1375643 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種基板收納容器、基板收納體及基板輸送裝 置，用以輸送及保護玻璃板、玻璃基板及其加工製品之液晶顯千 裝置中所使用的過濾片基板等。 # μ 【先前技術】 先前’在保存或移動於玻璃板及玻璃板加工製品玻璃基板表 面形成有黑色矩陣、者色層、透明導電膜層及間隔體等突起物之 過慮片基板時，為了避免玻璃板基板表面受傷或缺損，會使用發 泡樹脂製之箱收納容器，該收納容器形成有多數的溝槽，可將玻 璃基板彼此以不接觸的方式從箱子上方的開口部直立地插入固 定，可將玻璃基板以既定間隔並列收納。 專利文獻1 :特開2〇〇2_264992號公報 但是，最近要求製造大型的玻璃基板，如果將基板與先前一 樣以既定間隔收納於箱形的收納容器，則需要有更大的收納 和收納，間，而且，先前對基板周邊僅有鬆散的支撐，由於輸送 的振動等會使玻璃基板端從溝槽脫離而造成倒下損壞或者由於本 身重量而彎曲，與箱子中鄰接的玻璃基板接觸而受傷。 【發明内容】 (發明之揭示） (發明欲解決之問題） 發明之目的為提供一種基板收納容器、基板收納體及基板 輸送裝置，該等可以避免大型玻璃板、玻璃基板及過濾片基板等 加工製品在運送時受傷、缺損。 (解決問題之方式） 、第1之發明為一種基板收納容器，用於收納複數之基板疊置 構成之疊層體，該基板收納容器之特徵為具有： 5 丄j/5643 ^持台，具有可將前述疊層體的基板以水平狀態載置的支持 面，及 ，壓機構’可崎前述支持台上所載置之疊層體整個頂面施 加均勻之f壓力’將前述疊層體壓在前述支持台上並固定。 齡第2之發明為—種基板收納體，係將隔著間隔體疊置複 土板，成之疊層體收納於第i之發明的基板收納容器以形成。 又够第3之發明為一種基板收納體，其特徵為：具有第1支 ^反、Ϊ2.支持板’以及隔著間隔體疊置複數之基板形成之疊層 -’且刖，疊層體被前述第丨及第2支持板夾著並壓緊支持著。 ^加第4之發明為一種輸送裝置，具有架台及容器， ΐ架ίΐ'將複數之基板疊置構成之疊層體推壓固定收納， 此，述容器係收納前述架台，於内部底面具有緩衝元件，可將 則迷采台固家於前述緩衝元件上， 转玄ΐ送裝置之特徵為：前述架台具有吸收振動之低頻成分的 、述容器具有吸收振動之高頻成分的特性，1375643 IX. Description of the Invention: The present invention relates to a substrate storage container, a substrate storage body, and a substrate transfer device for transporting and protecting a glass plate, a glass substrate, and a processed product thereof in a liquid crystal display device. The filter substrate or the like used. # μ [Prior Art] In the past, in order to avoid the formation of a black matrix, a color layer, a transparent conductive film layer, and a spacer such as a spacer on the surface of a glass substrate and a glass plate processed product, in order to avoid In the case where the surface of the glass plate substrate is damaged or damaged, a container containing a foamed resin is used, and the storage container is formed with a plurality of grooves, and the glass substrates can be inserted and fixed upright from the opening above the case without contacting the glass substrate. The glass substrates can be accommodated in parallel at a predetermined interval. However, recently, it is required to manufacture a large-sized glass substrate. If the substrate is stored in a box-shaped storage container at a predetermined interval as before, a larger storage and storage are required. Moreover, there has been only loose support on the periphery of the substrate, and the glass substrate end is detached from the groove due to vibration or the like, causing collapse or damage due to its own weight, and is in contact with the adjacent glass substrate in the case and being injured. SUMMARY OF THE INVENTION (Problem to be Solved by the Invention) An object of the invention is to provide a substrate storage container, a substrate storage body, and a substrate transfer device, which can avoid processing of a large glass plate, a glass substrate, and a filter substrate. The product is injured and defective during transportation. (Solution to Problem) The first aspect of the invention is a substrate storage container for accommodating a plurality of stacked substrates, wherein the substrate storage container is characterized by: 5 丄 j/5643 ^ holding table, The support surface of the laminate body may be placed in a horizontal state, and the pressing mechanism may apply a uniform f pressure to the entire top surface of the laminate placed on the support table. On the aforementioned support stand and fixed. In the second aspect of the invention, the substrate storage body is formed by stacking a composite board with a spacer interposed therebetween, and the laminate is housed in the substrate storage container of the invention of the first aspect. Further, the third invention is a substrate storage body characterized by having a first support member, a support plate, and a laminate formed by stacking a plurality of substrates via a spacer. It is sandwiched and supported by the first and second support plates. The invention of the fourth aspect is a conveying device having a gantry and a container, and the truss ΐ ΐ 推 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将The component can be solidified on the buffer element, and the transfer device is characterized in that the gantry has a low-frequency component that absorbs vibration, and the container has a characteristic of absorbing high-frequency components of vibration.
It剐述架台具有吸收振動之低頻成分的特性，亦即，可防止一 又會形成大振幅之振動的低頻成分所造成的疊層體變形， 而則述容器具有吸收振動之高頻成分的特性，亦即，將底面 台ί專^兀件振動的能量轉換為熱，以有效阻擋高頻成分向前述架 土 '第5之發明為一種輸送裝置，具有架台及容器， =述架台係將複數之基板疊置構成之疊層體推壓固定收納， ^剐述容器係收納前述架台並於内部頂面具有彈簧機構，藉由 月1J迷彈簧機構吊住前述架台並固定之， 5玄ί送裝置之特徵為：前述架台具有吸收振動之低頻成分的 ，則述容器具有吸收振動之高頻成分的特性， 炉則述架台具有吸收振動之低頻成分的特性，亦即， 又开》成大振幅之振動的低頻成分所造成的叠層體變形 可防止一 1375643 的緩高，的特性’亦即，將底面 台傳播。 轉換為熱，以有效阻擔高頻成分向前述架 又，第6之發明為一種輸送裝置，1 複數之基板疊置構成i疊層《2=收納， 有緩+構成’ _底部係收納前述且 有綾衝兀件將刖述架台固定，前述蓋 卫一 角落的4根支柱及連在前述柱上部之4 立於則述底柯件 及容^第8之發日料—種輸送裝置，具有支持台、基板收納體 前述支持台具有能將隔著間隔體將複數 層體中的基板以水平狀態載置的支持面，《基板邊置構成之疊 成，前述基板收納體係將前述疊層體收納於基板收納容器所構 前述基板收納容器具有能對載置於前 ::加均勻之壓力以將前述疊層體壓在前述复以Ζ 件，緩面具有緩衝元 具有動之低頻成分的特性，前述容器 ^ ’第9之發明為-種輸送裝置，具有基板 。。 ，板收納體係將原基板收納體(具備第$持’ 板及隔著職體疊置複數之基板所構紅疊相，、 支持 被前述第i撇料2編_卿她彡^納= 7 1375643 n基減賴捕_托減可覆輯置於前 你之别遂原基板收納體的可裝卸蓋體所構成）中， 且右=器，放_於前述箱體内的基板收納體，於内部底面It describes that the gantry has the characteristic of absorbing the low-frequency component of the vibration, that is, preventing the deformation of the laminate caused by the low-frequency component which generates the vibration of the large amplitude, and the container has the characteristic of absorbing the high-frequency component of the vibration. That is, the energy of vibrating the bottom surface of the unit is converted into heat, so as to effectively block the high-frequency component from the invention. The fifth invention is a conveying device having a gantry and a container, and the gantry system will be plural. The laminated body formed by stacking the substrates is pressed and fixed, and the container is stored in the container, and has a spring mechanism on the inner top surface, and the frame is suspended by the spring mechanism to fix the frame. The device is characterized in that: the gantry has a low-frequency component that absorbs vibration, and the container has the characteristic of absorbing high-frequency components of vibration, and the slab has the characteristic of absorbing low-frequency components of vibration, that is, opening a large amplitude The deformation of the laminate caused by the low-frequency component of the vibration can prevent the 1575564 from being slow and high, that is, the bottom table is propagated. Converted to heat to effectively block high-frequency components to the aforementioned frame, the sixth invention is a transport device, and a plurality of substrates are stacked to form an i-stack "2 = storage, slow + composition" _ bottom system storage And the 兀 兀 刖 固定 固定 固定 固定 固定 固定 固定 固定 固定 固定 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The support table and the substrate storage body have a support surface on which the substrate in the plurality of layers can be placed in a horizontal state via a spacer, and the substrate is stacked side by side, and the substrate storage system stacks the laminate The substrate storage container that is housed in the substrate storage container has a pressure that can be uniformly applied before the loading: the laminated body is pressed against the ridge, and the buffer has a low frequency component of the moving element. Characteristic, the container of the invention is a type of conveying device having a substrate. . In the board storage system, the original substrate storage body (with the first holding board and the red stack of the substrate stacked on the other side of the body) is supported by the aforementioned i-th material 2 _ _ she 彡 ^ 纳 = 7 1375643 n-base reduction _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Inside the bottom
