CN201024223Y - High-frequency coil capable of simultaneously producing two silica core or other crystal material - Google Patents

High-frequency coil capable of simultaneously producing two silica core or other crystal material Download PDF

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Publication number
CN201024223Y
CN201024223Y CNU200720089457XU CN200720089457U CN201024223Y CN 201024223 Y CN201024223 Y CN 201024223Y CN U200720089457X U CNU200720089457X U CN U200720089457XU CN 200720089457 U CN200720089457 U CN 200720089457U CN 201024223 Y CN201024223 Y CN 201024223Y
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China
Prior art keywords
frequency coil
radio
endoporus
produce
crystalline material
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Expired - Fee Related
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CNU200720089457XU
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Chinese (zh)
Inventor
刘朝轩
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Luoyang Jinnuo Mechanical Engineering Co Ltd
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刘朝轩
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Priority to CNU200720089457XU priority Critical patent/CN201024223Y/en
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Abstract

A high frequency coil which can produce two pieces of silica cores or other crystal materials at a time relates to a high frequency coil technical field; a high frequency coil upper side with a slope (9) is arranged on the upper part of the high frequency coil (3), a high frequency coil underside with a trapezoid (10) is arranged on the lower part of the high frequency coil, while two inner holes (8) are arranged in the middle part of the high frequency coil; a cooling water channel (4) surrounds the high frequency coil (3) and is fixedly connected with two current and cooling water transportation copper pipes (12) at two sides of an inclined opening (13) of the high frequency coil respectively; the inclined opening (13) is communicated to one of the two inner holes (8);the two inner holes is arranged orthodromically from the inclined opening, the trapezoidal high frequency coil underside arranged on the lower part of the high frequency coil comprises a plurality of trapezoids, while from outer to inner, the upper side of the high frequency coil arranged on the upper part of the high frequency coil can form a slope.

