CN207354076U - Plane ultrasonic motor based on the driving of ability to speak shape piezoelectric vibrator - Google Patents
Plane ultrasonic motor based on the driving of ability to speak shape piezoelectric vibrator Download PDFInfo
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- CN207354076U CN207354076U CN201721379603.2U CN201721379603U CN207354076U CN 207354076 U CN207354076 U CN 207354076U CN 201721379603 U CN201721379603 U CN 201721379603U CN 207354076 U CN207354076 U CN 207354076U
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- 230000005284 excitation Effects 0.000 claims abstract description 54
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- 230000000694 effects Effects 0.000 claims description 5
- 230000001737 promoting effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000004044 response Effects 0.000 abstract description 5
- 210000002683 foot Anatomy 0.000 description 52
- 239000011295 pitch Substances 0.000 description 10
- 230000010287 polarization Effects 0.000 description 10
- 238000002604 ultrasonography Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229910052573 porcelain Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- 206010049214 Monopodia Diseases 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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Abstract
The utility model discloses a kind of plane ultrasonic motor based on the driving of ability to speak shape piezoelectric vibrator, its stator module is installed between mover assembly and mounting assembly, the vertical tooth and contrate surrounded surface paste of ability to speak shape structural slab has Piezoelectric Ceramics Excitation component, utilize the specific two-phase operation mode vibration of stator module, wherein, antisymmetry bending vibration modes are used for realization contact and disengaging between mover assembly and stator module outside face, and symmetrical bending vibration modes then realize the plane slide plate edge for driving mover assembly respectively in faceyXiang HexTo movement.The utility model enables motor to produce the even more high-class precise motion of micron order, and motor is had fast response characteristic；Motor output power can be increased exponentially, and makes motor operation more stable；Motor micromation, panelized design are advantageously implemented, can be widely applied for precision plane motion positions, small-sized and microservo actualor driving.
Description
Technical field
The utility model is related to piezoelectric ultrasonic motor field, be using ability to speak shape structural slab in plane vibration operation mode and
The two-freedom plane ultrasonic motor of out-of-plane vibration operation mode composite flooding, and in particular to one kind is based on ability to speak shape piezoelectric vibrator
The plane ultrasonic motor of driving.
Background technology
Ultrasound electric machine is the mechanical energy that the inverse piezoelectric effect based on piezoelectric converts electrical energy into elastomer-forming particle, and profit
Macro-mechanical is converted to mechanical friction effect to move.Ultrasound electric machine is compared with conventional electromagnetic motor, simple in structure, volume
It is small, precision is high, response is fast, cut off self-lock, without electromagnetic interference the advantages that.Ultrasound electric machine is modern manufacturing equipment, space flight device, new
Formula weapon, family expenses and the indispensable important execution unit of business automation equipment, be divided into rotary-type, linear pattern, single-degree-of-freedom,
The diversified forms such as multiple degrees of freedom.At present, rotary-type and linear type ultrasound motor technology is increasingly ripe, and ultrasound electric machine industrialization is also led
Concentrate on this two classes motor, and a kind of specific pattern of the plane ultrasonic motor (PUSM) as multi-freedom electric motor, because existing
Movement and power couple feature, and make the surge of its technical contradiction, design complexity, drive control difficult, so as to cause it to develop phase
To slow.So far, the PUSM released mainly has the structure such as mast formula, flat, combined type.In terms of foreign study, 1998,
The monopodia formula standing wave linear type ultrasound electric machine of flexural vibration mode of Tomikawa Yoshio's successful design based on laminated piezoelectric ceramics, should
Maximal rate that motor is zero load is 90mm/s.2006, French Dembele developed a kind of small-sized three-freedom planar ultrasonic electric
Machine, size 64mm × 38mm × 2.5mm；In the same year, it is flat that Belgian Vijver develops a kind of piezoelectricity three-freedom planar work
Platform, precision reach l0nm.Scuor in 2012 designs the five degree of freedom locating platform based on ultrasound electric machine.At home, Liu in 2002
Person of outstanding talent's mark releases the planar motor of cylindrical bar vibratory drive.2008, when ship and cut bar two quadravalences in that orthogonal direction based on becoming
Bending vibration, develops a kind of mast formula two-freedom planar motor, the motor maximum speed 190mm/s, maximum thrust 19N.2009
Year, the plane ultrasonic motor based on the orthogonal amplitude transformer driving of cross is released on Harbin Institute of Technology Chen Wei mountains, and thrust reaches 100N.2014, sternly
It is bright etc. to develop single stator two-freedom plane ultrasonic driver.Generally see, since development time is not grown, that has released is flat
Face ultrasound electric machine structural shape is also extremely limited, generally in relatively low in the performance of motor.Nevertheless, due to plane ultrasonic electricity
Machine realizes plane motion and directly drives, and response is fast, power density is big, positioning is accurate high, therefore in big integrated level silicon processing, accurate
There is special important application prospect in the various fields such as skin processing, optical fiber assembling, micro- medical procedure, in micro-move device, micro-
The important function that other motors are difficult to substitute can have been given play in many high-technology fields such as assembling, robot.
