CN201073588Y - 外延炉尾气净化器 - Google Patents
外延炉尾气净化器 Download PDFInfo
- Publication number
- CN201073588Y CN201073588Y CNU2007200404388U CN200720040438U CN201073588Y CN 201073588 Y CN201073588 Y CN 201073588Y CN U2007200404388 U CNU2007200404388 U CN U2007200404388U CN 200720040438 U CN200720040438 U CN 200720040438U CN 201073588 Y CN201073588 Y CN 201073588Y
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- CN
- China
- Prior art keywords
- air inlet
- chamber
- washing chamber
- pipe
- inlet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2007200404388U CN201073588Y (zh) | 2007-07-30 | 2007-07-30 | 外延炉尾气净化器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2007200404388U CN201073588Y (zh) | 2007-07-30 | 2007-07-30 | 外延炉尾气净化器 |
Publications (1)
Publication Number | Publication Date |
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CN201073588Y true CN201073588Y (zh) | 2008-06-18 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNU2007200404388U Expired - Lifetime CN201073588Y (zh) | 2007-07-30 | 2007-07-30 | 外延炉尾气净化器 |
Country Status (1)
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CN (1) | CN201073588Y (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101254389B (zh) * | 2007-07-30 | 2010-06-02 | 张文光 | 外延炉尾气净化器 |
CN103845992A (zh) * | 2012-12-05 | 2014-06-11 | 常州恒威净化设备有限公司 | 废气净化器 |
WO2021184682A1 (zh) * | 2020-03-16 | 2021-09-23 | 上海晶盟硅材料股份有限公司 | 用于处理外延炉尾气的水洗管 |
-
2007
- 2007-07-30 CN CNU2007200404388U patent/CN201073588Y/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101254389B (zh) * | 2007-07-30 | 2010-06-02 | 张文光 | 外延炉尾气净化器 |
CN103845992A (zh) * | 2012-12-05 | 2014-06-11 | 常州恒威净化设备有限公司 | 废气净化器 |
WO2021184682A1 (zh) * | 2020-03-16 | 2021-09-23 | 上海晶盟硅材料股份有限公司 | 用于处理外延炉尾气的水洗管 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changzhou Hengwei Purifying Equipment Co., Ltd. Assignor: Zhang Wenguang Contract fulfillment period: 2009.3.10 to 2017.3.9 Contract record no.: 2009320000461 Denomination of utility model: Epitaxial furnace tail gas cleaner Granted publication date: 20080618 License type: Exclusive license Record date: 20090319 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.3.10 TO 2017.3.9; CHANGE OF CONTRACT Name of requester: CHANGZHOU HENGWEI CLEANSE EQUIPMENT CO., LTD. Effective date: 20090319 |
|
AV01 | Patent right actively abandoned |
Granted publication date: 20080618 Effective date of abandoning: 20070730 |
|
AV01 | Patent right actively abandoned |
Granted publication date: 20080618 Effective date of abandoning: 20070730 |