CN201446355U - Improved scribing equipment of precise laser to fragile base material - Google Patents
Improved scribing equipment of precise laser to fragile base material Download PDFInfo
- Publication number
- CN201446355U CN201446355U CN 200920043535 CN200920043535U CN201446355U CN 201446355 U CN201446355 U CN 201446355U CN 200920043535 CN200920043535 CN 200920043535 CN 200920043535 U CN200920043535 U CN 200920043535U CN 201446355 U CN201446355 U CN 201446355U
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Abstract
The utility model relates to an improved scribing equipment of precise laser to a fragile base material, which can improve coincidence accuracy of focal spots of laser beams and further improve the scribing accuracy. The improved scribing equipment comprises an X-axis-Y-axis movable working platform and at least one pair of laser heads; and each laser head comprises a light-emitting source and a focusing lens. The improved scribing equipment is characterized in that a refraction deflecting mirror deflecting around the X axis and a refraction deflecting mirror deflecting around the Y axis are respectively arranged between one side laser head of the pair of laser heads and the focusing lens corresponding thereto; and the focusing lens aligns to a stand of the working platform.
Description
(1) technical field
The utility model relates to precise laser cutting field, is specially the scribing equipment of a kind of modified precise laser to brittle base material.
(2) background technology
Existing precise laser is to the scribing equipment of brittle base material, it makes this right laser beam foucing align and coincide by mechanical type adjustment mode, but in the real process, machinery adjustment mode rectification precision when skew takes place in contraposition is not high, easily cause two laser beam foucing registration accuracies not high, and then cause its scribing precision not high.
(3) summary of the invention
At the problems referred to above, the utility model provides the scribing equipment of a kind of modified precise laser to brittle base material, and it can improve the laser beam foucing registration accuracy, and then improves its scribing precision.
A kind of modified precise laser is to the scribing equipment of brittle base material, its technical scheme is such: it comprises X-axis-Y-axis travelling table, at least one pair of laser head, described laser head comprises light emitting source, amasthenic lens, it is characterized in that: be equipped with respectively between a side laser head of described a pair of laser head and its corresponding amasthenic lens around the refractive deflection mirror of X-axis deflection, around the refractive deflection mirror of Y-axis deflection, described amasthenic lens is aimed at the articles holding table of described workbench.
It is further characterized in that: the central shaft of described refractive deflection mirror around X-axis deflection is parallel with X-axis, and the central shaft of described refractive deflection mirror around Y-axis deflection is parallel with Y-axis.
After adopting structure of the present utility model, be equipped with respectively between one side laser head of described a pair of laser head and its corresponding amasthenic lens around the refractive deflection mirror of X-axis deflection, around the refractive deflection mirror of Y-axis deflection, the emitted laser beam of one side laser head of described a pair of laser head passes through behind the refractive deflection mirror of X-axis deflection, the light beam of its ejaculation realize Y to skew, its light beam is again by behind the refractive deflection mirror of Y-axis deflection afterwards, the light beam of its ejaculation realize X to skew.This wherein, contraposition drift rate according to described a pair of laser head, regulate refractive deflection mirror respectively around X-axis deflection, around the refractive deflection mirror of Y-axis deflection, because it adopts optics to regulate, and its respectively at X to, Y to carrying out fine tuning, its contraposition degree of regulation can reach in the 2 μ m, and it can improve the laser beam foucing registration accuracy, and then improves its scribing precision.
(4) description of drawings
Fig. 1 is a structural representation of the present utility model.
(5) specific embodiment
See Fig. 1, it comprises X-axis-Y-axis travelling table 1, at least one pair of laser head, laser head comprises light emitting source 2, amasthenic lens 3, be equipped with respectively between the light emitting source 2 of one side laser head of a pair of laser head and its corresponding amasthenic lens 3 around the refractive deflection mirror 5 of Y-axis deflection, around the refractive deflection mirror 4 of X-axis deflection, the articles holding table 7 of amasthenic lens 3 alignment work platforms 1.Central shaft 8 around the refractive deflection mirror 4 of X-axis deflection is parallel with X-axis, and is parallel with Y-axis around the central shaft 6 of the refractive deflection mirror 5 of Y-axis deflection.
Claims (2)
1. a modified precise laser is to the scribing equipment of brittle base material, it comprises X-axis-Y-axis travelling table, at least one pair of laser head, described laser head comprises light emitting source, amasthenic lens, it is characterized in that: be equipped with respectively between a side laser head of described a pair of laser head and its corresponding amasthenic lens around the refractive deflection mirror of X-axis deflection, around the refractive deflection mirror of Y-axis deflection, described amasthenic lens is aimed at the articles holding table of described workbench.
2. according to the scribing equipment of the described a kind of modified precise laser of claim 1 to brittle base material, it is characterized in that: the central shaft of described refractive deflection mirror around X-axis deflection is parallel with X-axis, and the central shaft of described refractive deflection mirror around Y-axis deflection is parallel with Y-axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920043535 CN201446355U (en) | 2009-06-16 | 2009-06-16 | Improved scribing equipment of precise laser to fragile base material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920043535 CN201446355U (en) | 2009-06-16 | 2009-06-16 | Improved scribing equipment of precise laser to fragile base material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201446355U true CN201446355U (en) | 2010-05-05 |
Family
ID=42551067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200920043535 Expired - Fee Related CN201446355U (en) | 2009-06-16 | 2009-06-16 | Improved scribing equipment of precise laser to fragile base material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201446355U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113834429A (en) * | 2021-09-22 | 2021-12-24 | 深圳市大成精密设备股份有限公司 | Coaxiality calibration method and device |
-
2009
- 2009-06-16 CN CN 200920043535 patent/CN201446355U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113834429A (en) * | 2021-09-22 | 2021-12-24 | 深圳市大成精密设备股份有限公司 | Coaxiality calibration method and device |
| CN113834429B (en) * | 2021-09-22 | 2022-06-28 | 深圳市大成精密设备股份有限公司 | Coaxiality calibration method and device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100505 Termination date: 20140616 |
|
| EXPY | Termination of patent right or utility model |