Utility model content
The purpose of this utility model is that propose a kind of face using four in ability to speak shape structural slab symmetrical teeth two-by-two
Interior bending vibration mode of oscillation and the plane ultrasonic motor of face excurvation vibrational mode driving, make motor have micron order, sub-micron
Level Motion Resolution rate, Millisecond response speed, can produce larger movement velocity, and export compared with high thrust.
In view of above-mentioned purpose, the utility model is realized using following technical scheme.Driven based on ability to speak shape piezoelectric vibrator
Plane ultrasonic motor, including stator module, mover assembly and mounting assembly, the stator module be installed on the mover assembly
Between the mounting assembly；
The stator module includes ability to speak shape structural slab, and ability to speak shape structural slab is in square frame-shaped, in ability to speak shape structural slab four
The corner at angle sets grooved hole, and threaded hole is provided with corner；Vertical tooth is provided with the inside of one opposite side of ability to speak shape structural slab,
Contrate is provided with the inside of another opposite side；Vertical tooth and contrate are square strip, its end is tapered, indulges the inside of tooth and contrate
Adjusting hole is both provided with, the central axes of adjusting hole are overlapped with vertical tooth and contrate center line respectively；The surrounded surface of vertical tooth and contrate
Paste has Piezoelectric Ceramics Excitation component；Piezoelectric Ceramics Excitation component includes longitudinal vibration outside face and encourages bending vibration excitation pottery in ceramic knead dough
Porcelain, the plane of vertical tooth and contrate are pasted with longitudinal vibration excitation ceramics outside face, and the side of vertical tooth and contrate is pasted with bending vibration in face and encourages
Ceramics, the plane of the end of vertical tooth and contrate are both provided with driving foot, drive sufficient thickness to be slightly above longitudinal vibration excitation ceramics outside face
Thickness, drive sufficient top surface to wipe material coated with high-performance abrasion-proof；
The mover assembly includes plane slide plate and mover bearing, and mover bearing is provided with pit, ball is housed in pit,
And it is covered in plane slide plate；
The mounting assembly includes riser and bottom plate, is fixed with riser above bottom plate, riser is " U "-shaped, is set on riser
Screw hole is equipped with, the side substrate of riser is fixed with boss and is equipped with through hole, gasket is housed on boss, bottom plate is consolidated equipped with bearing
Determine screw；
The riser is connected by bolt with mover bearing, and stator fixing screws pass through the boss and gasket and knot on riser
Threaded hole on structure plate is fixedly connected, and drives the plane slide plate bottom surface of sufficient top surface and mover assembly to connect.
Preferably, the ceramic positive antiplane for being respectively symmetrically pasted on vertical tooth and contrate of bending vibration excitation outside the face.
Preferably, the ceramic left and right side for being respectively symmetrically pasted on vertical tooth and contrate of bending vibration excitation in the face.
Preferably, it is Kynoar base frication material that the high-performance abrasion-proof, which wipes material,.
The utility model has the technical effect that：1st, using simple mouth tooth-shape structure stator, while two straight line of mover is realized
Free degree direction directly drives, and avoids and plane caused by motion changing mechanism is used in traditional xOy 2 D shifting units
Kinematic error, so that motor can produce the even more high-class precise motion of micron order, and it is quick to have motor
Response characteristic；2nd, two couple of stator module drives foot alternately to promote mover assembly to make plane motion, and it is defeated to increase exponentially motor
Go out power, and make motor operation more stable；3rd, motor is sufficient to mover using the driving being arranged in ability to speak shape structural slab plane
It is driven, is advantageously implemented motor micromation, panelized design, can be widely applied for precision plane motion positions, small-sized
With the driving of microservo actualor.
Brief description of the drawings
Fig. 1 is the 3-D solid structure configuration partial sectional view of the utility model；
Fig. 2 is the dimensional structure diagram of stator module in the utility model；
Fig. 3 is the dimensional structure diagram of mover assembly in the utility model；
Fig. 4 is the dimensional structure diagram of mounting assembly in the utility model；
Fig. 5 is antisymmetry bending vibration modes floor map in a kind of operation mode face of stator module in the utility model；
Fig. 6 is antisymmetry bending vibration modes plane signal in another operation mode face of stator module in the utility model
Figure；
Fig. 7 is antisymmetry bending vibration modes side view outside the operation mode face of stator module in the utility model；
Fig. 8 is antisymmetry bending vibration modes schematic perspective view outside the operation mode face of stator module in the utility model；
Fig. 9 is that the piezoelectric ceramics location arrangements of stator module and its piezoelectric polarization power supply configuration plane are shown in the utility model
It is intended to；
Figure 10 is the piezoelectric ceramics location arrangements of stator module and its piezoelectric polarization power supply configuration side view in the utility model
Figure；
Figure 11 is antisymmetry bending vibration signal in a kind of work in-plane moving driving principle face of stator module in the utility model
Figure；
Figure 12 is that antisymmetry bending vibration is shown in another work in-plane moving driving principle face of stator module in the utility model
It is intended to；
Figure 13 is antisymmetry bending vibration schematic perspective view outside driving principle face outside the face of stator module in the utility model；
Figure 14 be the utility model in mover X to movement driving principle schematic diagram；
Figure 15 is that mover Y-direction moves driving principle schematic diagram in the utility model.
