CN101582653B - Ultrasonic motor with two linear degrees of freedom based on flexural oscillation driving of rectangular plate - Google Patents
Ultrasonic motor with two linear degrees of freedom based on flexural oscillation driving of rectangular plate Download PDFInfo
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- CN101582653B CN101582653B CN2009101155634A CN200910115563A CN101582653B CN 101582653 B CN101582653 B CN 101582653B CN 2009101155634 A CN2009101155634 A CN 2009101155634A CN 200910115563 A CN200910115563 A CN 200910115563A CN 101582653 B CN101582653 B CN 101582653B
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- driving gear
- rectangular slab
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- piezoelectric ceramic
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Abstract
An ultrasonic motor with two linear degrees of freedom based on flexural oscillation driving of a rectangular plate is characterized in that a stator component is connected with a support component and is matched with a rotor component by a driving tooth; the rotor component and the support component form a high pair connection; the mainbody of the stator is a rectangular plate; the driving toothis arranged on the plate; and the motor adopts the B<0, 5> and B<0, 8> in the X direction and the B<5, 0> and B<8, 0> in Y direction of the rectangular plate as a working mode, and activates the modesto drive the particles on the driving tooth to carry out elliptic motion respectively along the X direction and Y direction. The linear ultrasonic motor with two linear degrees of freedom has the technical effects of: 1. utilizing single slab stator to realize the direct driving of two linear DOF simultaneously, avoiding the motion transmission error of the traditional XY movement device and leading the motor to have quick and precise positioning; 2. adopting a sheet-type stator to facilitate the thinning and lightening of the motor; and 3. flexible motion, double functions, large thrust andmore stable performance.
Description
Technical field
The present invention relates to a kind of ultrasonic motor with two linear degrees of freedom that utilizes a plurality of flexural vibration modes of rectangular slab to drive, relate in particular to a kind of based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab.
Background technology
Ultrasound electric machine is divided into single-degree-of-freedom formula and two big types of many (containing two) degree of freedom formulas.So far, single-degree-of-freedom ultrasound electric machine technology has obtained rapid progress, wherein some application of having produced in batches and having succeeded.But in some occasion, like application scenarios such as accurate XY worktable driving, comprehensive bionic machine person joint drivings, people need provide above degrees of freedom motion of two and two and power, and at this moment, it is powerless that the single-degree-of-freedom motor just seems.Under this background, the nineties in last century, the multiple freedom degrees ultrasound motor did not arise at the historic moment and the person's that progresses into the ultrasonic investigation sight line.In 2007, domestic ultrasound electric machine technology chief scientist Zhao Chun gave birth to the academician and in its classical " ultrasound electric machine technology and application ", network analysis and summary has been carried out in the state of the art and the development of multiple freedom degrees ultrasound motor.Can find out that from this work the multiple freedom degrees ultrasound motor of having released few in number nearly all belongs to many rotary freedoms formula both at home and abroad, multi straight degree of freedom ultrasound electric machine achievement in research is close to blank.After just getting into 2008, professor Li Zhirong of Suzhou Vocational University released a kind of ultrasonic motor with two linear degrees of freedom that utilizes the rod-type stator to drive.Be not difficult to find out that from the paper of Prof Lee this motor properties is still undesirable at present.Although the ultrasonic motor with two linear degrees of freedom progress is slow at present; But this type motor is because of doing plane motion, fast, the precision positioning of response; And in technical fields such as integrated semiconductor manufacturing, Precision Machining, special important application prospects is arranged, in high-technology fields such as precision driving, robot, can give play to other motors and be difficult to substitute important effect.Just because of this, the present invention proposes a kind of ultrasonic motor with two linear degrees of freedom of making plane motion of a plurality of bending vibration modes pushing motor movers of elastic rectangular thin plate.So far, also do not see other ultrasound electric machines that have similar principles and structure with the present invention at home and abroad.
Summary of the invention
The object of the present invention is to provide a kind of ultrasonic motor with two linear degrees of freedom that drives based on the BENDING OF RECTANGULAR PLATE mode of oscillation.This motor have motion flexibly, advantage such as kinematic accuracy is high, response is fast and power density is big; The clear superiority that in precision positioning, SERVO CONTROL etc. are used, exists; This motor has submicron order (even higher) position resolution, Millisecond response speed, big speed is arranged and can
produce than high thrust applied range.
The present invention is achieved in that it comprises stator module, mover assembly, mounting assembly and pretension pressure-applying unit, it is characterized in that the pretension pressure-applying unit connects mounting assembly, connects stator module on the mounting assembly, and stator module and mover assembly are connected.Stator module is fixed on the mounting assembly through flexible hinged-support, and mover assembly constitutes higher pair through ball and mounting assembly and is connected, and the pretension pressure-applying unit is pressed on the stator module.