i缓itii，’且前述㈣於前述紐⑽絲㈣_定於前 且古rf基板㈣體具有吸收振動之低頻成分的特性，前述容器 具有吸收振動之高頻成分的特性。 ㈣奋益 八剛紐基板之4層體重4與輸送中的鋪，使用具有充 ^ ί*料基板收減，藉由可壓住整面基板之加壓體固定 =反之$層體，以抑制各基板之彎曲或基板疊層體變型，並防止 體縣，並且將基板收納於底面具緩衝 輸送中的振動區分為低頻(4 ΟΗζ以下)與高頻(4 〇〜1 〇〇Ηζ)成 ^ ’藉由將疊層體壓緊支持於具充分剛性之架台或高剛性支持二 =成基板收納體，可以吸收低頻的振動，而使容器底面具有^ 衝機能，可以吸收高頻振動，可社基板疊層體的推壓力不足時 由於分割振動造成各基板彼此之間或基板與間隔體間的碰 磨擦。 (發明之效果） 本發明之基板收納容器及基板收納體可以搭配多數大型玻璃 基板或其加工製品，同質地支持整面基板進行運送，基板不會偏 移，可以防止基板彼此磨擦或基板與間隔體的磨擦，能使運^效 率良好並且避免基板表面受傷或缺損等損害。又，藉由進一步設 ^衝擊吸收材，可以使耐衝擊性良好，並避免基板表面受傷或缺 損等損害。 又，藉由將疊層體載置於托板上，可以容易地用叉架起貨機 等搬運。再者，在托板上女裝可包圍載置於托板上疊層體之可裝 卸蓋體，使蓋體的頂板具有前述負荷支持板之作用，則蓋體可兼 1375643 負何支持板使用，不健使構造解，也可將疊層體以蓋體 復盍，防止污物、塵埃等附著在基板上。 —壯〜4 形成由第一把板與第一蓋體構成之外箱(收納由托板與 女裝於托板之蓋體所形成之内箱），則污物、塵埃不會附著於箱、 =納的内箱，將内箱搬入使用基板之工廠時，不會把污物、塵 买f入工廠内，可以維持工廠内的潔淨。 玻璃ίΪΐΐί送Ϊ置可以運送疊層體形式之多Μ型玻璃板、 板或其加工製品，並且#由將以推壓機構壓緊支持著的年 口或基板^納體收納於底面具有緩衝元件的容器，可吸收運送時 的低頻與高頻振動’避免基板表面產生受傷或缺損等損害。 【實施方式】 (實施發明之最佳形態） 以下參照附圖對本發明之較佳實施形態進行說明。 1每明之μ收納容器中收納基板疊層體所形成之第 貝施形態的基板收納體概略剖面圖，圖2為圖丨之基板收納體一 部分的概略立_，圖3為將基板4龍載托板之狀離 圖’圖4為於托板上載置基板疊層體之_的概略侧 =。 ，板收納體1係將多數基板疊層而成的疊層體5收納在基板 谷器（以下’僅稱收納容器）10内。以下，對各部分詳細說明。 工制ί實^態中，收納對象基板3為玻璃板、玻璃基板及其加 工製叩’為用於液晶•顯示裝置之漸慮片或薄膜電晶體 璃基板等。代表構造概略如圖5所示。 圖5中，基板3在玻璃板等之基板本體3a單面上具 声 3b(例如，為過濾片用基板，為具有黑色矩陣、著色晝 ^ 極等之層），且於機能層3b上形成用以防止保存、搬g受到損 ，護膜3。。該保護膜3c係使用容易形成且容易去除的材料製作， 韦使用水溶性樹脂(例如，聚乙烯醇）。膜厚約1〇〜2〇 忝，機旎層3b及保護膜3c係形成於基板本體3a上除周緣數 9 1375643 =t有區域。本說明書中’將機能層3b及機能層3b上形成 有保護膜3c的區域稱為有效區域。 ^板3a之大小不特別限定，可為寬18〇〇11^^長2〇〇〇mm左右 你it又’基板厚度亦沒有限制’多為0.3〜】.0臟左右。又， 收納片數較佳為1〜300片。 雔®^谷器1〇具有内箱(收納疊層體5)及外箱(收納該内箱），為 内箱具有托板11(由具有支持疊層體5之支持面lla的 f構成〕及蓋體12(裝在前述托板11上，包圍載置於托板11 上之疊層體5 ,可裝卸）。 S由之支持* 1U製作為較基板3面積為A，以使疊層體 H3可以與支持面11&呈平行的狀態被支持。蓋體12為 U5 了頁板12a(當裝在托板11時與支持面iia平行〕及4面側 板12b(與支持體Ua垂直）。 =了使蓋體12位於對應托板n之既定位置，在托板^頂面 ^触位置械有嵌合於蓋體12側板12b _的魏llb。又， 應托板11既定位置的方法不限定於使用突起 τι而ΪΓ之頂板仏如後述’其功能為支持氣囊15對疊層體5 力時反作用力的負荷支持板，蓋體12的構造具有可 ίΐΐϋΐ力的剛性。又，蓋體12與托板11之間係以具能承 強度的連結裝置連結。本實施形態中，為了使蓋 葚“π反1以所需的強度連結’使用了複數的彈簧鎖13。彈 觸開閉，故作業性良好且可承受的拉張力大。又， 托板11的賴裝置祕定於彈*鎖，也可使用 螺中自、螺栓、連結釘等任意物件。 支持面iia±設有高平面精度的補強板材7，疊層 ϊ iff :且，在ϊ層體5上設有高平面精度之補強板 捭14^、^置讀15。藉㈣基板3叫平__板材支 持或推壓’更可以防止基板3之損傷。 1375643 氣巧15之内部供給加壓空氣時會膨脹，且配置方式為頂面位 置受到蓋體12頂板(負荷支持板)12a限制，而對疊層體5之頂面 整個區域隔著補強板材9施_勻之推歷力。氣囊15與支持氣囊 15的頂板12a係由能對疊層體5整個頂面區域施加均勻之推壓力 將前述疊層體押在支持台上並固定的推壓機構構成。 又，於蓋體12裝在托板U的狀態下，氣囊15係連結於向蓋 體12外側延伸之空氣供給用f21，以對氣囊15内供給加壓空氣。The above-mentioned (4) is characterized in that the neon (10) filament (four) is pre-defined and the pale-rf substrate (four) body has a characteristic of absorbing vibration low-frequency components, and the container has a characteristic of absorbing high-frequency components of vibration. (4) The 4 layers of the 4th floor of the Fenyi Bagang New Board and the shop in the transport, using the substrate with the charge and the reduction, by the pressurizing body that can press the whole substrate = the opposite layer, to suppress The bending of each substrate or the substrate laminate is modified, and the body is prevented, and the vibration in which the substrate is stored in the buffer of the bottom mask is divided into a low frequency (4 ΟΗζ or less) and a high frequency (4 〇 〜 1 〇〇Ηζ) into ^ 'By pressing the laminate to a frame with sufficient rigidity or a high rigidity support for the two-to-substrate storage body, it is possible to absorb low-frequency vibrations, and the bottom surface of the container has a flushing function and can absorb high-frequency vibration. When the pressing force of the substrate laminate is insufficient, the friction between the substrates or between the substrate and the spacer is caused by the split vibration. (Effects of the Invention) The substrate storage container and the substrate storage body of the present invention can be matched with a large-sized glass substrate or a processed product thereof, and can support the entire substrate to be conveyed homogeneously, and the substrate can be prevented from being rubbed or the substrate can be prevented from rubbing each other or the substrate and the spacer. The friction of the body can make the operation efficient and avoid damage such as injury or defect on the surface of the substrate. Further, by further providing the impact absorbing material, the impact resistance can be improved, and damage such as damage or defects of the substrate surface can be avoided. Further, by placing the laminate on the pallet, it can be easily handled by a forklift or the like. Furthermore, the women's clothing on the pallet can surround the removable cover body of the laminated body placed on the pallet, so that the top plate of the cover body has the function of the above-mentioned load supporting plate, and the cover body can be used for 1372643 negative support board. If the structure is not solved, the laminate may be embossed with a cover to prevent dirt, dust, or the like from adhering to the substrate. - Zhuang ~ 4 Forms the outer box formed by the first board and the first cover body (the inner box formed by the cover plate and the cover body of the women's clothing plate), the dirt and dust will not adhere to the box When the inner box is moved into the factory where the substrate is used, the dirt and dust are not bought into the factory, and the cleanliness in the factory can be maintained. The glass Ϊ Ϊ Ϊ 可以 可以 可以 可以 可以 Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ The container can absorb low frequency and high frequency vibration during transportation to avoid damage such as injury or defect on the substrate surface. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. 1 is a schematic cross-sectional view of a substrate storage body of a first embodiment in which a substrate laminate is housed in a storage container, and FIG. 2 is a schematic view of a part of the substrate storage body of FIG. The shape of the pallet is shown in Fig. 4, which is a schematic side of the substrate laminate on which the pallet is placed. In the panel storage body 1, the laminate 5 in which a plurality of substrates are laminated is housed in a substrate groat (hereinafter referred to as a storage container) 10. Hereinafter, each part will be described in detail. In the manufacturing system, the storage target substrate 3 is a glass plate, a glass substrate, and a manufacturing process thereof, and is a retardation film for a liquid crystal display device or a thin film transistor substrate. The representative structure is schematically shown in Fig. 5. In Fig. 5, the substrate 3 has a sound 3b on one surface of a substrate body 3a such as a glass plate (for example, a substrate for a filter sheet, which is a layer having a black matrix, a coloring electrode, etc.), and is formed on the functional layer 3b. It is used to prevent storage and damage, and protect the film 3. . The protective film 3c is made of a material that is easily formed and easily removed, and a water-soluble resin (for example, polyvinyl alcohol) is used. The film thickness is about 1 〇 to 2 〇, and the casing layer 3b and the protective film 3c are formed on the substrate main body 3a except for the peripheral number 9 1375643 = t. In the present specification, a region in which the protective film 3c is formed on the functional layer 3b and the functional layer 3b is referred to as an effective region. ^ The size of the plate 3a is not particularly limited, and may be about 18 〇〇 11 ^ ^ long and 2 〇〇〇 mm or so. You also 'the thickness of the substrate is not limited' to be mostly 0.3~]. Further, the number of sheets to be stored is preferably from 1 to 300 sheets. The 雔 ^ ^ ^ 〇 〇 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ And a cover body 12 (mounted on the pallet 11 and surrounding the laminate 5 placed on the pallet 11 for detachable mounting). S is supported by *1U to form an area A of the substrate 3 so as to be laminated. The body H3 can be supported in a state parallel to the support surface 11& The cover 12 is U5, the sheet 12a (parallel to the support surface iia when mounted on the pallet 11), and the 4 side panel 12b (perpendicular to the support Ua) = The cover body 12 is located at a predetermined position of the corresponding pallet n, and the top surface of the pallet is attached to the linb of the side panel 12b_ of the cover body 12. Further, the method of setting the position of the pallet 11 The top plate of the use of the protrusions τι is not limited to a load supporting plate whose function is to support the reaction force of the airbag 15 against the laminated body 5, and the structure of the cover body 12 has a rigidity that can be exerted. 12 and the pallet 11 are connected by a coupling device having a bearing strength. In the present embodiment, in order to make the lid "π inverse 1 with the required strength" The plurality of spring locks 13 are elastically opened and closed, so that the workability is good and the tensile force that can be withstand is large. Moreover, the device of the pallet 11 is secreted in the bomb * lock, and the screw, the bolt, the connecting nail, etc. can also be used. Any object. Support surface iia± with high plane precision reinforcing plate 7, laminated ϊ iff : and, on the ϊ layer body 5 is provided with a high plane precision reinforced plate 捭 14 ^, ^ read 15. By (four) substrate 3 called flat __ plate support or push 'can prevent the damage of the substrate 3. 1375643 ventilating 15 will expand when supplied with pressurized air, and the configuration is the top position is subject to the top plate of the cover 12 (load support plate) 12a is limited, and the entire area of the top surface of the laminated body 5 is urged by the reinforcing plate 9. The top plate 12a of the air bag 15 and the supporting air bag 15 is uniformly applied to the entire top surface area of the laminated body 5. The pressing force is formed by pressing the laminate on the support table and fixing it. Further, in a state where the lid body 12 is attached to the pallet U, the airbag 15 is coupled to the air supply extending to the outside of the lid body 12. With f21, pressurized air is supplied to the inside of the air bag 15.