In figure:1. stator module, 11. ability to speak shape structural slabs, 111. driving foots, 112. threaded holes, 113. adjusting holes, 114.
Slot, 115. vertical teeth, 116. contrates, 117. square shape structural slabs, 12. Piezoelectric Ceramics Excitation components, the outer longitudinal vibration in 121. faces encourage
Ceramics, bending vibration excitation ceramics in 122. faces；2. mover assembly, 21. plane slide plates, 22. balls, 23. mover bearings, 231. is recessed
Hole；3. mounting assembly, 31. risers, 32. bottom plates, 33. boss, 34. gaskets, 35. bearing fixing screws, 36. stators fix spiral shell
Nail, 37. bolts.
Embodiment
Below in conjunction with drawings and examples, the utility model is described in further detail.Referring to Fig. 1 to Fig. 4, based on ability to speak shape
The plane ultrasonic motor of piezoelectric vibrator driving, including stator module 1, mover assembly 2 and mounting assembly 3, the stator module 1 are pacified
Loaded between the mover assembly 2 and the mounting assembly 3；
The stator module 1 includes ability to speak shape structural slab 11, and ability to speak shape structural slab 11 is in square frame-shaped, passes through line cutting technology
Slot 114 is cut out in the corner of ability to speak shape 11 4 interior angles of structural slab；And pass through brill on 11 4 jiaos of ability to speak shape structural slab
Hole technology drills out threaded hole 112；Vertical tooth 115 is provided with the inside of 11 1 opposite side of ability to speak shape structural slab, is set on the inside of another opposite side
It is equipped with contrate 116；Vertical tooth 115 and contrate 116 are square strip, its end is tapered；By drilling technique in vertical 115 He of tooth
The inside of contrate 116 drills out adjusting hole 113, its length is concordant with the bottom surface of 116 tapered end of vertical tooth 115 and contrate, adjusting hole
113 central axes are overlapped with vertical tooth 115 and 116 center line of contrate respectively；The surrounded surface paste of vertical tooth 115 and contrate 116 has
Piezoelectric Ceramics Excitation component 12, Piezoelectric Ceramics Excitation component 12 include longitudinal vibration outside face and encourage bending vibration excitation pottery in ceramic 121 knead doughs
Porcelain 122, the plane of vertical tooth 115 and contrate 116 are pasted with longitudinal vibration excitation ceramics 121 outside face, and bending vibration encourages ceramics 121 outside the face
Respectively symmetrically it is pasted on the positive antiplane of vertical tooth 115 and contrate 116.The side of vertical tooth 115 and contrate 116 is pasted with bending vibration in face
Excitation ceramics 122, bending vibration excitation ceramics 122 are respectively symmetrically pasted on the left and right sides of vertical tooth 115 and contrate 116 in the face.
The plane of the end of vertical tooth 115 and contrate 116 is both provided with driving foot 111, and the thickness of driving foot 111 is slightly above longitudinal vibration outside face and swashs
The thickness of ceramics 121 is encouraged, drives 111 top surfaces of foot to wipe material coated with high-performance abrasion-proof；The high-performance abrasion-proof is wiped material and is used
Kynoar base frication material.
The mover assembly 2 includes plane slide plate 21 and mover bearing 23, and mover bearing 23 is provided with pit 231, pit
Ball 22 is housed in 231, and is covered in plane slide plate 21；
The mounting assembly 3 includes riser 31 and bottom plate 32, and riser 31 is fixed with above bottom plate 32, and riser 31 is in " U "
Shape, is provided with screw hole on riser 31, the side bottom plate 32 of riser 31 is fixed on boss 33 and is equipped with through hole, filled on boss 33
There is gasket 34, bottom plate 32 is equipped with bearing fixing screws 35；
The riser 31 is connected by bolt 37 with mover bearing 23, and stator fixing screws 36 pass through the boss on riser 31
33 and gasket 34 be fixedly connected with the threaded hole 112 on structural slab 11, the plane of top surface and the mover assembly 2 of driving foot 111 is slided
21 bottom surface of plate connects.
The operation mode of the utility model is as follows：Using the specific two-phase operation mode vibration of stator module 1, wherein, face
Outer antisymmetry bending vibration modes are used for realization contact and disengaging between mover assembly 1 and stator module 2, symmetrical bending vibration modes in face
Then respectively realize driving mover assembly 2 plane slide plate 21 along y to x to movement；
Antisymmetry bending vibration modes are the inverse piezoelectric effects based on piezoelectric ceramics outside face, and ceramics are encouraged by bending vibration outside opposite
121 apply specific driving voltage, and vertical tooth 115 symmetrical above and below and symmetrical contrate 116 are based on ability to speak shape structural slab 11
The out-of-plane bending vibration of plane, drives vertical 116 end of tooth 115 and contrate respectively along perpendicular to the two of 11 plane of ability to speak shape structural slab
Opposite direction bends and is higher by the plane of ability to speak shape structural slab 11, indulge the out-of-plane bending vibration vibration shape of tooth 115 and contrate 116 on the contrary,
So that 111 points of driving foot on the vertical tooth 115 and contrate 116 of ability to speak shape structural slab 11 is two groups of alternate holdings and mover assembly
2 plane slide plate 21 is contacted with separating；
Symmetrical bending vibration modes are to apply specific driving voltage by bending vibration excitation ceramics 122 in opposite in face, and excitation is vertical
The in-plane bending vibration of tooth 115 and contrate 116 based on 11 plane of ability to speak shape structural slab, indulges the in-plane bending vibration vibration shape of tooth 115
Symmetrically so that the driving foot 111 on vertical tooth 115 alternately promotes the plane slide plate 21 of mover assembly 2 along x to moving；Contrate 116
The in-plane bending vibration vibration shape is symmetrical so that the driving foot 111 on contrate 116 alternately promotes the plane slide plate 21 of mover assembly 2
Along y to moving.
