CN1956899B - Substrate reception container, substrate reception body, and substrate conveyance device - Google Patents

Substrate reception container, substrate reception body, and substrate conveyance device Download PDF

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Publication number
CN1956899B
CN1956899B CN2005800162217A CN200580016221A CN1956899B CN 1956899 B CN1956899 B CN 1956899B CN 2005800162217 A CN2005800162217 A CN 2005800162217A CN 200580016221 A CN200580016221 A CN 200580016221A CN 1956899 B CN1956899 B CN 1956899B
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CN
China
Prior art keywords
mentioned
overlapping
substrate
feedway
base
Prior art date
Application number
CN2005800162217A
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Chinese (zh)
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CN1956899A (en
Inventor
松本武司
土公武行
中村友祐
竹原彻
汤本启介
田中丰彦
铃木谦作
中原法彦
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大日本印刷株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP152313/2004 priority Critical
Priority to JP2004152313 priority
Priority to JP2004152889 priority
Priority to JP152889/2004 priority
Priority to JP201585/2004 priority
Priority to JP2004201585 priority
Application filed by 大日本印刷株式会社 filed Critical 大日本印刷株式会社
Priority to PCT/JP2005/009250 priority patent/WO2005113375A1/en
Publication of CN1956899A publication Critical patent/CN1956899A/en
Application granted granted Critical
Publication of CN1956899B publication Critical patent/CN1956899B/en

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67363Closed carriers specially adapted for containing substrates other than wafers
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67386Closed carriers characterised by the construction of the closed carrier

Abstract

A reception container for receiving a layered body constructed by layering substrates. The substrate reception container has a support base having a support surface on which the substrates can be placed horizontally and has pressing means for applying uniform pressing force to the entire upper surface of the layered body, placed on the support base, to press and fix the layered body to the support base. The pressing means has a load support plate provided while being connected to the support base so as to face the upper surface of the layered body placed on the support base and has an air bag placed between the load support plate and the layered body, supported by the load support plate, and applying uniform pressing force to the entire upper surface of the layered body.

Description

Substrate accommodation container, substrate reception body and base board delivery device

Technical field

The present invention relates to be used to carry, protect plate glass, glass substrate and as substrate accommodation container, substrate reception body and the base board delivery device of employed colour filtering chip basic board of liquid crystal indicator of its fabricated product etc.

Background technology

In the past; the keeping and transporting flat glass and as its fabricated product be formed with the colour filtering chip basic board of thrusts such as black matrix, dyed layer, transparent conductive film layer and pad at glass baseplate surface the time; for the cover glass substrate surface not injured or damaged; adopted the accommodating container of Foamex system chest; this accommodating container is formed with many grooves; can take in glass substrate by the as prescribed spacing parallel arranging; so that glass substrate does not contact each other, and can with substrate from the peristome of chest top upright insert and keep.

Patent documentation 1:JP spy opens the 2002-264992 communique

Yet, require to make large-size glass substrate recently, if in the accommodating container that its as prescribed is accommodated at interval the case shape same, then need bigger accommodating container, accommodation space, and, owing to only substrate periphery was supported with relaxing in the past, the problem such as injured so exist glass substrate end by initiations such as vibrations in carrying to collapse it to be contacted case with the glass substrate of adjacency with the buckling that causes by own wt from the groove disengaging.

Summary of the invention

Main purpose of the present invention is to provide a kind of substrate accommodation container, substrate reception body and base board delivery device of its fabricated products such as injured, damaged equivalent damage ground transportation large-scale plate glass, glass substrate and colour filtering chip basic board when avoiding carrying.

First invention is a kind of substrate accommodation container, is used to take in stacked by many substrates and overlapping body that constitute is characterized in that having: brace table, and it has and substrate can placed the bearing surface of placing above-mentioned overlapping body under the horizontal state; Push the unit, it makes pressing force act on the entire upper surface zone of the overlapping body that is placed on the above-mentioned brace table equably, and above-mentioned overlapping body is pushed and is fixed on the above-mentioned brace table.

Second invention is a kind of substrate reception body, and it is the overlapping body that forms across stacked many substrates of free body, is accommodated in the described substrate accommodation container of first invention and forms.

The 3rd invention is a kind of substrate reception body, and its characteristic is to have: first stay bearing plate, second stay bearing plate and the overlapping body that constitutes across stacked many substrates of free body, and above-mentioned overlapping body is come clamping and is pushed support by above-mentioned first and second stay bearing plates.

The 4th invention is a kind of feedway, it is characterized in that having: base, and it is pushed and supports and storage makes the stacked and overlapping body that constitutes of many substrates; Freight container, it stores above-mentioned base, and has buffer unit in the in-to-in bottom surface, and keeps above-mentioned base on above-mentioned buffer unit, above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration.Above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, promptly refers to have the characteristic of the distortion that prevents the overlapping body that caused by the low-frequency component that generally becomes than large amplitude; And above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration, promptly refers to by the buffer unit of bottom surface vibrational energy is converted to heat, and blocks the characteristic that radio-frequency component is propagated to above-mentioned base effectively.

The 5th invention is a kind of feedway, it is characterized in that having: base, and it is pushed and supports and storage makes the stacked and overlapping body that constitutes of many substrates; Freight container, it stores above-mentioned base, and has spring device at the in-to-in end face, and with above-mentioned spring device above-mentioned base is hung and maintenance, above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration.Above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, promptly refers to have the characteristic of the distortion that prevents the overlapping body that caused by the low-frequency component that generally becomes than large amplitude; And above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration, promptly refers to by the buffer unit of bottom surface vibrational energy is converted to heat, and blocks the characteristic that radio-frequency component is propagated to above-mentioned base effectively.

The 6th invention is a kind of feedway, it is characterized in that having: base, and it is pushed and supports and storage makes the stacked and overlapping body that constitutes of many substrates; Box-shaped body, it stores above-mentioned base, and is made of the lid that has buffer unit and keep the bottom of above-mentioned base and be configured in the upside of above-mentioned bottom, wherein, above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned bottom has the characteristic of the radio-frequency component that absorbs vibration.

The 7th invention is a kind of feedway, it is with around the shelf encirclement invention 6 described feedways, wherein, this shelf has: bottom part, 4 pillars erectting the corner part that is arranged on above-mentioned bottom part and 4 beams that connect the top of above-mentioned pillar.

The 8th invention is a kind of feedway, it is characterized in that having: substrate reception body, and the overlapping body that it will constitute across stacked many substrates of free body is accommodated in the substrate accommodation container; Freight container, its storage aforesaid substrate packaging container, and has buffer unit in the in-to-in bottom surface, and on above-mentioned buffer unit, keep the aforesaid substrate packaging container, wherein, this substrate accommodation container has: brace table, and it has and substrate can be changed to the bearing surface of placing above-mentioned overlapping body under the horizontal state; Push the unit, it makes pressing force act on the entire upper surface zone of the overlapping body that is placed on the above-mentioned brace table equably, and above-mentioned overlapping body is pushed and is fixed on the above-mentioned brace table, in addition, the aforesaid substrate packaging container has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration.

The 9th invention is a kind of feedway, it is characterized in that, have: substrate reception body, it further is accommodated in substrate reception body in the casing, wherein, the overlapping body that the aforesaid substrate packaging container has first stay bearing plate and second stay bearing plate and constitutes across stacked many substrates of free body, and this overlapping body comes clamping by above-mentioned first and second stay bearing plates, and push support, this casing is by the supporting plate with the bearing surface that can place the aforesaid substrate packaging container and be placed on the removable lid that the mode of the substrate reception body on the above-mentioned supporting plate is provided with covering and constitute;

Freight container, its storage is accommodated in the substrate reception body in the above-mentioned casing, and has buffer unit in the in-to-in bottom surface, and on above-mentioned buffer unit, keep above-mentioned base, wherein, the aforesaid substrate packaging container has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration.

In the present invention, for the weight of the overlapping body of substrate with the vibration in carrying, employing has the base and the substrate reception body of enough rigidity, and utilize whole pressing body pushing substrate to fix the overlapping body of substrate, thus, can suppress the bending of each substrate and the distortion of the overlapping body of substrate, and prevent substrate each other or the friction between substrate and the free body, carry thereby it is stored in the bottom surface has the freight container of pooling feature.