Said stator module is made up of to driving gear to driving gear, Y rectangular slab, piezoelectric ceramic, X; The positive and negative two sides that it is characterized in that rectangular slab is connected with two-layer piezoelectric ceramic respectively; On the piezoelectric ceramic respectively symmetry be connected with four X to driving gear and four Y to driving gear, X applies respectively to the end face of driving gear to driving gear and four Y and increases the antifriction material that rubs.
Described mover assembly is made up of slide plate, rolling element, cover plate, it is characterized in that cover plate is fixedly connected slide plate, has several shoulder holes on the slide plate, and rolling element is arranged in the shoulder hole.
Described mounting assembly is made up of last mounting cover, following mount pad, flexible support, it is characterized in that mounting cover connects mount pad down, and following mount pad is connected with several flexible supports, is drilled with several installing holes on the following mount pad.
Described pretension pressure-applying unit is made up of disk spring and pressurization adjustment screw, it is characterized in that adjusting screw and connects the adjusting disk spring.
Described piezoelectric ceramic is characterized in that piezoelectric ceramic is made up of a plurality of piezoelectric chips, between each piezoelectric chip the X of rectangular slab to Y to all leaving the gap, the polarised direction of each piezoelectric chip in the two-layer piezoelectric ceramic on the rectangular slab front and back is identical.
Technique effect of the present invention is: 1, adopt single dull and stereotyped stator to realize that simultaneously the motion of both direction linear degrees of freedom directly drives; The transmission error of having avoided the conversion motion in the traditional X-ray Y mobile device to be brought; Make motor have fast precise (submicron order even more high accuracy) polarization, also simplified electric machine structure simultaneously, reduced motor size; 2, motion is flexible, difunctional, can produce than high thrust, and service behaviour is more stable, and the resistance of motion is little.3, adopt the board-like stator structure of flat, thin, help sawyer principle linear motor slimming and lightweight;
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is for being the structural representation of stator module of the present invention.
Fig. 3 is the structural representation of mover assembly of the present invention.
Fig. 4 is the structural representation of mounting assembly of the present invention.
Fig. 5 for the present invention drive configuration schematic diagram.
Fig. 6 is mover assembly drive principle figure of the present invention.
Embodiment
As shown in Figure 1; The present invention realizes that like this it comprises stator module 1, mover assembly 2, mounting assembly 3 and pretension pressure-applying unit 4, it is characterized in that pretension pressure-applying unit 4 connects mounting assembly 3; Connect stator module 1 on the mounting assembly 3, stator module 1 is connected with mover assembly 2;
As shown in Figure 2; Said stator module is made up of to individual driving gear 8 to driving gear 7, Y rectangular slab 5, piezoelectric ceramic 6, X; The positive and negative two sides that it is characterized in that rectangular slab 5 is connected with two-layer piezoelectric ceramic 6 respectively; On the piezoelectric ceramic 6 respectively symmetry be connected with four X to driving gear 7 and four Y to individual driving gear 8, X applies respectively to the end face of individual driving gear 8 to driving gear 7 and Y and increases the antifriction material 9 that rubs; Described piezoelectric ceramic 6, characteristic is: it is made up of a plurality of piezoelectric chips, between each piezoelectric chip at the X of stator plate 5 to upwards all leaving the gap with Y, the polarised direction of each piezoelectric chip in the two-layer piezoelectric ceramic on stator rectangular slab 5 front and backs is identical;
As shown in Figure 3, described mover assembly is made up of slide plate 10, rolling element 11, cover plate 12 and screw 13, it is characterized in that cover plate 12 and slide plate 10 are permanently connected together, has several shoulder holes on the slide plate 10, and rolling element 11 is housed in the shoulder hole;
As shown in Figure 4, described mounting assembly is by last mounting cover 14, mount pad 15, flexible hinged-support 16 and screw 17 are formed down.Last mounting cover 14 connects mount pad 15 down, is drilled with several installing holes on the following mount pad 15; Described pretension pressure-applying unit, it comprises the disk spring 18 and the adjustment screw 19 that pressurizes, and it is characterized in that rotation adjustment screw 19 connects adjusting disk spring 18.