Embodiment：The utility model is based on the plane ultrasonic motor of " ability to speak " shape piezoelectric vibrator driving, including stator module
1st, mover assembly 2 and mounting assembly 3, referring to Fig. 1 to Fig. 4.
Mounting assembly 3 is connected by the riser 31 that its 32 side of bottom plate is fixed with mover assembly 2, and stator module 1 is positioned at branch
Between holder assembly 3 and mover assembly 2, by driving foot 111 to be connected with mover assembly 2, and fixed by the stator of mounting assembly 3
Screw 36 is connected with boss 33；
Stator module 1 includes ability to speak shape structural slab 11, and ability to speak shape structural slab 11 is in square frame-shaped, and ability to speak shape structural slab 11 is a pair of
Vertical tooth 115 is provided with the inside of side, contrate 116 is provided with the inside of another opposite side；Set at 11 4 interior angles of ability to speak shape structural slab
Slot 114 is equipped with, corner is provided with threaded hole 112, and the inside of vertical tooth 115 and contrate 116 is both provided with adjusting hole 113, adjusts
Center line of the central axis in hole 113 respectively with vertical tooth 115 and contrate 116 overlaps；Vertical tooth 115 and contrate 116 are square bar
Shape, its end is tapered, and the surrounded surface paste of vertical tooth 115 and contrate 116 has Piezoelectric Ceramics Excitation component 12, and piezoelectric ceramics swashs
Component 12 is encouraged by bending vibration excitation ceramics 122 are formed in ceramic 121 knead doughs of longitudinal vibration excitation outside face, indulges the plane of tooth 115 and contrate 116
Longitudinal vibration excitation ceramics 121 outside face are pasted with, the side of vertical tooth 115 and contrate 116 is pasted with bending vibration excitation ceramics 122 in face, indulges
The plane of the end of tooth 115 and contrate 116 is both provided with driving foot 111, and the thickness of driving foot 111 is slightly above longitudinal vibration outside face and encourages
The thickness of ceramics 121, drives 111 top surfaces of foot to wipe material coated with high-performance abrasion-proof；
Mover assembly 2 includes plane slide plate 21 and mover bearing 23, and the one side of mover bearing 23 towards plane slide plate 21 is set
Pit 231 is equipped with, pit 231 is hemispherical, and ball 22 is housed in pit 231；
Mounting assembly 3 includes riser 31 and bottom plate 32, and riser 31 is fixed with above bottom plate 32, and riser 31 is " U "-shaped, stands
Screw hole is provided with plate 31, the side bottom plate 32 of riser 31 is fixed on boss 33 and is equipped with through hole, equipped with pad on boss 33
Piece 34, bottom plate 32 are equipped with bearing fixing screws 35；
Riser 31 is connected by bolt 37 with mover bearing 23, and stator fixing screws 36 pass through 33 He of boss on riser 31
Gasket 34 is fixedly connected with the threaded hole 112 on structural slab 11, the plane slide plate 21 of the top surface and mover assembly 2 of driving foot 111
Bottom surface connects.
Such as Fig. 2, the plane that the end of tooth 115 and contrate 116 is indulged in ability to speak shape structural slab 11 is both provided with driving foot 111,
It is placed in the positive driving foot 111 of ability to speak shape structural slab 11 to be mainly used for promoting mover assembly 2 to do two-freedom linear motion, is placed in
The driving foot 111 at 11 back side of ability to speak shape structural slab, it is main to play a part of to improve stator operation mode.Driving foot 111 parallel to
The surface of 11 plane of ability to speak shape structural slab has been coated with a floor height performance rub resistance material, Kynoar base frication material, purport
Friction drive and extension motor between the driving foot 111 of increase stator module 1 and the plane slide plate 21 of mover assembly 2 use
Service life；Adjusting hole 113 is provided among the outside on 11 4 side of ability to speak shape structural slab, in favor of realizing stator three-phase operation mode
Frequency invariance and improvement stator structure are flexible；Grooved hole 114 is set at 11 4 interior angles of ability to speak shape structural slab, and corner is provided with
Threaded hole 112, connection of the threaded hole 112 for stator module 1 and mounting assembly 3, and play a part of to grip, through hole
114 improving the flexibility of stator structure.
As Fig. 3, the mover bearing 23 of mover assembly 2 are recessed towards setting hemispherical dimples 231 in the one side of plane slide plate 21
Cheat 231 hemispherical, ball 22 is housed in pit 231, so as to realize point contact between plane slide plate 21 and ball 22.