配置於層體5上下之補強板材7、9其設計為可以極為平坦 狀態下支持或減疊層體5之基板。補驗材7、9係制平面精 度良好的輕質板材，具體而言’較佳為使科巢板或以發泡 内層FRP板為外層的疊層板。補強板材7、9面積與基板3相 更大，以支持或推壓疊層體5整面。補強板材7、9之平面精度較 佳為表面粗縫度lOOymRj·左右以下，平面度較 ^ 半徑700m左古以卜。 々取J萌半 收納由托板11及蓋體12所構成内箱之外箱由第二之托板17 與I裝卸的蓋體19形成。蓋體19和内箱之蓋體12為同樣形狀， 以彈ΐ鎖13連結於托板17且可裝卸。又，外箱的托板口上設有 將内箱的托板11固定於既定位置的裝置(圖省略）。 ^將基板3多片疊置構成疊層體5時，較佳為於各基板3間夾 者間隔體4以保護各基板的機能層3b、保護膜3c。夾入間隔體* ^態不特舰定，只要能使間隔體4位於覆蓋基板3有效區域 、=置即可，較佳形態為如圖6所示，將較基板3長的間隔體A' 兩為^己置於較基板3往外延伸的狀態，或者，如圖7所示，將折 成2半約和基板3同長的間隔體4B與以折成2半的狀態爽在美板 ^之間。圖6之形態由於間隔體4A的端部向基板3外側延伸, =離間隔體時只要抓取其延伸部分即可，使用抓取間隔體的 二以簡單地將間隔體確實地抓住。又，圖7之形態中，由於間p 折成2半，故即使輸送中基板3之保護膜3c(參照圖 而黏著於與其相接的間隔體片4Ba，上述的片4Bb也不會黏著广 1375643 藉由加入在剝^間隔體犯時可以用吸附塾容易地將上侧的片伽 ί附固定气提以將單片間隔體確實剝離的裝置(例如，捏夾滚 輪）’以將間隔體4從基板上確實的剝離。 間隔體4所使用的材料只要可保護基板 ^月旨片等。間隔體4之較储料為具錢泡 = 氏 沒有通氣性，可以防止The reinforcing sheets 7, 9 disposed above and below the layer body 5 are designed to support or reduce the substrate of the laminate 5 in an extremely flat state. The lightweight material of the surface of the inspection material 7 and 9 is excellent in planar precision. Specifically, it is preferable to use a base plate or a laminated plate having a foamed inner layer FRP plate as an outer layer. The area of the reinforcing sheets 7, 9 is larger than that of the substrate 3 to support or push the entire surface of the laminate 5. The plane accuracy of the reinforcing plates 7 and 9 is preferably about 100 μm of the surface roughness of lOOymRj·, and the flatness is lower than the radius of 700 m. The J inner half is housed by a cover 19 which is formed by the pallet 11 and the lid 12 and is housed and removed by the second pallet 17 and I. The lid body 19 and the lid body 12 of the inner box have the same shape, and are coupled to the pallet 17 by the magazine lock 13 and are detachable. Further, a means for fixing the pallet 11 of the inner box to a predetermined position is provided on the tray opening of the outer box (not shown). When a plurality of substrates 3 are stacked to form the laminate 5, it is preferable to sandwich the spacers 4 between the substrates 3 to protect the functional layer 3b and the protective film 3c of the respective substrates. If the spacer 4 is placed in the effective area of the cover substrate 3, the spacer 4 can be placed. Preferably, the spacer A is longer than the substrate 3 as shown in FIG. The two are placed in a state of extending outward from the substrate 3, or, as shown in FIG. 7, the spacer 4B which is folded into two halves and the length of the substrate 3 is folded in a state of two and a half. between. In the embodiment of Fig. 6, since the end portion of the spacer 4A extends toward the outside of the substrate 3, it is only necessary to grasp the extending portion when the spacer is separated from the spacer, and the spacer is used to simply grasp the spacer. Further, in the embodiment of Fig. 7, since the intermediate p is folded into two halves, even if the protective film 3c of the intermediate substrate 3 is transported (the spacer sheet 4Ba which is in contact therewith as shown in the drawing, the above-mentioned sheet 4Bb does not adhere to the wide area. 1375643 by adding a device (for example, a pinch roller) that can easily peel off the upper piece of the sheet by an adsorption 塾 when the detachment is made, to remove the spacer 4Removal from the substrate. The material used for the spacer 4 can protect the substrate, etc. The storage material of the spacer 4 is blister = no ventilation, and can be prevented.
Pj 4的居度選擇0.25~lmm左右為佳，其原因為如果太薄 保護效果不彰，但是若太厚成本會升高且佔空間。 、 其次，說明將疊層體5收納於收納容器1〇的方法。如圖3、 板U上載置補強板材7 ’再於補強板材7上交錯 =叠基板3及間隔體，以形成疊層體5。或者，也可分別形成疊只曰 在體5載置於托板11上。於托板上載體疊層體5後曰’ 在疊層體5上載置補強板材9及氣囊ls，再蓋上蓋 固定於托板n。之後，將與氣囊15連結之线供給用管將2= ，結壓縮器等加壓空氣供給裝置(未圖示），對氣囊15供給加壓空 氣。藉此，氣囊15會膨脹並隔著補強板材9推壓在疊声 將疊層體5壓住托板11並固定。 日 ’ 對氣囊I5產生的推壓力可藉由調整對氣囊ls提供的 所欲之值。又，如果疊層體5的高度不足且氣囊15不能 ϋ 5-施予推壓力時，只要在補強板材9與氣囊15之間插入 適虽的間隔物即可。 對氣囊15供給所欲壓力的加壓空氣後，將閥23關閉， 加壓空氣供給裝置。之後，整個收納於由第二之托板17與蓋體17 所形成的外箱内，以此狀態搬運到所欲的場所或者保管^運 保管時由於氣囊15可以維持封鎖加壓空氣的狀態，故&舍 持續以同等推屢力施加於4層體5頂面，使基板3不會偏^產生 12 1375643 損害。 又，將基板收納於收納容器10時，係以托板u呈水平狀能， 基板呈水平狀態的形式疊置，但是在搬運所形成的基板收納^ 時，托板11不限定要保持水平狀態，如有需要，可以將托板^ 傾斜或者垂直豎立。此情形中，可對基板3整面賦予均勾 住’故基板3不會移動，可在稿傷基板3的狀態下 安全地搬運。 拿2箱的蓋體19,取出收納於其中的内箱(托 板η盍體12等），並搬入所欲的場所。由於内箱被外箱覆苗， 物1塵埃不會附著，即使將内箱搬人使用基板之1薇内ί要 ，淨度的，所也不會有問題。其次，釋放氣囊15的空氣後從 托板11>取出蓋體12，並取出氣囊5、補強板材9後，從疊層體$ 頂面側父錯取出基板3、間隔體4即可。 如上，由於基板3係以水平狀態被載置且氣囊15對疊 =頂:㈣之推壓力，故即使基板面積大或者收納 Γ夕=損害。又，由於氣囊15對基板整面施加ΐ i叙丨L故即使早位面積的推壓力小也可將基板限制為不能 也可以防止基板受職傷。而且，藉由調整對氣囊供 、-，。的空氣壓可以容易地調整推壓力。 句之構之構成係對疊層體整個頂面區域施加均 域，即ίί整固:域域」並不嚴格限定為整個頂面區 基板不此移動即可，具體而言，為整個頂面區域的8〇^ 鮮^ ^ 5形態中I ^^之固定僅利用到配置於 且屬體5頂面的讀15所生的推壓力，但是，如 ===，蓋體12侧板⑽之間配置適當的緩衝材。 圖表不此情形的貫施形態中的基板收納體31，於該實施形態 13 1375643 中，於疊層體5之側面與蓋體12的側板⑶之_入有作 材:$ 33 ’並封入加壓空氣以拘束疊層體5的側面 = 以更確實地防止搬運中基板3偏移。 战了 _ ΐ ΐ第態中使用氣囊15作為對疊層體5頂面賦予同 質推壓力的推壓機構，但也可為其他構造。 “圖9為使用其他構造之推壓機構的基板收納體41。於 形態中’於托板上11載置的疊層體5與蓋體12的頂板仏之間， ^壓縮狀態配置有橡膠、_、樹脂發泡體等所形成的彈性板材 。也就是說，彈性板材43於未魏驗態、其厚度較 補強板材9的間隔還厚，藉由將彈性板材43載置於才^上與 ，於彈性紐43上壓合蓋體Π之施Ua，制適#推壓機構將 =體12往托板11壓住’以將蓋體12連結於托板u，會使頂板 ^對彈性板材43加壓並彈性變形，藉此，彈性變形的彈性 43可對疊層體5的整個頂面區域施加均勻之推壓力。 上述實施形態中任-者中，蓋體12之頂板t2a皆作 =的負荷支持板，但是域«15或彈性板材 43的負何支持板不一定要是蓋板12之頂板12a的形態，可使 用平板狀的支持板，並將該貞荷支持板以連結祕 、 平板等連結於托板11。 其-人，5兒明本發明第2實施形態的基板收納體。 圖上0為本發明第2實施形態之基板收納！| 51的前視圖中 近側的蓋體侧定未晝出），基板收納體包裝體53進一步收納於雙層 的箱體中。圖11係使用圖10的支持板的平面圖。' ' 基板收納體51中’與基板收納體j的構成元件相同者標記同 一編號’並省略詳細說明。 #本發明之基板收納體51為由包裝體53(壓緊支持疊層體幻及 =箱(收納包，體53)與外箱(收納該内箱)的雙層構造形成曰。内箱具 有托板1及蓋體I2 ’該托板j由具有支持包裝體S3之支持面lla 的支持台構成’蓋體12以包圍載置於托板u上的疊層體5的方’ 14 1375643 式裝在前述托板11上且為可震卸。 如圖10所示，包裝體53的構造為將基板3的疊層體载置於 ，板57上，再於疊層體5上再載置支持板55 ,以帶子59 壓機構環繞支持板55與支持板57的外周圍，將帶子59拉緊二 力:壓至岐的壓力’使支持板壓在疊層體上蚊。g 入彈育為佳’可用橡皮帶製作。使用橡皮帶，不會發生運 运日守疊層體厚度減少造成的鬆弛。 ，田11所示’支持板55、57為四角形板狀’較佳為事先於 設有溝槽部56。溝槽部56可以防止帶子59偏移， 細板55、57由於要不歪斜的推壓在基板整面頂面，故以蠻 者=’且若考慮操作性，嚇者為佳，例如可使用 蜂巢板、二夾板。又，支持板難為大於基板。 此接Ϊ基ίϋϊΐ支持板57形成疊層體5時，為了避免基板彼 42衝3間會夾入作為間隔體4之紙，脂膜或 泡聚，或發泡聚氨基甲酸醋構成的海綿片材。 ' 卿 左右之收納片數較佳為1〜湖片左右，尤其以〜200片 ，子59具有束緊部可以固幻未晝出）。 任一 時可為橫堆疊(基板橫躺)或直堆疊(基板賢立) 與基iLi ^t子59作為推壓機構使支持體55、57 搬運時，較佳橫堆疊進行。以直放方式 疊不^的支持板壓力較適麵在橫堆疊與直堆 以由料本身重量所_力可以較小， 如為直堆疊時較佳為100〜500g/cm2，更佳 15 1375643 為 300〜500以〇112。 53固將定=鬚吻，仙峨構峨)將包裝體 第2實施形態中說明了將包裝體53收納於雙層 純將包裝體53收納於箱體’也可以收縮膜等膜覆蓋後:進 如上所述’依照第2實施形態，可藉由帶子59壓 =搬送’故搬運效率良紅可以避免基板表面損傷或缺損夺g 口 前述第2實施形態中，包裝體53的壓緊支持機構 59 ’但使用其他壓緊支持機構也可以。圖12、13、n ' γ 用壓緊支持機構的包裝體61、包裝體71。 ^顯不使 以下說明包裝體61。 圖12及圖13說明包裝體61，圖12為包裝體61 闽 圖B為圖Π所錢支持板63的平關。包^體61 見圖辦 53的構成το件具有相同機能者標記相同號 田、^、明 如圖12所示，包裝體61的構造為將疊層體5載^^: ίΐ定板63 ’之後’將作為推壓機構 之口疋累巾目穿過支持板63、65的端部，將螺帽67盘 56底部的概66嵌合’藉轉動頂㈣目至、反 以將支持板63推壓固定於疊層體5。、[至既疋的[力’ 如圖13所示，支持板63、65為四 _ , 65的四個角具有穿過.的孔69。’ 7彳’於支持板63、 歷在===以佳=芯=推 面同^地支的位置’可在能對基板整 16 1375643 包裝體61與包裝體53同樣，在運送時可為横堆疊(基板橫躺) 或直堆疊(基板豎立)任一種方式，但是在形成包裝體61時，也就 疋以支持板63、65夾住基板的疊層體5，以螺栓67作為推壓機構 使支持體63、65與基板疊層體5 —體化的步驟較佳為以橫堆疊進 行。以直放方式搬運時，較佳為先以橫堆疊形成包裝體61後再直 立運送。 推壓機構螺栓67產生的支持板壓力較適範圍在橫堆疊與直堆 疊不同，如果為橫堆疊時，由於有本身重量所以壓力可以較小， 以30〜l〇〇g/Cm2為佳，如為直堆疊時較佳為100〜500g/cm2，更佳 為 300〜500#〇112。 如上所述，依照第2實施形態，可藉由螺栓67壓緊支持疊層 體並搬送，故搬運效率良好且可以避免基板表面損傷或缺損^傷曰 害0 以下說明包裝體71。 圖14及圖15說明包裝體71，圖14為包裝體71的前視圖， 圖15為圖14所使用支持板73的平面圖。包裝體71中與包裝體 53的構成元件具有相同機能者標記相同號碼，並省略詳細的說明。 包裝體71的構造為將疊層體5載置於支持板75上，再於疊 f體5上載置支持板73，之後，於支持板的端部設置複數個「〕Pj 4's occupancy is about 0.25~lmm, which is because if it is too thin, the protection effect is not good, but if it is too thick, the cost will increase and take up space. Next, a method of accommodating the laminate 5 in the storage container 1A will be described. As shown in Fig. 3, the plate U is placed on the reinforcing plate 7' and the reinforcing plate 7 is staggered with the laminated substrate 3 and the spacer to form the laminated body 5. Alternatively, it is also possible to form a stack 曰 on the body 5 on the pallet 11 respectively. After the carrier laminate 5 is placed on the pallet, the reinforcing plate 9 and the airbag ls are placed on the laminate 5, and the cover is fixed to the pallet n. Then, the line supply pipe connected to the airbag 15 is supplied with pressurized air to the airbag 15 by a pressurized air supply device (not shown) such as a 2=, knot compressor. Thereby, the airbag 15 is inflated and pressed against the reinforcing plate 9 to superimpose the laminated body 5 against the pallet 11 and fixed. The pressing force generated on the airbag I5 by the day can be adjusted by adjusting the desired value to the airbag ls. Further, if the height of the laminate 5 is insufficient and the airbag 15 is not capable of applying a pressing force, it is sufficient to insert a suitable spacer between the reinforcing plate 9 and the airbag 15. After the pressurized air of the desired pressure is supplied to the airbag 15, the valve 23 is closed to pressurize the air supply means. After that, the entire container is housed in the outer casing formed by the second pallet 17 and the lid body 17, and is transported to a desired place in this state, or the airbag 15 can maintain the state in which the pressurized air is blocked. Therefore, the & caster continues to apply the same force to the top surface of the 