Ultrasonic motor with two linear degrees of freedom promotes mover through the ultrasonic mechanical oscillation of doing of stator module 1 and does the XY plane motion.Vibration for the crooked operation mode that excites stator module 1 effectively; Need to paste high performance piezoelectric ceramic 6 at the front and back of stator rectangular slab 5; And need on these piezoelectric ceramic 6, apply high-frequency harmonic exciting power signal; Make piezoelectric ceramic 6 produce inverse piezoelectric effect, thereby cause rectangular slab 5 mechanical oscillation.In order to inspire the B of rectangular slab 5 on directions X
0,5Mode is pasted on stator rectangular slab 5 positive outer field piezoelectric ceramic 6 and need polarizes and handle and the power supply configuration; For the B on the directions X that excites stator
0,8Mode, the piezoelectric ceramic 6 that is affixed on stator rectangular slab 5 front nexines polarize and handle and the power supply configuration; For the Y that inspires rectangular slab 5 to B
5,0Mode is affixed on the outer field piezoelectric ceramic 6 in stator rectangular slab 5 back sides and polarizes and handle and the power supply configuration; For the Y that excites the stator rectangular slab to B
8,0Mode, the piezoelectric ceramic 6 that is affixed on nexine on stator rectangular slab 5 back sides polarize and handle and the power supply configuration.
Be provided with 8 driving gears on the stator plate 5 of ultrasonic motor with two linear degrees of freedom, these teeth be divided into X to driving gear 7 and Y to two groups of driving gear 8 grades.4 teeth are all arranged in every group, and X is used to promote mover to driving gear 7 and does rectilinear motion along X-direction, and Y is used to promote mover to driving gear 8 and does rectilinear motion along Y direction.
As shown in Figure 5, described X to driving gear 7 along the installation site on the directions X of stator rectangular slab 5 is: driving gear 7 must be in X to mode of flexural vibration B
0,5And B
0,8Non-crest and the appropriate location of trough.And for fear of or reduce X as far as possible and to the motion of driving gear 7 Y of mover assembly produced to linear degrees of freedom and disturb, X to driving gear 7 on the Y direction of rectangular slab 5 position is: be in B
5,0And B
8,0Public nodel line on.
Described Y to driving gear 8 along the installation site on the Y direction of stator rectangular slab 5 is: must be in Y to mode of flexural vibration B
5,0And B
8,0Non-crest and the appropriate location of trough.Equally, for fear of or reduce Y and to 8 motions of driving gear the X of mover produced to degree of freedom motion and disturb, Y to driving gear 8 on rectangular slab 5 along X to the position is: be in B
0,5And B
0,8The public nodel line place of r.
The operation principle of motor is: through on piezoelectric ceramic I group, applying the high-frequency harmonic pumping signal, excite stator X to B
0,5(or B
0,8) bending vibration modes, order about X and doing just (or anti-) to rectilinear motion to the friction promotion mover assembly of just doing (or anti-) to elliptic motion, relending to help between driving gear 7 and the mover assembly 22 along the X axle along X to the end face place of driving gear 7 particle; Through on piezoelectric ceramic II group, applying the high-frequency harmonic pumping signal, excite stator Y to B
5,0(or B
8,0) bending vibration modes, order about Y to the end face place of driving gear 8 particle along Y to just doing (or anti-) to elliptic motion, and by Y the friction between driving gear 8 and mover assembly 2 promotes mover assembly 2 and is just making (or instead) to rectilinear motion along the Y axle.When encouraging stator X simultaneously to the time, just realized the XY plane motion of motor with the operation mode of Y on both direction.
Shown in Figure 6, provide motor among the figure and utilized single-phase high-frequency harmonic signal that stator is encouraged, order about X and promote the situation that mover assembly 2 moves in the X-axis direction to driving gear 7.Because four X two rows before and after driving gear 7 has been divided into along the stator plate Y direction, two toothrows are just the same to the driving situation of mover, and therefore, wherein a toothrow is the driving of its X of example explanation to the degree of freedom.Mover assembly 2 is the B through stator along the forward drive of X axle
0,5Mode realizes, presses B at stator
0,5Mode is bent the preceding half period of shaking, and two X contact and do swing clockwise to driving gear 7 with mover assembly 2, promote mover through the rubbing action between driving gear and the mover assembly 2 and make positive movement; Press B at stator
0,5Mode is bent the later half cycle of shaking, and two X disengage to driving gear 7 and rotor, and not to the mover assembly transferring power, at this moment, mover assembly 2 continues slippage under effect of inertia.It is the B through rectangular slab 5 that mover assembly 2 moves along the opposite direction of X axle
0,8Mode realizes, presses B at stator
0,8The curved preceding half period of shaking of mode, two X contact and do counter-clockwise swing to driving gear 7 with mover assembly 2, promote the mover counter motion through the rubbing action between driving gear and the mover assembly 2; Press B at stator
0,8Mode is bent the later half cycle of shaking, and two X disengage to driving gear and rotor, and not to the mover assembly transferring power, at this moment, mover assembly 2 continues slippage under effect of inertia.What be worth explanation is, drives X at X in the degree of freedom to driving gear 7, and Y is also driving Y to by the degree motion to driving gear 8.Because Y is arranged in B to driving gear 8 along the X-direction of rectangular slab 5
0,5With B
0,8Public nodel line place, therefore, Y produces hardly to degree of freedom motion to the X of 8 pairs of mover assemblies of driving gear and disturbs.