Such as Fig. 1 and Fig. 4, the threaded hole 112 and mounting assembly 3 of 11 4 jiaos of settings of ability to speak shape structural slab of stator module 1
Gasket 34 is housed to realize that the pretension of stator module 1, gasket 34 and boss 33 by centre bore coaxially determine between boss 33
Position, is connected by the stator fixing screws 36 of mounting assembly 3；Stator module 1 connects mover group by the riser 31 of mounting assembly 3
The mover bearing 23 of part 2, and it is connected by screw fixation so that driving foot 111 and plane slide plate on ability to speak shape structural slab 11
21 form prismatic pair connection；Bottom plate 32 is used to mounting assembly 3 being fixed on other mechanisms equipped with bearing fixing screws 35.
Fig. 5 to Fig. 9, Piezoelectric Ceramics Excitation component 12 is by bending vibration excitation ceramic 121 outside ceramic 122 knead doughs of bending vibration excitation in face
Form, the plane of vertical tooth 115 and contrate 116 is pasted with longitudinal vibration excitation ceramics 121 outside face, and the side of vertical tooth 115 and contrate 116 is glued
Bending vibration excitation ceramics 122 in face are posted, altogether comprising 16 high performance piezoelectric potsherd PZT8, the piezoelectricity of each piezoelectric ceramic piece
Polarization direction is each perpendicular to ability to speak shape structural slab 11 and pastes surface, and parallel with normal to a surface direction；Bending vibration excitation pottery in face
The outer bending vibration excitation ceramics 121 of 122 knead dough of porcelain are respectively used to the symmetrical outer antisymmetry bending vibration two of bending vibration knead dough in 1 face of excitation stator module
Phase operation mode.
Such as Fig. 9, bending vibration excitation ceramics 122 are made of eight piezoelectric ceramic pieces in face, they are pasted in vertical 115 He of tooth respectively
The left and right side of contrate 116, bending vibration vibration shape wave crest (or trough) place in 116 face of vertical tooth 115 and contrate, and 115 He of vertical tooth
The laying mode of bending vibration excitation potsherd is identical in the face of contrate 116.
Such as Fig. 9, bending vibration excitation ceramics 121 are made of 8 piezoelectric ceramic pieces outside face, they are pasted in vertical 115 He of tooth respectively
The obverse and reverse sides of contrate 116, bending vibration vibration shape wave crest (or trough) place outside 116 face of vertical tooth 115 and contrate, and 115 He of vertical tooth
The arrangement of bending vibration excitation potsherd is identical outside the face of contrate 116.
The operation principle of the plane ultrasonic motor of the utility model is the certain vibration Working mould by exciting stator module 1
State, drives the driving being placed on 11 front of ability to speak shape structural slab foot 111 to do elliptic motion along xOz planes and yOz planes at the same time, and
Coupled by driving foot 111 with the friction between mover assembly 2, promote the plane slide plate 21 of mover assembly 2 at the same time along x directions
Plane motion is done with y directions.
As shown in Figure 11 to Figure 13, the 1 particular job mode of stator module mainly includes ability to speak shape structural slab 11
Vertical tooth 115 and contrate 116 are in antisymmetry flexural vibration mode outside the face in xOy faces, the two-phase such as symmetric curvature mode of oscillation in face
Operation mode.Wherein, antisymmetry bending vibration modes are mainly used for realizing instant contact between mover assembly 1 and stator module 2 outside face
With separating, in face symmetrical bending vibration modes be then used for realization driving mover assembly 2 y to x to movement.Motor is based on contrate
Antisymmetry bending vibration and antisymmetry bending vibration outside face in 116 faces, synthesize the elliptical trajectory along yOz faces on driving foot 111, and
The plane slide plate 21 of mover assembly 2 is promoted accordingly along y to moving；Utilize the vibration of vertical 115 in-plane bending mode of tooth and out-of-plane bending
Modal vibration, synthesizes the elliptical trajectory along xOz faces on driving foot 111, and promotes the plane of mover assembly 2 to slide accordingly
Plate 21 is along x to moving.
For ensure driving foot 111 on it is simultaneously synthesizing go out along xOz and yOz faces elliptic motion, it is desirable to the two of stator module 1
The intrinsic frequency of phase operation mode is equal or as close possible to while to prevent from producing mechanical noise when motor from working, it is necessary to logical
Every structure size of reasonable disposition stator module 1 is crossed, two-phase operation mode frequency is in ultrasonic frequency domain and meets frequency one
Cause property.
, need to be in vertical tooth for symmetric curvature operation mode vibration in the face of effective, correct excitation stator module 1 such as Fig. 9
115 and 116 left and right side of contrate paste face in bending vibration excitation ceramics 122 on be passed through high-frequency electric power drive signal；Respectively will
8 unilateral interior bending vibration excitation ceramics 122 of 116 arranged on left and right sides of vertical tooth 115 and contrate are divided into two groups by symmetry, with the pottery in group
Tile uses identical polarization direction.Such as Fig. 9, piezoelectric polarization direction is represented perpendicular to paste surface with "+" and with normal direction phase
With backwards to 1 entity of stator module, piezoelectric polarization direction is represented perpendicular to paste surface with "-" and is determined with normal direction phase opposite sense
1 entity of sub-component, the polarization direction for indulging bending vibration excitation ceramics 122 in the face of tooth 115 and contrate 116 are arranged symmetrically.All
The surface of bending vibration excitation ceramics 122 is passed through same frequency sine sin ω t driving voltages in face, and bending vibration encourages ceramics 122 and mouth in face
The paste face of tooth-shape structure plate 11 is grounded zero driving voltage of access.