4-layer body 5, so that the substrate 3 does not cause 12 1375643 damage. Further, when the substrate is stored in the storage container 10, the tray u is horizontally disposed, and the substrate is stacked in a horizontal state. However, when the substrate is formed by the conveyance, the tray 11 is not limited to be horizontal. If necessary, the pallet can be tilted or vertically erected. In this case, the entire surface of the substrate 3 can be hooked. Therefore, the substrate 3 does not move, and can be safely transported in the state in which the substrate 3 is wound. Take two boxes of the lid 19, take out the inner box (the tray n body 12, etc.) stored therein, and carry it into a desired place. Since the inner box is covered with the outer box, the dust of the object 1 will not adhere, and even if the inner box is moved to use the substrate, the netness is not problematic. Next, after the air of the airbag 15 is released, the cover 12 is taken out from the pallet 11 and the airbag 5 and the reinforcing plate 9 are taken out, and then the substrate 3 and the spacer 4 are taken out from the top surface side of the laminate. As described above, since the substrate 3 is placed in a horizontal state and the airbag 15 is pressed against the top: (4), even if the substrate area is large or stored, it is damaged. Further, since the airbag 15 applies the entire surface of the substrate, even if the pressing force of the early area is small, the substrate can be restricted to be incapable of preventing the substrate from being injured. Moreover, by adjusting the supply of airbags, -. The air pressure can easily adjust the pressing force. The composition of the sentence is to apply a uniformity to the entire top surface area of the laminate, that is, the ίί consolidation: domain domain is not strictly limited to the entire top surface area substrate, and specifically, the entire top surface area In the form of 8 〇 ^ fresh ^ ^ 5, the fixing of I ^ ^ only uses the pressing force of the reading 15 arranged on the top surface of the genus 5, but, if ===, between the side plates (10) of the cover 12 Configure the appropriate cushioning material. In the embodiment, in the embodiment 13 1375643, the side surface of the laminated body 5 and the side plate (3) of the lid body 12 are provided with a material: $33' and sealed. The air is pressed to restrain the side surface of the laminate 5 to more reliably prevent the substrate 3 from being displaced during transportation. In the first state, the airbag 15 is used as the pressing mechanism for imparting the homogenous pressing force to the top surface of the laminated body 5. However, other structures may be employed. Fig. 9 is a substrate storage body 41 using a pressing mechanism of another structure. In the embodiment, between the laminated body 5 placed on the pallet 11 and the top plate 盖 of the lid body 12, rubber is placed in a compressed state. _, a resin foam or the like formed of an elastic sheet. That is to say, the elastic sheet 43 is in an un-verified state, and its thickness is thicker than that of the reinforcing sheet 9 by placing the elastic sheet 43 on the board. Applying Ua on the elastic button 43 to press the cover body, and pressing the pressing mechanism to press the body 12 against the pallet 11 to connect the cover 12 to the pallet u, so that the top plate can be elastically plated. 43 is pressed and elastically deformed, whereby the elastically deformable elastic 43 can apply a uniform pressing force to the entire top surface area of the laminated body 5. In any of the above embodiments, the top plate t2a of the cover 12 is made = The load support plate, but the support plate of the field «15 or the elastic plate 43 does not have to be in the form of the top plate 12a of the cover plate 12, and a flat support plate can be used, and the load support plate can be connected to the secret plate. The substrate 11 is connected to the pallet 11. The substrate storage body according to the second embodiment of the present invention is shown in FIG. In the front view of the substrate storage unit||51 of the second embodiment of the present invention, the cover body side of the proximal side is not folded, and the substrate storage body package 53 is further housed in a double-layered case. FIG. In the substrate storage body 51, the same components as those of the substrate storage body j are denoted by the same reference numerals, and the detailed description thereof will be omitted. # The substrate storage body 51 of the present invention is supported by the package 53 (compacting) The double layer structure of the laminated body and the box (the storage bag, the body 53) and the outer box (accommodating the inner box) form a weir. The inner box has the pallet 1 and the lid I2 'the pallet j has the supporting package The support table of the support surface 11a of S3 constitutes a 'cover 12 to surround the laminated body 5 placed on the pallet u'. The type 1 1 375643 is mounted on the pallet 11 and is detachable. The package body 53 is configured to mount the laminate of the substrate 3 on the plate 57, and then mount the support plate 55 on the laminate 5, and surround the support plate 55 and the support plate 57 with a belt 59 pressing mechanism. The outer circumference of the belt, the belt 59 is tightened by two forces: pressing to the pressure of the crucible 'presses the support plate against the laminate on the mosquito. g into the bullet is better' It can be made with a rubber band. Without the rubber band, there will be no slack caused by the reduction of the thickness of the laminate in the transportation day. The 'support plate 55, 57 is a quadrangular plate shape' as shown in the field 11 is preferably provided with a groove in advance. The portion 56 can prevent the belt 59 from shifting, and the thin plates 55 and 57 are pushed on the top surface of the entire surface of the substrate without being skewed, so it is preferable to use the singularity of the singularity. For example, a honeycomb plate or a two-ply plate can be used. Further, the support plate is harder than the substrate. When the support plate 57 is formed into the laminate 5, the paper as the spacer 4 is sandwiched between the substrates 42 and 3, A lipid film or a foamed sheet, or a foamed sheet of foamed polyurethane. The number of storage pieces of the left and right sides is preferably 1 to about a lake piece, especially to ~200 pieces, and the sub-59 has a tightening portion that can be unfolded. At any time, it is preferable to carry out horizontal stacking when the horizontal stack (substrate lying) or the straight stack (substrate) and the base iLi^t 59 as the pressing mechanism for transporting the supports 55 and 57. The pressure of the support plate stacked in a straight-through manner is relatively small in the horizontal stack and the straight stack to be smaller by the weight of the material itself, preferably 100 to 500 g/cm 2 for straight stacking, more preferably 15 1375643 For 300~500 to 〇112. In the second embodiment, the package body 53 is housed in a double layer, and the package 53 is housed in a case, or a film such as a shrink film may be covered: As described above, according to the second embodiment, the belt 59 can be pressed and conveyed, so that the conveyance efficiency is good, and the surface of the substrate can be prevented from being damaged or damaged. In the second embodiment, the pressing support mechanism of the package 53 is provided. 59 'But it is also possible to use other compression support mechanisms. 12, 13, and n' γ are used to press the package 61 and the package 71 of the support mechanism. ^Improvement The package 61 will be described below. 