Vibration in the conveying, comprise low frequency (40Hz is following) composition and high frequency (40~100Hz) compositions, have the base of enough rigidity and overlapping body is pushed and is fixed on substrate reception body on the brace table etc. of high rigidity by employing, can absorb the vibration of low frequency, and the bottom surface that makes freight container has pooling feature, vibration that thus can absorbing high-frequency, and utilize the vibration of cutting apart under the inadequate occasion of pressing force push the overlapping body of substrate, can prevent that each substrate is each other and bump between substrate and the free body and friction.

Substrate accommodation container of the present invention and substrate reception body, owing to can carry glass substrate or its fabricated product that magnifies type more, and whole of supporting substrate carries equably, so cross travel can not take place, can prevent substrate each other friction and the friction between substrate and the free body, handling efficiency is good, can avoid the injured and damaged equivalent damage of substrate surface.And, by buffer unit further is set, and have good Dent resistance, can avoid the injured and damaged equivalent damage of substrate surface.

In addition, by overlapping body is placed on above the supporting plate, can obtain to be easy to the effect of carrying with fork truck etc.Further, if supporting plate is set to following structure, that is: the mode that is placed on the overlapping body above the supporting plate with encirclement on supporting plate is installed lid removably, and the top board of this lid is used as the structure of above-mentioned load support plate, then can when being come simplified structure, lid double as load support plate also can prevent that rubbish and dust etc. are attached on the substrate by cover overlapping body with lid.

In addition, if be arranged to following formation, that is: have and take in by supporting plate and be installed in interior case that the lid on this supporting plate forms and by second supporting plate and the outer container that constitutes by second lid, then rubbish and dust etc. can be attached to the interior casees that is accommodated in this outer container, when case is moved in the factory that uses substrate in will being somebody's turn to do, rubbish and dust etc. can not brought in the factory, thereby can be obtained to keep the effect of cleaning in the factory.

Feedway of the present invention, a large amount of large flat glass, glass substrate or its fabricated product are carried as overlapping body, and utilization pushed base or the substrate reception body that support is pushed in the unit, be stored in the bottom surface and have in the freight container or container of buffer unit, can absorb low frequency thus, high-frequency vibration is carried, therefore, can avoid the injured and damaged equivalent damage of substrate surface.

Description of drawings

Fig. 1 is the cutaway view of an example of expression substrate reception body of the present invention.

Fig. 2 is the block diagram of interior case of the substrate reception body of Fig. 1.

Fig. 3 is the instruction diagram that overlapping body is placed on supporting plate.

Fig. 4 is the instruction diagram that overlapping body is placed on supporting plate.

Fig. 5 is the instruction diagram of substrate.

Fig. 6 is the instruction diagram of overlapping body.

Fig. 7 is the instruction diagram of overlapping body.

Fig. 8 is the cutaway view of an example of expression substrate reception body of the present invention.

Fig. 9 is the cutaway view of an example of expression substrate reception body of the present invention.

Figure 10 is the front elevation of an example of expression substrate reception body of the present invention.

Figure 11 is the birds-eye view of the stay bearing plate of Figure 10.

Figure 12 is the front elevation of an example of expression substrate reception body of the present invention.

Figure 13 is the birds-eye view of the stay bearing plate of Figure 12.

Figure 14 is the front elevation of an example of of the present invention substrate reception body of expression.

Figure 15 is the birds-eye view of the stay bearing plate of Figure 14.

Figure 16 is the front elevation of an example of expression substrate reception body of the present invention.

Figure 17 is the A-A cutaway view of the substrate reception body of Figure 16.

Figure 18 is the front elevation of an example of expression substrate reception body of the present invention.

Figure 19 is the B-B cutaway view of the conveying body of Figure 12.

Figure 20 is the block diagram of an example of expression feedway of the present invention.

Figure 21 is the block diagram of freight container of the feedway of Figure 20.

Figure 22 is the birds-eye view of bottom surface of the freight container of Figure 21.

Figure 23 is the block diagram of base of the feedway of Figure 20.

Figure 24 is the cutaway view of an example of expression feedway of the present invention.

Figure 25 is the block diagram of an example of expression feedway of the present invention.

Figure 26 is the cutaway view of the feedway of Figure 25.

Figure 27 is the block diagram of an example of expression feedway of the present invention.

Figure 28 is the block diagram of other examples of the employed base of expression feedway of the present invention.

Figure 29 is the block diagram of other examples of the employed base of expression feedway of the present invention.

Figure 30 is the block diagram of other examples of the employed base of expression feedway of the present invention.

Figure 31 is the block diagram of an example of expression feedway of the present invention.

Figure 32 is the block diagram of an example of expression feedway of the present invention.

Nomenclature is as follows among the figure:

1 substrate reception body; 3 substrates; The 3a base main body; The 3b resin bed; The 3c protective film; The 4A free body; The 4B free body; 5 overlapping bodies; 7 strengthen sheet material; 9 strengthen sheet material; 11 supporting plates; 12 lids; 13 padlocks; 15 air bags; 17 supporting plates; 19 lids; 21 pipes; 23 valves; 31 substrate reception bodies; 33 air bags; 41 substrate reception bodies; 43 elastic plates; 51 substrate reception bodies; 53 bundling bodies; 55 stay bearing plates; 56 grooves; 57 stay bearing plates; 59 bandages; 61 bundling bodies; 63 stay bearing plates; 64 tops; 65 stay bearing plates; 66 nuts; 67 bolts; 69 holes; 71 bundling bodies; 73 stay bearing plates; 75 stay bearing plates; 77 cramps; 79 metal part; 81 substrate reception bodies; 82 impact absorbing members; 83 impact absorbing members; 85 impact absorbing members; 87 impact absorbing members; 89 impact absorbing members; 91 substrate reception bodies; 92 impact absorbing members; 93 impact absorbing members; 94 impact absorbing members; 95 impact absorbing members; 97 impact absorbing members; 99 impact absorbing members; 101 feedways; 103 freight containers; 105 bases; 107 bottom part; 109 buffer units; 111 bottom surfaces; 113 side panels; 115 top boards; 117; 119 backplates; 123 bottom part; 125 back part; 127 pressing bodies; 131 fence members; 133 bending blocks; 135 bending blocks; 137 screws; 139 front parts; 141 feedways; 143 support components; 145 tracks; 147 guide parts; 149 freight containers; 151 feedways; 153 bottom surfaces; 155 buffer units; 157 base holding members; 158 teats; 159 lids; 161 feedways; 163 bottom part; 165 pillars; 167 beams; 171 bases; 173 pressing bodies; 175 air bellows; 181 bases; 183 upper component; 185 support components; 187 arms; 191 bases; 193 air bellows; 201 feedways; 211 feedways.

The specific embodiment

Below, preferred implementation of the present invention is described with reference to the accompanying drawings.

Fig. 1 is that expression is accommodated in substrate accommodation container of the present invention with the overlapping body of substrate and the concise and to the point cutaway view of the substrate reception body that first embodiment that forms relates to, Fig. 2 is the concise and to the point block diagram of part of the substrate reception body of Fig. 1, Fig. 3 is a concise and to the point lateral plan of representing the overlapping body of substrate is placed on the state of supporting plate, and Fig. 4 is the concise and to the point lateral plan that expression is placed on the overlapping body of substrate the state of supporting plate.The overlapping body 5 that substrate reception body 1 forms overlapping many substrates is accommodated in the substrate accommodation container (below, abbreviate accommodating container as) 10.Below, describe each several part in detail.

In the present embodiment, be plate glass, glass substrate and fabricated product thereof as the substrate 3 of taking in object, the color filter of Liquid Crystal Display (LCD) and thin film transistor employed glass substrates such as (TFT) etc.Fig. 5 represents its typical structure briefly.

In Fig. 5; substrate 3 (for example has functional layer 3b on the single face of base main body 3a such as glass substrate; under the occasion of the substrate that color filter is used; be layer with black matrix, painted pixel, ITO electrode etc.), and further be formed with the protective film 3c that is used to prevent keeping, carries the damage of medium generation thereon.This protective film 3c makes with the material that can be easy to form and remove, and adopts water soluble resin (for example, polyvinyl alcohol) more.Film thickness is general to be adopted about 10~20 μ m.Usually, functional layer 3b, protective film 3c are formed on the Zone Full except that peripheral number mm of base main body 3a.The zone that in this manual, will be formed with functional layer 3b and go up form protective film 3c is called the service area.