Y on the rectangular slab 5 is the B that utilized rectangular slab 5 to the driving of 8 pairs of mover assemblies 2 of driving gear
5,0Or B
8,0Mode, wherein, B
5,0Be used to drive mover assembly 2 along Y axle positive movement, B
8,0Being used to drive mover assembly 2 moves along the negative direction of Y axle.It is just the same to the situation of the degree of freedom to driving gear 7 promotion X to the situation and the X of the degree of freedom that Y promotes mover Y to driving gear 8.Equally, because X is arranged in B to driving gear 7 along the Y direction of rectangular slab 5
5,0With B
8,0Public nodel line place, therefore, X does not produce interference to the Y of 7 pairs of mover assemblies 2 of driving gear to degree of freedom motion yet.
Claims (4)
1. one kind based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab; It comprises stator module, mover assembly, mounting assembly and pretension pressure-applying unit, it is characterized in that the pretension pressure-applying unit connects mounting assembly, connects stator module on the mounting assembly; Stator module and mover assembly are connected; Stator module is fixed on the mounting assembly through flexible hinged-support, and mover assembly constitutes higher pair through ball and mounting assembly and is connected, and the pretension pressure-applying unit is pressed on the stator module; Said stator module is made up of to driving gear to driving gear, Y rectangular slab, piezoelectric ceramic, X; The positive and negative two sides of rectangular slab is connected with two-layer piezoelectric ceramic respectively; On the piezoelectric ceramic respectively symmetry be connected with four X to driving gear and four Y to driving gear, X applies respectively to the end face of driving gear to driving gear and four Y and increases the antifriction material that rubs; Described mover assembly is made up of slide plate, rolling element, cover plate, and cover plate is fixedly connected slide plate, has several shoulder holes on the slide plate, and rolling element is arranged in the shoulder hole.
2. according to claim 1 based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab; Described mounting assembly is made up of last mounting cover, following mount pad, flexible support; It is characterized in that mounting cover connects mount pad down; Following mount pad is connected with several flexible supports, is drilled with several installing holes on the following mount pad.
3. the ultrasonic motor with two linear degrees of freedom based on the curved driving of shaking of rectangular slab according to claim 1, described pretension pressure-applying unit is made up of disk spring and pressurization adjustment screw, it is characterized in that adjusting screw and connects the adjusting disk spring.
4. according to claim 2 based on the curved ultrasonic motor with two linear degrees of freedom that shakes and drive of rectangular slab; Described piezoelectric ceramic; It is characterized in that piezoelectric ceramic is made up of a plurality of piezoelectric chips; Between each piezoelectric chip the X of rectangular slab to Y to all leaving the gap, the polarised direction of each piezoelectric chip in the two-layer piezoelectric ceramic on the rectangular slab front and back is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101155634A CN101582653B (en) | 2009-06-19 | 2009-06-19 | Ultrasonic motor with two linear degrees of freedom based on flexural oscillation driving of rectangular plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101155634A CN101582653B (en) | 2009-06-19 | 2009-06-19 | Ultrasonic motor with two linear degrees of freedom based on flexural oscillation driving of rectangular plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101582653A CN101582653A (en) | 2009-11-18 |
| CN101582653B true CN101582653B (en) | 2012-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101155634A Expired - Fee Related CN101582653B (en) | 2009-06-19 | 2009-06-19 | Ultrasonic motor with two linear degrees of freedom based on flexural oscillation driving of rectangular plate |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101719733A (en) * | 2010-01-14 | 2010-06-02 | 马海英 | piezoelectric ceramic motor |
| CN105048862A (en) * | 2015-07-31 | 2015-11-11 | 南京航空航天大学 | Inertial linear ultrasonic motor based on bending vibration of rectangular plate |
| CN107592029B (en) * | 2017-10-25 | 2023-06-23 | 南昌航空大学 | Planar ultrasonic motor driven by tooth-shaped piezoelectric vibrator and working mode thereof |
| CN108847782B (en) * | 2018-06-07 | 2019-06-28 | 西安交通大学 | The big stroke piezoelectric straight line actuator and actuation method driven using micro- tooth |
| CN110190775B (en) * | 2019-05-31 | 2021-03-23 | 维沃移动通信（杭州）有限公司 | Terminal equipment |
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2009
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| CN101582653A (en) | 2009-11-18 |
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Granted publication date: 20120523 Termination date: 20130619 |