12 and 13 illustrate the package body 61, and Fig. 12 shows the package body 61. Fig. B is a close-up of the money support plate 63 of Fig. The structure of the package body 61 is shown in Fig. 53. The member having the same function is marked with the same number, the field is shown in Fig. 12, and the package body 61 is constructed such that the laminate body 5 is loaded with a plate 63'. After that, the end of the support plate 63, 65 is passed through the mouth of the pressing mechanism, and the bottom 66 of the nut 67 of the nut 67 is fitted by the rotating top (four) to the support plate 63. Pressed and fixed to the laminate 5. [To force [to force] As shown in Fig. 13, the support plates 63, 65 are four _, and the four corners of the 65 have holes 69 that pass through. '7彳' is in the support plate 63, and the position where the === 佳 = core = push surface is the same as the ground support ' can be used for the substrate 16 1375643 package 61 is the same as package 53 and can be horizontal when transported Stacking (substrate lying) or straight stacking (substrate standing), but when forming the package 61, the laminated body 5 of the substrate is sandwiched by the supporting plates 63, 65, and the bolt 67 is used as a pressing mechanism. The step of integrating the support bodies 63, 65 with the substrate laminate 5 is preferably carried out in a horizontal stack. When transporting in a straight-line manner, it is preferable to form the package body 61 in a horizontally stacked manner and then transport it vertically. The pressure of the support plate generated by the pushing mechanism bolt 67 is different in the horizontal stack and the straight stack. If it is a horizontal stack, the pressure can be small due to its own weight, preferably 30~l〇〇g/cm2, such as For straight stacking, it is preferably 100 to 500 g/cm 2 , more preferably 300 to 500 #〇 112. As described above, according to the second embodiment, the support laminate can be pressed and supported by the bolts 67. Therefore, the conveyance efficiency is good and the surface of the substrate can be prevented from being damaged or damaged. The package 71 will be described below. 14 and 15 illustrate the package body 71, Fig. 14 is a front view of the package body 71, and Fig. 15 is a plan view of the support plate 73 used in Fig. 14. The components of the package 71 that have the same functions as those of the package body 53 are denoted by the same reference numerals, and detailed description thereof will be omitted. The package body 71 is configured such that the laminate 5 is placed on the support plate 75, and the support plate 73 is placed on the stack body 5. Thereafter, a plurality of "] are placed at the ends of the support plate.
字形的夾甜77，以夾钳77將支持板73推壓於疊層體5，並 至既定的壓力固定。 1 如圖15所示，支持板73、75為四角形板狀，較佳為在安$ 夾钳77的位置預先埋入金屬進行補強(金屬部79)，以形成凹 針73、75與支持板55、57囉，由於要不偏不倚& I在基板整面頂面，故以彎曲剛性高者為佳，且若考慮操 為佳，例如可使用蜂巢板、三夾板。又，“板她 =钳77的配置不限定於圖14、圖15所示的位置，可 基板整面同質地支持並搬運的位置設置複數個。 17 丄j/5643 包裝體71與包裝體53同樣，在 ，堆疊(基板豎立)任-種方式，但是在 =支持板73、75夾住基板的疊層體5 H 3壓= 使支持體73、75與基板疊層體5 一體 =直放方式搬運時’較佳為先以橫物“;:ί =顧構輪77產生的域板壓力㈣在橫堆疊盘 豐不同’如果，橫堆疊時，由於有本身重 較、 ^(MOOgW為佳，如為直堆疊時較佳為1〇〇〜 車义上 為 300〜500g/cm2。 又1土 如上所述，依照第2實施形態，可藉由夾钳π壓緊支持疊声 |並搬送，錄運效率良好且可叫免基絲賴傷或缺損等傷曰 第2實施形態之包裝體53較佳為與圖16〜】9所示的衝擊吸收 材組合。如® 16〜19所示的狀態，包裂體53可以收納於前述雙層 構造的箱子或其他雜的箱子，或是以㈣财前蓋後運送。θ 圖16、17說明本發明第2實施形態之包裝體53與衝擊吸收 材組合成的包裝體81。圖16為前視圖(近側的衝擊吸收材未書 出）’圖17為圖16之Α-Α剖面圖。圖18為包裝體91的前視圖(近 •侧的衝擊吸收材未畫出），圖19為圖18所示包裝體91之Β-Β剖 面圖。與前述說明的構成元件機能相同者標記同一編號，並省略 詳細的說明。 包裝體81如圖16所示，在橫堆疊的包裝體53底部、上部及 側部配置有衝擊吸收材。包裝體53的底部配置有衝擊吸收材82， 在包裝體53的上部設有衝擊吸收材83。衝擊吸收材83、83為四 角形狀’較包裝體53的支持板大。 側部的衝擊吸收材係於疊層體5的基板端部設置衝擊吸收材 87、89，並於衝擊吸收材87、89的外側設置衝擊吸收材85。衝擊 吸收材87與外側的衝擊吸收材85可為一體成形。 18 1375643 成凹別岐，如果能符合找體的形狀形 邱;5 μ對於防止運购的橫向偏移是有效的。又，將底部、側 =的衝:?收材82、83、85組合成形為箱狀也為丄: 實施落不特別限定，較佳為對本發明之包裝體 擊力降Itr擊外部衝擊力腦時，具有將疊層體的衝 ㈣it G下左右之緩衝性’發泡聚丙稀為適用的。又’衝擊 二=佳Γ。、87、89的材質與衝擊吸收材82同樣，以發泡聚 此處係綱於包裝體Μ整個表面配置衝擊吸收材之例，但也 ϋ?使祕料衝擊魏材82，可㈣當地轉衝擊吸收材的 卜邱L裝，體91如圖18所示’係在縱向堆疊的包裝體53的底部、 92 = f==擊吸_。包賴53的底雜置有衝擊吸收材 Q9 裝體53的上部設有衝擊吸收材94、95。衝擊吸收材 為四角形狀，較包裝體53的底部務大。又衝擊吸收材92 ，、衝輕收材93、衝擊吸收材94與衝擊吸收材95可以一體成形。 ㈣側ί的衝擊吸收材97，並在衝擊吸收材97與包裝 體/中且層體的基板端部之間設置衝擊吸收材99。 ㈣Ζ吸收材的形狀不_限定，如果㈣合包裝體的形成成 〈’、' ，則可以有效防止運送時橫向偏移。又，如果整體為箱 形，可以提高運送時的作業性。 發』、93、94、95、97、99的材質與前述同樣’以 此處係說明於包裝體53整個表面配置衝擊吸收材之例，但也 =只使用底部的衝擊吸收材82，可以適當地選擇衝擊吸 配置。 如上，藉由將疊層體推壓於支持板製作為包裝體，可以支持 ，面基板進行運送，且於底部設置衝擊吸收材，可以吸收輸送時 的振動，再者，於包裝體的基板端部設置衝擊吸收材，可保護基 19 1375643 巧f部:，整體以衝擊吸收材包圍，可以緩和外部的衝擊，使運 送效率變高，防止運送時基板偏移，並避免基板表面受傷或缺損。 以下，說明本發明第3實施形態的基板輸送裝置。 、、 如炎說明本發明第3實施形態的基板輸送裴置HU，圖 乂為基―板輸送襄置101的立體圖，圖21為圖2〇之基板輪送裝置 〇1的谷态103的立體圖，圖22為圖21之容器底面U1的平面 圖23為圖20之基板輸送裝置101中架台105的立體圖。 基板輸送襞置1〇1如圖2〇所示，係於圖21所示容器1〇3内 收納作為基板收納體的圖23所示架台1〇5所形成。° 圖20之基板輸送裝置1〇ι的容器為箱狀，被底部元件 ^則固面面托板119、頂板115及門m包圍，於底面 固疋δ又置有緩衝元件1〇9。 底部7L件為高剛性的材質，較佳為將鋼材或金屬製角管成形 =狀如iff型為面狀，具有又架起貨機等作業時有用形狀的 Μ。 ^面巧板113、背面托板119、頂板115及門117的材質不 、別限疋，較佳為使用於鋁框上固定樹脂製瓦愣紙板形成的面 —，也可使用於侧面托板113、背面托板119、頂板115及門Η? ，成形之發泡料烯等發泡樹脂成形品兩面接著純形成之三 夹板。 π制^兀件如圖22所示’可以作成塊狀設於數個位置，也 2 °緩衝元件1〇9較佳為使用油壓減震器或黏彈性橡 胗#黏彈性體。 保存容H 1〇3之架台1〇5係裝載基板3，且由 成，具有足夠剛性。 ，圖23户斤示’架台105具有底部元件123、g立於底部元件 的背面7L件125，底部123與背面元件125係以溶接固定。 ί 21牛尺與背面元们25各為在四角形框上有複數支柱的形 於“：卩元件125具有對叉架起貨機等作業有用的形狀的腳部。 ;-元件123上具有與背面元件125相對的加壓體〇背面元 20 1375643 件125與加壓體127夾住並支持疊層體5。此時，背面元件125 與底部元件123為垂直設置。 架台本體上裝有複數片基板3 ’並且連接基板3之端部設有包 圍元件131。包圍元件131連結於背面元件125及加壓體127。包 圍元件131迴避基板3的角部設置。包圍元件131為四角形框。 底部元件123及包圍元件131與基板3端部連接的面較佳為 設置橡膠(未晝出）。藉此，可以吸收輸送時的衝擊或基板3的不整 齊。前述橡膠厚度較佳為3〜lOmm，硬度較佳為3〇〜70HS。 背面元件125及加壓體127的基板3支持面上各配置有蜂巢 板131、135。由於將基板3夾在不易彎曲的面很重要，蜂巢板不 ^發生4丑轉或奇曲，可以支持整面基板3，防止對一部分特別加 壓。蜂巢板的厚度不特別限定，較佳為5〇mm以下。 基板輸送用架台105中，加壓體127係由複數的螺釘137及 正面兀件139構成。螺釘137被固定於底部元件123或包圍元件 1 λ 1 〇 於架台本魏置蜂巢板133，並裝載複數片基板3，之後，配 置蜂巢板135、加壓體137及包圍元件131後，藉由將複數的螺釘 广-起旋轉’使正面元件139往背面元件125的方向移動，對基 ϋίΪΐί，釘數目或配置不特別限$，但設計為能對基板3 整面同質地施壓。 =板It壓支持時的面壓較佳為5_m2以下，尤其以 口要= 背面元件125、正面元件139、包圍元件131 用ί即可，其材質不特別限定，由強度及重量的 佳。本ΐ二i使2之，材或金屬製角管形成框狀者較 者，使用面狀=。件，但也可以在框之間設有薄板，或 基板3的大小不特別限定，各邊長廋較佳為 基板厚不限定，以^ 〜2.5m。又， i.Omm左右為多。收納片數以2〇〇〜5〇〇片 21 1375643 左右較適。當將基板3裝載於架台本體時，為卞避免基板3彼此 接觸，較佳為於鄰接的基板3之間使用由紙、樹脂膜、海綿片等 構成的間隔體4以製作為疊層體。 基板輸送裝置101係於容器103的緩衝元件1〇9上存放基板 收納體架台1G5。係於緩衝元件上固定板(未畫出），並將架 台105放在固定的銘板上。將架台1〇5的底部元件123以可自由 取下的固定元件夾鉗等固定。又，架台1〇5僅在底部部分 侧部等沒有固定。 如上所述，依照本實施形態，使用複數螺釘137將蜂巢板135 ，住基板3,將支持基板之架台1G5放人底面ln上固定有緩衝元 ϊ、109 2Γ〇3 ’並將底部元件123部分固定於緩衝元件1〇9 運达’則木台可吸收振動的低頻成分，容器1〇3之緩衝元9 成分’故可以對抗各種輸送中的衝擊，避免基 以下，說明本發明第4實施形態之基板輸送装置141。 U7 f佥2^本4實施形態之基板輸送裝置141的前視圖(門 裝置141係由將第1實施形態中說明的架 口 105收納於容器149中所構成。 几π π永 々η 送裝置141中與基板輸送裝置101構成元件相同者把 口己同一編戒，並省略詳細說明。 不 牲m49中，頂板115設有複數個可吊住架台收之彈笼支 、兀牛43’於側面托板113的内側設有約呈 二 1〇5側面設有引導裝置L &十的軌道’於架台 妝的為高剛性材f，具有又架起貨機等作孝有用來 狀的腳和側面部113、背面托板119、頂板115及Τ ?有祕 不特別限定’但必需具有能將架台1〇5 的材質 構。 貝板U5之咼剛性架 基板輸送裝置H1係將架台1()5书在容器⑽内設有的支持 22 1375643 元件143，並將設於架台之引導裝置147導入軌道145存放。 如上所述’依照第4實施形態，使用複數螺釘137將蜂巢板 135~壓住基板3,將支持基板3之高剛性架台ι〇5用容器149中為 彈簧構造的支持元件143從頂部吊下存放並搬運，則架台可吸收 振動的低頻成分，容器149之彈簧構造支持元件丨43可吸收振動 的高頻成分，可以對抗各種運送中的衝擊，避免基板表面受傷或 缺損。 以下，說明本發明第5實施形態之基板輸送裝置151。 圖25為本發明第5實施形態之基板輸送裝f 151社體圖。 圖26為圖25之基板輸送裝置151的剖面圖。 基板輸送裝置之構成為，於底部153上隔著緩衝元件155設 置^台蚊几件I57構成的底部’在作為岐機構之突部⑼内 侧載置架台105，並以箱狀的蓋子159蓋住。 底部153及架台固定元件157為高剛性材質 鋼材^屬製角管作成框狀，或者成型為面狀。祕為使用將 丨·生;^丨55祕級轉雜樹脂#。又，不限^為點彈 蓋子⑼為箱狀’無底部，作用為防止污染寻;】d 疋，較佳為使用樹脂製瓦愣紙板、將膜拉伸於鋁框丨:限 聚丙烯等發泡樹脂之一體成型品。 、目、务泡 m 述’依照第5實施形態’使用複數螺釘m將蜂巢柘 疋件155之底部，再覆蓋蓋子159後搬運，則架$ =有凌衝 動的低頻成分，緩衝元件155可吸收振動的高頻二二=收振 抗各種運送巾_擊，避免基板表面受傷或缺損。刀’支可以對 以下，說明本發明第6實施形態之基板輸送 圖27為本發明第6實施形態之基板輸送裝置* 。 基板輪送健⑸係㈣於由除底部元件 體圖， 子形成。 卞…从外只有骨架的架 23 1375643 卜邱有豎立於底部元件163角部的4根轾165，並且柱165 材^，各3部元件163、柱165 _ 167為高剛性 成八如’依照第6實施形態，架台1G5可吸收振動的低頻 美二势、，置151之緩衝元件155可吸收振動的高頻成分，且 运裝1周圍以堅_架子包圍’可以對抗各種運送中 的衝贼練絲钱或缺損。 為々丨=基板輸縣置1(Η、14卜15卜161的架台係以架台1〇56 λ ·Ητΐ不限定為架台⑽7的構造，只要為例如圖28〜30所 藤持板之高囉奸即可仙。®28域糾105與加 同的架台171，圖29'30顯示使基板橫躺疊層並壓緊 191。架台171、181、191中與前述構成元件機 月b相同者己同一編號，並省略詳細說明。 ㈣如f「2i所示’架台171中，壓緊支持基板3之機構使用空氣 壓體173由設有複數空氣彈*175之正面元件139構成。 139為四角形框上具有複數支柱的形狀，正面元件139 ，、連、、，。於背面元件125之包圍元件係以容易取下的連結具連結。 =複數的空氣彈簧Π5 -起灌人空氣，可以對基板整面均勻 i加壓。也可㈣空氣鋼瓶取代空氣彈簧175。空氣彈I的數目或 配置不特別限定，但要設計為能對基板3整面羽地推壓。/ 於架台本體配置蜂巢板133，裝載基板3，並配置蜂巢板135、 加壓體及包航件131後，對減的空氣科〗 再推壓蜂巢板i35，可以壓緊支持基板3。 题崔孔 架台181如圖29所示，具有底部元件123以及垂直設於底部 兀件123之支持元件185，底部元件123與支持元件185係以炼接 f定。严部70件口3、支持元件IS5分別為在四角形框上有複數支 ，的形狀，底部元件123具有對叉架起貨機作業㈣形狀的聊部。 底部兀件123讀置基板3，並具有有職元件183之加壓體，且 24 1375643 底部元件123與加壓體將基板3夾住並壓緊支持。於底邙元件123 有蜂巢板133後載置基板3,並配置蜂巢板135及包圍元件 在蜂巢板135上載置頂面元件183，藉頂面林183本身 ^里或是將元件183雜於底部元件123_脑機構(未畫 出），可以均勻地壓緊支持整面基板3。 一 數*圖30所示，壓緊支持基板3之加魏係由設有複 ，=牛123之包圍元件係以連結具連結。於底部元件 斤蜂巢板133後載置基板3 ’並配置蜂巢板135及包圍元件ΐ3ΐ ^=件183連結於包圍元件13卜對複數的空氣彈簧⑺ 起灌入工乳，再推壓蜂巢板135，可以壓緊支持基板3。 以下’說明本發明第7實施形態之基板輪送裝置2〇1。 ，3 =本發明第7實施形態之基板輸送裝置2 Ϊ置2G1係將容11 103放在圖1所示基板收納體， 置f1中與前述基板輸送裝置1及基板收納 體1構成7〇件1彳目同者標記同—編號，並省略詳細說明。 卜收納於基板收納容器10成為基板收納體 再將基板收納體1存放於容器1〇3内。 搬運依，可域由基板收哺1支·面基板3並 以谷器103 ’可以緩和或阻斷輸送時之振動。藉由 持整面疊層體’可吸收振動的低頻成分防止由 收造成的變形’容器103之緩衝元件109可以吸 擊成分傳播’可對抗各種運送中的衝 其次，說明本發明第8實施形態之基板輸送裝置川。 圖本=月第8實施形態之基板輸送袈置211之概略立體 阳所形成。軸_ 211+，贿^ 25 1375643 納體5!構成元件機能相同者標記同一编號，並省略詳細說明。 本發明中係將基板3收納於包裝體53成為基板收納體5〗，再 將基板收納體51存放於容器1〇3内。 再 、依照^實施形態，可以藉由基板收納體51支持整面基板3並 搬運’並藉由存放容器103，可以緩和或阻斷輸送時之振動。藉由 以基板收納體1、支持磐面疊層體，可吸收振動的低頻成分防止由 於f動的低頻成分造成的變形，容器1〇3之緩衝元件1〇9可以吸 收震度的高頻成分’防止高頻成分傳播，可對抗各種運送中的衝 擊’避面基板表面受傷或缺損。 一以上°兒明本發明較佳實施形態，但本發明不限於實施形態所 示構造，耑明瞭在專利申請範圍所記載的範圍内可作適當的變更。 【圖式簡單說明】 二顯示本發明之基板收納體之一例的剖面圖； 圖顯二圖1之基板收納體之内箱立體圖. 圖3顯示於托板上載置疊層體狀態之說明圖· 圖4顯示於托板上載置疊層體狀 „ 圖5為基板之說明圖； 兄乃園， 圖6為疊層體之說明圖； 圖7為疊層體之說明圖； 月之基板收納體之一例的剖面圖； =為本㈣之基板收罐之―例的剖面圖； ^ ^本發明之基板收納體之1_面^ 圖11為圖1〇之支持板平面圖； 本發明之咖之—例的前視圖； 圖為圖12之支持板的平面圖； 本發明之包裝體之一例的她 圖 為圖14之支持板的平面圖； 26 1375643 圖16為本發明之包裝體之一例的前視圖； 圖17為圖16之包裝體之A-A剖面圖； 圖18為本發明之包裝體之一例的前視圖； 圖19為圖18之包裝體的B-B剖面圖； 圖20為本發明之輸送裝置之一例的立體圖； 圖21為圖20之輸送裝置之容器的立體圖； 圖22為圖21之容器的底面平面圖； 圖23為圖20之輸送裝置之架台立體圖； 圖24為本發明之輸送裝置之一例的剖面圖； 圖25為本發明之輸送裝置之一例的立體圖； 圖26為圖25之輸送裝置的剖面圖； 圖27為本發明之輸送裝置之一例的立體圖； 圖28為本發明之輸送裝置所使用架台之另一例的立體圖; 圖29為本發明之輸送裝置所使用架台之另一例的立體圖; 圖30為本發明之輸送裝置所使用架台之另一例的立體圖; 圖31為本發明之輸送裝置之一例的立體圖； 圖32為本發明之輸送裝置之一例的立體圖。 