Substrate 3 is not particularly limited size, also can adopt the large-size about width 1800mm * length 2000mm.And the thickness of substrate also is not particularly limited, but in the majority about 0.3~1.0mm.In addition, taking in number is advisable about 1~300.

Accommodating container 10 is the double-deckers that have the interior case of taking in overlapping body 5 and take in the outer container of case in this.Interior case has: supporting plate 11, its formation have the brace table of the bearing surface 11a that is used to support overlapping body 5; And lid 12, it is placed on the mode of the overlapping body 5 on the supporting plate 11 with encirclement, is installed in removably on the above-mentioned supporting plate 11.

In order to be parallel to the overlapping body 5 of state lower support of bearing surface 11a at substrate 3, the bearing surface 11a of supporting plate 11 is formed into the area also bigger than the area of substrate 3.Lid 12 is the case shape objects with the side plate 12b on top board 12a parallel with bearing surface 11a under the state that is installed on supporting plate 11 and 4 faces vertical with bearing surface 11a.

For lid 12 being positioned at assigned position,, be formed with projection 11b with the inside face tabling of the side plate 12b of lid 12 in a plurality of positions of the upper surface of supporting plate 11 with respect to supporting plate 11.In addition, the relative parts of supporting plate 11 location lids 12 are not limited to the projection 11b that adopted, and can suitably change.

The top board 12a of lid 12, as described below, be as the load support plate, it is used to support the antagonistic force that is produced when the upper surface effect pressing force of overlapping body 5 by air bag 15, and lid 12 adopts the structure with the rigidity that can bear this antagonistic force.In addition, lid 12 is connected in supporting plate 11 by having the linkage unit that can support this counteraction intensity of force.In the present embodiment, for lid 12 being connected in supporting plate 11, a plurality of padlocks 13 have been adopted with needed intensity.But because the switching of padlock 13 individual palpations, so operation is good and can bear bigger pulling force.In addition, the linkage unit that lid 12 is connected in supporting plate 11 is not limited to padlock, can be to have adopted unit arbitrarily such as parts screw bolt and nut or that adopted connecting pin.

On the bearing surface 11a of supporting plate 11, place the higher reinforcement sheet material 7 of plane precision, place overlapping body 5 in the above.And, on overlapping body 5, place the higher reinforcement sheet material 9 of plane precision, dispose air bag 15 thereon.By supporting with this smooth strengthening part or pushing substrate 3, can further prevent the damage of substrate 3.

Air bag 15 is configured as: by expanding to its internal feed forced air, and the upper surface position limited by top board (load support plate) 12a of lid 12, can be by strengthening the entire upper surface zone that sheet material 9 is pushed overlapping body 5 equably.Thereby air bag 15 and the top board 12a etc. that supports it push the unit below formation, that is: it makes pressing force act on the entire upper surface zone of overlapping body 5 equably, and above-mentioned overlapping body is pushed and is fixed on the brace table.

In order lid 12 to be installed under the state of supporting plate 11, to air bag 15 internal feed forced airs, the pipe 21 of air being supplied with usefulness is connected in air bag 15 in the mode of stretching out in the outside of lid 12, and at its front end valve 23 is installed.

At the reinforcement sheet material the 7, the 9th of configuration up and down of overlapping body 5, for the substrate that supports or push overlapping body 5 with smooth state as far as possible is provided with.Adopt the good and weight-saving sheet material of plane precisions as strengthening part 7,9, specifically, preferably adopt bending block or be core with the foaming body and be the ply wood etc. on top layer with the FRP plate.In order to support or push whole of overlapping body 5, strengthening part 7,9 adopts the parts identical or big than its area with substrate 3.As the plane precision of strengthening part 7,9, preferably adopt roughness of surface be about 100 μ mRmax below, and planeness be minimum profile curvature radius be about 700m more than.

Taking in the outer container of the interior case that is made of supporting plate 11 and lid 12, is to be formed by second supporting plate 17 and lid 19 mounted thereto removably.Lid 19 also is the shape identical with the lid 12 of interior case, and is installed in removably on the supporting plate 17 by padlock 13.Omit diagram, but on the supporting plate 17 of outer container, be provided with the unit that is used for the supporting plate 11 of interior case is located and is fixed on assigned position.

When overlapping many substrates 3 constitute overlapping body 5, preferably between each substrate 3, accompany free body 4, so that can protect functional layer 3b, the protective film 3c of each substrate 3.The mode that accompanies free body 4 is not particularly limited, as long as there is free body 4 in the position in the service area of covered substrate 3, can enumerate following manner as optimal way, that is: as shown in Figure 6, to dispose than the mode that substrate 3 stretches out more laterally with its both ends than the free body 4A of substrate 3 length; Or as shown in Figure 7, will be under the state behind two foldings and the free body 4B of substrate 3 approximate same size, be clipped between the substrate 3 with the state behind two foldings.In mode shown in Figure 6, because the end of free body 4A stretches out to the outside of substrate 3, thus when peeling free body off, catch this part of stretching out to get final product, and can simplify and be used to catch the mechanism of this free body and can catch exactly.In addition; in mode shown in Figure 7; because free body 4B is two foldings; even if so in transportation protective film 3c (with reference to Fig. 5) moisture absorption of substrate 3 and and the sheet 4Ba of the free body that is adjacent adhesion; can not adhere with the sheet 4Bb of upside yet; therefore; when peeling free body 4B off; be convenient to the sheet 4Bb absorption of upside is kept and take up with sorption pad etc.; and by (for example to the unit that can peel free body 4 exactly off; niproll etc.) add this a slice in, can peel free body 4 off from substrate exactly.

The material that free body 4 is adopted, can be can protective substrate 3 any materials, generally adopt paper, resin flake etc.As the preferred material of free body 4, can enumerate trademark that resin expanded thin slice with separated foam, for example JSP Corp produce foamed damping material for " ミ ラ マ Star ト (miramat) ".Because the resin expanded thin slice with separated foam has suitable flexibility, therefore, the functional layer 3b on protective substrate surface reliably, and because no permeability to air, so can prevent protective film 3c moisture absorption.As the thickness of free body 4, consider if it is thinner, then reduce the protection effect, and if it is blocked up, then produce the high and bulky shortcoming of cost, so its thickness is chosen to be about 0.25~1mm preferably.

Then, the method for taking in overlapping body 2 in accommodating container 10 is described.As shown in Figure 3, Figure 4, on supporting plate 11, place to strengthen sheet material 7, then alternately overlapping substrate 3 and free body and form overlapping body 5 thereon.In addition, also can change to: be pre-formed overlapping body 5 at elsewhere, place it in again on the supporting plate 11.After placing overlapping body 5 on the supporting plate 11, place strengthening part 9 and air bag 15 thereon, and portion covers lid 12 from it, and lid 12 is fixed on the supporting plate 11., pressed air supplying devices such as compressor (not shown) be connected in the pipe 23 of with air bag 15 bonded assembly air supplying with usefulness, and supply with forced air to air bag 15 thereafter.Thus, air bag 15 expands, and pushes the upper surface of overlapping body 5 by strengthening sheet material 9, and overlapping body 5 is pushed and is fixed on the supporting plate 11.

The pressing force that air bag 15 is produced can supply to the air pressure of this air bag 15 by adjustment, and adjust to required value.In addition,, and can't apply under the occasion of pressing force to overlapping body 5, can strengthen inserting suitable pad between sheet material 9 and the air bag 15 with air bag 15 in the height deficiency of overlapping body 5.

After air bag 15 was supplied with the forced air of required pressure, shutoff valve 23 took off pressed air supplying device., its integral body be accommodated in the outer container that by second supporting plate 17 and lid 19 formed in, and be transported to required local or keeping with this state thereafter.When carrying out this carrying, keeping, because air bag 15 remains on the state that forced air is housed, so the pressing force of the upper surface continuous action equalization of 15 pairs of overlapping bodies 5 of air bag, substrate 3 can not be subjected to displacement and sustain damage.

