CN201024225Y - High-frequency coil capable of simultaneously producing six silica cores or other crystal material - Google Patents
High-frequency coil capable of simultaneously producing six silica cores or other crystal material Download PDFInfo
- Publication number
- CN201024225Y CN201024225Y CNU2007200894599U CN200720089459U CN201024225Y CN 201024225 Y CN201024225 Y CN 201024225Y CN U2007200894599 U CNU2007200894599 U CN U2007200894599U CN 200720089459 U CN200720089459 U CN 200720089459U CN 201024225 Y CN201024225 Y CN 201024225Y
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- China
- Prior art keywords
- frequency coil
- radio
- endoporus
- roots
- crystalline material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000013078 crystal Substances 0.000 title abstract description 10
- 239000000463 material Substances 0.000 title abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 18
- 239000000498 cooling water Substances 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 44
- 239000002178 crystalline material Substances 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 28
- 230000035807 sensation Effects 0.000 claims description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000002826 coolant Substances 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910000679 solder Inorganic materials 0.000 claims description 6
- 230000001788 irregular Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 17
- 239000002994 raw material Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000000446 fuel Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000019771 cognition Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
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- General Induction Heating (AREA)
Abstract
A high frequency coil which can produce six pieces of silica cores or other crystal materials at a time relates to a high frequency coil technical field; a high frequency coil upper side (9) with a slope is arranged on the upper part of the high frequency coil (3), a high frequency coil underside (10) with a trapezoid is arranged on the lower part of the high frequency coil, while six inner holes (8) are arranged in the middle part of the high frequency coil; a cooling water channel (4) surrounds the high frequency coil and is fixedly connected with a current and cooling water transportation copper pipe (11) and another current and cooling water transportation copper pipe (12) at two sides of an inclined opening (13) of the high frequency coil; the inclined opening (13) is communicated to a central hole of the six inner holes (8) through one of the five circularly arranged inner holes. Among the six inner holes, one is put in the central place while the rest are circularly arranged.
Description
Technical field:
The utility model relates to the radio-frequency coil technical field, but the radio-frequency coil of especially a kind of once production six roots of sensation silicon core or other crystalline material.
Background technology:
At present, in the technological process that the molten mode in silicon core, silicon single crystal and other material crystals district is produced, what use mostly is a kind of monocular radio-frequency coil, its principle of work is as follows: feed high-frequency current to radio-frequency coil during work, produce magnetic line of force fuel rod is carried out induction heating, make the fuel rod upper end form the melting area, then with the brilliant melting area of inserting of son, slowly promote young brilliant, raw material after the fusing will be followed young brilliant the rising, form a new column type crystal, this new column type crystal is the finished product of silicon core or other material crystals.Yet the shortcoming of this radio-frequency coil is once to draw a silicon core or other material crystals, and efficient is too low, causes a large amount of wastes of the manpower and the energy.Though this radio-frequency coil also can make it can once draw many silicon cores or other crystal by strengthening endoporus, need several times ground to increase power, can cause bigger waste to the energy, thereby this method is extremely worthless.
Summary of the invention:
The radio-frequency coil of a kind of once production six roots of sensation silicon core or other crystalline material is repeatedly tested, now provided to the utility model in order to overcome the above-mentioned deficiency of existing radio-frequency coil but pass through me.But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material not only can be increased work efficiency widely, and has advantages such as homogeneous heating, save energy, increase output.
In order to realize the purpose of foregoing invention, the utility model adopts following technical scheme;
But the radio-frequency coil of a kind of once production six roots of sensation silicon core or other crystalline material, on radio-frequency coil top is provided with the radio-frequency coil on band inclined-plane, the bottom is provided with below the trapezoid radio-frequency coil, is provided with six endoporus at the middle part of radio-frequency coil; Its cooling water channel is around radio-frequency coil, and carries with electric current in the both sides at radio-frequency coil diagonal cut joint place and water coolant carries copper pipe and another root electric current to carry and water coolant carries copper pipe to fixedly connected.