【主要元件符號說明】 1〜基板收納體 2~基板 3〜收納對象基板 3a〜基板本體 3b〜樹脂層 3 c〜保護膜 4A〜間隔體 4B〜間隔體 4Ba〜間隔體片 4Bb〜間隔體片 27 1375643 5〜疊層體 7〜補強板材 9〜補強板材 10〜基板收納容器 11〜托板 11 a〜支持面 1 lb〜突起 12〜蓋體 12a〜頂板 12b〜底板 13〜彈簧鎖 15〜氣囊 17〜托板 19〜蓋體 21〜管 23〜閥 31〜基板收納體 33〜氣囊 41〜基板收納體 43〜彈性板材 51〜基板收納體 53〜包裝體 55〜支持板 56〜溝部 57〜支持板 59〜帶子 61〜包裝體 63〜支持板 64〜頂部 65〜支持板 66〜螺帽 67〜螺栓 69〜孔 71〜包裝體 73〜支持板 75〜支持板 77〜夾甜 79〜金屬部 81〜包裝體 82〜衝擊吸收材 83〜衝擊吸收材 84〜衝擊吸收材 85〜衝擊吸收材 87〜衝擊吸收材 89〜衝擊吸收材 91〜包裝體 92〜衝擊吸收材 93〜衝擊吸收材 94〜衝擊吸收材 95〜衝擊吸收材 97〜衝擊吸收材 99〜衝擊吸收材 101〜輸送裝置 103〜容器 105〜架台 107〜底部元件 109〜緩衝元件 111〜底面 1375643 113〜彳則面板 115~頂板 117〜門 119〜背面板 123〜底部元件 125〜背面元件 127〜加壓體 131〜包圍元件 133〜蜂巢板 13 5〜蜂巢板 137〜螺釘 139〜正面元件 H1〜輸送裝置 143〜支持元件 145〜軌道 147〜引導裝置 149〜容器 151〜輸送裝置 153〜底部 155〜緩衝元件 157〜架台固定元件 158〜突部 159〜蓋子 161〜輸送裝置 163〜底部元件 165〜柱 167〜樑 171〜架台 30 1375643 173〜加壓體 175〜空氣彈簧 181〜架台 183〜頂面元件 185〜支持元件 187〜臂 191〜架台 193〜空氣彈簧 201〜輸送裝置 211〜輸送裝置The clip-shaped sweetness 77 pushes the support plate 73 against the laminate 5 with the clamp 77 and is fixed to a predetermined pressure. 1 As shown in Fig. 15, the support plates 73, 75 are in the shape of a quadrangular plate, and it is preferable to bury the metal (metal portion 79) in advance at the position of the clamp 77 to form the concave needles 73, 75 and the support plate. 55, 57 啰, because it is not biased & I on the top surface of the entire surface of the substrate, it is better to have high bending rigidity, and if it is considered to be good, for example, a honeycomb plate or a three-ply plate can be used. Further, the arrangement of the "plates" = tongs 77 is not limited to the positions shown in Figs. 14 and 15, and a plurality of positions can be supported and conveyed on the entire surface of the substrate. 17 丄j/5643 Package 71 and package 53 Similarly, the stack (substrate erected) is of any type, but the laminate of the substrate sandwiching the support plates 73, 75 5 H 3 pressure = the support bodies 73, 75 are integrated with the substrate laminate 5 = straight In the mode of transportation, it is better to use the horizontal object first;; ί = the pressure of the domain plate generated by the construction wheel 77 (4) is different in the horizontal stacking. If it is horizontally stacked, it has its own weight, ^(MOOgW is better) In the case of straight stacking, it is preferably 1 〇〇 〜 ～ 300 至 500 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The packaging body 53 of the second embodiment is preferably combined with the impact absorbing material shown in Figs. 16 to 9 as shown in Figs. 16 to 19, and the recording and transportation efficiency is good. In the state, the split body 53 can be stored in the above-mentioned double-layered box or other miscellaneous box, or can be transported after the (4) front cover. θ Figs. A package body 81 in which a package body 53 and a shock absorbing material according to a second embodiment of the present invention are combined. Fig. 16 is a front view (a near-side impact absorbing material is not shown). Fig. 17 is a cross-sectional view taken along line Α-Α of Fig. 16. Fig. 18 is a front view of the package body 91 (the shock absorbing material on the near side is not shown), and Fig. 19 is a cross-sectional view of the package body 91 shown in Fig. 18. The same function as the above-described constituent elements is marked with the same mark. The package 81 is provided with an impact absorbing material at the bottom, the upper portion, and the side portion of the package 53 that is stacked horizontally as shown in Fig. 16. The bottom of the package 53 is provided with an impact absorbing material 82, which is packaged. The upper portion of the body 53 is provided with an impact absorbing material 83. The impact absorbing members 83 and 83 have a square shape 'larger than the support plate of the package 53. The impact absorbing material at the side is provided with an impact absorbing material at the end of the substrate of the laminate 5. 87 and 89, the impact absorbing material 85 is provided on the outer side of the impact absorbing materials 87 and 89. The impact absorbing material 87 and the outer impact absorbing material 85 may be integrally formed. 18 1375643 It is concave, if it conforms to the shape of the body. Shape Qiu; 5 μ is to prevent the lateral offset of the purchase Further, the combination of the bottom and side = punching: the material 82, 83, 85 is formed into a box shape, which is also a 丄: the implementation is not particularly limited, and it is preferred that the package of the present invention has a force drop of Itr externally. In the case of impacting the brain, it is suitable for the buffering of the laminate (four) it G, and the foaming polypropylene is suitable for use. The material of the shock absorber is the same as that of the impact absorber 82. The foaming polyg is an example of the impact absorbing material disposed on the entire surface of the package body, but it also causes the secret material to impact the Wei material 82, and (4) the local transfer impact absorbing material of the Buqiu L, the body 91 is shown in Fig. 18. The 'shown' is at the bottom of the package 53 stacked longitudinally, 92 = f = = squeezing _. The bottom of the package 53 is provided with an impact absorbing material. Q9 The upper portion of the package 53 is provided with impact absorbing members 94 and 95. The impact absorbing material has a square shape and is larger than the bottom of the package 53. Further, the impact absorbing material 92, the light absorbing material 93, the impact absorbing material 94, and the impact absorbing material 95 can be integrally molded. (4) The impact absorbing material 97 of the side, and an impact absorbing material 99 is provided between the impact absorbing material 97 and the package/middle and the substrate end of the layer. (4) The shape of the absorbing material is not limited, and if the (four) combined package is formed into <', ', the lateral shift during transportation can be effectively prevented. Moreover, if the whole is a box shape, the workability at the time of transportation can be improved. The materials of the hair, 93, 94, 95, 97, and 99 are the same as described above. Here, an example in which the impact absorbing material is disposed on the entire surface of the package 53 is described. However, it is also possible to use only the bottom impact absorbing material 82. Select the impact suction configuration. As described above, by pressing the laminate on the support plate to form a package, it is possible to support the transfer of the surface substrate and to provide the impact absorbing material at the bottom portion, thereby absorbing the vibration during transportation, and further, at the substrate end of the package. The shock absorbing material is provided in the part to protect the base 19 1375643. The whole part is surrounded by the impact absorbing material, which can alleviate the external impact, improve the transportation efficiency, prevent the substrate from being displaced during transportation, and avoid the surface damage or defect of the substrate. Hereinafter, a substrate transfer device according to a third embodiment of the present invention will be described. The substrate transporting device HU according to the third embodiment of the present invention will be described as a perspective view of the base-plate transporting device 101, and FIG. 21 is a perspective view of the valley state 103 of the substrate transporting device 图1 of FIG. 22 is a perspective view of the bottom surface U1 of the container of FIG. 21 as a perspective view of the gantry 105 in the substrate transfer device 101 of FIG. As shown in Fig. 2A, the substrate transporting device 1〇1 is formed in the container 1〇3 shown in Fig. 21 and houses the rack 1〇5 shown in Fig. 23 as a substrate housing. The container of the substrate transfer device 1〇 of Fig. 20 has a box shape, and is surrounded by the bottom member ^, the solid surface plate 119, the top plate 115, and the door m, and the cushion member 1〇9 is placed on the bottom surface. The bottom 7L member is made of a highly rigid material, and it is preferable to form a steel or metal angle tube into a shape such as a iff-type surface, and to have a shape which is useful for carrying out operations such as a freighter. The material of the surface plate 113, the back plate 119, the top plate 115 and the door 117 is not limited to, and is preferably used for fixing the surface of the corrugated cardboard made of resin on the aluminum frame, and can also be used for the side plate. 113. The back plate 119, the top plate 115, and the door sill, and the foamed resin molded article such as the formed foamed olefin are formed on both sides of the three-ply plate. As shown in Fig. 22, the π-shaped member can be formed in a plurality of positions in a block shape, and the 2° cushioning member 1〇9 is preferably a hydraulic shock absorber or a viscoelastic rubber # viscoelastic body. The gantry 1 〇 5 series loading substrate 3 having a capacity of H 1 〇 3 is stored and formed to have sufficient rigidity. Fig. 23 shows that the gantry 105 has a bottom member 123, a rear side 7L member 125 standing on the bottom member, and the bottom portion 123 and the back member 125 are fixed by fusion bonding. 