, need to be vertical for effectively, correctly antisymmetry bends operation mode vibration outside the face of excitation stator module 1 such as Figure 10
High-frequency electric power drive signal is passed through on bending vibration excitation ceramics 121 outside the face of tooth 115 and the paste of 116 positive and negative of contrate, the driving
Signal frequency should be identical with bending vibration pumping signal in face.Such as Figure 10, bending vibration swashs outside 116 positive and negative face of vertical tooth 115 and contrate
Encourage ceramics 121 and use opposite piezoelectric polarization direction, the piezoelectric polarization direction of the outer bending vibration excitation ceramic 121 in the face of single tooth reverse side
The piezoelectric polarization direction of bending vibration excitation ceramics 121 is opposite outside face corresponding with front.Bending vibration excitation ceramics 121 outside all faces
Surface is passed through same frequency cosine cos ω t driving voltages, and bending vibration encourages the ceramic 121 paste faces with ability to speak shape structural slab 11 outside face
Zero driving voltage of ground connection access.
Such as Figure 11 to Figure 14, the stator module 1 drives elliptic motion of the foot 111 along xOz planes, is with time phase
Potential difference is 90 ° of two same frequency sine sin ω t voltages, inspire respectively in the face of stator the vibration of single order longitudinal vibration Modality work with
Outside face after mode operational vibration, facilitated by two phase vibration coupling.It is following four rank by vibration period T of stator point
Section, then corresponding elliptical orbit is made of four parts：
Such as Figure 14 (Step 1), within 0~T/4 vibration periods, the outer bending vibration of stator face makes vertical tooth 115 by largest face excurvation shape
Direct rod shape is reverted to, makes the driving foot 111 on vertical 115 top of tooth keep contacting with mover assembly 2, and contrate 116 is by reverse at this time
Largest face excurvation shape reverts to straight-bar, and is not contacted with mover 21；Bending vibration makes vertical tooth 115 by initial position A faces in stator face
It is interior to bend to B.In the period, 115 top of the vertical tooth driving foot 111 of stator module 1 is contacted with mover assembly 2 at the same time, jointly
Promote plane slide plate 21 along x to shift-in first step pitch λ.
Such as Figure 14 (Step 2), within T/4~T/2 vibration periods, the outer bending vibration of stator face drives vertical tooth 115 curved by direct rod shape
Curved shape after into maximum, makes the driving foot 111 on vertical tooth 115 be disengaged with mover assembly 2；And contrate 116 is by direct rod shape at this time
At to face excurvation to maximum displacement, and the driving foot 111 on contrate 116 is contacted with mover assembly 21；Bending vibration makes to indulge in stator face
Tooth 115 is reverted at straight-bar C by maximum deflection B in face, and the driving foot 111 on the period, stator contrate 116 is at the same time with moving
Sub-component 2 contacts, common to promote plane slide plate 21 along y to second step pitch λ of shift-in.
Such as Figure 14 (Step 3), within T/2~3T/4 vibration periods, the outer bending vibration of stator face makes vertical tooth 115 by curved after maximum
Shape reverts to direct rod shape, while the driving foot 111 on vertical tooth 115 is remained disengaged from mover assembly 2；And contrate 116 is by most at this time
Recover at big displacement to direct rod shape, and the driving foot 111 on contrate 116 is contacted with mover assembly 21；Bending vibration makes to indulge in stator face
Tooth 115 is by D at straight-bar C in-plane bendings to maximum deflection in face, in the period, driving foot 111 and mover group on contrate 116
Part 21 contacts, common to promote plane slide plate 21 along y to the 3rd step pitch λ of shift-in.
Such as Figure 14 (Step 4), within 3T/4~T vibration periods, the outer bending vibration of stator face is driven on vertical tooth 115 by direct rod shape
Maximum antecurvature shape is curved, makes driving foot 111 on vertical tooth 115 keep contacting with mover assembly 2；And contrate 116 is by direct rod shape at this time
At face excurvation to reverse maximum displacement, and the driving foot 111 on contrate 116 departs from mover assembly 2；In the period, stator face
Interior bending vibration makes vertical tooth 115 be recovered by maximum deflection D in face to A at straight-bar；In the period, indulge driving foot 111 on tooth 115 with
Mover assembly 21, which contacts, common promotes plane slide plate 21 along x to the 4th step pitch λ of shift-in.
As shown in figure 14, stator module 1 often completes said one vibration period T, and indulging 115 top of tooth driving foot 111 will be complete
The back bay position D- in curved position C- largest faces into after outside largest face in antecurvature position A- largest faces outside the B- largest faces of preceding song position
An elliptical trajectory of antecurvature position A outside largest face；So stator module 1 often completes said one vibration period T, just will
The plane slide plate 21 of mover assembly 2 is promoted along x to 2 step pitches that move forward.When stator module 1 constantly repeats the above-mentioned vibration period, it
The plane slide plate 21 of mover assembly 2 will be promoted constantly along x to reach.It is if advanced stagnant between bending vibration outside bending vibration and face in reverse face
Phase relation afterwards, then the plane slide plate 21 of mover assembly 2 will be moved along the opposite direction of x-axis.