In addition, substrate reception during in accommodating container 10, is being placed horizontality with supporting plate 11, substrate is carried out overlapping with horizontality, but when the formed substrate reception body 1 of carrying, be not limited to keep supporting plate 11 to be horizontal state, also can be as required, supporting plate 11 is tilted or stand vertically.Even if under this occasion, owing to substrate 3 is compressed by uniform pressure on whole, and pushed by supporting plate 11, so can carry safely, substrate 3 can not be moved, and can not cause damage to substrate 3 yet.

When unpacking, take off the lid 19 of outer container, take out the interior case (supporting plate 11, lid 12 etc.) that is accommodated in wherein, and move required place to.At this moment, because of interior case is covered by outer container,, therefore,, can not go wrong even if move interior case to wait the requirement cleaning in the factory that uses substrate place so be not attached with rubbish, dust etc. yet.Then, bleed off the air of air bag 15 after, take out lids 12 from supporting plate 11, and after taking out air bag 15, strengthening sheet material 9, from the upper surface side of overlapping body 5 alternately take out substrate 3, free body 4 gets final product.

Like this, owing to place substrate 3 with horizontality, and air bag 15 acts on pressing force the entire upper surface zone of overlapping body 5 equably, even if it is so big or take under the more occasion of number at substrate size, also can compress and fix each substrate 3 in its whole zone, and can not take place that substrate moves and the problem damaged in that handling process is medium by uniform pressure.In addition, because air bag 15 acts on pressing force on whole of substrate equably, so, even if set the pressing force of per unit area lessly, also can not move by restricting substrate, thereby also can prevent the damage of substrate.And, supply to the air pressure of air bag by adjustment, can adjust pressing force easily.

In addition, in the present invention, push the unit and adopt the formation that pressing force is acted on equably the entire upper surface zone of overlapping body, but " entire upper surface zone " is not limited to proper entire upper surface zone, even if how many zones littler than whole zone, the zone that restricting substrate does not move so long as can be applied to this zone by loading uniformly gets final product, and specifically means the zone more than about 80% in entire upper surface zone.

And, in the above-described first embodiment, the pressing force that only utilizes the air bag 15 on the upper surface be configured in overlapping body 5 to be produced fixes substrate 3, but as required, also can be by the suitable buffer unit of configuration between the side plate 12b of the side of overlapping body 5 and lid 12.Fig. 8 represents the substrate reception body 31 that the embodiment under this occasion relates to, and in this embodiment, inserts air bag 33 as buffer unit between the side plate 12b of the side of overlapping body 5 and lid 12, and charges into the side that forced air limits overlapping body 5.Constitute according to this, can further prevent the displacement of the substrate 3 that in handling process, takes place.

And in the above-described first embodiment, the unit of pushing as on the upper surface that pressing force is applied to equably overlapping body 5 has adopted air bag 15, is not limited to this but push the unit, also can be other structure.

Fig. 9 has represented to adopt the substrate reception body of pushing the unit 41 of other structures.In this embodiment, the elastic plate 43 that is formed by rubber, sponge, foamed resin etc. is to be configured between the top board 12a of the overlapping body 5 that is positioned over supporting plate 11 and lid 12 with compressive state.Promptly, under unpressed state, the thickness of this elastic plate 43 is greater than the thickness at the interval between top board 12a and the reinforcement sheet material 9, strengthening placing elastic plate 43 on the sheet material 43, portion is against the top board 12a of lid 12 from it, and lid 12 is pushed to supporting plate 11 with the suitable unit of pushing, under this state, lid 12 is connected in supporting plate 11, top board 12a pressurizes to elastic plate 43 and makes it that elastic deformation take place thus, thus, elastic deformation elastic plate 43 pressing force can be affacted equably the whole zone of upper surface of overlapping body 5.

In addition, in above-mentioned arbitrarily embodiment, all the top board 12a of lid 12 is used as the load support plate of support air bag 15 and elastic plate 43, but the load support plate of support air bag 15 and elastic plate 43, may not necessarily adopt the mode of the top board 12a of lid 12, also can be following structure, that is: the rod of the simple flat load support plate of employing, and employing connection usefulness, pipe, flat board etc. be connected to supporting plate 11 with this load support plate.

Below, the substrate reception body that second embodiment of the invention is related to describes.

Figure 10 is the front elevation (the lid side in the place ahead among the not shown figure) of the substrate reception body 51 that relates to of second embodiment of the invention, and will further be accommodated in the double-ply casing as the bundling body 53 of substrate reception body.Figure 11 is the birds-eye view of the stay bearing plate 55 that adopts among Figure 10.

About substrate reception body 51, have the part of identical function for inscape with substrate reception body 1, give same-sign, and detailed.

Substrate reception body 51 of the present invention is to have: as the bundling body 53 of pushing the substrate reception body that supports overlapping body 5, take in the interior case of bundling body 53 and the double-layer structural of taking in the outer container of case in this.Interior case has: supporting plate 11, and it constitutes brace table, and this brace table has the bearing surface 11a that supports bundling body 53; And lid 12, it is installed on the above-mentioned supporting plate 11 removably in the mode that encirclement is positioned over the overlapping body 5 above the supporting plate 11.

As shown in figure 10, bundling body 53 constitutes: the overlapping body 5 of substrate 3 is placed on above the stay bearing plate 57, further stay bearing plate 55 is placed on above the overlapping body 5, thereafter, adopt as the bandage 59 of pushing the unit, the periphery of stay bearing plate 55 with stay bearing plate 57 surrounded, be pressurized to the thrust of regulation by tension bandage 50, thereby stay bearing plate is pushed and is fixed on the overlapping body 5.The formation that the preferred especially employing of bandage 59 in series is inserted with spring can adopt rubber tape as bandage 59.By adopting rubber tape, can in conveying, not reduce to become flexible by the thickness because of overlapping body.

As shown in figure 11, stay bearing plate 55,57 is that quadrangle is tabular, and preferably sets in advance groove 56 in the part that bandage is installed.Utilize groove 56 can prevent the displacement of bandage 59, be easy to the operation of pressurizeing.

In order to push whole of substrate equably, stay bearing plate 55,57 is preferably the higher material of bending stiffness, or considers and install and be preferably lighter material.For example, can enumerate bending block, sandwich plate.And the gravel size decision of stay bearing plate is greater than substrate.

When forming overlapping body 5 substrate 3 being carried on stay bearing plate 57, for fear of substrate contact each other, and between the substrate 3 of adjacency, sandwich paper, resin film or have the thin slice of resiliency as free body 4.Thin slice with resiliency, the preferred sponge thin slice that forms by polyethylene foamed, expanded polypropylene or polyurathamc that uses.

The number of taking in of substrate 3 preferably uses about 1~500, especially is preferably about 100~200.

About bandage 7, though not shown, it has the fastening part, is fixable structure.

Bundling body 53, when carrying, can carry with the any-mode in horizontal folded mode (state that substrate is set level) or the perpendicular folded mode (state that substrate is upright), but the formation of bundling body 53, promptly use the overlapping body 5 of stay bearing plate 55,57 clamping substrates, and as pushing unit employing bandage 59, make the operation of the overlapping body 5 formation one of stay bearing plate 55,57 and substrate, be adapted at carrying out under the horizontal folded mode.Under the occasion of carrying, preferably after forming bundling body 53 under the horizontal folded mode, carry in the setting mode in perpendicular folded mode.

About utilizing the scope of pushing the suitable thrust of stay bearing plate as the bandage 59 of pushing the unit, different under horizontal folded mode and perpendicular folded mode, under horizontal folded occasion,, be preferably 30~100g/cm owing to the effect of conducting oneself with dignity can be adopted less pressure 2And under perpendicular folded occasion, be preferably 100~500g/cm 2, especially be preferably 300~500g/cm 2

In being accommodated in, bundling body 53 during case, bundling body 53 is fixed on the supporting plate 11 with not shown fixed cell.

In second embodiment, the mode that bundling body 53 is accommodated in the double-deck casing is illustrated, but also bundling body 53 can be accommodated in casing simply, or with carrying after the covering of films such as stretch-draw film.

Like this,, carry,, can avoid the injured and damaged equivalent damage of substrate surface so handling efficiency is good owing to can utilize bandage 59 to push the overlapping body of support according to second embodiment.