21 21 牛 feet and back elements 25 each have a shape of a plurality of struts on the square frame: "The 卩 element 125 has a shape of a foot useful for a forklift truck and the like. - The element 123 has a back member 125 opposite pressing body 〇 back element 20 1375643 piece 125 is sandwiched by the pressing body 127 and supports the laminated body 5. At this time, the back surface member 125 and the bottom member 123 are vertically disposed. The gantry body is provided with a plurality of substrates 3 The end portion of the connection substrate 3 is provided with a surrounding element 131. The surrounding element 131 is coupled to the back surface element 125 and the pressing body 127. The surrounding element 131 is disposed at a corner portion of the substrate 3. The surrounding element 131 is a quadrangular frame. Preferably, the surface of the surrounding member 131 connected to the end of the substrate 3 is provided with rubber (not drawn), whereby the impact during transportation or the irregularity of the substrate 3 can be absorbed. The thickness of the rubber is preferably 3 to 10 mm, and the hardness is relatively high. Preferably, the honeycomb element 131 and the 135 are disposed on the support surface of the back surface element 125 and the pressurizing body 127. Since the substrate 3 is sandwiched on the non-curvable surface, the honeycomb plate does not occur. Turn or odd songs, can support The entire substrate 3 is prevented from being particularly pressurized. The thickness of the honeycomb plate is not particularly limited, but is preferably 5 mm or less. In the substrate transfer stand 105, the pressurizing body 127 is composed of a plurality of screws 137 and a front member 139. The screw 137 is fixed to the bottom member 123 or the surrounding member 1 λ 1 to the gantry-mounted honeycomb panel 133, and is loaded with a plurality of substrates 3, after which the honeycomb panel 135, the pressing body 137, and the surrounding member 131 are disposed. The front member 139 is moved in the direction of the back member 125 by rotating the plurality of screws wide, and the number or arrangement of the staples is not particularly limited to $, but is designed to apply a uniform pressure to the entire surface of the substrate 3. The surface pressure at the time of plate press support is preferably 5 mm or less, and particularly, the back surface element 125, the front surface element 139, and the surrounding element 131 may be used, and the material thereof is not particularly limited, and is excellent in strength and weight. ΐ二i, 2, material or metal angle tube formed into a frame shape, using a flat shape =. However, a thin plate may be provided between the frames, or the size of the substrate 3 is not particularly limited, each side length廋 preferably the substrate thickness is not limited to ^ 2 .5m. Further, i.Omm is more than about. The number of accommodating sheets is preferably about 2 〇〇 5 〇〇 21 21 21, 351 643. When the substrate 3 is mounted on the gantry body, it is preferable to prevent the substrates 3 from contacting each other. A spacer 4 made of paper, a resin film, a sponge sheet or the like is used between the adjacent substrates 3 to form a laminate. The substrate transfer device 101 is attached to the buffer member 1〇9 of the container 103 to store the substrate storage frame. 1G5. A fixing plate (not shown) is attached to the cushioning member, and the stand 105 is placed on a fixed name plate. The bottom member 123 of the stand 1〇5 is fixed by a freely removable fixing member clamp or the like. Further, the gantry 1〇5 is not fixed only at the side portion of the bottom portion or the like. As described above, according to the present embodiment, the honeycomb plate 135 is placed on the substrate 3 using the plurality of screws 137, and the buffer plate ϊ, 109 2Γ〇3' and the bottom member 123 are fixed on the bottom surface ln of the support substrate 1G5. Fixed to the cushioning element 1〇9, the low frequency component that absorbs the vibration of the wooden table, and the buffer element 9 of the container 1〇3 can resist the impact during various transportation, avoiding the base, and the fourth embodiment of the present invention will be described. The substrate transfer device 141. U7 f佥2^ Front view of the substrate transfer device 141 of the fourth embodiment (the door device 141 is configured by accommodating the rack opening 105 described in the first embodiment in the container 149. Several π π 々 々 送 feeding device 141 In the case where the components of the substrate transfer device 101 are the same as those of the substrate transfer device 101, the details are omitted, and the detailed description is omitted. In the m49, the top plate 115 is provided with a plurality of cages that can be hung from the stand, and the yak 43' is placed on the side. The inner side of the plate 113 is provided with a high-rigidity material f which is provided with a guide device L & ten on the side of the side plate 1 and has a high-rigidity material f on the gantry makeup, and has a foot and a side portion which are used for hawking and the like. 113, the back plate 119, the top plate 115 and the Τ? The secret is not particularly limited 'but it must have a material structure that can be used for the gantry 1 〇 5. The truss U5 咼 rigid frame substrate transport device H1 will be the stand 1 () 5 book The 22 1375643 element 143 is provided in the container (10), and the guiding device 147 provided on the gantry is introduced into the rail 145. As described above, according to the fourth embodiment, the honeycomb plate 135 is pressed against the substrate 3 by using the plurality of screws 137. , will support the substrate 3 high rigidity gantry ι〇5 container 149 The spring-structured support member 143 is stored and transported from the top, and the gantry can absorb the low-frequency components of the vibration. The spring-structured support member 容器43 of the container 149 can absorb the high-frequency components of the vibration, and can resist various impacts during transportation, thereby avoiding The substrate transfer device 151 according to the fifth embodiment of the present invention is shown in Fig. 25. Fig. 25 is a view showing the substrate transfer device 151 of Fig. 25. Fig. 26 is a substrate transfer device 151 of Fig. 25. The substrate transfer device is configured such that a bottom portion constituting a plurality of mosquitoes I57 is disposed on the bottom portion 153 via a cushioning member 155. The gantry 105 is placed inside the projection (9) as a cymbal mechanism, and is in a box shape. The cover 159 is covered. The bottom 153 and the gantry fixing member 157 are made of a high-rigidity material, and the angle tube is formed into a frame shape, or is formed into a flat shape. The secret is to use the 丨·生; Moreover, it is not limited to the point cover (9) is a box-shaped 'no bottom, the role is to prevent pollution;】 d 疋, preferably using resin corrugated cardboard, stretching the film in aluminum frame 丨: limited polypropylene, etc. Foam resin Integral molded product. 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目 目The element 155 can absorb the vibration of the high-frequency two-two=shock-proof various kinds of transporting napkins to avoid damage or defects on the surface of the substrate. The blade can be used to describe the substrate transporting according to the sixth embodiment of the present invention. 6 Substrate transport device of the embodiment * The substrate transfer (5) is formed by the sub-element body diagram. 卞... The frame 23 from the outside is only 1377643. The Buqi has four erected at the corner of the bottom element 163.