drive principle figure.
Embodiment
As shown in Figure 1, the utility model is achieved like this, it comprises stator module 1, mover assembly 2, mounting assembly 3 and pretension pressure-applying unit 4, it is characterized in that pretension pressure-applying unit 4 connects mounting assembly 3, connect stator module 1 on the mounting assembly 3, stator module 1 is connected with mover assembly 2;
As shown in Figure 2, described stator module is made up of to individual driving gear 8 to driving gear 7, Y rectangular slab 5, piezoelectric ceramic 6, X, the positive and negative two sides that it is characterized in that rectangular slab 5 is connected with two-layer piezoelectric ceramic 6 respectively, on the piezoelectric ceramic 6 respectively symmetry be connected with four X to driving gear 7 and four Y to individual driving gear 8, X applies respectively to the end face of individual driving gear 8 to driving gear 7 and Y and increases the antifriction material 9 that rubs; Described piezoelectric ceramic 6, feature is: it is made up of a plurality of piezoelectric chips, between each piezoelectric chip at the X of stator plate 5 to upwards all leaving the gap with Y, the polarised direction of each piezoelectric chip in the two-layer piezoelectric ceramic on stator rectangular slab 5 front and backs is identical;
As shown in Figure 3, described mover assembly is made up of slide plate 10, rolling element 11, cover plate 12 and screw 13, it is characterized in that cover plate 12 and slide plate 10 are permanently connected together, has several shoulder holes on the slide plate 10, and rolling element 11 is housed in the shoulder hole;
As shown in Figure 4, described mounting assembly is made up of last mounting cover 14, following mount pad 15, flexible hinged-support 16 and screw 17.Last mounting cover 14 connects mount pad 15 down, is drilled with several installing holes on the following mount pad 15; Described pretension pressure-applying unit, it comprises disk spring 18 and pressurizes and adjust screw 19, it is characterized in that rotation adjustment screw 19 connects adjusting disk spring 18.
Ultrasonic motor with two linear degrees of freedom promotes mover by the ultrasonic mechanical oscillation of doing of stator module 1 and does the XY plane motion.Vibration for the crooked operation mode that excites stator module 1 effectively, need to paste high performance piezoelectric ceramic 6 at the front and back of stator rectangular slab 5, and need on these piezoelectric ceramic 6, apply high-frequency harmonic exciting power signal, make piezoelectric ceramic 6 produce inverse piezoelectric effect, thereby cause rectangular slab 5 mechanical oscillation.In order to inspire the B of rectangular slab 5 on directions X
0,5Mode is pasted on stator rectangular slab 5 positive outer field piezoelectric ceramic 6 and need polarizes and handle and the power supply configuration; For the B on the directions X that excites stator
0,8Mode, the piezoelectric ceramic 6 that is affixed on stator rectangular slab 5 front nexines polarize and handle and the power supply configuration; For the Y that inspires rectangular slab 5 to B
5,0Mode is affixed on the outer field piezoelectric ceramic 6 in stator rectangular slab 5 back sides and polarizes and handle and the power supply configuration; For the Y that excites the stator rectangular slab to B
8,0Mode, the piezoelectric ceramic 6 that is affixed on nexine on stator rectangular slab 5 back sides polarize and handle and the power supply configuration.
Be provided with 8 driving gears on the stator plate 5 of ultrasonic motor with two linear degrees of freedom, these teeth be divided into X to driving gear 7 and Y to two groups of driving gears 8 etc.4 teeth are all arranged in every group, and X is used to promote mover to driving gear 7 and does rectilinear motion along X-direction, and Y is used to promote mover to driving gear 8 and does rectilinear motion along Y direction.
As shown in Figure 5, described X to driving gear 7 along the installation site on the directions X of stator rectangular slab 5 is: driving gear 7 must be in X to mode of flexural vibration B
0,5And B
0,8Non-crest and the appropriate location of trough.And for fear of or reduce X as far as possible and to the motion of driving gear 7 Y of mover assembly produced to linear degrees of freedom and disturb, X to driving gear 7 on the Y direction of rectangular slab 5 position is: be in B
5,0And B
8,0Public nodel line on.
Described Y to driving gear 8 along the installation site on the Y direction of stator rectangular slab 5 is: must be in Y to mode of flexural vibration B
5,0And B
8,0Non-crest and the appropriate location of trough.Equally, for fear of or reduce Y and to 8 motions of driving gear the X of mover produced to degree of freedom motion and disturb, Y to driving gear 8 on rectangular slab 5 along X to the position is: be in B
0,5And B
0,8The public nodel line place of r.
The operation principle of motor is: by on piezoelectric ceramic I group, applying the high-frequency harmonic pumping signal, excite stator X to B
0,5(or B
0,8) bending vibration modes, order about X and doing just (or anti-) to rectilinear motion to the friction promotion mover assembly of just doing (or anti-) to elliptic motion, relending to help between driving gear 7 and the mover assembly 22 along X-axis along X to the end face place of driving gear 7 particle; By on piezoelectric ceramic II group, applying the high-frequency harmonic pumping signal, excite stator Y to B
5,0(or B
8,0) bending vibration modes, order about Y to the end face place of driving gear 8 particle along Y to just doing (or anti-) to elliptic motion, and by Y the friction between driving gear 8 and mover assembly 2 promotes mover assembly 2 and is just making (or instead) to rectilinear motion along Y-axis.When encouraging stator X simultaneously to the time, just realized the XY plane motion of motor with the operation mode of Y on both direction.