In addition, according to second embodiment, bundling body 53 adopts bandage 59 conducts to push support unit, but also can adopt other to push support unit.Figure 12,13 and Figure 14,15 expressions adopted bundling body 61, the bundling body 71 of pushing support unit.

Bundling body 61 is described.

Figure 12 and Figure 13 are the instruction diagrams of bundling body 61, and Figure 12 is the front elevation of bundling body 61, and Figure 13 is the birds-eye view of the stay bearing plate 63 that adopts among Figure 12.About bundling body 61, to the part of the inscape identical function of bundling body 53, give same-sign, and detailed.

Bundling body 61, as shown in figure 12, constitute: on stay bearing plate 65, place overlapping body 5, and on overlapping body 5, place stay bearing plate 63 again, thereafter, pass binding bolt 67 in the end of stay bearing plate 63,65 as pushing the unit, and with bolt 67 and chimeric at the nut 66 of the bottom of stay bearing plate 65 setting, and rotation and fastening top 64, thus be pressurized to the thrust of regulation, and stay bearing plate 63 pushed be fixed on the overlapping body 5.

As shown in figure 13, stay bearing plate 63,65 is that quadrangle is tabular, has the hole 69 of passing bolt in four bights of stay bearing plate 63,65.

Stay bearing plate 63,65, same with stay bearing plate 55,57, in order to push whole of substrate equably, be preferably the higher material of bending stiffness, or consider operation and be preferably lighter material.For example, can enumerate bending block or sandwich plate.And the gravel size decision of stay bearing plate is greater than substrate.

The configuration of bolt 67 is not limited to position shown in Figure 13, can on whole position of carrying of supporting substrate equably a plurality of places be set.

Bundling body 61, identical with bundling body 1, when carrying, can carry with the any-mode in horizontal folded mode or the perpendicular folded mode, but the overlapping body 5 of stay bearing plate 63,65 clamping substrates is promptly used in the formation of bundling body 61, and adopts bolt 67 as pushing the unit, and the operation that the overlapping body 5 that makes stay bearing plate 63,65 and substrate forms as one is adapted at carrying out under the horizontal folded mode.Under the occasion of carrying, preferably after forming bundling body 61 under the horizontal folded mode, carry in the setting mode in perpendicular folded mode.

Utilize the suitable thrust scope of pushing stay bearing plate as the bolt 67 of pushing the unit, different under horizontal folded mode and perpendicular folded mode, under horizontal folded occasion,, be preferably 30~100g/cm owing to the effect of conducting oneself with dignity can be adopted less pressure 2, and under perpendicular folded occasion, be preferably 100~500g/cm 2, especially be preferably 300~500g/cm 2

Like this,, carry,, can avoid the injured and damaged equivalent damage of substrate surface so handling efficiency is good owing to can utilize bolt 67 to push the overlapping body of support according to present embodiment.

Bundling body 71 is described.

Figure 14 and Figure 15 are the instruction diagrams of bundling body 71, and Figure 14 is the front elevation of bundling body 71, and Figure 15 is the birds-eye view of the stay bearing plate 73 that adopts among Figure 14.About bundling body 71, to the part of the inscape identical function of bundling body 53, give same-sign, and detailed.

Bundling body 71 constitutes: place overlapping body 5 on stay bearing plate 75, on overlapping body 5, place stay bearing plate 73 again, thereafter, the cramp 77 of a plurality of コ fonts is set in the end of stay bearing plate, by cramp 77 stay bearing plate 73 is pushed to overlapping body 5, and the thrust that is pressurized to regulation is fixed.

As shown in figure 15, stay bearing plate 73,75 is that quadrangle is tabular, preferably buries metal in the cramp installation site in advance underground and strengthens (metal part 79), and preferably adopt recess.

Stay bearing plate 73,75 and stay bearing plate 55,57 are same, in order to push whole of substrate equably, are preferably the higher material of bending stiffness, or consider operation and be preferably lighter material.For example, can enumerate bending block or sandwich plate.And the gravel size decision of stay bearing plate is greater than substrate.

The allocation position of cramp 77 is not limited to the position shown in Figure 14,15, can on whole position of carrying of supporting substrate equably a plurality of places be set.

Bundling body 71 is identical with bundling body 53, when carrying, can carry with the any-mode in horizontal folded mode or the perpendicular folded mode, but the formation of bundling body 71, promptly use the overlapping body 5 of stay bearing plate 73,75 clamping substrates, and adopt cramp 77 as pushing the unit, and the operation that the overlapping body 5 of stay bearing plate 73,75 and substrate is formed as one is adapted at carrying out under the horizontal folded mode.Under the occasion of carrying, preferably after forming bundling body 71 under the horizontal folded mode, carry in the setting mode in perpendicular folded mode.

Utilize the suitable thrust scope of pushing stay bearing plate as the cramp 77 of pushing the unit, different under horizontal folded mode and perpendicular folded mode, under horizontal folded occasion,, be preferably 30~100g/cm owing to the effect of conducting oneself with dignity can be adopted less pressure 2, and under perpendicular folded occasion, be preferably 100~500g/cm 2, especially be preferably 300~500g/cm 2

Like this, according to present embodiment,,, can avoid the injured and damaged equivalent damage of substrate surface so handling efficiency is good owing to can utilize cramp 77 to push to support overlapping body and carry.

In addition, the bundling body 53 in second embodiment also is fit to make up with impact absorbing member shown in Figure 16~19.Under the state shown in Figure 16~19, can be accommodated in the above-mentioned double-deck chest or in the chest of other shapes, in addition, carry after also can covering with films such as stretch-draw films.

The instruction diagram of the bundling body 81 that bundling body 53 and impact absorbing member are made up in Figure 16,17 this second embodiments of expression.Figure 16 is front elevation (impact absorbing member in the place ahead among the not shown figure), and Figure 17 is the A-A cutaway view of Figure 16.Figure 18 is the front elevation (impact absorbing member in the place ahead among the not shown figure) of bundling body 91, and Figure 19 is the B-B cutaway view of conveying body 91 shown in Figure 180.About with above-mentioned explanation in the part of inscape identical function, give same-sign, and detailed.

Bundling body 81, as shown in figure 16, the bottom of the bundling body 53 under horizontal folded mode, top and sidepiece configuration impact absorbing member.At the bottom of bundling body 53 configuration impact absorbing member 82, and impact absorbing member 83 is set on the top of bundling body 53.Impact absorbing member the 82, the 83rd, the quadrangle more bigger than the stay bearing plate of bundling body 53.

As the impact absorbing member of sidepiece, in the substrate end of overlapping body 5 impact absorbing member 87,89 is set, and at the arranged outside impact absorbing member 85 of impact absorbing member 87,89.The impact absorbing member 85 in the impact absorbing member 87 and the outside also can be integrally formed.

The shape of impact absorbing member is not particularly limited, if but consistently be formed with recess, the cross travel in the time of then can preventing to carry effectively with the shape of bundling body.And it also is actv. that the mode that the impact absorbing member 82,85,83 on bottom, sidepiece and top is combined into the case shape forms.

The material of impact absorbing member 82 is not particularly limited, but conveying body of the present invention is carried out the drop impact test, and applied under the occasion of external impact force of 20G, preferably had the impulsive force in the overlapping body is in resiliency following about 20G, can preferably use expanded polypropylene.In addition, the material and the impact absorbing member 82 of impact absorbing member 83,85,87,89 are same, can preferably use expanded polypropylene.

Here, enumerate the example that impact absorbing member is configured on whole of bundling body 53 and be illustrated, but also can only adopt the impact absorbing member 82 of bottom, suitably select the configuration impact absorbing member.

Bundling body 91, as shown in figure 18, at bottom, top and the sidepiece configuration impact absorbing member of the bundling body 53 of horizontal folded mode.Bottom at bundling body 53 disposes impact absorbing member 92,93, and on the top of bundling body 53 impact absorbing member 94,95 is set.

Impact absorbing member the 92, the 94th, the quadrangle more bigger than the bottom of bundling body 53.Impact absorbing member 92 and impact absorbing member 93, impact absorbing member 94 and impact absorbing member 95 also can be integrally formed.