轾 165, and the column 165 material, each of the three elements 163, the column 165 _ 167 is of high rigidity into eight, as in the sixth embodiment, the gantry 1G5 can absorb the vibration of the low frequency, the second potential, the 151 buffer element 155 It can absorb the high-frequency components of the vibration, and the surrounding of the container 1 is surrounded by a strong _ shelf, which can resist the money or defects of the rushing thieves in various transportations. For the 々丨=substrate transmission county 1 (Η, 14 卜 15 161 truss system truss 1 〇 56 λ · Η ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ , , , , , , , , , , , , , , , , , , , , , , , , , The 28 即可 ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® ® The same reference numerals are omitted, and the detailed description is omitted. (4) In the gantry 171 shown in "2i", the mechanism for pressing the support substrate 3 is composed of a front member 139 having a plurality of air bombs * 175. The 139 is a square frame. The shape of the plurality of pillars, the front member 139, the connection, and the outer member of the back member 125 are connected by a connector that is easy to remove. The plurality of air springs -5 - the air is filled and can be applied to the substrate. The surface may be uniformly pressurized. It is also possible to replace the air spring 175 with an air cylinder. The number or arrangement of the air bombs I is not particularly limited, but is designed to push the entire surface of the substrate 3. Feathering the honeycomb panel 133 on the gantry body Loading the substrate 3 and arranging the honeycomb plate 135, the pressurized body and the package After 131, the air is reduced, and then the honeycomb plate i35 is pressed to press the support substrate 3. The core hole 181 has a bottom member 123 and a support member 185 vertically disposed at the bottom member 123 as shown in FIG. The bottom member 123 and the support member 185 are fixed by the refining. The strict 70-piece port 3 and the support member IS5 have a shape of a plurality of squares on the square frame, and the bottom member 123 has a shape for the forklift truck (4). The bottom member 123 reads the substrate 3 and has a pressing body of the active member 183, and the 24 1375643 bottom member 123 and the pressing body clamp the substrate 3 and press-support. The bottom member 123 has a honeycomb. After the board 133 is placed on the substrate 3, and the honeycomb board 135 and the surrounding elements are disposed on the honeycomb board 135, the top surface element 183 is placed on the top surface 183 or the element 183 is mixed with the bottom element 123_ brain mechanism (not drawn The outer surface substrate 3 can be uniformly pressed tightly. As shown in Fig. 30, the pressing support substrate 3 is provided with a composite, and the surrounding elements of the bull 123 are connected by a connecting member. After the component is placed on the honeycomb plate 133, the substrate 3' is placed and the honeycomb is placed 135 and the surrounding member ΐ3ΐ ^=the member 183 is connected to the surrounding member 13 and the plurality of air springs (7) are filled into the working milk, and the honeycomb plate 135 is pressed to press the support substrate 3. The following describes the seventh embodiment of the present invention. The substrate transfer device 2〇1, 3 = the substrate transfer device 2 according to the seventh embodiment of the present invention, the device 2G1 is placed in the substrate storage body shown in Fig. 1, and the substrate transfer device 1 is placed in the f1 And the substrate storage body 1 is constituted by the same reference numerals, and the detailed description thereof will be omitted. The substrate storage container 10 is stored in the substrate storage body, and the substrate storage body 1 is stored in the container 1〇3. In the transport, the substrate can be fed by one substrate and the surface substrate 3, and the vibration can be moderated or blocked by the grain 103'. The eighth embodiment of the present invention is described by the fact that the low-frequency component that absorbs the vibration of the entire surface laminate prevents the deformation caused by the deformation, and that the cushioning element 109 of the container 103 can transmit the component of the suction component. The substrate transport device is Sichuan. The present invention is formed by a schematic perspective of the substrate transporting device 211 of the eighth embodiment of the present invention. Axis _ 211+, bribe ^ 25 1375643 纳体5! The same components are denoted by the same reference numerals, and detailed description is omitted. In the present invention, the substrate 3 is housed in the package body 53 as the substrate storage body 5, and the substrate storage body 51 is stored in the container 1〇3. Further, according to the embodiment, the entire substrate 3 can be supported and transported by the substrate storage body 51, and the storage container 103 can be used to alleviate or block the vibration during transportation. By using the substrate storage body 1 and the support surface laminate, the low frequency component of the vibration can be absorbed to prevent deformation due to the low frequency component of the f motion, and the buffer element 1〇9 of the container 1〇3 can absorb the high frequency component of the vibration. Prevents the transmission of high-frequency components, and can resist the impact of various transportations. The present invention is not limited to the structures shown in the embodiments, and may be appropriately modified within the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a cross-sectional view showing an example of a substrate storage body according to the present invention; FIG. 3 is a perspective view showing a state in which a laminate is placed on a pallet. Figure 4 is a view showing a stacked body on a pallet. Figure 5 is an explanatory view of the substrate; Figure 2 is an illustration of the laminate; Figure 7 is an illustration of the laminate; A cross-sectional view of one example; = a cross-sectional view of a substrate receiving can of the present invention; ^ ^ 1_face of the substrate storage body of the present invention; FIG. 11 is a plan view of the support plate of FIG. 1; 1 is a plan view of a support plate of FIG. 12; an illustration of a package of the present invention is a plan view of the support plate of FIG. 14; 26 1375643 FIG. 16 is a front view of an example of a package of the present invention. Figure 17 is a cross-sectional view of the package of Figure 16; Figure 18 is a front view of one of the packages of the present invention; Figure 19 is a cross-sectional view of the package of Figure 18; Figure 20 is a conveyor of the present invention Figure 21 is a perspective view of the container of the transport device of Figure 20; Figure 22 Figure 23 is a perspective view of the gantry of the transport device of Figure 20; Figure 24 is a cross-sectional view of an embodiment of the transport device of the present invention; Figure 25 is a perspective view of an embodiment of the transport device of the present invention; Fig. 27 is a perspective view showing an example of a conveying device of the present invention; Fig. 28 is a perspective view showing another example of a gantry used in the conveying device of the present invention; Fig. 30 is a perspective view showing another example of the gantry used in the transport apparatus of the present invention; Fig. 31 is a perspective view showing an example of the transport apparatus of the present invention; and Fig. 32 is a perspective view showing an example of the transport apparatus of the present invention. [Description of main component symbols] 1 to substrate storage body 2 to substrate 3 to storage target substrate 3a to substrate main body 3b to resin layer 3 c to protective film 4A to spacer 4B to spacer 4Ba to spacer 4Bb to spacer 27 1375643 5~Laminated body 7~Reinforcing sheet 9~Reinforcing sheet 10~Substrate storage container 11~Board 11 a~Support surface 1 lb~Protrusion 12~Cover 12a~Top plate 12b~Bottom plate 13 to spring lock 15 to airbag 17 to pallet 19 to cover 21 to tube 23 to valve 31 to substrate storage body 33 to airbag 41 to substrate storage body 43 to elastic plate 51 to substrate storage body 53 to package 55 to support Plate 56 to groove portion 57 to support plate 59 to tape 61 to package 63 to support plate 64 to top 65 to support plate 66 to nut 67 to bolt 69 to hole 71 to package 73 to support plate 75 to support plate 77 to Sweetener 79 to metal portion 81 to package 82 to impact absorber 83 to impact absorber 84 to impact absorber 85 to shock absorber 87 to impact absorber 89 to impact absorber 91 to package 92 to impact absorber 93 - Impact Absorbing Material 94 - Impact Absorbing Material 95 - Impact Absorbing Material 97 - Impact Absorbing Material 99 - Impact Absorbing Material 101 - Conveying Apparatus 103 - Container 105 - Rack 107 - Bottom Element 109 - Cushioning Element 111 - Bottom Plate 1356643 113 - 彳Panel 115 to top plate 117 to door 119 to back plate 123 to bottom member 125 to back member 127 to pressurizing member 131 to surrounding member 133 to honeycomb plate 13 5 to honeycomb plate 137 to screw 139 to front member H1 to transport device 143 Holding element 145 to rail 147 to guiding device 149 to container 151 to conveying device 153 to bottom 155 to cushioning member 157 to gantry fixing member 158 to protrusion 159 to cover 161 to conveying device 163 to bottom member 165 to column 167 to beam 171 ~ gantry 30 1375643 173 ~ pressurizing body 175 ~ air spring 181 ~ gantry 183 ~ top surface element 185 ~ support element 187 ~ arm 191 ~ gantry 193 ~ air spring 201 ~ transport device 211 ~ transport device