Shown in Figure 6, provide motor among the figure and utilized single-phase high-frequency harmonic signal that stator is encouraged, order about X and promote the situation that mover assembly 2 moves in the X-axis direction to driving gear 7.Because four X two rows before and after driving gear 7 has been divided into along the stator plate Y direction, two toothrows are just the same to the driving situation of mover, and therefore, wherein a toothrow is that example illustrates the driving of its X to the degree of freedom.Mover assembly 2 is B by stator along the forward drive of X-axis
0,5Mode realizes, presses B at stator
0,5Mode is bent the preceding half period of shaking, and two X contact and do swing clockwise to driving gear 7 with mover assembly 2, promote mover by the rubbing action between driving gear and the mover assembly 2 and make positive movement; Press B at stator
0,5Mode is bent the later half cycle of shaking, and two X disengage to driving gear 7 and rotor, and not to the mover assembly transferring power, at this moment, mover assembly 2 continues slippage under effect of inertia.It is B by rectangular slab 5 that mover assembly 2 moves along the opposite direction of X-axis
0,8Mode realizes, presses B at stator
0,8The curved preceding half period of shaking of mode, two X contact and do counter-clockwise swing to driving gear 7 with mover assembly 2, promote the mover counter motion by the rubbing action between driving gear and the mover assembly 2; Press B at stator
0,8Mode is bent the later half cycle of shaking, and two X disengage to driving gear and rotor, and not to the mover assembly transferring power, at this moment, mover assembly 2 continues slippage under effect of inertia.What deserves to be explained is, drive X at X in the degree of freedom to driving gear 7, Y is also driving Y to being moved by degree to driving gear 8.Because Y is arranged in B to driving gear 8 along the X-direction of rectangular slab 5
0,5With B
0,8Public nodel line place, therefore, Y produces hardly to degree of freedom motion to the X of 8 pairs of mover assemblies of driving gear and disturbs.
Y on the rectangular slab 5 is the B that utilized rectangular slab 5 to the driving of 8 pairs of mover assemblies 2 of driving gear
5,0Or B
8,0Mode, wherein, B
5,0Be used to drive mover assembly 2 along Y-axis positive movement, B
8,0Being used to drive mover assembly 2 moves along the negative direction of Y-axis.It is just the same to the situation of the degree of freedom to driving gear 7 promotion X to the situation and the X of the degree of freedom that Y promotes mover Y to driving gear 8.Equally, because X is arranged in B to driving gear 7 along the Y direction of rectangular slab 5
5,0With B
8,0Public nodel line place, therefore, X does not produce interference to the Y of 7 pairs of mover assemblies 2 of driving gear to degree of freedom motion yet.
Claims (6)
1. one kind based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab, it comprises stator module, mover assembly, mounting assembly and pretension pressure-applying unit, it is characterized in that the pretension pressure-applying unit connects mounting assembly, connect stator module on the mounting assembly, stator module and mover assembly are connected, stator module is fixed on the mounting assembly by flexible hinged-support, and mover assembly constitutes higher pair by ball and mounting assembly and is connected, and the pretension pressure-applying unit is pressed on the stator module.
2. according to claim 1 based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab, described stator module is made up of to driving gear to driving gear, Y rectangular slab, piezoelectric ceramic, X, the positive and negative two sides that it is characterized in that rectangular slab is connected with two-layer piezoelectric ceramic respectively, on the piezoelectric ceramic respectively symmetry be connected with four X to driving gear and four Y to driving gear, X applies respectively to the end face of driving gear to driving gear and four Y and increases the antifriction material that rubs.
3. according to claim 1 based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab, described mover assembly is made up of slide plate, rolling element, cover plate, it is characterized in that the fixedly connected slide plate of cover plate, have several shoulder holes on the slide plate, rolling element is arranged in the shoulder hole.
4. according to claim 1 based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab, described mounting assembly is made up of last mounting cover, following mount pad, flexible support, it is characterized in that mounting cover connects mount pad down, following mount pad is connected with several flexible supports, is drilled with several installing holes on the following mount pad.
5. the ultrasonic motor with two linear degrees of freedom based on the curved driving of shaking of rectangular slab according to claim 1, described pretension pressure-applying unit is made up of disk spring and pressurization adjustment screw, it is characterized in that adjusting screw and connects the adjusting disk spring.
6. according to claim 2 based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab, described piezoelectric ceramic, it is characterized in that piezoelectric ceramic is made up of a plurality of piezoelectric chips, between each piezoelectric chip the X of rectangular slab to Y to all leaving the gap, the polarised direction of each piezoelectric chip in the two-layer piezoelectric ceramic on the rectangular slab front and back is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201855177U CN201490919U (en) | 2009-06-19 | 2009-06-19 | Rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201855177U CN201490919U (en) | 2009-06-19 | 2009-06-19 | Rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201490919U true CN201490919U (en) | 2010-05-26 |
Family
ID=42429785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201855177U Expired - Fee Related CN201490919U (en) | 2009-06-19 | 2009-06-19 | Rectangular plate bending vibration driven two-linear-degree-of-freedom ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201490919U (en) |
-
2009
- 2009-06-19 CN CN2009201855177U patent/CN201490919U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20110619 |