And, the impact absorbing member 97 of sidepiece is set, between the substrate end of the overlapping body 5 of impact absorbing member 97 and bundling body 53, impact absorbing member 99 is set.

The shape of impact absorbing member is not particularly limited, if but consistently form recess, the cross travel in the time of then can preventing to carry effectively with the shape of bundling body.And,, then can improve the operation when carrying if integral body forms the case shape.

The material of impact absorbing member 92,93,94,95,97,99 and above-mentioned same can preferably be used expanded polypropylene.

Here, enumerate whole the example that impact absorbing member is configured in bundling body 53 and be illustrated, but also can only adopt the impact absorbing member 92,93 of bottom, can suitably select to dispose impact absorbing member.

Like this; by adopting stay bearing plate by the bundling body that is pressed on the overlapping body; carry for can supporting substrate whole; and by impact absorbing member being set in the bottom; can absorb the vibration when carrying; and by impact absorbing member further is set in the substrate end of bundling body; can the protective substrate end; by surrounding integral body with impact absorbing member; can relax from exterior impact; handling efficiency is good, and the injured and damaged equivalent damage of substrate surface is avoided in the displacement of the substrate in the time of can preventing to carry.

Below, the base board delivery device that third embodiment of the invention is related to describes.

The instruction diagram of the base board delivery device 101 that Figure 20~23rd, third embodiment of the invention relate to, Figure 20 is the block diagram of base board delivery device 101, Figure 21 is the block diagram of freight container 103 of the base board delivery device 101 of Figure 20, and Figure 22 is the birds-eye view of bottom surface 111 of the freight container of Figure 21.Figure 23 is the block diagram of the base 105 in the base board delivery device 101 of Figure 20.

Base board delivery device 101 as shown in figure 20, constitutes: as substrate reception body, in freight container shown in Figure 21 103, storage has base shown in Figure 23 105.

The freight container 103 of the base board delivery device 101 of Figure 20 is bottom part 107, side panel 113, backplate 119, top board 115 and the door 117 case shapes that surround, and fixes and be provided with buffer unit 109 on bottom surface 111.

Bottom part 107 is the higher material of rigidity, and preferred the use by steel or metal cornue forms the frame shape and forms planar parts, and has the foot that helps carrying out the shape of operation with fork truck etc., and side panel 113, backplate 119, top board 115 and 117 pairs of materials of door are not particularly limited, but preferred the use is fixed on sheet material on the aluminium frame with resin system corrugated board, also preferably use following sandwich plate, that is: with side panel 113, backplate 119, the two sides adhesion of the Foamex formed products of the expanded polypropylene that top board 115 and door 117 are integrally formed etc. has aluminium sheet.

Buffer unit 109 as shown in figure 22, can be arranged on a plurality of positions blockly, also can adopt laminar.The buffer unit 109 preferred viscoelastic bodies that use oil snubber or visoelasticity rubber etc.

Being stored at the base 105 in the freight container 103, is the base with enough rigidity that has carried substrate 3 and be made of metallic material etc.

As shown in figure 23, base 105 has bottom part 123 and erects the back part 125 that is arranged on above the bottom part 123, and fixes bottom part 123 and back part 125 by welding.Bottom part 123, back part 125 are respectively the shapes that has many pillars on tetragonal frame, and bottom part 123 has the foot that helps carrying out with fork truck etc. the shape of operation.On bottom part 123, have press body 127 mutually opposed to each other, come clamping and push the overlapping body 5 of support by back part 125 and press body 127 with back part 125.At this moment, back part 125 vertically is provided with respect to bottom part 123.

On base body, carry many substrates 3, and with the end of substrate 3 mutually ground connection fence members 131 is set.Fence members 131 is connected in back part 125 and press body 127.In addition, fence members 131 corner part of avoiding substrate 3 is provided with.Fence members 131 is the quadrilateral frame shape.

The face that the end with substrate 3 of bottom part 123 and fence members 131 joins is not shown, but rubber preferably is set.Thus, can absorb the impact when carrying and eliminate the irregular of substrate 3.The thickness of above-mentioned rubber is preferably more than the 3mm and below the 10mm, and hardness is preferably more than the 30HS and below the 70HS.

On substrate 3 bearing surfaces of parts 125 and press body 127, dispose bending block 133,135 respectively overleaf.Particularly importantly come clamping substrate 3 by being difficult to crooked face, bending block is difficult for twisting and crooked plate, and comes supporting substrate 3 by whole, can prevent the phenomenon to the concentration of local pressurization.There is no particular limitation for the thickness of bending block, but be preferably below the 50mm.

Carry with in the base 105 at substrate, press body 127 is made of a plurality of bolts 137 and front parts 139.Bolt 137 is fixed on bottom part 123 or the fence members 131.

Configuration bending block 133 on base body, and carry many substrates 3, and after configuration bending block 135, press body 127 and the fence members 131, front parts 125 are moved to the direction of back part 125, thereby pressurization keep substrate 3 by rotating a plurality of bolts 137 in the lump.By rotating a plurality of bolts 137 in the lump, the whole face of substrate 3 is pressurizeed equably.There is no particular limitation for the quantity of bolt and configuration, can be equably the whole face of substrate 3 be pressurizeed but be set at.

Surface pressure when 3 pressurizations are supported to substrate is preferably 500g/cm 2Below, especially preferably at 200g/cm 2~300g/cm 2Scope.

Bottom part 123, back part 125, front parts 139, as long as fence members 131 has the material of enough rigidity, then material is not particularly limited, but, especially preferably is that the steel or the metal cornue formation frame shape of L type adopts the cross section from intensity and weight aspect.Adopt frame shape parts in the present embodiment, but also can thin plate be set between frame, in addition, can adopt planar parts.

Substrate 3 sizes are not particularly limited, but preferably use the substrate of each edge lengths for about 0.5m~2.5m.And the thickness of substrate is not particularly limited, but adopts the substrate about each edge lengths 0.3~1.0mm more.In addition, taking in number is preferably about 200~500.When carrying substrate 3 on base body,, preferably adopt the overlapping body that between the substrate 3 of adjacency, has adopted the free body 4 that constitutes by paper, resin film, sponge thin slice etc. for fear of substrate 3 contact each other.

Base board delivery device 101 constitutes: storage is as the base 105 of substrate reception body on the buffer unit 109 of freight container 103.Fixing aluminium sheet (not shown) on buffer unit 109, storage base 105 on the aluminium sheet of having fixed.Cramp of the holding member that bottom part 123 usefulness of base 105 can freely be dismantled etc. fixes.In addition, base 5 is only fixed at bottom surface portions, and fixing sidepiece etc. not.

Like this, according to present embodiment, will be stored at as lower bottom base 105 buffer unit 109 will be fixed in the freight container 103 of bottom surface 111, promptly by adopting a plurality of bolts 137 bending block 135 to be pressed into the base 105 of supporting substrate on the substrate 3; And the partial fixing of bottom part 123 carried on buffer unit 109, thereby base absorbs the low-frequency component of vibration, and the buffer unit 109 of freight container 103 absorbs the radio-frequency component of vibration, therefore can be corresponding to the various impacts in carrying, and can avoid the injured and damaged equivalent damage of substrate surface.

Below, the base board delivery device 141 that the 4th embodiment of the present invention is related to describes.

Figure 24 is the front elevation (door 117 is not shown) of the base board delivery device 141 that relates to of the 4th embodiment of the present invention.Base board delivery device 141 constitutes: the base 105 that illustrates in first embodiment is stored in the freight container 149.

About base board delivery device 141, for the part of the inscape identical function of base board delivery device 101, give same-sign, and detailed.

Freight container 149 is provided with a plurality of support components 143 that hang the spring structure of base 105 on top board 115, and the inboard approximate horizontal of side panel 113 track 145 is set, and guide part 147 is set in the side of base 105.

Bottom part 107 is higher material of rigidity and structure, and has a foot that helps carrying out the shape of operation with fork truck etc., and side panel 113, backplate 119, top board 115 and 117 pairs of materials of door are not particularly limited, but need base 105 to be suspended on the skeleton of the high stiffness on the top board 115.

Base board delivery device 141 is suspended on base 105 on the support component 143 that is arranged at freight container 149, and guide part 147 alignment rail 145 that will be arranged at base 147 are stored.