Description

A kind of radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously
Technical field:
The utility model relates to the radio-frequency coil technical field, the especially a kind of radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously.
Background technology:
At present, in the technological process that the molten mode in silicon core, silicon single crystal and other material crystals district is produced, what use mostly is a kind of monocular radio-frequency coil, its principle of work is as follows: feed high-frequency current to radio-frequency coil during work, produce magnetic line of force fuel rod is carried out induction heating, make the fuel rod upper end form the melting area, then with the brilliant melting area of inserting of son, slowly promote young brilliant, raw material after the fusing will be followed young brilliant the rising, form a new column type crystal, this new column type crystal is the finished product of silicon core or other material crystals.Yet the shortcoming of this radio-frequency coil is once to draw a silicon core or other material crystals, and efficient is too low, causes a large amount of wastes of the manpower and the energy.Though this radio-frequency coil also can make it can once draw many silicon cores or other crystal by strengthening endoporus, need several times ground to increase power, can cause bigger waste to the energy, thereby this method is extremely worthless.
Summary of the invention:
The utility model is in order to overcome the above-mentioned deficiency of existing radio-frequency coil, and the purpose of this utility model provides a kind of radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously.This radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously not only can be increased work efficiency widely, and has advantages such as homogeneous heating, save energy, increase output.
In order to realize the purpose of foregoing invention, the utility model adopts following technical scheme;
A kind of radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously, radio-frequency coil top is provided with above the radio-frequency coil on band inclined-plane, the bottom is provided with below the trapezoid radio-frequency coil, is provided with two endoporus at the middle part of radio-frequency coil, and two endoporus connect seam by endoporus and connect series connection; Cooling water channel is around radio-frequency coil, and carries with two electric currents respectively in the both sides at the diagonal cut joint place of radio-frequency coil and water coolant carries copper pipe to fixedly connected.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, can be made up of a plurality of ladders below the trapezoidal radio-frequency coil that its radio-frequency coil bottom is provided with.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, can form a slope from outside to inside above the radio-frequency coil that its radio-frequency coil top is provided with.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and its cooling water channel can directly be slotted on radio-frequency coil, imbeds copper pipe then and is fixed by solder bonding metal.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and its cooling water channel can directly be slotted on radio-frequency coil, utilizes copper coin to cover then and is fixed by the metal solder slit.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and its diagonal cut joint forward is used to pass to one of them in two endoporus (8).
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and two endoporus is forward arranged by diagonal cut joint.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and two endoporus that its radio-frequency coil middle part is provided with can be designed to circular inner hole, square inner bore, rectangle endoporus, trilateral endoporus, Polygons endoporus, irregular polygon endoporus, rhombus endoporus, trapezoidal endoporus, Long Circle endoporus and oval endoporus.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, can use the design of band angle when its endoporus shaped design is the band angle.
This can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and the method for rounding of angle realized in its endoporus can use when being designed to the angle equally.
Owing to adopt technique scheme, the utlity model has following superiority;
The utility model is owing to adopt the radio-frequency coil technology of two holes discharging simultaneously, once can draw two silicon cores or other crystalline material simultaneously, its endoporus connects seam can make high-frequency current form the loop between two endoporus, make high-frequency current uniform distribution on radio-frequency coil, use this radio-frequency coil to enhance productivity greatly, improve capacity usage ratio, reduce production costs, increase output and have advantages such as homogeneous heating, a large amount of save energy, minimizing facility investment and artificial comprehensive cost can effectively reduce, be easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is the two dimensional structure synoptic diagram of radio-frequency coil.
Fig. 2 is the A-A view of Fig. 1.
Fig. 3 is the principle of work synoptic diagram of radio-frequency coil.
Fig. 4 be the electric current of radio-frequency coil in the workflow of radio-frequency coil to principle schematic
Fig. 5 is the circular inner hole synoptic diagram of radio-frequency coil.
Fig. 6 is the square inner bore synoptic diagram of radio-frequency coil.
Fig. 7 is the square interior rounding of angle endoporus synoptic diagram of radio-frequency coil.
Fig. 8 is the rectangle endoporus synoptic diagram of radio-frequency coil.
Fig. 9 is the interior rounding of angle endoporus synoptic diagram of the rectangle of radio-frequency coil.
Figure 10 is the trilateral endoporus synoptic diagram of radio-frequency coil.
Figure 11 is the interior rounding of angle endoporus synoptic diagram of the trilateral of radio-frequency coil.
Figure 12 is the Polygons endoporus synoptic diagram of radio-frequency coil.
Figure 13 is the irregular limit shape endoporus synoptic diagram of radio-frequency coil.
Figure 14 is the rhombus endoporus synoptic diagram of radio-frequency coil.
Figure 15 is the interior rounding of angle endoporus synoptic diagram of the rhombus of radio-frequency coil.
Figure 16 is the trapezoidal endoporus synoptic diagram of radio-frequency coil.
Figure 17 is the trapezoidal interior rounding of angle endoporus synoptic diagram of radio-frequency coil.
Figure 18 is the Long Circle endoporus synoptic diagram of radio-frequency coil.