Such as Figure 11, Figure 12, Figure 13 and Figure 15, the stator module 1 drives elliptic motion rail of the foot 111 along yOz planes
Mark, is using time phase difference as 90 ° of two same frequency sine sin ω t voltages, inspires stator in-plane bending mode work respectively
Make vibration with after the vibration of out-of-plane bending Modality work, facilitating by two phase vibration coupling.If by a vibration period T of stator
It is divided into four-stage, then drives 111 elliptic motion in yOz faces of foot to regard as and be made of four parts：
Such as Figure 15 (Step 1), within 0~T/4 vibration periods, the outer bending vibration of stator face makes contrate 116 by largest face excurvation shape
Direct rod shape is reverted to, makes the driving foot 111 on 116 top of contrate keep contacting with mover assembly 2, and indulges tooth 115 at this time by reverse
Largest face excurvation shape reverts to straight-bar, and is not contacted with mover 21；Bending vibration makes contrate 116 by initial position E faces in stator face
It is interior to bend to F.In the period, 116 top of the contrate driving foot 111 of stator module 1 is contacted with mover assembly 2 at the same time, jointly
Promote plane slide plate 21 along y to shift-in first step pitch λ.
Such as Figure 15 (Step 2), within T/4~T/2 vibration periods, the outer bending vibration of stator face drives contrate 116 curved by direct rod shape
Curved shape after into maximum, makes the foot of the driving on contrate 116 111 be disengaged with mover assembly 2；And tooth 115 is indulged at this time by direct rod shape
At to face excurvation to maximum displacement, and the driving foot 111 on vertical tooth 115 is contacted with mover assembly 21；Bending vibration makes horizontal stroke in stator face
Tooth 116 is reverted at straight-bar G by maximum deflection F in face, and in the period, stator indulges the driving foot 111 on tooth 115 while with moving
Sub-component 2 contacts, common to promote plane slide plate 21 along x to second step pitch λ of shift-in.
Such as Figure 15 (Step 3), within T/2~3T/4 vibration periods, the outer bending vibration of stator face makes contrate 116 by curved after maximum
Shape reverts to direct rod shape, while the driving foot 111 on contrate 116 is remained disengaged from mover assembly 2；And tooth 115 is indulged at this time by most
Recover at big displacement to direct rod shape, and the driving foot 111 on vertical tooth 115 is contacted with mover assembly 21；Bending vibration makes horizontal stroke in stator face
Tooth 116 is by H, driving sufficient 111 and mover group on the period, vertical tooth 115 at straight-bar G in-plane bendings to maximum deflection in face
Part 21 contacts, common to promote plane slide plate 21 along x to the 3rd step pitch λ of shift-in.
Such as Figure 15 (Step 4), within 3T/4~T vibration periods, the outer bending vibration of stator face is driven on contrate 116 by direct rod shape
Maximum antecurvature shape is curved, makes to drive foot 111 to keep contacting with mover assembly 2 on contrate 116；And tooth 115 is indulged at this time by direct rod shape
At face excurvation to reverse maximum displacement, and the driving foot 111 on vertical tooth 115 departs from mover assembly 2；In the period, stator face
Interior bending vibration makes contrate 116 be recovered by maximum deflection H in face to E at straight-bar；In the period, driving on contrate 116 foot 111 with
Mover assembly 21, which contacts, common promotes plane slide plate 21 along y to the 4th step pitch λ of shift-in.
As shown in figure 15, stator module 1 often completes said one vibration period T, and 116 top of contrate driving foot 111 will be complete
The rear curved position H- in curved position G- largest faces into after outside largest face in antecurvature position E- largest faces outside the F- largest faces of preceding song position
An elliptical trajectory of antecurvature position E outside largest face；So stator module 1 often completes said one vibration period T, just will
The plane slide plate 21 of mover assembly 2 is promoted along y to 2 step pitches that move forward.When stator module 1 constantly repeats the above-mentioned vibration period, it
The plane slide plate 21 of mover assembly 2 will be promoted constantly along y to reach.It is if advanced stagnant between bending vibration outside bending vibration and face in reverse face
Phase relation afterwards, then the plane slide plate 21 of mover assembly 2 will be moved along the opposite direction of y-axis.