But can form by a plurality of ladders below the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, the trapezoidal radio-frequency coil that its radio-frequency coil bottom is provided with.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material can form a slope above the radio-frequency coil that its radio-frequency coil top is provided with from outside to inside.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, its cooling water channel can directly be slotted on radio-frequency coil, imbeds copper pipe then and is fixed by solder bonding metal.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, its cooling water channel can directly be slotted on radio-frequency coil, utilizes copper coin to cover then and is fixed by the metal solder slit.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, its diagonal cut joint by five around one at the center of arranging one of them in the endoporus and being used to pass to six endoporus.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, its six endoporus are that other five endoporus in center are around arrangement.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, six endoporus that its radio-frequency coil middle part is provided with can be designed to circular inner hole, square inner bore, rectangle endoporus, trilateral endoporus, Polygons endoporus, irregular polygon endoporus, rhombus endoporus, trapezoidal endoporus, Long Circle endoporus and oval endoporus.
But the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, its endoporus shaped design can use the design of band angle when being the band angle.
The method of rounding of angle realized in but the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, its endoporus can use when being designed to the angle equally.
Owing to adopt technique scheme, the utlity model has following superiority;
The utility model is owing to adopt the radio-frequency coil technology of six holes discharging simultaneously, once can draw six roots of sensation silicon core or other crystalline material simultaneously, use this radio-frequency coil to enhance productivity greatly, improve capacity usage ratio, reduce production costs, increase output and have advantages such as homogeneous heating, a large amount of save energy, minimizing facility investment and artificial comprehensive cost can effectively reduce, be easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is the two dimensional structure synoptic diagram of radio-frequency coil.
Fig. 2 is the A-A view of Fig. 1.
Fig. 3 is the principle of work synoptic diagram of radio-frequency coil.
Fig. 4 be the electric current of radio-frequency coil in the workflow of radio-frequency coil to principle schematic
Fig. 5 is the circular inner hole synoptic diagram of radio-frequency coil.
Fig. 6 is the square inner bore synoptic diagram of radio-frequency coil.
Fig. 7 is the square interior rounding of angle endoporus synoptic diagram of radio-frequency coil.
Fig. 8 is the rectangle endoporus synoptic diagram of radio-frequency coil.
Fig. 9 is the interior rounding of angle endoporus synoptic diagram of the rectangle of radio-frequency coil.
Figure 10 is the trilateral endoporus synoptic diagram of radio-frequency coil.
Figure 11 is the interior rounding of angle endoporus synoptic diagram of the trilateral of radio-frequency coil.
Figure 12 is the Polygons endoporus synoptic diagram of radio-frequency coil.
Figure 13 is the irregular limit shape endoporus synoptic diagram of radio-frequency coil.
Figure 14 is the rhombus endoporus synoptic diagram of radio-frequency coil.
Figure 15 is the interior rounding of angle endoporus synoptic diagram of the rhombus of radio-frequency coil.
Figure 16 is the trapezoidal endoporus synoptic diagram of radio-frequency coil.
Figure 17 is the trapezoidal interior rounding of angle endoporus synoptic diagram of radio-frequency coil.
Figure 18 is the Long Circle endoporus synoptic diagram of radio-frequency coil.
Figure 19 is the oval endoporus synoptic diagram of radio-frequency coil.
In the drawings; 1, the raw material silicon rod, 2, magnetic line of force, 3, radio-frequency coil, 4, cooling water channel, 5, the silicon core, 6, young brilliant, 7, young brilliant chuck, 8, endoporus, 9, above the radio-frequency coil, 10, below the radio-frequency coil, 11, electric current is carried and water coolant is carried copper pipe, 12, electric current is carried and water coolant is carried copper pipe, 13, diagonal cut joint, 14, circular inner hole, 15, square inner bore, 16, rounding of angle endoporus in square, 17, the rectangle endoporus, 18, rounding of angle endoporus in the rectangle, 19, the trilateral endoporus, 20, rounding of angle endoporus in the trilateral, 21, the Polygons endoporus, 22, irregular limit shape endoporus, 23, the rhombus endoporus, 24, rounding of angle endoporus in the rhombus, 25, trapezoidal endoporus, 26, rounding of angle endoporus in trapezoidal, 27, the Long Circle endoporus, 28, oval endoporus.
Embodiment;
With reference to the following examples, can explain the utility model in more detail; But the utility model is not limited to these embodiment.