Like this, according to the 4th embodiment, to be pressed into bending block 135 base 105 of the high rigidity of supporting substrate on the substrate 3 by adopting a plurality of bolts 137, adopt the support component 143 of spring structure, hang and be stored at the freight container 149 from top board and carry, thus, base absorbs the low-frequency component of vibration, and the support component 143 of the spring structure of freight container 149 absorbs the radio-frequency component of vibration, so can be, and can avoid the injured and damaged equivalent damage of substrate surface corresponding to the various impacts in carrying.

Below, the base board delivery device 151 that the 5th embodiment of the present invention is related to describes.

Figure 25 is the block diagram of the base board delivery device 151 that relates to of the 5th embodiment of the present invention.Figure 26 is the cutaway view of the base board delivery device 151 of Figure 25.

For base board delivery device, in the bottom, promptly base holding member 157 is arranged on bottom on the bottom surface 153 by buffer unit 155, be provided with teat 158 as maintaining body, and base 105 is placed in the inboard at teat 158, and covers with the lid 159 of case shape.

Bottom surface 153 and base holding member 157 are the higher material of rigidity, and preferred the use formed the parts of frame shape and formed planar parts by steel or metal cornue.

The viscoelastic resin flake of buffer unit 155 preferred uses.In addition, be not limited to viscoelastic resin flake, can use the viscoelastic body of oil snubber or visoelasticity rubber etc.

Lid 159 is the case shape at the no end, because purpose is to prevent to pollute, so be not particularly limited material, preferably uses resin system corrugated board chest, the integrally formed product of the Foamex of the chest, expanded polypropylene etc. of sticking film on the aluminium frame.

Like this, according to the 5th embodiment, to be pressed into bending block 135 base 105 of the high rigidity of supporting substrate on the substrate 3 by adopting a plurality of bolts 137, be placed on bottom, and carry, thus with lid 159 coverings with buffer unit 155, base 105 absorbs the low-frequency component of vibration, and buffer unit 155 absorbs the radio-frequency component of vibration, can avoid the injured and damaged equivalent damage of substrate surface corresponding to the various impacts in carrying.

Below, the base board delivery device 161 that the 6th embodiment of the present invention is related to describes.

Figure 27 is the block diagram of the base board delivery device 161 that relates to of the 6th embodiment of the present invention, and it constitutes: base board delivery device 151 is stored in the shelf that is skeleton structure except that bottom part 163.

Shelf has 4 pillars 165 erectting on the corner part that is arranged on bottom part 163, and has the structure that connects the top of pillar 165 with 4 beams 167.Bottom part 163, pillar 165 and beam 167 adopt the material of high rigidity, and firmly fix each connection.

Like this, according to the 6th embodiment, base 105 absorbs the low-frequency component of vibration, and the buffer unit 155 of feedway 151 absorbs the radio-frequency component of vibration, and surround base board delivery device 151 with firm shelf and carry, thus, can avoid the injured and damaged equivalent damage of substrate surface corresponding to the various impacts in carrying.

In addition,, be that example is illustrated with base 5, but be not limited to the structure of base 5 about the base of aforesaid substrate feedway 101,141,151,161, for example, so long as the base of the high rigidity of pushing supporting substrate shown in Figure 28~30 is all applicable.Figure 28 is illustrated in the structure of press body the base 171 different with base 5, and it is stacked and push the base 181,191 of supporting substrate that Figure 29, Figure 30 represent to keep flat substrate.For base 171,181,191, with the part of above-mentioned inscape identical functions, give same-sign, and detailed.

As shown in figure 28, base 171 adopts air bellow as the mechanism that is used to push supporting substrate 3, and press body 173 is formed by the front parts 139 that are provided with a plurality of air bellows 175.Front parts 139 are for having the shape of many pillars on quadrilateral frame, front parts 139 usefulness be easy to be connected back part 125 on the attaching parts of fence members 131 dismounting be connected.

By a plurality of air bellows 175 of in the lump air being packed into, can be equably the whole face of substrate 3 be pressurizeed.Also can adopt inflator to replace air bellow 175.There is no particular limitation for the quantity of air bellow and configuration, but be configured to push equably whole of substrate 3.

Configuration bending block 133 on base body, and mounted board 3, and after configuration bending block 135, press body 173 and the fence members 131 to a plurality of air bellows 175 air of packing in the lump, and is pushed bending block 135, pushes supporting substrate 3 thus.

As shown in figure 29, base 181 has bottom part 123 and the support component 185 of the setting perpendicular to bottom part 123, and fixes bottom part 123 and support component 185 by welding.Bottom part 123, support component 185 be for having the shape of many pillars on each tetragonal frame, bottom part 123 has the foot that helps carrying out with fork truck etc. the shape of operation.Mounted board 3 on bottom part 123, and the press body with end face parts 183 is set, and come clamping to push substrate 3 with bottom part 123 and press body.Configuration bending block 133 on bottom part 123, and mounted board 3, and after configuration bending block 135 and the fence members 131, on bending block 135, carry end face parts 183, and utilize the deadweight of end face parts 183 or the pressing mechanism (not shown) that end face parts 183 are pushed to bottom part 123 sides, whole of pushing supporting substrate 3 equably.

As shown in figure 30,, push the press body of supporting substrate 3, constitute by the end face parts 183 that are provided with a plurality of air bellows 193 for base 191.End face parts 183 usefulness attaching partss are connected with fence members 131 on being connected bottom part 123.Configuration bending block 133 on bottom part 123, and mounted board 3, and after configuration bending block 135 and the fence members 131 to a plurality of air bellows air of packing in the lump, is pushed bending block 135, pushes supporting substrate 3 thus.

Below, the base board delivery device 201 that the 7th embodiment of the present invention is related to describes.

Figure 31 is the concise and to the point block diagram of the base board delivery device 201 that relates to of the 7th embodiment of the present invention.Base board delivery device 201 constitutes: substrate reception body shown in Figure 11 is stored in the freight container 103.

About base board delivery device 201, to the part of the inscape identical function of aforesaid substrate feedway 1 and substrate reception body 1, give same-sign, and detailed.

In the present invention, in substrate accommodation container 10, take in substrate 3 and, and substrate reception body 1 is stored in the freight container 103 as substrate reception body 1.

According to present embodiment, can utilize substrate reception body 1 to come whole of supporting substrate 3 and carry, and it is stored in the freight container 101, can alleviate or cut off the vibration in carrying thus.By supporting overlapping body with 1 whole of substrate reception body, the low-frequency component that absorbs vibration prevents the distortion that the low-frequency component because of vibration produces, and the buffer unit 109 of freight container 103 absorbs the radio-frequency component of vibration, prevent the propagation of radio-frequency component, thus, can can avoid the injured and damaged equivalent damage of substrate surface corresponding to the various impacts in carrying.

Below, the base board delivery device 211 that the 8th embodiment of the present invention is related to describes.

Figure 32 is the concise and to the point block diagram of the base board delivery device 211 that relates to of the 8th embodiment of the present invention.Base board delivery device 211 constitutes: substrate reception body shown in Figure 10 1 is stored in the freight container 103.

About base board delivery device 211, to the part of the inscape identical function of aforesaid substrate feedway 1 and substrate reception body 51, give and use same-sign and detailed.

In the present invention, the bundling body 53 of substrate 3 is accommodated in the chest and, and substrate reception body 51 is stored in the freight container 103 as substrate reception body 51.

According to present embodiment, can utilize substrate reception body 51 to come whole of supporting substrate to carry, and it is stored in the freight container 101, can alleviate or cut off the vibration in carrying thus.By supporting overlapping body with 51 whole of substrate reception bodies, the low-frequency component that absorbs vibration prevents the distortion that the low-frequency component because of vibration produces, and the buffer unit 109 of freight container 103 absorbs the radio-frequency component of vibration, prevent the propagation of radio-frequency component, thus, can can avoid the injured and damaged equivalent damage of substrate surface corresponding to the various impacts in carrying.

More than, preferred implementation of the present invention has been described, but has the invention is not restricted to the structure shown in the embodiment, can in the scope that claims are put down in writing, suitably change.