Claims (5)
1. the plane ultrasonic motor driven based on ability to speak shape piezoelectric vibrator, including stator module, mover assembly and mounting assembly, its
It is characterized in that, the stator module is installed between the mover assembly and the mounting assembly；
The stator module includes ability to speak shape structural slab, and ability to speak shape structural slab is in square frame-shaped, four interior angles of ability to speak shape structural slab
Corner sets grooved hole, and threaded hole is provided with corner；Vertical tooth is provided with the inside of one opposite side of ability to speak shape structural slab, it is another
Contrate is provided with the inside of opposite side；Vertical tooth and contrate are square strip, its end is tapered, and the inside of vertical tooth and contrate is all provided with
Adjusting hole is equipped with, the central axes of adjusting hole are overlapped with vertical tooth and contrate center line respectively；The surrounded surface paste of vertical tooth and contrate
There is Piezoelectric Ceramics Excitation component；Piezoelectric Ceramics Excitation component includes longitudinal vibration outside face and encourages bending vibration excitation ceramics in ceramic knead dough, indulges
The plane of tooth and contrate is pasted with longitudinal vibration excitation ceramics outside face, and the side of vertical tooth and contrate is pasted with bending vibration excitation ceramics in face,
The plane of the end of vertical tooth and contrate is both provided with driving foot, drives sufficient thickness to be slightly above the thickness of longitudinal vibration excitation ceramics outside face
Degree, drives sufficient top surface to wipe material coated with high-performance abrasion-proof；
The mover assembly includes plane slide plate and mover bearing, and mover bearing is provided with pit, ball is housed in pit, and cover
It is placed in plane slide plate；
The mounting assembly includes riser and bottom plate, is fixed with riser above bottom plate, riser is " U "-shaped, is provided with riser
Screw hole, the side substrate of riser are fixed with boss and are equipped with through hole, and gasket is housed on boss, and bottom plate fixes spiral shell equipped with bearing
Nail；
The riser is connected by bolt with mover bearing, and stator fixing screws pass through the boss and gasket and structural slab on riser
On threaded hole be fixedly connected, drive the plane slide plate bottom surface of sufficient top surface and mover assembly connect.
2. the plane ultrasonic motor according to claim 1 based on the driving of ability to speak shape piezoelectric vibrator, it is characterised in that described
Bending vibration excitation ceramics are respectively symmetrically pasted on the positive antiplane of vertical tooth and contrate outside face.
3. the plane ultrasonic motor according to claim 1 based on the driving of ability to speak shape piezoelectric vibrator, it is characterised in that described
Bending vibration excitation ceramics are respectively symmetrically pasted on the left and right side of vertical tooth and contrate in face.
4. the plane ultrasonic motor according to claim 1 based on the driving of ability to speak shape piezoelectric vibrator, it is characterised in that described
It is Kynoar base frication material that high-performance abrasion-proof, which wipes material,.
5. a kind of operation mode of plane ultrasonic motor as claimed in claim 1 based on the driving of ability to speak shape piezoelectric vibrator, its
It is characterized in that, is vibrated using the specific two-phase operation mode of stator module, wherein, antisymmetry bending vibration modes are used for realization dynamic outside face
Contact and disengaging between sub-component and stator module, symmetrical bending vibration modes then realize the plane of driving mover assembly respectively in face
Slide plate edgeyXiang HexTo movement；
Antisymmetry bending vibration modes are the inverse piezoelectric effects based on piezoelectric ceramics outside the face, encourage ceramics to apply by bending vibration outside opposite
Add specific driving voltage, the out-of-plane bending of vertical tooth symmetrical above and below and symmetrical contrate based on ability to speak shape structural slab plane
Vibration, drives vertical tooth and contrate end to be bent respectively along two opposite directions perpendicular to ability to speak shape structural slab plane and is higher by ability to speak shape
The plane of structural slab, the out-of-plane bending vibration vibration shape for indulging tooth and contrate are opposite so that on the vertical tooth and contrate of ability to speak shape structural slab
Driving foot be divided into two groups and alternate keep and the contact of the plane slide plate of mover assembly is with separating；
Symmetrical bending vibration modes are to apply specific driving voltage by bending vibration excitation ceramics in opposite in the face, excite vertical tooth and
In-plane bending vibration of the contrate based on ability to speak shape structural slab plane, the in-plane bending vibration vibration shape for indulging tooth are symmetrical so that on vertical tooth
Driving foot alternately promote mover assembly plane slide plate edgexTo movement；The in-plane bending vibration vibration shape of contrate is symmetrical so that horizontal
The alternate plane slide plate edge for promoting mover assembly of driving foot on toothyTo movement.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721379603.2U CN207354076U (en) | 2017-10-25 | 2017-10-25 | Plane ultrasonic motor based on the driving of ability to speak shape piezoelectric vibrator |
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| CN201721379603.2U CN207354076U (en) | 2017-10-25 | 2017-10-25 | Plane ultrasonic motor based on the driving of ability to speak shape piezoelectric vibrator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107592029A (en) * | 2017-10-25 | 2018-01-16 | 南昌航空大学 | Plane ultrasonic motor and its operation mode based on the driving of ability to speak shape piezoelectric vibrator |
| CN108696182A (en) * | 2018-05-30 | 2018-10-23 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
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2017
- 2017-10-25 CN CN201721379603.2U patent/CN207354076U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107592029A (en) * | 2017-10-25 | 2018-01-16 | 南昌航空大学 | Plane ultrasonic motor and its operation mode based on the driving of ability to speak shape piezoelectric vibrator |
| CN107592029B (en) * | 2017-10-25 | 2023-06-23 | 南昌航空大学 | Planar ultrasonic motor driven by tooth-shaped piezoelectric vibrator and working mode thereof |
| CN108696182A (en) * | 2018-05-30 | 2018-10-23 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
| CN108696182B (en) * | 2018-05-30 | 2019-06-07 | 东北大学 | A kind of rotatable stage and control method towards Multi-station precision operation |
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