In Fig. 1,2, but the radio-frequency coil of this a kind of once production six roots of sensation silicon core or other crystalline material, on radio-frequency coil (3) top is provided with the radio-frequency coil on band inclined-plane (9), the bottom is provided with (10) below the trapezoid radio-frequency coil, is provided with six endoporus (8) at the middle part of radio-frequency coil (3); Its cooling water channel (4) is around radio-frequency coil (3), and carry with electric current in both sides that radio-frequency coil (3) diagonal cut joint (13) is located and water coolant carries copper pipe (11) and another root electric current to carry and water coolant carries copper pipe (12) to fixedly connected, (10) can be made up of a plurality of ladders below the trapezoidal radio-frequency coil that radio-frequency coil (3) bottom is provided with, and (9) can form a slope from outside to inside on the radio-frequency coil that radio-frequency coil (3) top is provided with; Cooling water channel (4) can directly be gone up fluting at radio-frequency coil (3), imbedding copper pipe is then fixed by solder bonding metal again, its cooling water channel (4) also can directly be gone up fluting at radio-frequency coil (3), utilize copper coin to cover then and fix by solder bonding metal, its diagonal cut joint (13) by five around one at the center of arranging one of them in the endoporus and being used to pass to six endoporus (8), six endoporus (8) are that other five endoporus in center (8) are around arrangement.
In Fig. 3,4, but the radio-frequency coil of this a kind of once production six roots of sensation silicon core or other crystalline material, and its principle of work and using method thereof are; Earlier raw material silicon rod (1) is delivered to radio-frequency coil (3) bottom, raw material silicon rod (1) is near more good more apart from radio-frequency coil (3), but must not contact with radio-frequency coil (3), electric current on radio-frequency coil (3) is carried and water coolant carries copper pipe (11) energising to send water and another root electric current to carry and water coolant is carried copper pipe (12) energising draining then, impel radio-frequency coil (3) to produce powerful magnetic line of force (2), make raw material silicon rod (1) upper end utilize magnetic line of force to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel (4) is given radio-frequency coil (3) cooling, diagonal cut joint (13) is made angle and is passed to of six endoporus (8) center, and its major function is to make raw material silicon rod (1) thermally equivalent in order to make high-frequency current can form to intersect at boundary; After melt at the position of (10) below the close radio-frequency coil in the termination of raw material silicon rod (1), young brilliant chuck (7) is being with young brilliant (6) to descend, the melting area that makes young brilliant (6) insert fuel rod (1) by six endoporus (8) back, promote young brilliant (6) then, the melt cognition on fuel rod (1) top is followed young brilliant (6) and is risen, also corresponding the following synchronously of the lower shaft of its fuel rod (1) bottom slowly risen, but its fuel rod (1) must not contact with radio-frequency coil (3); Because the end of raw material silicon rod (1) may be not too smooth, so, (10) are designed to stepped below the radio-frequency coil, its role is to make as much as possible the many bottom surfaces (10) of raw material silicon rod (1) near radio-frequency coil, the slope from outside to inside of its (9) design above radio-frequency coil, its effect is can reduce high-frequency current too the concentrating of middle part, and makes it at radio-frequency coil (3) uniform distribution, with the effect that realizes being heated evenly; The melting area on raw material silicon rod (1) top is in the sticking and drive of young brilliant (6) and by behind radio-frequency coil (3) endoporus (8), because weakening and condensation of magnetic line of force (2), just form a new column type crystal, its young brilliant chuck (7) is carried young brilliant (6) secretly and is slowly risen, and just can form the finished silicon core (5) of desired length.
In Fig. 5,6,7,8,9,10,11,12,13,14,15,16,17,18,19, but the radio-frequency coil of this once production six roots of sensation silicon core or other crystalline material, six endoporus (8) that its radio-frequency coil (3) middle part is provided with can be designed the endoporus (8) of different size, model and moulding, and its scope of design roughly has following kind; Rounding of angle endoporus (18), trilateral endoporus (19), the interior rounding of angle endoporus (20) of trilateral, Polygons endoporus (21), irregular limit shape endoporus (22), rhombus endoporus (23), the interior rounding of angle endoporus (24) of rhombus, trapezoidal endoporus (25), trapezoidal interior rounding of angle endoporus (26), Long Circle endoporus (27) and oval endoporus (28) in circular inner hole (14), square inner bore (15), square interior rounding of angle endoporus (16), rectangle endoporus (17), the rectangle; But it is to be noted that different shape is Protean, so do not enumerate one by one at this.