Figure 19 is the oval endoporus synoptic diagram of radio-frequency coil.
In the drawings; 1, the raw material silicon rod, 2, magnetic line of force, 3, radio-frequency coil, 4, cooling water channel, 5, the silicon core, 6, young brilliant, 7, young brilliant chuck, 8, endoporus, 9, above the radio-frequency coil, 10, below the radio-frequency coil, 11, endoporus connects seam, 12, electric current is carried and water coolant is carried copper pipe, 13, diagonal cut joint, 14, circular inner hole, 15, square inner bore, 16, rounding of angle endoporus in square, 17, the rectangle endoporus, 18, rounding of angle endoporus in the rectangle, 19, the trilateral endoporus, 20, rounding of angle endoporus in the trilateral, 21, the Polygons endoporus, 22, irregular limit shape endoporus, 23, the rhombus endoporus, 24, rounding of angle endoporus in the rhombus, 25, trapezoidal endoporus, 26, rounding of angle endoporus in trapezoidal, 27, the Long Circle endoporus, 28, oval endoporus.
Embodiment:
With reference to the following examples, can explain the utility model in more detail; But the utility model is not limited to these embodiment.
In Fig. 1,2, radio-frequency coil (3) top is provided with above the radio-frequency coil of being with the inclined-plane (9), the bottom is provided with (10) below the trapezoid radio-frequency coil, is provided with two endoporus (8) at the middle part of radio-frequency coil (3), and two endoporus (8) connect seam (11) by endoporus and connect series connection; Cooling water channel (4) is around radio-frequency coil (3), and carry with two electric currents respectively in both sides that the diagonal cut joint (13) of radio-frequency coil (3) is located and water coolant carries copper pipe (12) to fixedly connected, (10) can be made up of a plurality of ladders below the trapezoidal radio-frequency coil that radio-frequency coil (3) bottom is provided with, and (9) can form a slope from outside to inside on the radio-frequency coil that radio-frequency coil (3) top is provided with; Cooling water channel (4) can directly be gone up fluting at radio-frequency coil (3), imbedding copper pipe is then fixed by solder bonding metal again, its cooling water channel (4) also can directly be gone up fluting at radio-frequency coil (3), utilize copper coin to cover then and fix by solder bonding metal, diagonal cut joint (13) forward is used to pass to one of them in two endoporus (8), and two endoporus (8) are forward arranged by diagonal cut joint.
In Fig. 3,4, this can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, and its principle of work and using method thereof are; Earlier raw material silicon rod (1) is delivered to radio-frequency coil (3) bottom, raw material silicon rod (1) is near more good more apart from radio-frequency coil (3), but must not contact with radio-frequency coil (3), electric current on radio-frequency coil (3) is carried and water coolant carries copper pipe (12) energising to send water and another root electric current to carry and water coolant is carried copper pipe (12) energising draining then, impel radio-frequency coil (3) to produce powerful magnetic line of force (2), make raw material silicon rod (1) upper end utilize magnetic line of force to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel (4) is given radio-frequency coil (3) cooling, diagonal cut joint (13) directly forward is used to pass to one of them in two endoporus (8), its major function is in order to make high-frequency current go up uniform distribution at radio-frequency coil (3), to make raw material silicon rod (1) thermally equivalent; After melt at the position of (10) below the close radio-frequency coil in the termination of raw material silicon rod (1), young brilliant chuck (7) is being with young brilliant (6) to descend, the melting area that makes young brilliant (6) insert fuel rod (1) by two endoporus (8) back, promote young brilliant (6) then, the melt cognition on fuel rod (1) top is followed young brilliant (6) and is risen, also corresponding the following synchronously of the lower shaft of its fuel rod (1) bottom slowly risen, but its fuel rod (1) must not contact with radio-frequency coil (3); Because the end of raw material silicon rod (1) may be not too smooth, so, (10) are designed to stepped below the radio-frequency coil, its role is to make as much as possible the many bottom surfaces (10) of raw material silicon rod (1) near radio-frequency coil, the slope from outside to inside of its (9) design above radio-frequency coil, its effect is can reduce high-frequency current too the concentrating of middle part, and makes it at radio-frequency coil (3) uniform distribution, with the effect that realizes being heated evenly; The melting area on raw material silicon rod (1) top is in the sticking and drive of young brilliant (6) and by behind radio-frequency coil (3) endoporus (8), because weakening and condensation of magnetic line of force (2), just form new column type crystal, its young brilliant chuck (7) is carried young brilliant (6) secretly and is slowly risen, and just can form the finished silicon core (5) of desired length.
In Fig. 5,6,7,8,9,10,11,12,13,14,15,16,17,18,19, this can produce the radio-frequency coil of two silicon cores or other crystalline material simultaneously, two endoporus (8) that its radio-frequency coil (3) middle part is provided with can be designed the endoporus (8) of different size, model and moulding, and its scope of design roughly has following kind; Rounding of angle endoporus (18), trilateral endoporus (19), the interior rounding of angle endoporus (20) of trilateral, Polygons endoporus (21), irregular limit shape endoporus (22), rhombus endoporus (23), the interior rounding of angle endoporus (24) of rhombus, trapezoidal endoporus (25), trapezoidal interior rounding of angle endoporus (26), Long Circle endoporus (27) and oval endoporus (28) in circular inner hole (14), square inner bore (15), square interior rounding of angle endoporus (16), rectangle endoporus (17), the rectangle; But it is to be noted that different shape is Protean, so do not enumerate one by one at this.
When its endoporus (8) shaped design is the band angle (as; Triangle or the like) can use the design of being with the wedge angle angle, the method for rounding of angle realized in endoporus (8) can use when being designed to the angle equally, i.e. arc angle.
The embodiment that selects for use in this article for open the purpose of this utility model currently thinks to suit, but will be appreciated that, the utility model is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the utility model scope.