Claims (21)

1. substrate reception body is characterized in that having:
Stacked and the overlapping body that constitutes of many substrates;
Be configured in the reinforcement sheet material up and down of above-mentioned overlapping body;
Brace table, it has and can place by the bearing surface of the above-mentioned overlapping body of above-mentioned reinforcement sheet material clamping substrate being placed under the horizontal state;
Push the unit, its pressing force is acted on equably be positioned on the above-mentioned brace table by the entire upper surface zone of the above-mentioned overlapping body of above-mentioned reinforcement sheet material clamping, and above-mentioned overlapping body pushed and is fixed on the above-mentioned brace table;
The above-mentioned unit of pushing has:
The load support plate, its be placed on above-mentioned brace table on the mode faced mutually of the upper surface of overlapping body, be connected with above-mentioned brace table and be provided with;
Air bag, it is configured between above-mentioned load support plate and the above-mentioned overlapping body, and is supported by above-mentioned load support plate, and makes pressing force act on the upper surface of above-mentioned overlapping body;
Adjustment unit, its adjustment is supplied to the air pressure of above-mentioned air bag,
Above-mentioned reinforcement sheet material is to be core with the foaming body and to be the ply wood or the bending block on top layer with the FRP plate.
2. substrate reception body according to claim 1 is characterized in that,
Above-mentioned brace table is a supporting plate, and above-mentioned supporting plate is provided with lid, and the top board of this lid is as above-mentioned load support plate, and this lid is installed on the above-mentioned supporting plate removably in the mode that encirclement is placed on the overlapping body on the above-mentioned supporting plate.
3. substrate reception body according to claim 1 is characterized in that,
Above-mentioned brace table is a supporting plate, and above-mentioned supporting plate is provided with lid, and the top board of this lid is as above-mentioned load support plate, and this lid is installed on the above-mentioned supporting plate removably in the mode that encirclement is placed on the overlapping body on the above-mentioned supporting plate,
Have outer container, this outer container is made of second supporting plate of taking in the interior case that is formed by above-mentioned supporting plate and above-mentioned lid and second lid.
4. substrate reception body according to claim 1 is characterized in that, above-mentioned overlapping body is the overlapping body that forms across stacked many substrates of free body.
5. a feedway is characterized in that,
Have: base, it is used the reinforcement clamping parallel with substrate and pushes to support and take in and make the stacked and overlapping body that constitutes of many aforesaid substrates; Freight container, it stores above-mentioned base, and has buffer unit in the in-to-in bottom surface, and keeps above-mentioned base on above-mentioned buffer unit,
Above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration,
Above-mentioned reinforcement is a bending block.
6. feedway according to claim 5 is characterized in that, above-mentioned buffer unit is an oil snubber.
7. feedway according to claim 5 is characterized in that, above-mentioned buffer unit is a viscoelastic body.
8. feedway according to claim 5 is characterized in that, above-mentioned base has:
Bottom part;
Setting is fixed on the back part on the above-mentioned bottom part;
Press body, it is mutually opposed with above-mentioned back part and be provided with on above-mentioned bottom part, and can push above-mentioned overlapping body to above-mentioned back part side;
The fence members of quadrilateral frame shape, it can be installed on above-mentioned back part and the above-mentioned press body,
Erect and support aforesaid substrate.
9. feedway according to claim 8 is characterized in that, above-mentioned press body is by a plurality of bolts and front component set-up.
10. feedway according to claim 8 is characterized in that, above-mentioned press body is by the front component set-up that is provided with a plurality of air bellows.
11. feedway according to claim 5 is characterized in that, above-mentioned base has:
Bottom part;
Press body, it can push the above-mentioned overlapping body that is placed on above the above-mentioned bottom part to above-mentioned bottom part side;
Fence members, it can be installed on the above-mentioned bottom part.
12. feedway according to claim 5 is characterized in that, above-mentioned overlapping body is the overlapping body that constitutes across stacked many substrates of free body.
13. a feedway is characterized in that,
Have: base, it is used the reinforcement clamping parallel with substrate and pushes and support and store the stacked and overlapping body that constitutes of many aforesaid substrates; Freight container, it stores above-mentioned base, and has spring device at the in-to-in end face, and hangs and keep above-mentioned base with above-mentioned spring device,
Above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration,
Above-mentioned reinforcement is a bending block.
14. feedway according to claim 13 is characterized in that, above-mentioned overlapping body is the overlapping body that constitutes across stacked many substrates of free body.
15. a feedway is characterized in that,
Have: base, it is used the reinforcement clamping parallel with substrate and pushes and support and storage makes the stacked and overlapping body that constitutes of many aforesaid substrates; Box-shaped body, it stores above-mentioned base, and is made of the lid that has buffer unit and keep the bottom of above-mentioned base and be configured in the upside of above-mentioned bottom,
Above-mentioned base has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned bottom has the characteristic of the radio-frequency component that absorbs vibration,
Above-mentioned reinforcement is a bending block.
16. feedway according to claim 15 is characterized in that, above-mentioned overlapping body is the overlapping body that constitutes across stacked many substrates of free body.
17. feedway according to claim 15, it is characterized in that, with shelf surround feedway around, this shelf has: bottom part, erect 4 pillars on the corner part that is arranged on above-mentioned bottom part, connect 4 beams on the top of above-mentioned pillar.
18. a feedway is characterized in that,
Have:
Substrate reception body, the overlapping body that it will constitute across stacked many substrates of free body, be accommodated in the substrate accommodation container, this overlapping body has disposed the reinforcement sheet material parallel with substrate thereon down, this substrate accommodation container has: brace table, and it has and substrate can placed the bearing surface of placing above-mentioned overlapping body under the horizontal state; Push the unit, it makes pressing force act on the entire upper surface zone of the overlapping body that is placed on the above-mentioned brace table equably, and above-mentioned overlapping body is pushed and is fixed on the above-mentioned brace table;
Freight container, it stores aforesaid substrate packaging container, and has buffer unit in the in-to-in bottom surface, and keeps the aforesaid substrate packaging container on above-mentioned buffer unit, wherein,
The aforesaid substrate packaging container has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration,
Above-mentioned reinforcement sheet material is to be core with the foaming body and to be the ply wood or the bending block on top layer with the FRP plate.
19. feedway according to claim 18 is characterized in that, the above-mentioned unit of pushing has:
The load support plate, its be placed on above-mentioned brace table on the mode faced mutually of the upper surface of overlapping body, be connected with above-mentioned brace table and be provided with;
Air bag, it is configured between above-mentioned load support plate and the above-mentioned overlapping body, and is supported by above-mentioned load support plate, and makes pressing force act on the entire upper surface zone of above-mentioned overlapping body equably.
20. a feedway is characterized in that,
Have:
Substrate reception body, this substrate reception body further is accommodated in the casing, wherein, the overlapping body that the aforesaid substrate packaging container has first stay bearing plate and second stay bearing plate and constitutes across stacked many substrates of free body, and this overlapping body comes clamping by above-mentioned first and second stay bearing plates parallel with aforesaid substrate, and push support, this casing is by the supporting plate with the bearing surface that can place the aforesaid substrate packaging container and be placed on the removable lid that the mode of the aforesaid substrate packaging container on the above-mentioned supporting plate is provided with covering and constitute;
Freight container, its storage is accommodated in the substrate reception body in the above-mentioned casing, and has buffer unit in the in-to-in bottom surface, and keeps above-mentioned casing on above-mentioned buffer unit, wherein,
The aforesaid substrate packaging container has the characteristic of the low-frequency component that absorbs vibration, and above-mentioned freight container has the characteristic of the radio-frequency component that absorbs vibration,
Above-mentioned first and second stay bearing plates are bending block or sandwich plate.
21. feedway according to claim 20 is characterized in that, the above-mentioned periphery that supports with fastening above-mentioned first stay bearing plate of bandage and above-mentioned second stay bearing plate of pushing realizes.
CN2005800162217A 2004-05-21 2005-05-20 Substrate reception container, substrate reception body, and substrate conveyance device CN1956899B (en)

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JP2004201585 2004-07-08
PCT/JP2005/009250 WO2005113375A1 (en) 2004-05-21 2005-05-20 Substrate reception container, substrate reception body, and substrate conveyance device

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CN1956899A (en) 2007-05-02

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