When its endoporus (8) shaped design is the band angle (as; Triangle or the like) can use the design of being with the wedge angle angle, the method for rounding of angle realized in endoporus (8) can use when being designed to the angle equally, i.e. arc angle.
The embodiment that selects for use in this article for open the purpose of this utility model currently thinks to suit, but will be appreciated that, the utility model is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the utility model scope.
Claims (10)
1. but the radio-frequency coil of an once production six roots of sensation silicon core or other crystalline material, it is characterized in that: on radio-frequency coil (3) top is provided with the radio-frequency coil of being with the inclined-plane (9), the bottom is provided with (10) below the trapezoid radio-frequency coil, is provided with six endoporus (8) at the middle part of radio-frequency coil (3); Its cooling water channel (4) is around radio-frequency coil (3), and carries with electric current in the both sides that radio-frequency coil (3) diagonal cut joint (13) is located and water coolant carries copper pipe (11) and another root electric current to carry and water coolant carries copper pipe (12) to fixedly connected.
2. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: (10) can be made up of a plurality of ladders below the trapezoidal radio-frequency coil that its radio-frequency coil (3) bottom is provided with.
3. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: (10) can form a slope from outside to inside above the radio-frequency coil that its radio-frequency coil (3) top is provided with.
4. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: its cooling water channel (4) can directly be gone up at radio-frequency coil (3) and beat groove, imbeds copper pipe then and is fixed by solder bonding metal.
5. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: its cooling water channel (4) can be directly gone up at radio-frequency coil (3) beat groove, utilizes the copper coin covering then and is fixed by solder bonding metal.
6. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: its diagonal cut joint (13) by five around one at the center of arranging one of them in the endoporus and being used to pass to six endoporus (8).
7. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: its six endoporus (8) are that other five endoporus in center are around arrangement.
8. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 1 or other crystalline material is characterized in that: six endoporus (8) that its radio-frequency coil (3) middle part is provided with can be designed to circular inner hole (14), square inner bore (15), rectangle endoporus (17), trilateral endoporus (19), Polygons endoporus (21), irregular limit shape endoporus (22), rhombus endoporus (23), trapezoidal endoporus (25), Long Circle endoporus (27) and oval endoporus (28).
9. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 8 or other crystalline material is characterized in that: can use the design of band angle when its endoporus (8) shaped design is the band angle.
10. but the radio-frequency coil of once production six roots of sensation silicon core as claimed in claim 8 or other crystalline material is characterized in that: its endoporus (8) can use interior rounding of angle equally when being designed to be with the angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200894599U CN201024225Y (en) | 2007-02-13 | 2007-02-13 | High-frequency coil capable of simultaneously producing six silica cores or other crystal material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200894599U CN201024225Y (en) | 2007-02-13 | 2007-02-13 | High-frequency coil capable of simultaneously producing six silica cores or other crystal material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201024225Y true CN201024225Y (en) | 2008-02-20 |
Family
ID=39098079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200894599U Expired - Lifetime CN201024225Y (en) | 2007-02-13 | 2007-02-13 | High-frequency coil capable of simultaneously producing six silica cores or other crystal material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201024225Y (en) |
-
2007
- 2007-02-13 CN CNU2007200894599U patent/CN201024225Y/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhang Li Document name: Notification to Pay the Fees |
|
| DD01 | Delivery of document by public notice |
Addressee: Zhang Li Document name: Notification that Application Deemed not to be Proposed |
|
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: Jin Xin Road, national high tech Development Zone, Luoyang City, Henan province 471009 No. 2 Luoyang Jinnuo Engineering Machinery Co. Ltd. Patentee after: Liu Chaoxuan Address before: 471009 Henan province Luoyang Xigong Road No. 1 single building Patentee before: Liu Chaoxuan |
|
| ASS | Succession or assignment of patent right |
Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20111116 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20111116 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Patentee after: Luoyang Jinnuo Mechanical Engineering Co., Ltd. Address before: Jin Xin Road, national high tech Development Zone, Luoyang City, Henan province 471009 No. 2 Luoyang Jinnuo Engineering Machinery Co. Ltd. Patentee before: Liu Chaoxuan |
|
| CX01 | Expiry of patent term |
Granted publication date: 20080220 |
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| CX01 | Expiry of patent term |