Claims (10)

1. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously, it is characterized in that: radio-frequency coil (3) top is provided with above the radio-frequency coil of being with the inclined-plane (9), the bottom is provided with (10) below the trapezoid radio-frequency coil, is provided with two endoporus (8) at the middle part of radio-frequency coil (3); Cooling water channel (4) is around radio-frequency coil (3), and carries with two electric currents respectively in the both sides that the diagonal cut joint (13) of radio-frequency coil (3) is located and water coolant carries copper pipe (12) to fixedly connected.
2. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: (10) can be made up of a plurality of ladders below the trapezoidal radio-frequency coil that its radio-frequency coil (3) bottom is provided with.
3. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: (10) can form a slope from outside to inside above the radio-frequency coil that its radio-frequency coil (3) top is provided with.
4. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: its cooling water channel (4) can directly be gone up at radio-frequency coil (3) and beat groove, imbeds copper pipe then and is fixed by solder bonding metal.
5. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: its cooling water channel (4) can be directly gone up at radio-frequency coil (3) beat groove, utilizes the copper coin covering then and is fixed by solder bonding metal.
6. the radio-frequency coil that once can produce two silicon cores or other crystalline material as claimed in claim 1 is characterized in that: its diagonal cut joint (13) forward is used to pass to one of them in two endoporus (8).
7. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: two endoporus (8) is forward arranged by diagonal cut joint (13).
8. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: two endoporus (8) that its radio-frequency coil (3) middle part is provided with can be designed to circular inner hole (14), square inner bore (15), rectangle endoporus (17), trilateral endoporus (19), Polygons endoporus (21), irregular limit shape endoporus (22), rhombus endoporus (23), trapezoidal endoporus (25), Long Circle endoporus (27) and oval endoporus (28).
9. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 8 is characterized in that: can use the design of band angle when its endoporus (8) shaped design is the band angle.
10. the radio-frequency coil that can produce two silicon cores or other crystalline material simultaneously as claimed in claim 8 is characterized in that: its endoporus (8) can use interior rounding of angle equally when being designed to be with the angle.
CNU200720089457XU 2007-02-13 2007-02-13 High-frequency coil capable of simultaneously producing two silica core or other crystal material Expired - Fee Related CN201024223Y (en)

Priority Applications (1)

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CNU200720089457XU CN201024223Y (en) 2007-02-13 2007-02-13 High-frequency coil capable of simultaneously producing two silica core or other crystal material

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Application Number Priority Date Filing Date Title
CNU200720089457XU CN201024223Y (en) 2007-02-13 2007-02-13 High-frequency coil capable of simultaneously producing two silica core or other crystal material

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103596310A (en) * 2013-11-01 2014-02-19 上海交通大学 Variable cross-section annular fork type induction coil and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103596310A (en) * 2013-11-01 2014-02-19 上海交通大学 Variable cross-section annular fork type induction coil and manufacturing method thereof
CN103596310B (en) * 2013-11-01 2015-10-14 上海交通大学 Variable cross-section annular fork type induction coil and preparation method thereof

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Addressee: Zhang Li

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Addressee: Zhang Li

Document name: Notification to Pay the Fees

C56 Change in the name or address of the patentee
CP02 Change in the address of a patent holder

Address after: Jin Xin Road, national high tech Development Zone, Luoyang City, Henan province 471009 No. 2 Luoyang Jinnuo Engineering Machinery Co. Ltd.

Patentee after: Liu Chaoxuan

Address before: 471009 Henan province Luoyang Xigong Road No. 1 single building

Patentee before: Liu Chaoxuan

ASS Succession or assignment of patent right

Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD.

Free format text: FORMER OWNER: LIU ZHAOXUAN

Effective date: 20111116

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20111116

Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd

Patentee after: Luoyang Jinnuo Mechanical Engineering Co., Ltd.

Address before: Jin Xin Road, national high tech Development Zone, Luoyang City, Henan province 471009 No. 2 Luoyang Jinnuo Engineering Machinery Co. Ltd.

Patentee before: Liu Chaoxuan

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080220

Termination date: 20140213